Edwards SCU-1601 Instruction Manual
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Edwards SCU-1601 Instruction Manual

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Instruction Manual (C)
SCU-1601 Control Unit
for STP-XA2703BV155 / STP-XA3203BV155
Description
SCU-1601 Control Unit
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
Instruction Manual (C):
(This Instruction Manual)
Instruction Manual (D):
Voltage
200 - 240 Va.c.
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
Supplied with STP control unit
STC-U e-TMS unit for Turbomolecular
Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-96E-1B1-0
2022.06

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Summary of Contents for Edwards SCU-1601

  • Page 1 STP pump specific information Instruction Manual (C): STP control unit Instruction Manual (This Instruction Manual) Supplied with STP control unit Instruction Manual (D): STC-U e-TMS unit for Turbomolecular Pump 2022.06 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 -Apr-2023 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Tanya Palmer Petr Tochacek Vice President, Engineering, Semiconductor Chamber...
  • Page 3 -Apr-2023 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Tanya Palmer Petr Tochacek Vice President, Engineering, Semiconductor Chamber...
  • Page 4 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III: •6(a)-I Lead as an alloying element in steel for machining purposes containing up to 0,35 % lead by weight and in batch hot dip galvanised steel components containing up to 0,2 % lead by weight •6(b)-I Lead as an alloying element in aluminium containing up to 0,4 % lead by weight, provided it stems from lead bearing aluminium scrap recycling...
  • Page 5 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铸铝及铝合金制品 × 〇 〇 〇 〇 〇...
  • Page 6 The description of this product consists of the four-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...

  • Page 7: Table Of Contents

    SCU-1601 Control Unit for Turbomolecular Pump PAGE CONTENTS Section Title Page INTRODUCTION Scope and definitions Electromagnetic compatibility Limited warranty 1.3.1 Item warranted 1.3.2 Disclaimer 1.3.3 Spare parts Labels Label affixing positions General description 1.6.1 Cable sets TECHNICAL DATA SCU-1601 specifications...
  • Page 8 SCU-1601 Control Unit for Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 3.11.4 Rotational inhibit signal setting 3.11.5 Second speed option setting 3.11.6 Second speed setting 3.11.7 Optional output signal setting (Emergency vent valve setting) 3.11.8 Second Damage Limit setting 3.11.9...
  • Page 9 SCU-1601 Control Unit for Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 5.2.3 Communication parameter setting 5.2.4 Recommended items about communication cable installation 79 Protocol specifications 5.3.1 General description 5.3.2 Standard transmission frame (in the RS232/RS485 single point connection) 5.3.3...
  • Page 10 SCU-1601 Control Unit for Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page MAINTENANCE Safety functions 8.1.1 Power failure 8.1.2 Operation after a power recovery 8.1.3 Abnormal state of magnetic bearing 8.1.4 Excessive vibration 8.1.5 Motor driver overload 8.1.6 Overheating inside the STP pump 8.1.7...
  • Page 11 SCU-1601 Control Unit for Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page High voltage device caution label Safety instruction label Caution label Connector caution label Voltage rating label Applicable pump model label Label affixing positions SCU-1601 control unit Configuration of the STP pump with the TMS...
  • Page 12 SCU-1601 Control Unit for Turbomolecular Pump ILLUSTRATIONS (CONTINUED) PAGE Figure Title Page Example of response when the command is sent continuously 93 Example of command sending during answer data reply Example of communication cycle process Example of command sending process...
  • Page 13 SCU-1601 Control Unit for Turbomolecular Pump TABLES PAGE Table Title Page Turbomolecular pumps SCU-1601 front panel functions SCU-1601 front panel functions (continued) SCU-1601 rear panel connection Power cable User setting data list Causes of "CAUTION" at the self test state...
  • Page 14 SCU-1601 Control Unit for Turbomolecular Pump PAGE viii This page is intentionally blank. MT-96E-1B1-0 Page viii...

  • Page 15: Introduction

    This manual provides installation, operation and maintenance instructions for the Edwards SCU-1601 control unit (abbreviated to "SCU-1601" throughout this manual) for the Turbomolecular pump (STP). You must use the SCU-1601 as specified in this manual otherwise the protection provided by the equipment may be impaired.

  • Page 16: Electromagnetic Compatibility

    An alarm function is incorporated into this STP series. Alarm and cautionary messages are displayed on the LCD of the SCU-1601. Note that the words "WARNING" and "CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions during the operation.

  • Page 17: Limited Warranty

    1. This warranty applies only to the product delivered from Edwards to the customer. 2. If any defect is found during this period, Edwards will, at its option, repair or recondition the product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at your own charge.

  • Page 18: Spare Parts

    Spare parts • Air-cooling fan for SCU-1601. (When exchanging, contact Service Office). Labels The following labels are affixed or printed to the SCU-1601. Read the contents of the labels before operation. 1. High voltage device caution label The SCU-1601 is equipped with a high voltage device. This label warns operators to pay attention to the high voltage device at the maintenance and inspection.
  • Page 19 The label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation. Figure 4 - Connector caution label 5. Voltage rating label This label describes the rated voltage of the SCU-1601. Use voltage specified in this label. Figure 5 - Voltage rating label Applicable pump model label This label describes an applicable pump model to STC-U.

  • Page 20: Label Affixing Positions

    SCU-1601 Control Unit for Turbomolecular Pump Label affixing positions Refer to Section 1.4 for the details of the labels 1 to 6. Figure 7 - Label affixing positions High voltage device caution label Safety instruction label Caution label Connector caution label...

  • Page 21: General Description

    Model Name Specification STP-XA2703BV155 Extreme Advanced throughput type STP-XA3203BV155 Table 1 - Turbomolecular pumps *1 SCU-1601 is a control unit dedicated to the STP-XA2703BV155 / XA3203BV155. DO NOT connect to other models as it may cause damage. MT-96E-1B1-0 Page 7...

  • Page 22: Cable Sets

    SCU-1601 Control Unit for Turbomolecular Pump 1.6.1 Cable sets The following cable set (optional accessories) is used with the STC-U, STP control unit and STP pump: • Heater, Valve and Sensor cable: STP pump to STC-U • STP connection cables: STP pump to STP control unit •...
  • Page 23 SCU-1601 Control Unit for Turbomolecular Pump STC-U eTMS control unit STP pump unit TMS sensor branch cable STC-U remote branch cable Outlet port heater cable STC-U remote cable TMS heater cable Power extension cable TMS valve cable Power cable STP connection cable...
  • Page 24 SCU-1601 Control Unit for Turbomolecular Pump This page is intentionally blank. MT-96E-1B1-0 Page 10...

  • Page 25: Technical Data

    SCU-1601 Control Unit for Turbomolecular Pump TECHNICAL DATA SCU-1601 specifications Applicable pump STP-XA2703BV155 STP-XA3203BV155 Input voltage: 200 to 240 Va.c ±10% Allowable input voltage fluctuation Input power: Built-in TMS unit is not used 1,500 VA maximum Built-in TMS unit is used...
  • Page 26 SCU-1601 Control Unit for Turbomolecular Pump TMS control unit Built in Battery for clock Specification Lithium battery (3 V, 130 mAhr) function Model BR1632A Maker PANASONIC Serial communication function RS232/RS485 (Push-button switch•Green) Operation switch START (Push-button switch•Dark Grey) STOP (Push-button switch•Grey) RESET (Push-button switch•Grey)
  • Page 27 SCU-1601 Control Unit for Turbomolecular Pump Figure 11 - SCU-1601 dimensions (mm) Note: The size of the attached screws for the rubber feet is M4×12. MT-96E-1B1-0 Page 13...
  • Page 28 SCU-1601 Control Unit for Turbomolecular Pump This page is intentionally blank. MT-96E-1B1-0 Page 14...

  • Page 29: Installation

    Unpacking Check outer package for damage and that the delivery note corresponds to the purchase order. If the STP control unit is damaged, contact Edwards or their distributor. Note: It is recommended to keep the packaging materials, such as the corrugated fibreboard container and cushioning material for possible re-use.
  • Page 30 LCD panel messages, and other. FAILURE LED (Red LED) Illuminates when an abnormality/error occurs on the STP pump or SCU-1601. LCD panel simultaneously displays an error message. RESET switch (Flat panel switch, grey. Valid in MANUAL only.) Alarm reset function. Tuning function.
  • Page 31 TEMP CTRL LED (Green LED) illuminates when the TMS unit is (optional accessory) operational. POWER LED (Green LED) Illuminates when power is on. Extinguishes when backup power is being supplied. Table 3 - SCU-1601 front panel functions (continued) MT-96E-1B1-0 Page 17...

  • Page 32: Rear Panel

    . DO NOT touch the terminal. Doing so may result in electric shock. When connecting/disconnecting the connecter, always power off the SCU-1601 (turn the MAIN POWER "OFF") and isolate (Lockout/Tagout) the electrical energy source, water and gas, and other energy sources on the vacuum equipment.

  • Page 33: Precautions Before Installation

    Insulation test CAUTION The varistor for the power supply line protection is installed in the SCU-1601. DO NOT perform the insulation test with the varistor installed. Doing so may result in product damage. DO NOT perform an insulation test on the SCU-1601. When performing the insulation test on your equipment, ensure that you disconnect the SCU-1601 from the equipment that is to be insulation tested, so that the test voltage is not applied to the SCU-1601.

  • Page 34: Installation Area

    The minimum bending radius of the STP connection cable is 200 mm (8"). DO NOT bend the cables excessively and beware of any obstacles when installing the SCU-1601. In addition, leave enough space to install other cables without bending them excessively.

  • Page 35: Attaching The Scu-1601 To A Rack

    Attaching the SCU-1601 to a rack CAUTION The SCU-1601 cannot be supported with only the 4 screws on the front panel. Always support it from the bottom using a support angle. When installing the SCU-1601, DO NOT block the ventilation port of the SCU-1601 by the support angle or other things.

  • Page 36: Cable Connection

    CAUTION Use each cable that Edwards has specified to connect to SCU-1601 and STC-U. The use of other cables may result in product damage. Align the position of the guide key of the connectors and insert vertically so as not to bend the pins. If a pin is bent, not only may the connector not function normally, but it may make the pins contact, resulting in a malfunction.

  • Page 37: Stp Connection Cable

    STP connection cable Connect the receptacle (socket) side of the STP connection cable to the STP connector on the STP pump and connect the plug (pin) side to "X1 P.CONNECTOR" and "X4 MOTOR" on the SCU-1601. To "X1 P.CONNECTOR" and "X4 MOTOR"...

  • Page 38: Stc-U Remote Branch Cable

    (9 pin, pin). Connect the plug (37 pin, pin) of the other side of the cable to the “X7 REMOTE” of the STP control unit (SCU-1601). Also, connect the plug (37-pin. socket) of the STC-U remote branch cable to the IO remote connector on the customer device side.

  • Page 39: Stc-U Remote Cable

    SCU-1601 Control Unit for Turbomolecular Pump 3.6.3 STC-U remote cable Connect the plug (socket) side of the STC-U remote cable to the "X3 STP" of the STC-U. Connect the plug (pin) of the other side of the cable to the plug (socket) of the STC-U remote blanch cable.

  • Page 40: Power Extension Cable

    SCU-1601 Control Unit for Turbomolecular Pump 3.6.4 Power extension cable WARNING The output of the "X2 AC OUT" connector of the STC-U is directly connected to the input of the "X1 AC IN" connector. Even when the STC-U breaker is "OFF", the output of "X2 AC OUT"...

  • Page 41: Power Cable

    Ensure that the supply voltage is as indicated on the SCU-1601 information label. Connect the power cable to the "X2 AC POWER" on the SCU-1601 rear panel as shown in Table 5. Connect the suitable connector to the power supply as shown in Table 5.
  • Page 42 SCU-1601 Control Unit for Turbomolecular Pump PE( ) 49.5 PE( ) SCU-1601 side Power side (Primary) 3 pin (socket) (AWG 14) × 3 cores, φ9.6 to φ10.1 mm 2.5 mm Cable color: Brown, Blue, Yellow/Green or Black1, Black2, Yellow/Green 3 pin (pin)
  • Page 43 SCU-1601 Control Unit for Turbomolecular Pump SCU-1601 side Power side (Primary) Brown or Black1 M4-bolt (fixing screw) Blue or Black2 Crimp-type terminal (M4) Yellow/Green Cover Clearance min. 1.5 mm Terminal block *1 Use material flammability: UL 94V-0 *2 Use the UL-recognized terminal block satisfying with the following conditions;...

  • Page 44: Connecting To Semiconductor Equipment

    3.7.2 Emergency off circuit (EMO circuit) Activation of EMO circuit of the equipment will interrupt electrical power from the SCU-1601. When the power is shut off, the STP pump performs the same as a power failure. (After backup operation of a power failure, the rotor lands on the touch down bearing) Consider the following when establishing the EMO circuit.

  • Page 45: Remote Communication

    3.8.1 Parallel communication The SCU-1601 is fitted with a remote communication port, "X7 REMOTE" (refer to Figure 23) to allow remote input and output signal control via input and output remote signals. This connector is a D-Sub type (37-pins, socket) that conforms to MIL-C-24308. The screw for connector is M2.6.

  • Page 46: Adjustment Methods

    Tuning is required in the following cases in which the position of levitation may deviate from the centre of the rotor's movable range: • When purchasing only the SCU-1601 and connecting to the STP pump for the first time. • When changing the length of the STP connection cable (not when changing the length of the power cable).
  • Page 47 Once tuning is completed, re-tuning is not required unless the configuration (the STP pump serial number, the SCU-1601 serial number, and the STP connection cable length) is changed. Although the STP pump produces an abnormal noise during tuning, this is not an indication of abnormality.
  • Page 48 SCU-1601 Control Unit for Turbomolecular Pump Software Version 95_**.* Autotest 2023/MAY/20 15:40 Autotest complete CAUTION CAUTION Coupling is Changed Pump Type is Changed STP-XA2703/XA3203 DATA COPY? No Levitation STP-XA2703/XA3203 DATA COPY? Yes Press RESET 3sec to Update Data Updating Data...

  • Page 49: Change Of Data After Tuning

    SCU-1601 Control Unit for Turbomolecular Pump 3.9.3 Change of data after tuning The user setting may be changed because of the change of the configuration of the STP pump and SCU-1601 after "CAUTION" message is displayed. Confirm the setting shown in Table 6 after tuning, and reconfigure the setting when the user setting has changed.

  • Page 50: Confirmation Mode

    SCU-1601 Control Unit for Turbomolecular Pump 3.10 Confirmation mode Confirmation mode is used to check the status of the STP pump and SCU-1601. The following items can be checked in Confirmation mode: 1. Version information. 2. Individual information (serial number, total hours of running, number of starts and damage of the bearing).
  • Page 51 SCU-1601 Control Unit for Turbomolecular Pump MT-96E-1B1-0 Page 37...
  • Page 52 SCU-1601 Control Unit for Turbomolecular Pump Error Record n Failure message ENTER Error Record n Error Record n 2023/Aug/09 16:32 NORM : 27960rpm Error Record n Error Record n undef_ID4_: MOTOR TEMP : Error Record n Error Record n undef_ID3_:...

  • Page 53: Parameter Set Mode

    SCU-1601 Control Unit for Turbomolecular Pump 3.11 Parameter set mode Parameter set mode is used to set the different parameters of the STP pump and SCU-1601. 3.11.1 Remote operation setting The remote parallel port (I/O REMOTE), serial port COM1, serial port COM2, and STP-Link are fitted on the SCU-1601 as standard connectors for the remote operation.

  • Page 54: Optional Output Signal Setting (Emergency Vent Valve Setting)

    Disable the function when the emergency vent valve is not fitted on the STP pump connected to the SCU-1601. Second speed function and option signal setting cannot be enabled simultaneously.

  • Page 55: Warning Function Setting

    SCU-1601 Control Unit for Turbomolecular Pump 3.11.9 Warning function setting Refer to Section 8.2, ""WARNING" message function" for the detail of the "WARNING" function. 1. Warning Damage Point Enable/Disable Damage limit of the bearing warning function. When setting to "ENABLE" and the Damage limit of the bearing exceeds the setting value, a warning message is displayed.

  • Page 56: 3.11.10 Serial Port Com1 Setting

    SCU-1601 Control Unit for Turbomolecular Pump 3.11.10 Serial port COM1 setting 1. Baud rate Set the communication speed. Maximum 56,000 bps can be set. 2. Bit length Set the bit number of the communication data to 7 or 8. 3. Stop bit Set the stop bits number to 1 or 2.

  • Page 57: 3.11.15 Parameter Setting Procedure

    SCU-1601 Control Unit for Turbomolecular Pump 3.11.15 Parameter setting procedure Refer to Figure 28 to Figure 33. 1. Press the "UP" and "SELECT" switches simultaneously to enter the Parameter Set Mode. The setting options detailed from Section 3.11.1 to 3.11.13 is each displayed in order.
  • Page 58 SCU-1601 Control Unit for Turbomolecular Pump DOWN Levitation NORM:*****rpm SELECT ENTER SELECT ＋ Remote Mode Remote Mode Remote Mode xxxxx rpm COM1 COM2 Remote Mode STP-Link Speed Set Point Speed Set Point xxxxx rpm xxxxx rpm TMS Function TMS Function...
  • Page 59 SCU-1601 Control Unit for Turbomolecular Pump Warning Function Warning Damage Point Warning Damage Point ENTER to modify DISABLE ENABLE ENTER SELECT Warning Imbalance Warning Imbalance DISABLE ENABLE Warning Pump Runtime Warning Pump Runtime DISABLE ENABLE PumpRuntime Setpoint PumpRuntime Setpoint xxxxxxx H...
  • Page 60 SCU-1601 Control Unit for Turbomolecular Pump Serial Port COM1 Set COM1:Baud Rate COM1:Baud Rate ENTER to modify ***** ***** ENTER SELECT COM1:Bit Length COM1:Bit Length COM1:Stop bit COM1:Stop bit COM1:Parity COM1:Parity None Even COM1:Parity COM1:Driver Type COM1:Driver Type RS232 RS485 Single...
  • Page 61 SCU-1601 Control Unit for Turbomolecular Pump DOWN SELECT STORAGE STORAGE SELECT ENTER STORAGE IN PROGRESS STORAGE STORAGE NOT OK / TIME OUT SELECT SELECT 2023/APR/01 12:00 2023/APR/01 12:00 ENTER to adjust Year:2023 ENTER 2023/APR/01 12:00 Month:04(APR) 2023/APR/01 12:00 Day:01 2023/APR/01 12:00...
  • Page 62 SCU-1601 Control Unit for Turbomolecular Pump ENTER EdCentra Setting DHCP ENTER to modify DISABLE SELECT IP address 192.168.1.10 Subnet mask 255.255.255.0 Default gateway 192.168.1.1 Primary DNS Server Primary gateway 10. 1. 2. 1 10.1.2.1 Secondary DNS Server Secondary gateway 10. 1. 2. 10 10.1.2.10...
  • Page 63 SCU-1601 Control Unit for Turbomolecular Pump From Date/Time setting Refer to Figure 33 AC. Press "ENTER" to EdCentra setting Press "UP/DOWN" to change AD. Press "UP/DOWN" to change AK. Refer to Figure 33 Refer to Figure 33 Press "UP/DOWN" to change...

  • Page 64: Manual Operation Mode

    SCU-1601 Control Unit for Turbomolecular Pump 3.12 Manual operation mode The operation of the built-in TMS heater, the built-in TMS water valve, the emergency vent valve and the output channel device of the External TMS unit can be inspected in manual operation mode.
  • Page 65 SCU-1601 Control Unit for Turbomolecular Pump Levitation NORM:*****rpm DOWN SELECT ENTER DOWN SELECT ＋ Manual Operation Manual Operation TMS Heater OFF TMS Heater ON DOWN SELECT Manual Operation Manual Operation TMS WaterValve Close TMS WaterValve Open DOWN SELECT Manual Operation...
  • Page 66 SCU-1601 Control Unit for Turbomolecular Pump This page is intentionally blank. MT-96E-1B1-0 Page 52...

  • Page 67: Operation

    STP pump is rotating. 4.1.1 Confirmation before starting After completing the installation of the STP pump and the SCU-1601, carry out the following checks before starting: 1. Ensure the STP pump and the SCU-1601 are installed correctly (refer to Section 3).

  • Page 68: Powering On

    Self test Refer to Figure 35. 1. Switch the MAIN POWER to "ON", located on the SCU-1601 rear panel, refer to Figure 13. (To prevent incorrect operation, a metal fitting is attached to the breaker. Loosen the screw, lift the metal fitting and secure it.) The SCU-1601 performs a self test and "Autotest"...

  • Page 69: How To Start/Stop The Stp Pump

    Manual start/stop the STP pump To manually start/stop the STP pump, slide the "MANUAL/REMOTE" changeover switch on the SCU-1601 front panel from the "ON" position, refer to Figure 12. The "REMOTE" LED will extinguish. 4.4.1 Starting the STP pump 1.

  • Page 70: Starting The Stp Pump After Stopping

    SCU-1601 Control Unit for Turbomolecular Pump 4.4.3 Starting the STP pump after stopping 1. Press the "START" switch on the front panel to accelerate the STP pump. 2. The STP pump can be accelerated even while it is stopping. Note: Avoid frequent start/stop operations as this may cause the STP pump to overheat.
  • Page 71 SCU-1601 Control Unit for Turbomolecular Pump Software Version 95 * *.* Levitation (Sensor Name) : ** Autotest DOWN 2023/MAY/20 15:40 Levitation (Sensor Name) : ** Autotest STP-XA2703/XA3203 DOWN Levitation Autotest complete (Sensor Name) : ** DOWN DOWN Levitation Levitation TMS TEMP : **...

  • Page 72: Remote Operation

    SCU-1601 Control Unit for Turbomolecular Pump Remote operation To select remote operation, slide the "MANUAL/REMOTE" changeover switch on the SCU-1601 front panel to "ON", refer to Figure 12. The "REMOTE" LED illuminates. 4.5.1 Input signal pins Use input signal pins according to Table 8, Table 9 and Figure 36. Remote input signals are set to the parallel port in the remote setting and function during REMOTE operation only, except pins for inputting the ROTATION INHIBIT.
  • Page 73 SCU-1601 Control Unit for Turbomolecular Pump Description Pins for inputting the START signal. The following two methods are available: 1) Short the circuits between (1)-(21). Then, short the circuits between (3)-(21) for 0.3 seconds or more. However, when inputting this START signal simultaneously with switching "ON"...
  • Page 74 (2), (19), (20), (31), (34) These pins are not used. CAUTION DO NOT connect anything to these pins. Doing so may damage the SCU-1601 or the vacuum equipment. Table 9 - X7 REMOTE input signal pins (continued) MT-96E-1B1-0 Page 60...
  • Page 75 SCU-1601 Control Unit for Turbomolecular Pump +12V COM (0V) 2.2kΩ +12V START IN 2.2kΩ +12V STOP IN (21) 2.2kΩ +12V RESET IN (22) 2.2kΩ +12V INHIBIT IN 2.2kΩ +12V OPT1 IN 2.2kΩ +12V OPT2 IN (23) (20) (31) (34) A. In case of Start 1) B.

  • Page 76: Output Signal Pins

    SCU-1601 Control Unit for Turbomolecular Pump 4.5.2 Output signal pins Use output signal pins according to Table 10, Table 11 and Figure 37. Remote output signals function during MANUAL and REMOTE operations. Three abbreviations are used in Table 10, Table 11 and Figure 37.
  • Page 77 SCU-1601 Control Unit for Turbomolecular Pump Description WARNING OUT Pins for the WARNING signal output. When the WARNING (24) message is displayed on the LCD, the pins between (24)-(6) are closed and the pins between (25)-(6) are opened. (25) Pins for outputting the STP pump REMOTE SELECTION state signal.
  • Page 78 SCU-1601 Control Unit for Turbomolecular Pump Description Pins for optional signal output. OPT OUT (E. VALVE) The emergency vent valve (optional accessory) can be connected. These pins are closed while this valve functions. (37) (26) In state of the emergency vent valve function is "ENABLE", the pins between (7)-(26) are closed and the pins between (37)-(26) are opened.
  • Page 79 SCU-1601 Control Unit for Turbomolecular Pump N.O OUT (24) WARNING N.C OUT (25) REMOTE N.O OUT (27) POWER N.O OUT (28) (10) ACCELERTION N.O OUT (29) N.O OUT (11) NORMAL (30) (12) N.C OUT BRAKE (13) (32) N.O OUT N.O OUT...

  • Page 80: Remote Setting

    SCU-1601 Control Unit for Turbomolecular Pump Table 12 shows the rated contacts for relays CR1 to CR9 in Figure 37. Resistance Load (COS Ø=1) Rated Load 125 VAC, 0.5 A 24 VDC, 1 A Rated Current Maximum Contact Point Current Maximum Open/Close Capacity AC: 62.5 VA...

  • Page 81: Rotation Inhibit Signal

    SCU-1601 Control Unit for Turbomolecular Pump 4.5.5 Rotation INHIBIT signal When using rotation INHIBIT signal, set the rotation INHIBIT function to the "ENABLE" according to Section 3.11, "Parameter set mode". Relations between rotation INHIBIT signal input and pump operation state are shown in Table 14.

  • Page 82: Second Speed Option

    SCU-1601 Control Unit for Turbomolecular Pump 4.5.6 Second speed option When the second speed option is enabled, second rating speed can be set independently of the normal rating speed setting. The selection of the second rating speed and normal rating speed are operated from I/O remote input or serial communication port.
  • Page 83 SCU-1601 Control Unit for Turbomolecular Pump Table 15 shows pump status in the state of speed selection. Pump status Difference between When the rotational speed becomes low, the STP pump enters Normal Speed and BRAKE mode, and then decelerates. Standby Speed Setting...

  • Page 84: Starting The Stp Pump After Stopping

    Table 16 - Reset operation during remote operation (X7 REMOTE) Powering OFF Turn the MAIN POWER "OFF" on the SCU-1601 rear panel when all three LEDs "ACCEL.", "NORMAL" and "BRAKE" extinguish. The magnetic bearing stops, the rotor stops, and the "POWER"...

  • Page 85: Operating The Tms Unit (For Use With The Tms Unit)

    While the TMS unit is in operation, the "TEMP CTRL" LED illuminates on the SCU-1601. When STP pump is in the power ON state, the TMS unit operates regardless of the status of the SCU-1601. When the STP pump is the cause of the malfunction, the TMS unit is stopped. 4.7.3 Setting the TMS unit function When the "TEMP CTRL"...
  • Page 86 SCU-1601 Control Unit for Turbomolecular Pump This page is intentionally blank. MT-96E-1B1-0 Page 72...

  • Page 87: Serial Communication Protocol

    The SCU-1601 is provided with compliant serial interface. Prepare the user application software according to this instruction manual. Operation instructions and information, such as the running state and setting values of the STP pump (information which appears on the LCD of the SCU-1601) can be obtained with the software.

  • Page 88: Connection And Setting Up

    SCU-1601 Control Unit for Turbomolecular Pump Connection and setting up 5.2.1 Signal connection The STP control unit is equipped with 3 serial ports COM1, COM2 and STP-Link as a standard. Details of the serial ports COM1 and COM2 are as follows: Serial Port COM1 (shared use by the RS232/485) Connect the PC serial port to connectors X3A or X3B (a D-Sub9-pin, socket) on the rear panel.
  • Page 89 SCU-1601 Control Unit for Turbomolecular Pump Serial Port COM2 (exclusively used in the RS485) Connect D+/D- to connector X7 on the rear panel (D-Sub 37pin, socket) according to Table 18. Other pins are reserved for Input/Output remote function, accordingly, there is no connection to these pins.

  • Page 90: Connecting The Rs485

    1.2 km or less. ⚫ Connect the terminator to the communication devises at both ends of the transmission line. The terminator (120 Ω, 0.25 W) is required for connection. (SCU-1601 does not have terminator setting function) 7 (D–) (connector X3 120Ω...
  • Page 91 SCU-1601 Control Unit for Turbomolecular Pump ⚫ Because the device driving a communication bus does not exist in the state of no communication, a noise may lead unstable signal which causes communication failure such as a flaming error. When the communication failure is occurred, connect one external pull up and pull down resistance to the PC side to provide a FAIL-SAFE bias.

  • Page 92: Communication Parameter Setting

    Section 3.11, "Parameter set mode". To use the operational commands of the SCU-1601 (START, STOP, RESET), set the MANUAL/REMOTE changeover switch on the SCU-1601 to "ON", and set a port to use the Remote mode, refer to Figure 12.

  • Page 93: Recommended Items About Communication Cable Installation

    SCU-1601 Control Unit for Turbomolecular Pump 5.2.4 Recommended items about communication cable installation Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely.
  • Page 94 SCU-1601 Control Unit for Turbomolecular Pump ⚫ DO NOT bundle a communication line with a protective earth conductor or a power line. Moreover, keep away a communication line from the apparatus used as a noise source as much as possible.
  • Page 95 SCU-1601 Control Unit for Turbomolecular Pump ⚫ DO NOT insert or remove a communication cable while a communication device and a STP pump are turned ON the power. Communication interface circuit may break down if surge voltage caused by such as potential difference of communication interfaces or static electricity is applied to communication line.

  • Page 96: Protocol Specifications

    SCU-1601 Control Unit for Turbomolecular Pump Protocol specifications 5.3.1 General description The STP serial communication protocol enables the SIM to receive the communication command, (Figure 48, item 1) transmitted from the PC and send a response, (Figure 48, item 2) following the communication command.

  • Page 97: Standard Transmission Frame (In The Rs232/Rs485 Single Point Connection)

    SCU-1601 Control Unit for Turbomolecular Pump 5.3.2 Standard transmission frame (in the RS232/RS485 single point connection) The transmission frame used in the RS232/RS485 single point connection has a single block or multiple transmission blocks. The transmission block consists of a start control character, data block No.

  • Page 98: Control Command

    SCU-1601 Control Unit for Turbomolecular Pump 5.3.3 Control command (in the RS232/RS485 single point connection) A control command is used when transmitting a pump operation command and a setting change command to the SIM. The first character of the control command in the RS232/RS485 single point connection is "Sp"...

  • Page 99: Query Command

    SCU-1601 Control Unit for Turbomolecular Pump Next, the preceding SIM->PC character is "Ack", the PC continues instructing the control command (the 2nd block). PC->SIM Stx Etx LRC SIM->PC Ack or Nak Always assign less than 510 characters (n< 510) to the parameter so that the message is less than 512 characters.

  • Page 100: Transmission Data Format

    SCU-1601 Control Unit for Turbomolecular Pump Always assign less than 254 characters (n< 254) to the parameter so that the message is less than 256 characters. Next, the preceding SIM->PC character is "Ack", the instructed query command is executed and the SIM returns the following response (1st block).

  • Page 101: Error Control

    SCU-1601 Control Unit for Turbomolecular Pump ASCII However, when the MSB (most significant bit) is always 0 when data length is 7 bits, LRC is set to 5.3.7 Error control • Transmit the transmission frame repeatedly from the PC when the SIM transmits “Nak” (parity check error).

  • Page 102: Control Command In The Rs485 Multi-Point Connection

    SCU-1601 Control Unit for Turbomolecular Pump 8+n+1 8+n+2 ASCII “@” is used as a network frame ID character. “Stx” and “Etx” are used as a start and an end character of the transmission frame, respectively. Transmission frame when a message exceeds 255 characters (n = 255, m<=255, k = the number of...
  • Page 103 SCU-1601 Control Unit for Turbomolecular Pump Designate the control command on the PC. <- Less than 256 chr.-> PC->SIM @ F Stx 0 Sp CHR C Etx LRC SIM->PC Ack or Nak Always assign less than 254 characters (n< 254) to the parameter so that the message is less than 256 characters.

  • Page 104: Query Command In The Rs485 Multi-Point Connection

    SCU-1601 Control Unit for Turbomolecular Pump 5.3.10 Query command in the RS485 multi-point connection The query command to be used when a pump operation instruction or a setting change instruction is transmitted from the SIM and is arranged in the order specified below. The top is “?” (HEX code “3F”) and ASCII characters corresponding to the respective function code and parameter follow.

  • Page 105: Broadcasting Command In The Rs485 Multi-Point Connection

    SCU-1601 Control Unit for Turbomolecular Pump 5.3.11 Broadcasting command in the RS485 multi-point connection The START or STOP of STP pump operation command can be concurrently instructed to all the multi-connected SIMs. Always assign 0 (HEX code “30”, “30”) to network frame number. Note that there is no response from the respective SIM.

  • Page 106: Application Note

    SCU-1601 Control Unit for Turbomolecular Pump 5.3.12 Application note Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely.
  • Page 107 SCU-1601 Control Unit for Turbomolecular Pump ⚫ Always check the LRC checksum of answer data. When LRC checksum is incorrect, do not use the data. When the incorrect data caused by noise is accepted, parameters might be set unexpected values. In this case, the processing of the tool application may determine to be a communication failure.
  • Page 108 SCU-1601 Control Unit for Turbomolecular Pump This procedure is not necessary Communication cycle start if TMP connection number = 1. RS485 multipoint connection? Address selection: First TMP Command sending process Succeeded? Answer receiving process Succeeded? Decode process Error process RS485 multipoint...
  • Page 109 SCU-1601 Control Unit for Turbomolecular Pump This procedure is not necessary if total block N = 1. Send command (N blocks) *1 When using RS485 to communicate, switch the PC side from sending state to receiving state within 5 msec.

  • Page 110: Command Specifications

    Reads the errors being detected. ReadModFonct Reads the pump operation mode and the errors being detected. ReadVersion Reads the software version of the SCU-1601. ReadCounters Reads serial number, running time and start counter. ReadSetPoint Reads the setting values of the speed set point and the built-in TMS temperature.

  • Page 111: Readmeas

    Function: Sends the pump operation commands START, STOP and RESET. These commands function in the same way as when each switch of the SCU-1601 is pressed. They are valid when MANUAL/REMOTE changeover switch on the SCU-1601 is "ON" and when being sent to the serial port which is set as the input operation port in the remote operation mode setting.

  • Page 112: Readfailmess

    SCU-1601 Control Unit for Turbomolecular Pump Parameter Item Data format Remark Pump operation command 8-bits hexadecimal coded Refer to Table 23 ASCII Pump operation command Value START STOP RESET Table 23 - Pump operation commands Example: Pump operation command : RESET operation = 4 = 04...
  • Page 113 8-bits hexadecimal coded ASCII *1 The maximum number of errors may differ depending upon the software version of SCU-1601. It is recommended that an application be designed as variable-length data. *2 Value corresponding to the error message is transmitted, (refer to Table 24 and Table 25). The most recent error has the largest parameter number.
  • Page 114 SCU-1601 Control Unit for Turbomolecular Pump Error message Value Error message Value Ram error DSP->PCB Com Fail Eeprom Error PCB->DSP Com Fail TMS Higher Temp TMS Sensor Lost TMS Breaker Trip Tuning Error 1 TMS Overheat Tuning Error 2 Mains Failure...

  • Page 115: Readmodfonct

    8-bits hexadecimal coded ASCII *1 The maximum number of errors may differ depending upon the software version of SCU-1601. It is recommended that an application be designed as variable-length data. *2 Value corresponding to the error message is transmitted (refer to Table 24 and Table 25). The most recent error has the largest parameter number.
  • Page 116 SCU-1601 Control Unit for Turbomolecular Pump Pump operation mode Value Levitation No Levitation Acceleration Normal Deceleration (Brake) Autotest Tuning Tuning Complete [System Reservation] 9, 10, 11 Table 26 - Pump operation mode Example: Pump operation mode : 01 = 1 = Levitation...

  • Page 117: Readversion

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.6 ReadVersion Function: Read the software version of the SCU-1601. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 24 Etx LRC Parameter Item Data format Remarks 1 to 16...

  • Page 118: Readcounters

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.7 ReadCounters Function: Reads serial number, running time and start counter. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 23 Etx LRC Parameter Item Data format Remarks 1 to 10...

  • Page 119: Readsetpoint

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.8 ReadSetPoint Function: Reads the setting value of the "Speed Set Point" and Built-in TMS temperature. The "Speed Set Point" data is the same data as that of "ReadSpeedSetPoint". Transmission frame: PC->SIM Stx Etx LRC SIM->PC...

  • Page 120: Readstatus

    SCU-1601 Control Unit for Turbomolecular Pump Parameter Item Data format Remark Motor temperature 16-bits hexadecimal coded (Unit: ºC) ASCII Example: Motor temperature : 0014 = 20 ºC (68 ºF) Parameter ASCII 30 30 31 34 5.4.10 ReadStatus Function: Reads various settings (Remote mode, TMS function, INHIBIT, Emergency vent valve).

  • Page 121: Readevents

    SCU-1601 Control Unit for Turbomolecular Pump Remote mode Value I/O Remote COM1 COM2 STP-Link [System reservation] 3, 4 Table 27 - Remote mode Example: Remote mode setting : 01 = I/O Remote TMS function setting : 00 = ENABLE INHIBIT setting...

  • Page 122: Setspeedsetpoint

    SCU-1601 Control Unit for Turbomolecular Pump Parameter Item Data format Remarks The number of 8-bits hexadecimal coded Up to 10 errors "Error Record" ASCII 2 to 11 Error Record 1 to 8-bits hexadecimal coded Error Record 10 ASCII *1 Value corresponding to the error message is transmitted (refer to Table 24 and Table 25). The most recent error has the smallest parameter number.

  • Page 123: Readspeedsetpoint

    When the parameter value is smaller than half of rated rotational speed, it is automatically set to half of rated rotational speed. The value of "Speed Set Point" displayed in LCD of SCU-1601 is in increments of 500 rpm. Example:...

  • Page 124: Readmodfonctwithwarning

    8-bits hexadecimal coded ASCII *1 The maximum number of errors may differ depending upon the software version of the SCU-1601. It is recommended that an application be designed as variable-length data. *2 Value corresponding to the error message is transmitted. (see Table 24 and Table 25) The recent error has the largest parameter number.
  • Page 125 SCU-1601 Control Unit for Turbomolecular Pump Warning message 16-bits hex value Remarks 0001 [System reservation] WARNING: Bad Pump Transmit WARNING: Second Damage Limit 0002 see 8.3.3 WARNING: First Damage Limit 0004 see 8.3.2 WARNING: Imbalance X_H 0008 see 8.3.4 WARNING: Imbalance X_B 0010 see 8.3.4...
  • Page 126 SCU-1601 Control Unit for Turbomolecular Pump Example: Pump operation mode : 01 = 1 = Levitation WARNING being detected : 0098 = 0008 OR 0010 OR 0080 3 warnings of "WARNING: Imbalance X_H", "WARNING: Imbalance X_B" and "WARNING: Pump Overload"...

  • Page 127: Readmeasvalue

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.15 ReadMeasValue Function: Reads the Built-in TMS temperature, motor temperature and measured rotational speed. The motor temperature value is the same temperature as "ReadMotorTemp". The measured rotational speed value is the same as "ReadMeas" parameter 2 (Measured rotational speed).
  • Page 128 SCU-1601 Control Unit for Turbomolecular Pump Example: Built-in TMS temperature: = 60 ºC (140ºF) Motor temperature: = 20 ºC (68ºF) or more Measured rotational speed: 02DC = 732 Hz = 43,920 rpm Parameter ASCII Parameter ASCII 30 30 33 43...

  • Page 129: Setoptions

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.16 SetOptions Function: Changes the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Stx Parameter 1 to n Etx LRC SIM->PC PC->SIM SIM->PC Stx Etx LRC *1 The HEX code of ASCII character ’0’...

  • Page 130: Second Speed Option Setting

    When the parameter value is smaller than half of rated rotational speed, it is automatically set to half of rated rotational speed. The value of "Speed Set Point" displayed in LCD of SCU-1601 is in increments of 500 rpm. Example:...

  • Page 131: Second Speed Selection

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.16.2 Second speed selection The normal rating speed setting or second rating speed setting can be selected in the normal state. When using this function, set the second speed option to the "ENABLE" (serial port operation). (see Section 3.11, "Parameter set mode")

  • Page 132: Readoptions

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.17 ReadOptions Function: Reads the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Parameter 1 Etx LRC SIM->PC PC→SIM SIM→PC Stx Parameter 1 to n Etx LRC *1 The HEX code of ASCII character ’0’...

  • Page 133: Second Speed Function Setting

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.17.1 Second speed function setting Settings for second speed can be changed. Parameter Item Data format Remark 0014 Optional function number 16-bits hexadecimal coded ASCII Second speed setting 16-bits hexadecimal (Unit: Hz) coded ASCII ：DISABLE...

  • Page 134: Second Speed Select

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.17.2 Second speed selection The speed setting set as rotational speed in the normal state can be read. Parameter Item Data format Remark Option function number 16-bits hexadecimal 0015 coded ASCII Second speed selection...

  • Page 135: External Tms Unit Setting

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.17.3 External TMS unit setting Settings for External TMS unit can be read. Parameter Item Data format Remark Option function number 16-bits hexadecimal 001A coded ASCII Output device 1 setting (see next table) Output device 2 setting...
  • Page 136 SCU-1601 Control Unit for Turbomolecular Pump Example1: “Heat ring” heater will be turned ON at Temperature 1 = 154 ºC or less, and it will be turned OFF at Temperature 1 = 156 ºC or more. “Heat ring” heater is NOT controlled by Temperature 2, 3 and 4 due to low limit value > high limit value.
  • Page 137 SCU-1601 Control Unit for Turbomolecular Pump Example2: “Cooling” valve will be closed at Temperature 2 = 79 ºC or less, and it will be opened at Temperature 2 = 81 ºC or more. “Cooling” valve is NOT controlled by Temperature 1, 3 and 4 due to low limit value > high limit value.

  • Page 138: External Tms Temperature

    SCU-1601 Control Unit for Turbomolecular Pump 5.4.17.4 External TMS temperature The temperatures of input sensors and the heater/water valve output conditions of external TMS can be read. And also, motor temperature and measured rotational speed can be read. Parameter Item...
  • Page 139 SCU-1601 Control Unit for Turbomolecular Pump Example: ＝155 ºC Measured temperature 1 : 9B : 50 Measured temperature 2 ＝80 ºC ＝150 ºC Measured temperature 3 : 96 ＝-32 ºC Measured temperature 4 : E0 ＝Heater ON/Water valve Open Output device 1 condition : 01 ＝Heater ON/Water valve Open...
  • Page 140 SCU-1601 Control Unit for Turbomolecular Pump This page is intentionally blank. MT-96E-1B1-0 Page 126...

  • Page 141: Stp-Link

    SCU-1601 Control Unit for Turbomolecular Pump STP-Link The "STP-Link" is a Windows application for operating the STP pump, confirming the pump status or setting various settings. Table 31 shows the principal functions. See the Instruction Manual of the "STP-Link" for the detailed specification and operating method.
  • Page 142 SCU-1601 Control Unit for Turbomolecular Pump This page is intentionally blank. MT-96E-1B1-0 Page 128...

  • Page 143: Edcentra

    SCU-1601 Control Unit for Turbomolecular Pump EdCentra EdCentra is a centralized monitoring system for a variety of Edwards vacuum and pressure reducing equipment commonly used in the semiconductor, solar and FPD manufacturing industries. Telemetry information from individual equipment is collected centrally and electronically, monitoring and analysing the equipment and presented to the user in the form of web pages.
  • Page 144 SCU-1601 Control Unit for Turbomolecular Pump This page is intentionally blank. MT-96E-1B1-0 Page 130...

  • Page 145: Maintenance

    The "FAILURE" LED extinguishes and the LCD is turned off. The alarm signal output is reset. The SCU-1601 does not detect a power failure of less than 2 seconds and the STP pump will continue to rotate.

  • Page 146: Operation After A Power Recovery

    2. When the START operation is performed after a power recovery, the STP pump reaccelerates even while it is in BRAKE state. However, the SCU-1601 may detect excessive vibration when power is recovered after the rotor lands on the touch down bearing (see Section 8.1.4). In this case, the STP pump once stops and cannot reaccelerate until the RESET operation completed (see Section 4.5.8).

  • Page 147: Abnormal State Of Magnetic Bearing

    8.1.7 Overheating inside the SCU-1601 The temperature in the SCU-1601 increases when the ventilating duct is blocked or the ambient temperature is high. The LCD displays error message "CAUTION : CNT heat*" when the inside of the SCU-1601 overheats. In this case, the pump does not stop.

  • Page 148: Overspeed

    Overspeed When the rotational speed of the STP pump exceeds the specified rotational value due to a failure in the motor driver, the MAIN POWER on the SCU-1601 switches "OFF". The STP pump has no power supplied, decelerates and stops.

  • Page 149: Warning" Message Function

    8.2.1 "WARNING" message display function The SCU-1601 is provided with a "WARNING" message to display when an overhaul is needed following a self test. When a "WARNING" appears in the upper left hand corner of the LCD, press the "ENTER" switch to display the warning message for seconds (The "ENTER" switch can also be used in REMOTE mode).

  • Page 150: Warning" Message Description

    Impact of the STP pump rotor onto the touch-down bearing, such as by an unexpected in-rush of air from outside or in the event of power failure, can damage the touch-down bearings. The SCU-1601 monitors these impacts and assigns damage points to the event of "Disturbance" or "Mains Failure".

  • Page 151: Pump Run Time Over

    8.3.5 Pump run time over The totalising counter adding up the rotation hours is installed in the SCU-1601. The counter value can be confirmed on the LCD. (see Section 3.10, "Confirmation mode") "Pump Run Time Over" is displayed when the counter value attains the setting value. When deposit accumulates inside the STP pump, this function can be used to consider the time of the overhaul.

  • Page 152: Low Rtc Battery

    8.3.7 Low RTC battery The lithium battery for the display function of the date/time is installed in the SCU-1601. "Low RTC Battery" is displayed when the decrease in the voltage of the battery is detected. The STP pump can operate though some failure occurs such as the time of the error history is not correct when the voltage of the battery is low.

  • Page 153: Warning" Function Setting

    SCU-1601 Control Unit for Turbomolecular Pump "WARNING" function setting The following "WARNING" functions can be set to Enable or Disable. Refer to Section 3.11, "Parameter set mode" for the setting method. See Table 35 and Table 36 for the default setting.

  • Page 154: Error At Self Test State

    SCU-1601 Control Unit for Turbomolecular Pump Error at self test state When an abnormality/error occurs during the self test while operating the ON switch, the safety function operates, the "FAILURE" LED illuminates and an alarm signal is output from the X7 REMOTE connector (see Table 9).

  • Page 155: Error After Self Test

    The upper message on the LCD shows the current STP pump operation state. The lower message on the LCD is alternately displayed. 8.5.3 Troubleshooting immediately after power failure occurs It is recommended to establish a procedure so that the power can be supplied to the SCU-1601 immediately after a power recovery. MT-96E-1B1-0 Page 141...

  • Page 156: Troubleshooting Immediately After Other Abnormality/Errors Occur

    Troubleshooting immediately after other abnormality/errors occur WARNING When disconnecting cables from the STP pump and/or the SCU-1601 to perform troubleshooting and take the necessary action, confirm that the STP pump has stopped, power off the primary power (turn the MAIN POWER "OFF") and isolate (Lockout/Tagout) the electrical energy source water and gas and other energy sources on the vacuum equipment.
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  • Page 165: When Error Message Is Not Displayed On Lcd

    SCU-1601 Control Unit for Turbomolecular Pump When error message is not displayed on LCD When the "FAILURE" LED illuminates and the LCD displays an error message, refer to Table 38 to Table 45. 8.6.1 Abnormalities when powering ON Symptom Probable cause...

  • Page 166: Other Abnormalities

    "Error Record" message display function The SCU-1601 can display the contents of up to the last 10 errors on the LCD. However, when "*" is displayed at the head of the message, it is not an error detected by the SCU-1601.

  • Page 167: Maintenance And Inspection

    NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipments such as a baking heater before performing maintenance and inspections. Only Edwards will replace the maintenance parts and will execute repair and overhaul. Contact Service office. 8.8.1 Cleaning The method of cleaning the SCU-1601 is shown below.

  • Page 168: Maintenance

    SCU-1601 Control Unit for Turbomolecular Pump 8.8.2 Maintenance Regular overhaul (the cost of overhaul will be at your own charge) is required for safety and proper use of STP control unit. This overhaul includes inspection and cleaning. Internal components of the STP control unit will deteriorate after long-term use.

  • Page 169: Storage, Transportation And Disposal

    SCU-1601 Control Unit for Turbomolecular Pump STORAGE, TRANSPORTATION AND DISPOSAL Storage of the SCU-1601 When planning not to use the SCU-1601 over a long period (more than a few months), follow the precautions below: 1. Store the SCU-1601 in a horizontal position.

  • Page 170: Disposal

    When returning the SCU-1601 to Service office, fill in the necessary items in the "Return Declaration" and fax it to Service office. Disposal Dispose of the SCU-1601 as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal.

  • Page 171: Service, Spares And Accessories

    10.2 Service Edwards products are supported by a world-wide network of Edwards Service office. Each Service office offers a wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory specifications. Equipment, which has been serviced, repaired or rebuilt, is returned with a full warranty.

  • Page 172: Accessories

    SCU-1601 Control Unit for Turbomolecular Pump 10.4 Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual (A) Generic Instruction Manual Instruction Manual (B) Pump Specific Information Instruction Manual (C)
  • Page 173 For more information, con tact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.

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