The scalable high-precision laser measurement sensor
ZS-HL series
The ZS laser sensor family provides out-
standing measurement performance on
all kind of materials. Its huge range of
sensor heads and scalable concept
makes it a versatile platform for all high
precision sensing applications.
• Highest resolution and dynamic
sensing range for all surfaces
• Modular and scalable platform
concept for up to 9 sensors
• Easy to use, install and maintain for all
user levels
• Fast response time of 110 µs
• Multi-tasking capability – manages up
to 4 measurement tools in one
controller
Ordering information
Sensors
ZS-HL-series sensor heads
Optical system
20±1 mm
Regular reflective models
25±2 mm
50±5 mm
100±20 mm
Diffuse reflective models
600±350 mm
1500±500 mm
*1.
Refer to the table of ratings and specifications for details.
ZS-HL-series sensor heads (for nozzle gaps) also compatible with ZS-L controller
Optical system
10±0.5 mm
Regular Reflective
15±0.75 mm
*1.
Refer to the table of ratings and specifications for details.
ZS-L-series sensor heads
Optical System
20±1 mm
Regular reflective models
40±2.5 mm
50±5 mm
80±15 mm
Diffuse reflective models
130±15 mm
200 ±50 mm
350 ±135 mm
*1.
This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse re-
flection mode and glass in the regular reflection mode.
ZS-HL series
Sensing distance
Beam shape
Line beam
Sensing distance
Beam shape
Line beam
Sensing distance
Beam shape
Line beam
Spot beam
Line beam
Line beam
Spot beam
Line beam
Line beam
Line beam
Spot beam
Beam diameter
Resolution
1.0 mmx20 µm
0.25 µm
2.2 mmx45 µm
0.6 µm
1.0 mmx30 µm
0.25 µm
3.5 mmx60 µm
1 µm
16 mmx0.3 mm
8 µm
40 mmx1.5 mm
500 µm
Beam diameter
Resolution
900x25 µm
0.25 µm
Beam diameter
Resolution
900x25 µm
25 µm dia.
0.25 µm
2000x35 µm
900x60 µm
0.8 µm
50 µm dia.
900x60 µm
2 µm
600x70 µm
3 µm
900x100 µm
5 µm
240 µm dia.
20 µm
*1
Model
ZS-HLD2ST
ZS-HLDS2VT
ZS-HLDS5T
ZS-HLDS10
ZS-HLDS60
ZS-HLDS150
*1
Model
ZS-LD10GT
ZS-LD15GT
*1
Model
ZS-LD20T
ZS-LD20ST
ZS-LD40T
ZS-LD50
ZS-LD50S
ZS-LD80
ZS-LD130
ZS-LD200
ZS-LD350S
1
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