Table of Contents Table of Contents Preface ................................... Congratulations on your purchase ........................Product Description ............................. COBRA DS 3010 G..............................Use ..................................Operating Principle ............................. 2.3.1 COMBI ..............................2.3.2 Gas Flow Checks ........................... Oil Circuit................................Cooling.................................. Nitrogen System..............................Optional Functions/ Use of Available Accessories ..................
1 | Preface Preface Congratulations on your purchase Congratulations on your purchase of the Busch vacuum pump. With watchful observation of the field’s requirements, innovation and steady development Busch delivers modern vacuum and pres- sure solutions worldwide. These operating instructions contain information for ●...
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Product Description | 2 Process Gas Diagram Description Process gas inlet Process gas outlet Cooling water regulating valve (CWR1) Cooling liquid pump (CLP) Heat exchanger (HE) Nitrogen flow meter, dilution gas (FME) Nitrogen pressure reducer (PRV) Magnetic valve (MV), regulating valve with soleneoid valve, dilution gas Regulating valve, dilution gas DP Regulating valve, dilution gas at ex-...
2 | Product Description COBRA NS 0600 C Description Inlet Outlet Cooling liquid Cooling water Barrier gas Screw rotors Dilution gas (dil 2) Dilution gas (dil 1) Motor klixon PUMA WY 3600 A Description Inlet Outlet Booster lobe Cooling water The COBRA DS vacuum pumps are designed for use in the field of microelectronics and similar in- dustries.
2.3.1 COMBI The COBRA DS 3010 G vacuum pumps are a combination of a screw vacuum pump NS 0600 C (DP) and a Booster vacuum pump WY 3600 A (MB). The COMBI vacuum pumps are streamlined. The COBRA DS vacuum pumps are COBRA NS screw vacuum pumps with cooling water and nitrogen circuits.
2 | Product Description 2.3.2 Gas Flow Checks A pressure sensor TS1 at the discharge monitors the discharge pressure. If the pressure reaches more than the limit value (alarm, preset at the factory: 0.2 bar), the purge cycle starts. Oil Circuit Since the complete operating principle works without contact, no oil circuit is needed in the work ar- Cooling The vacuum pump is cooled by:...
● FME: nitrogen flow rate, dilution ● CWM: cooling water flow rate in motors/ transmission / variable speed drives See "Installation and Maintenance Instructions, Busch PLC and Busch LCD (No. 0870758077)". On/ Off Switch The vacuum pump is delivered with a circuit breaker. The function start/ stop can be done in Local by using the LCD controller or in Remote by the production machine.
The maintenance instructions must be followed and observed. These installation and maintenance instructions must be read and understood before the vacuum pump is used. If you have any doubts, contact your Busch representative. Safety Information The vacuum pump is designed and manufactured in compliance with the latest technical standards and safety regulations.
Safety | 3 NOTE ... indicates helpful tips and recommendations, as well as information for efficient and trou- ble-free operation. CAUTION The COBRA DS system includes provision for the secondary containment of liquids leaks such as water and oil. Safety Stickers COBRA NS 0600 C Description Warning! Hot surface! Do not touch!
3 | Safety COBRA DS 3010 G Noise Emission Refer to the table “Technical data” for the permissible noise levelling free field conditions according to EN ISO 2151. CAUTION The sound level of the vacuum pump within a certain perimeter of the vacuum pump is high.
Safety | 3 Type 3 Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are no greater than 30 volts rms, 42.4 volts peak, 60 volts dc or 240 volt-amp in dry locations. Type 4 Equipment is energized.
Safety | 3 Decommissioning Procedure When the product arrives at the end of the lifetime, it is necessary to proceed to the decontamina- tion of the vacuum pump. CAUTION Only authorized personnel may carry out any dismantling on the vacuum pump. Before work begins, the operator of the vacuum pump must fill in a form or a “Declaration Regarding Con- tamination of Vacuum Equipment and Components”...
4 | Transport Transport The COBRA DS vacuum pumps are tested and checked in our factory before careful packing. Check the packaging for transport damage when the goods arrive. The vacuum pump can withstand tem- peratures between -25°C and +55°C during transport. Transport in Packed State Packed on a pallet, the vacuum pump can be moved with a hand forklift truck.
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Transport | 4 In case the vacuum pump was bolted to a pallet with fixing bolts: ● Unscrew the fixing bolts in the base frame. CAUTION In case of a vacuum pump filled with oil, make sure that by lifting the inclination angle of the vacuum pump do not exceed 5°...
5 | Storage Storage Temporary Storage ● Make sure that the intake and exhaust flanges are closed (put on the protective caps included in the delivery package of the vacuum pump) ● Store the vacuum pump: ● if possible, the vacuum pump should be stored in its original packaging, ●...
Installation and Commissioning | 6 Installation and Commissioning Installation Prerequisites CAUTION In case of non-compliance with the installation prerequisites, particularly in case of insuffi- cient cooling: Risk of damage or destruction of the vacuum pump and its components! Risk of personal injury! The installation prerequisites must be complied with.
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6 | Installation and Commissioning NOTE 1° (german degree = 1° dGH) = 1,78° (french degree) = 1,25 e (english degree) = 17,9 mg/kg Ca- CO3 (american hardness). ● Make sure that the cooling water is neutral and clean. ● Make sure that the cooling water outlet is unpressurised. ●...
Cooling water inlet 3/8'' Inlet DN 160 ISO-K Outlet DN 63 ISO-KF Emergency stop Busch PLC Remote Control (Moveable) Main switch ● Make sure that the vacuum pump is at least 1 meter away from any wall to ensure good cooling.
– DN 160 ISO-K In the case of long intake lines, the line cross-section should be larger than the intake flange to pre- vent a drop in the performance of the vacuum pump. If you have any doubts, contact your Busch representative.
● Make sure that an overload cut-out according to EN 60204-1 is provided for the motor. ● Make sure that the drive of the vacuum pump is not disturbed by any electric or electromagnetic interferences. If you have any doubts, contact your Busch representative. Installation 6.2.1...
6 | Installation and Commissioning 6.2.2 Electrical Connection WARNING Risk of electrocution, risk of damage. Electrical installation must be performed by a suitably qualified electrician who knows and fol- lows the following regulations: ● IEC 364 or CENELEC HD 384 or DIN VDE 0100, ●...
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Installation and Commissioning | 6 DP Motor Connection Motor connectors: Connection of motor temperature switches (recommended): Control voltage: ≤ 250 V Max current: 1.6 A MTS = Motor temperature switch (in motor coil) Double star connection (low voltage): Star connection (high voltage): Instruction Manual COBRA DS 3010 G_EN_en 27 | 68...
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6 | Installation and Commissioning MB Motor Connection Motor connectors: Connection of motor temperature switches (recommended): Control voltage: ≤ 250 V Max current: 1.6 A MTS = Motor temperature switch (in motor coil) Double star connection (low voltage): Star connection (high voltage): 6.2.2.1 Power Wiring Connection Power wiring 4 poles...
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Installation and Commissioning | 6 6.2.2.2 Power Connector on Rear Side Power Connector (208V) Description Pump side Phase L1 (Pump side) Phase L2 (Pump side) Phase L3 (Pump side) Ground (Pump side) Mating connectors Phase 1 (Mating connectors) Phase 2 (Mating connectors) Phase 3 (Mating connectors) Ground (Mating connectors) Pump side...
Interface connection (50 poles) / PID In- Monitoring System - Option) terface The information concerning the use of the Busch PLC and the Busch LCD can be found in the Opera- tion and Maintenance manual (Art. No. 0870758077). 6.2.4 Connection of Lines/ Pipes ●...
WY 3600 A Oil quantity (Liter) Oil type Busch YLC 250 B, Art. No. 0831 131 400 (0,5 l ≈ 1 kg) 6.2.5.1 COBRA NS 0600 C Oil Filling ● Prepare the quantity of oil specified in the table “Oil Quantity”.
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6 | Installation and Commissioning If the intake line is equipped with a shut-off device: ● Close the shut-off device. If the intake line is not equipped with a shut-off device: ● Place a rubber plate on the intake flange. ●...
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Installation and Commissioning | 6 6.2.5.2 PUMA WY 3600 A Oil Filling Description Oil fill plug (OFP) Oil fill plug (OFP) Oil sight glass (OSG) Oil drain plug (ODP) Oil sight glass (OSG) Oil drain plug (ODP) NOTE The quantity of oil specified in the installation handbook is of informative nature only. Check the oil level with the help of the various oil sight glasses (OSG1,2,3,4) on the vacuum pump.
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6 | Installation and Commissioning NOTE It is easier to switch on the vacuum pump with cold oil when the intake line is not closed or when the intake flange is not covered by a rubber plate. DS vacuum pump: ●...
Installation and Commissioning | 6 6.2.6 Cooling Liquid Filling NOTE The COBRA DS vacuum pumps are generally dispatched with cooling liquid already in the vac- uum pump. Before vacuum pump first startup, control the cooling liquid level. In the event of absence of one or the other of these lubricants, please carry out the filling (see “Cooling Liquid Type/ Quantity [➔ 64]”...
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6 | Installation and Commissioning ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally. Description Cooling liquid vent plug (CLV) Cooling liquid fill plug (CLF) Cooling liquid drain plug (CLD) ●...
Installation and Commissioning | 6 ● Unscrew purge cap on cylinder upper plate. ● Control that cooling liquid level is just under cylinder upper plate. ● In case cooling liquid level is below required level: ● Fill in more cooling liquid. ●...
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6 | Installation and Commissioning Solid particles must not get into the vacuum pump. Procedural errors can result in the pump suck- ing in a certain quantity of liquid. If the pump has sucked in liquid, a short drying time is necessary at the end of the procedure.
Installation and Commissioning | 6 CAUTION The cooling water flow, which is checked by the flow switch FS2, must be at least 10 l/min. ● Make sure that all caps, safeguards, and similar covers are mounted. ● Make sure that the safeguards are switched on. ●...
6 | Installation and Commissioning ● Make sure that the nitrogen flow is set correctly_ ● Nitrogen is used as dilution gas. It is injected inside the cylinder on two different places. Nitrogen flow FME injected in the middle hole is preset at 20 Nl/min and can be adjusted with valve DGR1, depending on the application.
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Installation and Commissioning | 6 time delay which is adjustable in its duration using the parameter « Time Before », will start. As soon as the time delay's duration has elapsed, the modules DP and MB slow down to their min- imum frequency of rotation.
7 | Standard Operational Time Chart Standard Operational Time Chart Signal Control Mode (Select LL Mode = EXTERN) Description LCD start or Remote start (tool to 1) Cold start pump) Delay (5 sec) Pump speed Dry pump Booster 2/ MB on delay Pump ready (pump to tool) Process on (tool to pump) Pump start-up...
8 | Maintenance Maintenance DANGER Live wires. Risk of electrical shock. ● Electrical installation work must only be executed by qualified personnel. DANGER In case the vacuum pump has conveyed gases that have been contaminated with foreign ma- terials that are dangerous to health, the oil and condensates will also be contaminated. These foreign materials can infiltrate the pores, recesses, and other internal spaces of the vac- uum pump.
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Maintenance | 8 ● Stop the pump with the LCD control (press on STOP button during 10s). ● Press on emergency stop button. ● Switch off the main circuit breaker. ● Switch off the customer’s power supply. ● Switch off the water and nitrogen quick connections (inlet first, then outlet). ●...
(contact Busch). ● Check the vacuum pump for cooling liquid leaks - in case of leaks have the vacuum pump repaired (contact Busch). ● Check the vacuum pump for cooling water leaks - in case of leaks have the vacuum pump repaired (contact Busch).
Maintenance | 8 Interval Maintenance work Yearly ● If the intake is equipped with a sieve: If one or more of these accesso- ● Check the sieve at the intake and clean if necessary. ries are installed. ● Check the measuring and safety equipment for working or- der.
NOTE Oil does not normally have to be refilled outside the recommended oil change intervals. A drop in the oil level indicates a fault (see "Alarms and warnings -> Busch PLC and Busch LCD"). CAUTION Only fill in oil through the oil filler opening.
If the oil becomes dark or looks different from the initial color: ● Change the oil immediately, see Oil Change. You can consult your Busch representative in order to find out why this color change has occurred. 8.2.4 Oil Change...
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8 | Maintenance 8.2.4.1 Used Oil Draining NOTE After switching off the vacuum pump at normal operating temperature wait no more than 20 minutes before the oil is drained. ● Make sure that the vacuum pump is switched off and cannot accidentally be switched on again. ●...
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Maintenance | 8 8.2.4.2 New Oil Filling COBRA NS (DP) vacuum pump: ● Prepare the quantity of oil needed (see “Oil Type/ Quantity [➔ 63]”). CAUTION The use of chemically contaminated or polluted oil can lead to hazardous pump conditions which could cause personal injury. NOTE The quantity of oil specified in the Instruction Manual is of informative nature only.
8 | Maintenance NOTE The quantity of oil specified in the Instruction Manual is of informative nature only. Check the oil level with the help of the various oil sight glasses on the vacuum pump. ● Make sure that the drain plugs have been fitted properly and that they do not leak. CAUTION Only fill in oil through the oil filler opening.
Maintenance | 8 ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally. ● Unscrew the filler cap (CLF) for the cooling liquid. ● Open purge cap (CLV) on cylinder upper plate and purge cap on cylinder endplate B-side. ●...
8 | Maintenance ● Make sure that the drain plug sits properly and does not leak. ● Unscrew purge cap on cylinder upper plate. ● Unscrew purge cap on cylinder endplate B-side. ● Unscrew the filler cap for the cooling liquid. ●...
● Decontaminate the machine as much as possible and state the contamination status in a ‘Dec- laration of Contamination’. Busch will only accept machine accompanied by a signed, fully completed and legally binding "decla- ration of contamination", downloadable from the following link: buschvacuum.com/declaration-of- contamination.
10 | Removal from Service Removal from Service DANGER Live wires. Risk of electrical shock. ● Electrical installation work must only be executed by qualified personnel. CAUTION Hot surface. Risk of burns! ● Before doing anything that requires touching the machine, let it cool down first. 10.1 Temporary Removal from Service Before disconnecting the intake and exhaust lines and switching off the cooling water and nitrogen...
Removal from Service | 10 10.3 Dismantling and Disposal DANGER In case the vacuum pump has conveyed gases that have been contaminated with harmful for- eign material which are harmful to health, the oil and the condensates will also be contami- nated with harmful foreign material.
Risk of premature failure! Loss of efficiency! ● The exclusive use of Busch genuine spare parts and consumables is recommended for the correct functioning of the machine and to validate the warranty. There are no standard spare parts kits available for this product.
Busch). Solid foreign matter has en- ● Remove the solid foreign tered the machine. matter or repair the ma- chine (contact Busch). ● Install an inlet filter if neces- sary. A temperature sensor has ● Let the machine cool down.
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Oil Change. The machine runs too hot. ● See problem "The machine runs too hot". For resolution of problems not listed in the troubleshooting table, please contact your Busch repre- sentative. 62 | 68 Instruction Manual COBRA DS 3010 G_EN_en...
Oil Type/ Quantity | 13 Oil Type/ Quantity 13.1 Oil Type Make sure that the oil type corresponds to specifications: YLC 250 B Part number 0.5 L packaging (~1 kg) 0831 131 400 Part number 1.0 L packaging (~2 kg) 0831 108 878 Part number 5.0 L packaging (~10 kg) 0831 108 879 CAUTION...
14 | Cooling Liquid Type/ Quantity Cooling Liquid Type/ Quantity 14.1 Cooling Liquid Type Make sure that the Cooling Liquid type corresponds to specifications: Zitrec M-25 (ready-to-use) Part number 25 L packaging 0831 563 468 Part number 5 L packaging 0831 563 469 The cooling liquid Zitrec M-25 is ready-to-use and does not require additional water.
EU Declaration of Conformity This Declaration of Conformity and the CE-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Decla- ration of Conformity is issued under the sole responsibility of the manufacturer.
UK Declaration of Conformity This Declaration of Conformity and the UKCA-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Dec- laration of Conformity is issued under the sole responsibility of the manufacturer.
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