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Turbo-V 700HT
Model 969-9057
Model 969-9058
87-900-878-01(C)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Summary of Contents for Varian 969-9057
- Page 1 MANUALE DI ISTRUZIONI Turbo-V 700HT BEDIENUNGSHANDBUCH pumps NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES BEDRIJFSHANDLEIDING Model 969-9057 INSTRUKSTIONSBOG Model 969-9058 BRUKSANVISNING INSTRUKSJON MANUAL OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-878-01(C) APRIL 2002...
- Page 2 Turbo-V 700HT...
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Page 5: Table Of Contents
ISTRUZIONI PER LíUSO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE DíEMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRU«’ES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Istruzioni Per Líuso
Durante il trasporto e l'immagazzinamento delle pompe non Le pompe turbomolecolari della serie Turbo-V700HT devono devono essere superate le seguenti condizioni ambientali: essere utilizzate solo con uno degli appositi controllori Varian − temperatura: da -20 QC a +70 QC (serie 969-9445, 969-9545, 969-9872) e devono essere colle- −... - Page 7 In caso di guasto Ë possibile usufruire del servizio di riparazio- della pompa. Le viti utilizzate devono avere un carico di sner- ne Varian o del "Varian advanced exchange service", che per- vamento di 500 N/mm e devono essere fissate con una cop- mette di ottenere una pompa rigenerata in sostituzione di pia di 3,1 Nm.
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Page 8: Gebrauchsanleitung
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Miflachtung einheimischen, hier zur Geltung kommenden Bestimmungen ¸bernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V700HT handelt es sich um Turbomolekularpumpen f¸r Hoch- Ultrahochvakuumanwendungen. Sie eignen sich f¸r jede Art von Gas oder gashaltige Gemische, nicht jedoch zur Fˆrderung... - Page 9 Pumpengheh‰use unter 50[C abgesunken ist. ìTechnical Informationî. Wenn die Pumpen ¸ber ihr Unterteil installiert werden sollen, Bei einem Defekt kann der Varian Service oder der " advanced m¸ssen in die Bohrungen des Unterteils 3 M6-Schrauben exchange service" in Anspruch genommen werden.
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Page 10: Mode Díemploi
Pendant le transport et l'emmagasinage des pompes, il faudra doivent Ítre utilisÈes quíavec líun des contrÙleurs spÈciaux veiller ‡ respecter les conditions environnementales suivantes: Varian (sÈrie 969-9445, 969-9545, 969-9872) et doivent Ítre − tempÈrature: de - 20UC - ‡ + 70UC connectÈes ‡... - Page 11 "advanced exchange service", remplir et contrÙle. faire parvenir au bureau local Varian la fiche "SÈcuritÈ et Il est conseillÈ de lire attentivement cette notice avant d'utiliser SantÈ" annexÈe ‡ la prÈsente notice d'instructions. Une copie la pompe.
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Page 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Page 13 En caso de averÌa se podr· utilizar el servicio de reparaciÛn Todas las instrucciones para el funcionamiento correcto de la Varian o el "Varian advanced exchange service", que permite turbobomba se encuentran en el manual de la unidad de obtener una bomba regenerada para sustituir la averiada.
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Page 14: Instru"'Es Para O Uso
Varian antes de usar a aparelhagem. A Varian n„o se responsabiliza pela eventual inobserv‚ncia total ou parcial das instruÁıes, pelo uso indevido por parte de pessoas n„o treinadas, por operaÁıes n„o autorizadas ou pelo uso contr·rio ‡s normas... - Page 15 3,1 Nm. Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o Para a instalaÁ„o dos acessÛrios opcionais, ver "Technical Varian ou do "Varian advanced exchange service", que permite Information". obter uma bomba regenerada que substitua a bomba com defeito.
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Page 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 In geval van storing is het mogelijk om de reparatiedienst van Om de pomp met behulp van zijn basis te bevestigen, zijn drie Varian of de "Varian advanced exchange service" in te schakelen: zo krijgt men een ruilpomp ter vervanging van de M6 bouten nodig die in de gaten in de basis van de pomp worden ingebracht.
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Page 18: Brugsanvisning
Brugeren bedes lÊse denne hÂndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb pÂ... - Page 19 Âbning, hvortil den passive luftart (argon eller TurbomolekulÊrpumperne i V700HT serien m kun anvendes kvÊlstof) skal sluttes for at beskytte lejerne. med en af de sÊrlige Varian kontrolapparater (serie 969-9445, 969-9545, 969-9872) og skal forbindes med en primÊr pumpe (se skemaet i "Technical Information").
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Page 20: Bruksanvisning
Anv‰ndaren bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av person utan tillr‰cklig kunskap, obehˆrigt bruk av utrustningen eller hantering som strider mot g‰llande lokala fˆreskrifter. - Page 21 ‰delgas (kv‰ve eller argon) fˆr att skydda lagren (se bilagan Turbomolekyl‰rpumparna i serien V700HT mÂste anv‰ndas ìTechnical informationì). med en s‰rskild styrenhet frÂn Varian (serie 969-9445, 969- 9545, 969-9872), och anslutas till en fˆrpump (se schema i " Technical information").
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren b¯r lese denne brukerveiledningen og all annen informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf¯lging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som pÂ... - Page 23 (argon eller kvelstoff) koples for  beskytte lagrene (se Turbo-V700HT serien turbo-molekulÊre pumper m kun ìTeknisk informasjon). brukes med en av de spesielle Varian kontrollere (serie 969- 9445, 969-9545, 969-9872), og m koples til hovedpumpen (se skjema i "Teknisk informasjon").
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Page 24: Kfytt÷Ohjeet
YLEISIƒ TIETOJA T‰m‰ laite on tarkoitettu ammattimaiseen k‰yttˆˆn. Ennen laitteen k‰yttˆˆnottoa tulee k‰ytt‰j‰n lukea huolellisesti mukana seuraava k‰yttˆohje sek‰ kaikki muu Varianin toimittama lis‰tieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden t‰ydest‰ tai osittaisesta laiminlyˆnnist‰, ammattitaidottoman henkilˆn virheellisest‰ laitteen k‰ytˆst‰,... - Page 25 (typpi tai argooni) jotta laakerit ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- suojataan (katso liite ìTechnical informationî). 9445, 969-9545, 969-9872) ja niiden t‰ytyy olla yhdistettyin‰ p‰‰pumppuun (katso kaaviota osasta "Technical Information"). Turbopumppu voidaan asentaa mihin tahansa asentoon.
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Page 26: Pdhgies Crhsews
£llh pr“sqeth plhrofor∂a pou d∂nei h Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euq⁄nh “son afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgiËn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpiko⁄, auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂... - Page 27 22 Nm Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj el∂kwsh M10 Varian ˇ sto ìVarian advanced exchange serviceî, pou saj d∂nei th H tourmpoantl∂a me fl£ntza eis“dou ConFlat pr◊pei na sterewqe∂ dunat“thta na antikatastˇsete thn calasm◊nh antl∂a me m∂a sto q£lamo keno⁄...
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Page 28: Instructions For Use
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Page 29 The used screws must have a minimum strength point of 500 N/mm and must be fixed with a torque of 3.1 Nm. In the case of breakdown, contact your local Varian service For installation of optional accessories, see "Technical center who can supply a reconditioned pump to replace that Information".
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Page 30: Technical Information
They are: The external body of the pump is shaped so that − Model 969-9057 with ISO 200 high vacuum the pump can function with natural convection air flange cooling. Kits are available for water cooling or forced air cooling to cool the pump in the cases −... -
Page 31: Technical Specification
ISO: 14 (31) CFF: 20.1 (42.2) Start-up time < 5 minutes Recommended mechanical: Varian SD 450 * According to standard DIN 28 428, the base forepump diaphragm: Varian MD 60 pressure is that measured in a leak-free test dome, Operating position... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-878-01(C)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on each pump. INLET SCREEN INSTALLATION The inlet screen can be removed as shown in the following figure. The inlet screens mod. 969-9316 prevents the blades of the pump from being damaged by debris greater than 0.7 mm diameter. -
Page 34: Heater Band Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- HEATER BAND INSTALLATION eration. In the event of turbopump overheat, the heater will be automatically cut out by the thermis- tor sensor. NOTE The turbopump must be "baked" only when operat- ing with an inlet pressure less than 10 mbar and with water cooling. -
Page 35: Water Cooling Kit Installation
TECHNICAL INFORMATION The assembled kit must be screwed into the suit- WATER COOLING KIT INSTALLATION able holes of the pump body with a recommended Two types of water cooling kits are available to be closing torque of 5 Nm. mounted when the pump is used under heavy load conditions or when air cooling is insufficient. -
Page 36: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION Position the fan on the pump, ensuring that the holes in the plate line up with those in the pump base. Insert the respective washers and screws and tighten with a screwdriver. Connect the fan to the controller. A fan kit model 969-9314 is available for air cooling the pump. -
Page 37: Gas Purge Valve Installation
TECHNICAL INFORMATION GAS PURGE VALVE INSTALLATION VENT VALVE INSTALLATION A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump. To install the gas purge valve it is necessary to un- screw the purge port cover as shown in the follow- ing figure, The vent valve mod. -
Page 38: Vent Device Installation
TECHNICAL INFORMATION Tighten the valve using a 16 mm. hexagonal span- Unscrew and remove the threaded plug (see figure ner with a torque of 2.5 Nm. below). ! ! ! ! CAUTION Do not overtighten the valve as this may damage the thread on the pump. -
Page 39: Typical Layout Diagram
Fore-vacuum pump with internal one-way valve For ConFlat flange connections we recommend 10. Fore-vacuum pump control relay using Varian hardware. 11. Connection for water cooling To facilitate assembly and dismantling, apply Fel- pro C-100 high temperature lubricant to the screw 12. -
Page 40: Connection Configurations
TECHNICAL INFORMATION Connection configurations Connection B - FORE-VACUUM PUMP Connection C - ELECTRICAL A flange KF 25 NW is available to connect the Turbo-V700 HT to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the me- chanical pump must be eliminated through the use of bellows. -
Page 41: Pump Used With Corrosive Gases
! ! ! ! CAUTION 1. Purge gas line 2. Pressure To prevent bearing damage, Varian suggests a regulator minimum purge gas flow rate of 10 sccm (0.17 3. Gas purge valve mbar l/s). This value can be exceeded, according 4. -
Page 42: Accessories
300 single phase, universal motor Triscroll Dry Vacuum Pump PTS PTS03003UNIV 300 3 phase, universal motor Vibration damper ISO 200 969-9346 Vibration damper CFF 10î 969-9336 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-878-01(C) - Page 43 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 44 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 45 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...