Edwards SCU-350 Series Instruction Manual
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Edwards SCU-350 Series Instruction Manual

Edwards SCU-350 Series Instruction Manual

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Instruction Manual (C)
SCU-350 Series Control Unit
Description
SCU-350 Series Control Unit
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
Instruction Manual (C):
(This Instruction Manual)
Voltage
100 - 240 Va.c.
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-21E-201-E

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Summary of Contents for Edwards SCU-350 Series

  • Page 1 Instruction Manual (A): STP pump generic Instruction Manual Instruction Manual (B): STP pump specific information Instruction Manual (C): STP control unit Instruction Manual (This Instruction Manual) Supplied with STP control unit Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards. Manufacture: June. 2016, Yachiyo Yuji Kato, TMP Technical Senior Manager, Edwards Japan Limited Date and Place June, 2016, Burgess Hill EU representative: Date and Place...
  • Page 3 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: Introduction Installation of the STP pump Installation of the STP control unit Operation Safety functions...
  • Page 4 This page intentionally blank...

  • Page 5: Table Of Contents

    SCU-350 Series Control Unit for Turbomolecular Pump CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions Applied standards Limited warranty 1.3.1 Warranty period 1.3.2 Item warranted 1.3.3 Disclaimer 1.3.4 Spare parts Labels Label affixing positions General description 1.6.1 Cable sets...
  • Page 6 SCU-350 Series Control Unit for Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 3.13.1 When setting DSW-B No. 1 to ON under power-on state 3.13.2 When setting DSW-B No. 1 to ON before powering ON OPERATION Before starting the STP pump 4.1.1...
  • Page 7 SCU-350 Series Control Unit for Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page Commands 5.4.1 List of commands 5.4.1.1 Description of individual commands 5.4.2 Error message Data Formats 5.5.1 Pump state 5.5.2 Alarm state 5.5.3 Alarm type 5.5.4 SIM control state 5.5.5...
  • Page 8 SCU-350 Series Control Unit for Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page High voltage device caution label Safety instruction label Caution label Connector caution label Label affixing positions SCU-350 control unit Configuration of the STP pump SCU-350 dimensions (mm) SCU-350 front panel...
  • Page 9 SCU-350 Series Control Unit for Turbomolecular Pump TABLES PAGE Table Title Page Turbomolecular pumps SCU-350 front panel functions SCU-350 rear panel function SCU-350 top panel function SCU-350 left side panel function Power cable I/O TB2 terminal block I/O TB1 terminal block...
  • Page 10 SCU-350 Series Control Unit for Turbomolecular Pump PAGE This page intentionally blank. MT-21E-201-E Page vi...

  • Page 11: Introduction

    INTRODUCTION Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards SCU-350 control unit (abbreviated to "SCU-350" throughout this manual) for the Turbomolecular pump (STP). You must use the SCU-350 as specified in this manual otherwise the protection provided by the equipment may be impaired.

  • Page 12: Applied Standards

    - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.

  • Page 13: Limited Warranty

    This WARRANTY applies to the customer to whom Edwards has delivered this product. 1.3.1 Warranty period Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards. 1.3.2 Item warranted 1.

  • Page 14: Spare Parts

    SCU-350 Series Control Unit for Turbomolecular Pump 1.3.4 Spare parts Air-cooling fan for SCU-350. (When exchanging, contact Service Office). Labels The following labels are affixed or printed to the SCU-350. Read the contents of the labels before operation. 1. High voltage device caution label The SCU-350 is equipped with a high voltage device.

  • Page 15: Connector Caution Label

    SCU-350 Series Control Unit for Turbomolecular Pump 4. Connector caution label This label describes lock of the connector. The label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation. Figure 4 - Connector caution label...

  • Page 16: Label Affixing Positions

    SCU-350 Series Control Unit for Turbomolecular Pump Label affixing positions Refer to Section 1.4 for the details of the labels 1 to 4. Figure 5 - Label affixing positions High voltage device caution label Safety instruction label Caution label Connector caution label...

  • Page 17: General Description

    SCU-350 Series Control Unit for Turbomolecular Pump General description The SCU-350 is the control unit required to drive the STP series of turbomolecular pumps. The SCU-350 converts the single-phase line supply voltage into a 3-phase d.c. voltage to drive the pump motor.

  • Page 18: Cable Sets

    SCU-350 Series Control Unit for Turbomolecular Pump 1.6.1 Cable sets The following cable sets (optional accessories) are used with the SCU-350 and STP pump: STP connection cable - STP pump to SCU-350. Power cable - SCU-350 to power supply. Note: Figure 7 shows a typical TMS system installation.

  • Page 19: Technical Data

    SCU-350 Series Control Unit for Turbomolecular Pump TECHNICAL DATA Control unit specifications Model Applicable STP pump SCU-350 series STP-301/451 series STP-L301/L451 series Type Specification SCU-350 Standard SCU-350A With ABS function SCU-350H With STP-200/300/400 series compatible remote input / output connector (CON4)

  • Page 20: Specifications

    SCU-350 Series Control Unit for Turbomolecular Pump SCU-350 specifications Applicable pump STP-301/451 series STP-L301/L451 series Input voltage: 100 to 240 Va.c Input power: 350 VA maximum Input frequency 50/60 ± 2 Hz Leakage current 3.5 mA maximum Input phase Single phase...
  • Page 21 SCU-350 Series Control Unit for Turbomolecular Pump Operation switch START (Non-locking push-button / Green) STOP (Non-locking push-button / Red) RESET (Non-locking push-button / White) SELECT (Non-locking push-button / White) MANUAL/REMOTE changeover (Slide switch• Grey) Panel indication LED ACCEL. (Green LED)

  • Page 22: External Appearance Of Scu-350

    SCU-350 Series Control Unit for Turbomolecular Pump External appearance of SCU-350 246 or more Figure 8 - SCU-350 dimensions (mm) Note: The screw hole sizes for the rubber feet and rack fixation are M4×10. MT-21E-201-E Page 12...

  • Page 23: Installation

    Unpacking Check outer package for damage and that the delivery note corresponds to the purchase order. If the STP control unit is damaged, contact Edwards or their distributor. Note: It is recommended to keep the packaging materials, such as the corrugated fibreboard container and cushioning material for possible re-use.
  • Page 24 SCU-350 Series Control Unit for Turbomolecular Pump Item Description Function START switch (Non-locking push-button, green) STP pump rotating function (Valid in MANUAL only) Rated speed setting function (Valid in MANUAL and REMOTE) STOP switch (Non-locking push-button, red. Valid in MANUAL only)

  • Page 25: Rear Panel Function

    SCU-350 Series Control Unit for Turbomolecular Pump Rear panel 13 AC POWER CON1 17 I/O TB1 terminal block 14 MAIN POWER breaker 18 I/O TB2 terminal block 15 P.CONNECTOR CON2 19 CON4 (for SCU-350H/350HA only) 16 Ground terminal 20 CON3 (for optional accessory)

  • Page 26: Top Panel Function

    SCU-350 Series Control Unit for Turbomolecular Pump Top panel “ON” with SCU-350H/350HA Expanded view of DSW-B switch (setting at delivery) 21 VR1 volume 22 DSW-B dip switches Figure 11 - SCU-350 top panel Item Description Function VR1 volume For setting the rated speed of the STP pump This volume is normally made ineffective.

  • Page 27: Left Side Panel

    SCU-350 Series Control Unit for Turbomolecular Pump Left side panel 23 Air cooling fan Figure 12 - SCU-350 left side panel Item Description Function Air cooling fan For cooling the inside of the STP control unit Table 5 - SCU-350 left side panel function...

  • Page 28: Precautions Before Installation

    SCU-350 Series Control Unit for Turbomolecular Pump Precautions before installation CAUTION DO NOT move the STP pump and the STP control unit while the STP pump is in operation. Doing so may result in product damage. CAUTION Fasten the STP control unit to a rack to prevent a falling accident caused by earthquake.

  • Page 29: Installation Area

    SCU-350 Series Control Unit for Turbomolecular Pump 3.6.2 Installation area CAUTION The minimum bending radius of the STP connection cable is 150 mm (5.91"). DO NOT bend the cables excessively and beware of any obstacles when installing the SCU-350. In addition, leave enough space to install other cables without bending them excessively.

  • Page 30: Attaching The Scu-350 To A Rack

    SCU-350 Series Control Unit for Turbomolecular Pump Attaching the SCU-350 to a rack CAUTION The SCU-350 cannot be supported with only the 4 screws on the front panel. Always support it from the bottom using a support angle. When installing the SCU-350, DO NOT block the ventilation port of the SCU-350 by the support angle or other things.

  • Page 31: Cable Connection

    CAUTION Use the STP connection cable and the power cable that Edwards has specified. The use of other cables may result in product damage. Align the position of the guide key of the connectors and insert vertically so as not to bend the pins. If a pin is bent, not only may the connector not function normally, but it may make the pins contact, resulting in a malfunction.

  • Page 32: Stp Connection Cable

    SCU-350 Series Control Unit for Turbomolecular Pump 3.8.1 STP connection cable CAUTION STP-301/451 Series Use the STP connection cable that has a label affixed The use of different cables may result in product damage. Connect the receptacle (socket) side of the STP connection cable to the STP connector on the STP pump and connect the plug (pin) side to "P.CONNECTOR CON2"on the SCU-350.

  • Page 33: Power Cable

    SCU-350 Series Control Unit for Turbomolecular Pump 3.8.2 Power cable WARNING Ensure that the SCU-350 and the electrical supply cable are suitably protected against earth (ground) faults and that the earth (ground) of the SCU-350 and "AC POWER CON1" are correctly connected.

  • Page 34: Power Cable (With Plug)

    SCU-350 Series Control Unit for Turbomolecular Pump PE( ) SCU-350 side Power side (Primary) a) Plug type NEMA 5-15 PE( ) SCU-350 side Power side (Primary) b) Plug type NEMA 6-15 3 pin (socket) 1.5 mm × 3 cores, φ8.1 mm...
  • Page 35 SCU-350 Series Control Unit for Turbomolecular Pump SCU-350 side Power side (Primary) Black 1 M4-bolt (fixing screw) Black 2 Crimp-type terminal (M4) Yellow/Green Cover Clearance min. 1.5 mm Terminal block Use material flammability: UL 94V-0 Use the UL-recognized terminal block satisfying with the following conditions;...

  • Page 36: How To Secure The Power Cable

    SCU-350 Series Control Unit for Turbomolecular Pump SCU-350 Power cable connector CON1 AC POWER CON1 Secure with M3×2 screws POWER cable Cable fitting tool Figure 19 - How to secure the power cable MT-21E-201-E Page 26...

  • Page 37: Connecting To Semiconductor Equipment

    SCU-350 Series Control Unit for Turbomolecular Pump Connecting to semiconductor equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the following when designing the semiconductor equipment. 3.9.1 Connecting to power The SCU-350 receives its power from the semiconductor equipment electrical distribution system via a circuit breaker (rated current 5 to 10 A).

  • Page 38: Remote Communication

    SCU-350 Series Control Unit for Turbomolecular Pump 3.10 Remote communication 3.10.1 Parallel communication The SCU-350 is fitted with a terminal block "I/O TB1" for remote output signal (refer to Figure 20) to allow remote output signal control. This terminal block has 20 terminals. The screw for connector is M3.5.

  • Page 39: 3.10.3 Serial Communication

    SCU-350 Series Control Unit for Turbomolecular Pump 3.10.3 Serial communication SCU-350 is fitted with a remote communication port, "CON3" (optional accessory) (refer to Figure 23) to allow remote input and output signal control by serial protocol. This connector is a D-Sub type (25 pins, socket).

  • Page 40: Tuning

    SCU-350 Series Control Unit for Turbomolecular Pump 3.11 Tuning 3.11.1 Tuning Tuning is required to align the position of levitation in the STP pump axial direction with the centre of the rotor's movable range. Tuning can be performed simply by pressing the "RESET" switch on the front panel (refer to Figure 10).
  • Page 41 SCU-350 Series Control Unit for Turbomolecular Pump P021* ver.*.** SELF TEST TEST COMPLETE LEVITATION RATING: ***00rpm TUNING! TUNING COMPLETE A. Breaker ON D. LEVITATION B. Execute self test E. Tuning compete C. Levitation state Press RESET switch for 3 sec.

  • Page 42: Confirmation Mode

    SCU-350 Series Control Unit for Turbomolecular Pump 3.12 LCD display state 3.12.1 Display items The following items can be checked on the LCD: 1. Operation status Levitation State "LEVITATION" Acceleration state "ACCEL: ***00rpm" Normal operation state "NORMAL: ***00rpm" Break stare "BRAKE: ***00rpm”...

  • Page 43: Setting The Rated Speed

    SCU-350 Series Control Unit for Turbomolecular Pump 3.13 Setting the rated speed The STP pump can be set (changed) to the required rated speed in the range of 25,000 to 48,000 rpm in units of 500 rpm. The setting can be performed even during rotation of the STP pump. The rated speed is set to 48,000 rpm at delivery.

  • Page 44: 3.13.2 When Setting Dsw-B No. 1 To On Before Powering On

    SCU-350 Series Control Unit for Turbomolecular Pump 3.13.2 When setting DSW-B No. 1 to ON before powering ON 1. Set dip switch 1 of DSW-B to the ON position. 2. Switch "ON" the breaker on the rear panel. After the STP pump completes the self test, the LCD displays the current rated speed in "RATING: ***00rpm".

  • Page 45: Lcd Message In Rated Speed Setting Mode

    SCU-350 Series Control Unit for Turbomolecular Pump SET = ***00rpm RATING: ***00rpm PUMP TEMP: **°C LEVITATION NORMAL: ***00rpm ･･ A. Rated speed setting mode DSW-B No.1 ON B. Set value of rated speed Change speed by turning VR1 volume C. Pump internal temperature Determine speed by pressing "START"...
  • Page 46 SCU-350 Series Control Unit for Turbomolecular Pump This page intentionally blank. MT-21E-201-E Page 36...

  • Page 47: Operation

    SCU-350 Series Control Unit for Turbomolecular Pump OPERATION Before starting the STP pump CAUTION NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in rotation. DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump is rotating.

  • Page 48: Powering On

    SCU-350 Series Control Unit for Turbomolecular Pump Powering ON 4.2.1 Self test Refer to Figure 27. 1. Switch the MAIN POWER to "ON", located on the SCU-350 rear panel, refer to Figure 11. (To prevent incorrect operation, a metal fitting is attached to the breaker. Loosen the screw, lift the metal fitting and secure it.) The SCU-350 performs a self test and "SELF TEST"...

  • Page 49: Stopping The Stp Pump

    SCU-350 Series Control Unit for Turbomolecular Pump 4.4.2 Stopping the STP pump 1. Press the "STOP" switch on the front panel to stop the STP pump. 2. The "NORMAL" LED or "ACCEL." LED extinguishes, and the "BRAKE" LED illuminates. (BRAKE state) 3.
  • Page 50 SCU-350 Series Control Unit for Turbomolecular Pump P021* ver.*.** SELF TEST TEST COMPLETE LEVITATION ACCEL: ***00rpm NORMAL: ***00rpm ACCEL: ***00rpm Breaker ON Start operation of the STP pump Version <Manual operation> Execute self test STP pump can be started with...

  • Page 51: Remote Operation

    SCU-350 Series Control Unit for Turbomolecular Pump Remote operation To select remote operation, slide the "MANUAL/REMOTE" changeover switch on the SCU-350 front panel to "ON", refer to Figure 9. The "REMOTE" LED illuminates. 4.5.1 I/O TB2 terminal block This is a terminal block for remote input signals. Use it in accordance with Table 7 and Figure 28. This terminal block operates only during the REMOTE operations.
  • Page 52 SCU-350 Series Control Unit for Turbomolecular Pump Description Terminals for outputting the power (12 V DC) for driving remote signals. CAUTION +12V NEVER use these terminals for the purpose except REMOTE operations. DO NOT connect these terminals to another power line.
  • Page 53 SCU-350 Series Control Unit for Turbomolecular Pump Figure 28 - I/O TB2 remote input signal terminal block Note: I/O TB2 fuses F1 to 4 are on the substrate in the circuit. For their replacement, contact service office. Note: The input current of remote input signal is approx. 1 mA. Make sure the minimum applicable load of the relay contact when the remote operation with the relay.

  • Page 54: I/O Tb1 Terminal Block

    SCU-350 Series Control Unit for Turbomolecular Pump 4.5.2 I/O TB1 terminal block This is a terminal block for remote output signals. Use it in accordance with Table 8 and Figure 29. This terminal block functions in both the MANUAL and REMOTE operations. The screw for the terminal is M3.5.
  • Page 55 SCU-350 Series Control Unit for Turbomolecular Pump Description Terminals for inputting power for driving the air cooling unit. AC. POWER The voltage input to these terminals is output to the specified terminal N1 IN L1 block through operation of the STP pump.
  • Page 56 SCU-350 Series Control Unit for Turbomolecular Pump (11) (13) (15) (17) (19) (10) (12) (14) (16) (18) (20) TB1 terminal arrangement MT-21E-201-E Page 46...
  • Page 57 SCU-350 Series Control Unit for Turbomolecular Pump ( 1 ) ( 2 ) ( 3 ) ( 4 ) ( 5 ) ( 6 ) ( 7 ) ( 8 ) ( 9 ) (1 0 ) (1 2 )

  • Page 58: Rated Contacts For Relays Cr1

    SCU-350 Series Control Unit for Turbomolecular Pump Table 9 shows the rated contacts for relays CR1, 3, 5, 7 to CR8 in Figure 29. Induction Load Resistance Load (COS φ=0.4) (COS φ=1) (L/R=7 ms) 250 V AC 10 A 250 V AC...

  • Page 59: Con4 Connector (For Scu-350H/350Ha Only)

    SCU-350 Series Control Unit for Turbomolecular Pump 4.5.3 CON4 connector (for SCU-350H/350HA only) This is a connector for remote input/output signals. This connector can maintain compatibility with the remote I/O signal of the STP-200/300/400 series. The remote input signal from the CON 4 connector is valid by setting No.4 switch to "ON", and No.5 switch of the DSW-B on the top panel to "OFF".

  • Page 60: Con4 Connector (Remote Input Signal)

    SCU-350 Series Control Unit for Turbomolecular Pump Description Pins for inputting the RESET signal. (14) When inputting 24VDC between (2)-(14) for 0.3 seconds or more, the "FAILURE" LED is turned off. Connect the (+) side to (2), and the (-) side to (14).
  • Page 61 SCU-350 Series Control Unit for Turbomolecular Pump 24VDC (14) 0VDC 24VDC (15) 0VDC 24VDC (16) 0VDC (13) STP control unit RESET signal input pins Coil of relay CR3 START signal input pins C. Coil of relay CR1 G. STOP signal input pins D.

  • Page 62: 4.5.3.2 Remote Output Signals

    SCU-350 Series Control Unit for Turbomolecular Pump 4.5.3.2 Remote output signals Use output signals according to Table 13, Table 14 and Figure 31. This output signal operates in both manual operation and remote operation. No.4 of the DSW-B DIP switch operates in "ON/OFF" both states.

  • Page 63: Con 4 Connector (Remote Output Signal)

    SCU-350 Series Control Unit for Turbomolecular Pump Description Pins for outputting the STP pump REMOTE SELECTION state signal. (17) When the MANUAL/REMOTE changeover switch on the STP front panel is REMOTE set to ON (remote side), these pins are closed (REMOTE operation).
  • Page 64 SCU-350 Series Control Unit for Turbomolecular Pump (17) (18) (19) CR10 (20) (21) (11) (23) (24) (10) (22) (12) STP control unit OVER TEMPERATURE state signal output pins Remote selection state G. ACCELERATION state signal output pins signal output pins C.

  • Page 65: Remote Cables For Con4 (For Scu-350H/350Ha Only)

    SCU-350 Series Control Unit for Turbomolecular Pump Table 14 shows rated contacts for relays CR4, 5, 6, 7, 8, 9 and 10 in Figure 31. Induction Load Resistance Load （COSφ=0.4） （COSφ=1） （L/R=7ms） 125 V AC 0.4 A 125 V AC 0.2 A...

  • Page 66: Remote Setting

    SCU-350 Series Control Unit for Turbomolecular Pump 4.5.5 Remote setting The terminals for remote input signal (I/O TB2) and remote output signal (I/O TB1) are fitted as standard. The CON4 connector (for SCU-350H/350HA only) is available with either of the following remote operations.

  • Page 67: Starting The Stp Pump After Stopping (I/O Tb2)

    SCU-350 Series Control Unit for Turbomolecular Pump 4.5.7 Starting the STP pump after stopping (I/O TB2) Perform the rotation procedures to reaccelerate the STP pump. See Section 4.5.6, "Starting/Stopping the STP pump (I/O TB2)". The STP pump can be reaccelerated even while it is stopping.

  • Page 68: Starting The Stp Pump After A Safety Function Operates (Con4)

    SCU-350 Series Control Unit for Turbomolecular Pump 4.5.11 Starting the STP pump after a safety function operates (CON4) A safety function operates when an abnormality occurs in the STP pump or peripheral equipment. To restart the STP pump, remove the cause of the abnormality after the "BRAKE" LED distinguishes, and perform either operation shown in Table 19.

  • Page 69: Serial Communication Protocol

    SCU-350 Series Control Unit for Turbomolecular Pump SERIAL COMMUNICATION PROTOCOL Introduction The SCU-350 equipped with COM3 (option) on the rear panel can be operated with the compliant serial interface RS232C. Prepare the user application software according to this instruction manual. Operation instructions and the running state of the STP pump can be obtained with the software.

  • Page 70: Stp Control Unit Rear Panel

    SCU-350 Series Control Unit for Turbomolecular Pump I/O TB2 terminal block P.CONNECTOR CON2 AC POWER CON1 I/O TB1 terminal block CON3 (for optional accessory) Figure 33 - STP Control Unit Rear Panel MT-21E-201-E Page 60...

  • Page 71: Pin Assignments

    SCU-350 Series Control Unit for Turbomolecular Pump 5.2.2 Pin Assignments Connect SIM (STP control unit) to PC with the Serial Interface Cable connected according to Table 21 or Table 22. The length of the communication cable should be 15 m or less.

  • Page 72: Communication Mode

    SCU-350 Series Control Unit for Turbomolecular Pump 5.2.4 Communication mode This STP control unit has two remote input modes. (see Figure 34) Remote input mode is selected by DSW-B No.5. DSW-B No.5 ON: Remote input from CON3 is effective (RS-232C) DSW-B No.5 OFF:...

  • Page 73: Recommended Items About Communication Cable Installation

    SCU-350 Series Control Unit for Turbomolecular Pump 5.2.5 Recommended items about communication cable installation Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely.
  • Page 74 SCU-350 Series Control Unit for Turbomolecular Pump DO NOT bundle a communication line with a protective earth conductor or a power line. Moreover, keep away a communication line from the apparatus used as a noise source as much as possible.

  • Page 75: Serial Protocol

    SCU-350 Series Control Unit for Turbomolecular Pump Serial Protocol 5.3.1 Overview The serial protocol used on the SIM is called Query-Command. The serial link and operations remotely controlled can be confirmed on the PC (Personal computer). The SIM replies the value when receiving the query.

  • Page 76: Sim Replies To Queries Or Commands

    SCU-350 Series Control Unit for Turbomolecular Pump 5.3.3 SIM replies to queries or commands When a query or command is received by the SIM, a reply is always returned on the serial link. The replies sent by the SIM are text messages - sequences of ASCII coded characters terminated by two control characters CR, LF (ASCII chars 13 [0Dhex], 10 [0Ahex]).

  • Page 77: Queries

    SCU-350 Series Control Unit for Turbomolecular Pump 5.3.4 Queries 5.3.4.1 List of Queries Query Syntax Replies {alarm state, alarm code1, alarm Alarm State code 2---} Control state {SIM control state} Pump state {pump state, alarm state} ?V {n} Parameter {value} n=1, 2, 3 If a value cannot be returned because the hardware is not functioning, a space character is returned.
  • Page 78 SCU-350 Series Control Unit for Turbomolecular Pump 3. ?P Pump state See Section 5.5.1 for pump state and Section 5.5.2 for alarm state. Syntax SIM reply Status level, Alarm state Example: 3, 0 4. ?Vx Parameters See Section 5.5.5 for value corresponding to the parameters.

  • Page 79: Commands

    SCU-350 Series Control Unit for Turbomolecular Pump Commands A reply of "ERR 0" indicates that the command has been accepted but does not mean that the command has operated. A program that needs positive verification needs to wait an appropriate time and then perform a query.

  • Page 80: Error Message

    SCU-350 Series Control Unit for Turbomolecular Pump 5.4.2 Error message Each query or command sets the error number to indicate success or the reason for failure. The error number is returned by any command. If a query is in error (for example a parameter number is out of range) then instead of the normal reply, a message of the form "ERR n"...

  • Page 81: Data Formats

    SCU-350 Series Control Unit for Turbomolecular Pump Data Formats 5.5.1 Pump state Code Pump state Levitation Acceleration Brake (Deceleration) Normal 5.5.2 Alarm state Code Pump state No alarm Alarm MT-21E-201-E Page 71...

  • Page 82: Alarm Type

    SCU-350 Series Control Unit for Turbomolecular Pump 5.5.3 Alarm type Alarm code Alarm type No Error RAM Error Disturbance Power failure Overspeed Overload Controller OT Pump Overtemp Thermal Error Driver RA Drier OC Driver OV Driver UV Driver HF Tuning Error 1...

  • Page 83: Sim Control State

    SCU-350 Series Control Unit for Turbomolecular Pump 5.5.4 SIM control state Code SIM control state No control SIM has control 5.5.5 Parameters Parameter Description Value units Total run hours hours Motor temperature degree centigrade Rotational speed MT-21E-201-E Page 73...
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  • Page 85: Maintenance

    SCU-350 Series Control Unit for Turbomolecular Pump MAINTENANCE The SCU-350 is provided with safety functions for various abnormalities/errors. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures. If you cannot trace it or if the STP pump does not function normally after the troubleshooting, fill in the necessary information in the "Return Declaration"...

  • Page 86: Operation After A Power Recovery

    SCU-350 Series Control Unit for Turbomolecular Pump Table 25 shows the status of LCD, LEDs, and REMOTE output signals at a power failure. REMOTE output signal LEDs (I/O TB1) Duration of power Rotational speed failure ALARM Error POWER FAILURE Backlight...

  • Page 87: Abnormal State Of Magnetic Bearing

    SCU-350 Series Control Unit for Turbomolecular Pump 6.1.3 Abnormal state of magnetic bearing CAUTION When an abnormality/error occurs in the magnetic bearing, check the STP pump as well as the SCU-350. If "FAILURE" cannot be released after reset operation, contact Service office.

  • Page 88: Overspeed

    SCU-350 Series Control Unit for Turbomolecular Pump 6.1.8 Overspeed When the rotational speed of the STP pump exceeds the specified rotational value due to a failure in the motor driver, the MAIN POWER on the SCU-350 switches "OFF". The STP pump has no power supplied, decelerates and stops.

  • Page 89: 6.1.11 Troubleshooting Immediately After Other Abnormality/Errors Occur

    SCU-350 Series Control Unit for Turbomolecular Pump 6.1.11 Troubleshooting immediately after other abnormality/errors occur WARNING When disconnecting cables from the STP pump and/or the SCU-350 to perform troubleshooting and take the necessary action, confirm that the STP pump has stopped, power off the primary power (turn the MAIN POWER "OFF") and isolate (Lockout/Tagout) the electrical energy source water and gas and other energy sources on the vacuum equipment.
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  • Page 93 SCU-350 Series Control Unit for Turbomolecular Pump MT-21E-201-E Page 83...

  • Page 94: When Error Message Is Not Displayed On Lcd

    SCU-350 Series Control Unit for Turbomolecular Pump When error message is not displayed on LCD When the "FAILURE" LED illuminates and the LCD displays an error message, refer to Table 26 to Table 29. 6.2.1 Abnormalities when powering ON Symptom...

  • Page 95: Displaying Past Abnormalities/Errors And Accumulated Running-Time

    SCU-350 Series Control Unit for Turbomolecular Pump Displaying past abnormalities/errors and accumulated running-time SCU-350 provides a function that the LCD displays a maximum of eight error messages that occurred in the past, and a total of running-time in hours (acceleration, rated speed operation, and deceleration).

  • Page 96: Maintenance And Inspection

    NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipments such as a baking heater before performing maintenance and inspections. Only Edwards will replace the maintenance parts and will execute repair and overhaul. Contact Service office. 6.4.1 Cleaning The method of cleaning the SCU-350 is shown below.

  • Page 97: Maintenance

    SCU-350 Series Control Unit for Turbomolecular Pump 6.4.2 Maintenance Regular overhaul (the cost of overhaul will be at your own charge) is required for safety and proper use of STP control unit. This overhaul includes inspection and cleaning. Internal components of the STP control unit will deteriorate after long-term use.
  • Page 98 SCU-350 Series Control Unit for Turbomolecular Pump This page intentionally blank. MT-21E-201-E Page 88...

  • Page 99: Storage, Transportation And Disposal

    Ensure you follow the "Return Procedure" to prevent an accident during the transportation, repair or overhaul. CAUTION Edwards will not be responsible for any damage or problems that may occur when returning the SCU-350. Always contact Service office before returning the SCU-350 for repairs, overhaul or other purposes.

  • Page 100: Disposal

    SCU-350 Series Control Unit for Turbomolecular Pump Disposal Dispose of the SCU-350 as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal. MT-21E-201-E Page 90...

  • Page 101: Service, Spares And Accessories

    A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards or distributor. When you order, state for each part required:...

  • Page 102: Accessories

    SCU-350 Series Control Unit for Turbomolecular Pump Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual (A) Generic Instruction Manual Instruction Manual (B) Pump Specific Information Instruction Manual (C)
  • Page 103 For more information, contact the nearest Service Office. (http://www.edwardsvacuum.com/) Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8853 International +81-47-458-8853 Facsimile: Domestic 047-458-8048 International +81-47-458-8048 Copyright 2018 Edwards Japan Limited. All rights reserved.

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