Table Of Contents - SMC Networks PFCQ531 Series Operation Manual

Flow controller for air
Table of Contents

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Contents
1
2
3
4
5
6
6-1
6-2
6-3
(1) Analog input (flow rate command signal) ............................................... 11
(2) Analog output (flow rate output signal) ................................................... 11
(3) Controllable range ................................................................................. 11
7
9 Working Principle ............................................................................................. 16
10
Installation
10-1
10-2
10-3
10-4
(1) D-sub connector terminal No. ................................................................ 22
(2) Example of D-sub connector wiring ....................................................... 23
(3) Flow rate display connector terminal No. ............................................... 25
11
11-1
11-2
11-3
12
.......................................................................................................... 32
12-1
12-2
12-3
13
13-1
.......................................................................................... 4
.................................................................................................... 8
................................................................................................... 9
........................................................................... 9
..................................................................................................... 13
..................................................................................................... 17
............................................................................................ 17
.............................................................................................. 19
..................................................................................................... 20
......................................................................... 22
....................................................................................................... 26
............................................................................... 26
.......................................................................... 32
................................................................................................ 33
............................................................................. 34
.......................................................................... 37
....................................................................... 3
...................................................................... 6
...................................................... 7
....................................................................... 10
................................................................... 11
....................................................................... 27
................................................................. 30
........................................... 37
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