Tektronix KEITHLEY S530 Reference Manual

Parametric test system

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S530 Parametric Test System

Reference Manual

S530-901-01 Rev. B / January 2019

*PS530-901-01B*

S530-901-01B

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Summary of Contents for Tektronix KEITHLEY S530

Page 1 tek.com/keithley S530 Parametric Test System Reference Manual S530-901-01 Rev. B / January 2019 *PS530-901-01B* S530-901-01B...
Page 2 S530 Parametric Test System Reference Manual...
Page 3 © 2019, Keithley Instruments, LLC Cleveland, Ohio, U.S.A. All rights reserved. Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments, LLC, is strictly prohibited. These are the original instructions in English. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, LLC.
Page 4 Safety precautions The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present. This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury.
Page 5 For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired. Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
Page 6: Table Of Contents
Table of contents Introduction ......................1-1 Contact information ......................1-1 Systems documentation ....................... 1-1 System description ....................... 1-2 Optional accessories ......................1-3 When you receive your system .................... 1-3 Inspect for damage ........................1-4 Move the shipping crate to the installation location ..............1-5 Overview of system instruments ................
Page 7 Table of contents S530 Parametric Test System Reference Manual Editing the icconfig_<QMO>.ini file ..................4-9 Using NPLCs to adjust speed and accuracy ............... 4-9 Setting the number of power line cycles .................. 4-10 Setting a custom system speed ....................4-10 NPLC default differences ......................
Page 8 S530 Parametric Test System Reference Manual Table of contents KDFtoKCS File Conversion Utility ..................6-146 System administration ...................... 6-149 System configuration: kth.ini file .................... 6-149 kptm.ini file ..........................6-150 Environment variables ......................6-152 Keithley directory environment variables ................6-154 Open interface environment variables ................... 6-154 System environment variables ....................
Page 9 Table of contents S530 Parametric Test System Reference Manual cpf_info ..........................6-227 current_slot_list ........................6-228 current_wwp_list ........................6-228 cur_wwp_list_ptr ........................6-229 display_lotdlg ........................6-229 failed_result_list ........................6-229 ktm_list ..........................6-230 ktxe_abort_logging ........................ 6-230 ktxe_cpf_mode ........................6-230 ktxe_debug..........................6-230 ktxe_disable_exec_log ......................6-230 ktxe_disable_kdf ........................
Page 10 S530 Parametric Test System Reference Manual Table of contents wwp_list..........................6-240 Advanced data pool use....................6-240 Data pool function descriptions ..................... 6-241 Example ..........................6-242 User access points (UAPs) ....................6-243 User access point usage ....................... 6-245 Types of user access points ....................6-247 UAP locations ........................
Page 11 Table of contents S530 Parametric Test System Reference Manual Client systems ........................7-26 Version control menu in KULT ................... 7-27 Automatic version control functions ..................7-27 Alternate version-control menu ....................7-27 Library Control submenu in KULT ................... 7-28 General KULT version control menu items ................7-28 Advanced KULT version control menu items ................
Page 12 S530 Parametric Test System Reference Manual Table of contents Editing existing recipes ......................8-52 Checking files into the archive ....................8-60 Reverting files to precheck-out status ..................8-61 Releasing and installing a recipe or supporting file ..............8-61 Moving recipes between sites ....................8-66 Deleting items from the local area ...................
Page 13 Table of contents S530 Parametric Test System Reference Manual The diagnostics process ....................11-1 User interface ........................11-3 Selection area ......................... 11-4 Control area ..........................11-5 Status and result area ......................11-6 Selection area tabs ......................11-7 Dashboard tab ......................... 11-7 Matrix tab ..........................
Page 14: Introduction
Section 1 Introduction In this section: Contact information ..............1-1 Systems documentation ............1-1 System description ..............1-2 Optional accessories ..............1-3 When you receive your system ..........1-3 Contact information If you have any questions after you review the information in this documentation, please contact your local Keithley Instruments office, sales partner, or distributor.
Page 15: System Description
Section 1: Introduction S530 Parametric Test System Reference Manual System description The Keithley Instruments S530 Parametric Test System is a configurable, instrument-based system for semiconductor parametric characterization and testing. There are two different S530 systems available: S530 low-current parametric test system S530 high-voltage parametric test system The S530 systems have flexible hardware configurations that allow you to customize them to your specific needs.
Page 16: Optional Accessories
S530 Parametric Test System Reference Manual Section 1: Introduction Optional accessories Optional items and accessories that may accompany the S530 system: Cables to connect to the test fixture or the probe card adapter 9139A-PCA (probe card adapter) 9139B-PCA (probe card adapter) RSA306B USB Spectrum Analyzer Advanced seismic securement kit When you receive your system...
Page 17: Inspect For Damage
Section 1: Introduction S530 Parametric Test System Reference Manual Inspect for damage The field service engineer (FSE) is responsible for unpacking the crate. If the crate is damaged when you receive it, the FSE will do a thorough inspection of each of the system components. Inspect the shock sensor on the outside of the shipping crate (see the following figure).
Page 18: Move The Shipping Crate To The Installation Location
S530 Parametric Test System Reference Manual Section 1: Introduction Move the shipping crate to the installation location We recommend that you move the crate and the accessories box to the area where the system is going to be used, but do not unpack them. The Keithley field service engineer (FSE) is responsible for unpacking the S530 system cabinet and the accessories.
Page 19: Overview Of System Instruments
Section 2 Overview of system instruments In this section: Introduction ................2-1 Switching .................. 2-2 Sourcing and measuring ............2-3 Optional instrumentation ............2-4 Introduction This section contains an overview of the instruments used in S530 test systems and examples of typical connection schemes.
Page 20: Switching
Section 2: Overview of system instruments S530 Parametric Test System Reference Manual Switching The following components provide the switching capabilities of the S530. Model 707B Switch Matrix Mainframe The 707B Semiconductor Switch Matrix Mainframe is a programmable switch for connecting signal paths in a matrix structure.
Page 21: Sourcing And Measuring
S530 Parametric Test System Reference Manual Section 2: Overview of system instruments Model 7072-HVD High-Voltage Semiconductor Matrix Card High-voltage systems may also use 7072-HVD high-voltage matrix cards to support up to 60 pin connections to the probe card adaptor (PCA). The 7072-HVD is identical to the 7072-HV card, except for additional circuitry designed to automatically discharge energy that may be accumulated in the system cables and PCA under certain test conditions.
Page 22: Optional Instrumentation
Section 2: Overview of system instruments S530 Parametric Test System Reference Manual Optional instrumentation Keithley Test Environment (KTE) version 5.8.0 supports several optional instruments: DMM7510 7½ Digit Graphical Sampling Multimeter 4200A-SCS Parameter Analyzer 4210-CVU Capacitance-Voltage Unit Card 4220-PGU High-Voltage Pulse-Generator Unit Card RSA306B USB Spectrum Analyzer For systems purchased before September 2015, a 2010 Digital Multimeter (DMM) is included instead of the DMM7510.
Page 23: Installation
Section 3 Installation In this section: Site preparation ................ 3-1 Keithley field service engineer installation tasks ...... 3-6 System connections ..............3-6 Site preparation The following topics will help you get your site ready for installation. Site preparation checklist The following site preparation checklist will help you prepare your site for the S530 system in your facility.
Page 24: Line Power Requirements
Section 3: Installation S530 Parametric Test System Reference Manual S530 system preparation checklist (continued) Floor plan Did you take future expansions into consideration? Electrical Item power Is there sufficient space for any supplies or manuals? Is adequate and proper electrical power available (see Line power requirements (on page 3-2) for specifications)?
Page 25: Operating Environment Conditions
S530 Parametric Test System Reference Manual Section 3: Installation Operating environment conditions To ensure operation within specifications, the S530 must be operated inside of the following environmental conditions. Temperature: 23 °C ±5 °C Operating humidity: 30% to 60% relative humidity, noncondensing, after a two-hour warm up time Vibration: High ambient vibration levels may require isolation pads or the repositioning of equipment Air quality: The S530 system is compatible for use in a Class 10 clean room Audible system noise: Decibel level is 65 dBA in optimal environmental conditions...
Page 26 Section 3: Installation S530 Parametric Test System Reference Manual Figure 6: S530 floor plan, top view S530-901-01 Rev. B / January 2019...
Page 27: System Cabinet Size And Weight
S530 Parametric Test System Reference Manual Section 3: Installation Figure 7: S530 weight distribution and center of gravity System cabinet size and weight The size and weight specifications for the system cabinet are listed in the following table. See Floor plan (on page 3-3) for details about designing a floor plan for the system cabinet.
Page 28: Required System Securement
Section 3: Installation S530 Parametric Test System Reference Manual Required system securement You must bolt the S530 system cabinet to the floor for safety purposes and to ensure the cabinet will not tip over. If you are in an area that has seismic activity, an optional advanced seismic securement option is available.
Page 29: Getting Started
Section 4 Getting started In this section: Initial equipment startup ............4-1 System startup ................. 4-2 System software ............... 4-2 Emergency OFF button ............4-3 Safety interlocks ............... 4-5 Prober safety ................4-6 System communications ............4-6 Editing the icconfig_<QMO>.ini file .......... 4-9 Using NPLCs to adjust speed and accuracy ......
Page 30: System Startup
Section 4: Getting started S530 Parametric Test System Reference Manual 3. Press the power/standby button on the computer and monitor. 4. Set the power button on the front door of the system cabinet to the ON position. Figure 9: S530 power ON switch System startup To start up the system: 1.
Page 31: Start The Kte Software
S530 Parametric Test System Reference Manual Section 4: Getting started Start the KTE software To start the KTE software, first start the instrument controller (IC) process. To start the IC process, log on to the computer and enter the following command: run_ic.pl The IC process must be started manually after you log on.
Page 32: Emergency Off Button
Section 4: Getting started S530 Parametric Test System Reference Manual Emergency OFF button An EMERGENCY OFF (EMO) button is on the system cabinet front door (see the following figure). If you push the EMERGENCY OFF button, it removes power to all of the system instruments except the host computer.
Page 33: Safety Interlocks
S530 Parametric Test System Reference Manual Section 4: Getting started Figure 11: S530 front-panel controls and indicators Safety interlocks Failure to make sure that the safety interlock and safety shields and guards are properly installed and arranged as indicated will put personnel in severe danger. Severe personal injury or death due to electric shock or electrocution may result.
Page 34: Prober Safety
Section 4: Getting started S530 Parametric Test System Reference Manual Once the interlock has been activated, you must clear the cause of the interlock activation. To clear the interlock activation: 1. Follow the instructions on the computer. 2. Make sure the front and rear doors are closed. 3.
Page 35 S530 Parametric Test System Reference Manual Section 4: Getting started Figure 13: S530 KTE communications diagrams 1 and 2 S530-901-01 Rev. B / January 2019...
Page 36 Section 4: Getting started S530 Parametric Test System Reference Manual Figure 14: S530 KTE communications diagram 3 S530-901-01 Rev. B / January 2019...
Page 37: Editing The Icconfig_.Ini File
S530 Parametric Test System Reference Manual Section 4: Getting started Editing the icconfig_<QMO>.ini file The $KIHOME/IC/icconfig_<QMO>.ini file is a system configuration file that defines the types of instruments installed in the S530 system, matrix and terminal configuration, and default system settings.
Page 38: Setting The Number Of Power Line Cycles
Section 4: Getting started S530 Parametric Test System Reference Manual Setting the number of power line cycles The default number of power line cycles (NPLCs) for measurements using the S530 can be set in several ways: Specify in the icconfig_<QMO>.ini file; your field service engineer (FSE) can change this from the factory default setting (see Setting a custom system speed (on page 4-10))
Page 39: Nplc Default Differences
S530 Parametric Test System Reference Manual Section 4: Getting started To set a custom default system speed mode, the FSE can add the following block to the top of the icconfig_<QMO>.ini file (example): [SYSTEM SPEED MODE] MODE=CUSTOM SOURCE_SETTLING=3 NPLC=0.01 ANALOG_FILTER=1 DELAY_FACTOR=0 If you have problems with correlation of data using the system speed settings from the factory, your FSE can add the following line to your icconfig_<QMO>.ini file to force the system to use the...
Page 40: Using Function Libraries
Section 5 Using function libraries In this section: Introduction ................5-1 The KTE Linear Parametric Test Library (LPTLib) Library ..5-2 The KTE Parametric Test Subroutine (PARLib) ....... 5-6 Introduction The Keithley line of semiconductor test systems uses function libraries to control the instruments in the system.
Page 41: The Kte Linear Parametric Test Library (Lptlib) Library
Section 5: Using function libraries S530 Parametric Test System Reference Manual The KTE Linear Parametric Test Library (LPTLib) Library The Linear Parametric Test Library (LPTLib) is one of the primary libraries that you can use with your S530 system. Following is an overview of the LPTLib commands that you can use with your system. The following tables list the LPTLib commands with a brief description of each command.
Page 42: General Commands
S530 Parametric Test System Reference Manual Section 5: Using function libraries General commands Command Description devclr Set all sources to a zero state. devint Reset all instruments and clear the system. Get last LPTLib error since devint command. getlpterr getstatus Return operating status of instrument.
Page 43: Pulse Generator Commands
Section 5: Using function libraries S530 Parametric Test System Reference Manual Pulse generator commands These commands are only compatible with systems that have 4220-PGU pulse cards. Command Description pgu_current_limit Force a voltage or current. pgu_delay Set the trigger delay time. pgu_fall Set the fall time of the pulse.
Page 44: Scope Card Commands
S530 Parametric Test System Reference Manual Section 5: Using function libraries Scope card commands These commands are only compatible with systems that include 4200-SCP2HR scope cards. Command Description scp_close Disconnect communications to the scope card. scp_detect_peaks Return frequencies in signal amplitude order. scp_init Initialize the scope card to a default state.
Page 45: Timing Commands
Section 5: Using function libraries S530 Parametric Test System Reference Manual Timing commands Command Description adelay Specify an array of delay points to use in a sweep. delay Set a user-defined delay in a test sequence (in milliseconds). disable Disable the timer. enable Initialize and start the timer.
Page 46: Software
Section 6 Software In this section: Introduction ................6-1 Keithley Test Environment system software......6-2 Creating test plans ..............6-11 Adaptive testing ..............6-92 Test execution ..............6-102 Data analysis ................ 6-129 System administration ............6-149 Data logging ................. 6-169 Keithley User Interface Library ..........
Page 47: Keithley Test Environment System Software
Section 6: Software S530 Parametric Test System Reference Manual KTE file formats (on page 6-198): Provides file structure examples for all of the files created using the KTE software. Data pool (on page 6-223): Describes the data pool which is used to hold global data while the Keithley Test Execution Engine (KTXE) is running.
Page 48 S530 Parametric Test System Reference Manual Section 6: Software The ability to create limits files that control the wafer testing depending on the test results The ability to create cassette test plans (.cpf) that tie all of the test data together into a coherent executable test plan The ability to use math expressions in test macros and conditional execution of test modules.
Page 49: Kte Process Overview
Section 6: Software S530 Parametric Test System Reference Manual KTE process overview The S530 system uses the Keithley Test Equipment (KTE) Software platform. The following figure shows a diagram of how Keithley Test Environment (KTE) software is used to create and execute a cassette plan.
Page 50 S530 Parametric Test System Reference Manual Section 6: Software All of the data files created using KTE play important roles in creating a coherent test plan. The following figure shows a diagram of the data in each file and the placement of each file when a test plan is created.
Page 51: Kte Software Tools
Section 6: Software S530 Parametric Test System Reference Manual During test plan creation, it is possible to specify the probe card file and the wafer description file in more than one place. If this occurs, the file specified in the Cassette Test Plan takes precedence over the file specified in the Wafer Test Plan.
Page 52: Kte Support Utilities
S530 Parametric Test System Reference Manual Section 6: Software KTE support utilities The following topics describe some utilities that you can use. Random pattern generation The random pattern generation (rand_pat) utility provides the ability to read in a .wdf file containing zones (patterns) and create a new .wdf file containing randomly generated patterns covering the given zones.
Page 53 Section 6: Software S530 Parametric Test System Reference Manual Where the input file zones have the following form: Figure 17: Random pattern utility input file zones The output patterns look like: Figure 18: Random pattern utility output patterns S530-901-01 Rev. B / January 2019...
Page 54: Building And Executing Tests
S530 Parametric Test System Reference Manual Section 6: Software File filtering All Keithley Test Environment (KTE) tools use a standard window to open and save files. Directories are displayed with a folder icon before the name, and read-only files are identified by a lock icon before the filename.
Page 55 Section 6: Software S530 Parametric Test System Reference Manual Figure 19: Test plan generation block diagram S530-901-01 Rev. B / January 2019 6-10...
Page 56: Creating Test Plans
S530 Parametric Test System Reference Manual Section 6: Software The Keithley Test Execution Engine (KTXE) accesses the Cassette Test Plan, which specifies the: Execution engine Probe card file Wafer description file Lot data filename Global data file Wafer test plans The cassette plan then accesses this data.
Page 57: Keithley Tool Palette
Section 6: Software S530 Parametric Test System Reference Manual Keithley tool palette The tool palette provides a point-and-click interface into the Keithley Test Environment (KTE) development environment. The tool palette for the S530 system, shown in the following figure, contains an icon for each of the test plan development and utility functions. Figure 20: Keithley tool palette After clicking an icon, the command related to that icon is displayed in the Command field and a brief description of the selected tool is displayed in the Description field.
Page 58 S530 Parametric Test System Reference Manual Section 6: Software To start the currently selected tool, click the Run button in the lower right corner of the tool palette or double-click the icon of the software tool you want to initiate. The status of the program selected is displayed directly below the Description field.
Page 59: Wafer Description Utility (Wdu)
Section 6: Software S530 Parametric Test System Reference Manual Icon only view: Removes everything from the tool palette except the icons and opens the task list. The right mouse button accesses a dialog box that lets you toggle between the icon-only view and the full view of the tool palette.
Page 60 S530 Parametric Test System Reference Manual Section 6: Software Figure 23: WDU main window Title bar: The title bar displays the filename of the current wafer description file, and the read-write status of the file. Menu bar: The menu bar contains selections used to modify the information in the main window work area.
Page 61 Section 6: Software S530 Parametric Test System Reference Manual WDU File menu Selecting File produces the menu shown in the following figure. Figure 24: WDU File menu New: Initializes a new .wdf file as either single or multiple project. Open: Opens an existing .wdf file. Import: Imports or converts a file to a .wdf file.
Page 62 S530 Parametric Test System Reference Manual Section 6: Software Check Pattern Editor Duplicates: Checks for duplicate probe pattern IDs, cross-checks the site IDs in the Probe Pattern Editor against those in the Site Editor, and checks for duplicate site locations within a pattern, all when saving the file.
Page 63 Section 6: Software S530 Parametric Test System Reference Manual Control buttons Clicking a control button performs one of the following procedures: New: Allows the selection of Single or Multi-project mode, and initializes the Wafer Description Utility (WDU) for the entry of a new .wdf file. Open: Opens an existing .wdf file.
Page 64 S530 Parametric Test System Reference Manual Section 6: Software Wafer Setup window The Wafer Setup window, shown in the following figure, is used to enter all of the wafer size, die size, site definition, and autoalign distance data. Figure 27: Wafer Setup window Control buttons Apply: Applies the wafer setup information to all other windows.
Page 65 Section 6: Software S530 Parametric Test System Reference Manual Wafer orientation buttons Pop-up windows are activated when positioning the cursor on the following selection rectangles and holding the left mouse button down. Button preceded by "Wafer has a" (flat or notch button): Select flat or notch. Orientation buttons: Specify the flat or notch position to be on the left, right, bottom, or top of the wafer in the following two categories: "In Definition"...
Page 66 S530 Parametric Test System Reference Manual Section 6: Software Target Setup window The Target Setup window shown in the following figure, sets the X,Y coordinates of the target site (die or reticle) and the direction for increases in the X,Y coordinate values. Figure 28: Target Setup window Control buttons Recalc.: Saves target information and adjusts the coordinate values of all specified sites so that the...
Page 67 Section 6: Software S530 Parametric Test System Reference Manual Probe Pattern Editor window The Probe Pattern Editor window, shown in the following figure, is used to specify site probe patterns during testing. These site probe patterns are paired with tests in the Keithley Test Plan Manager (KTPM) tool’s Wafer Plan Editor window.
Page 68 S530 Parametric Test System Reference Manual Section 6: Software Control buttons The control buttons along the top of the Probe Pattern Editor window function for both single and multiproject files: Add Patt Aft.: Adds a pattern name field to the pattern listing after the currently selected field. Add Patt Bef.: Adds a pattern name field to the pattern listing before the currently selected field.
Page 69 Section 6: Software S530 Parametric Test System Reference Manual X and Y offset fields The information in these fields differs depending on the project type selected. Single project: The X,Y offset values are based on site (die or reticle) coordinates. You specify the coordinate values through the Target Setup window.
Page 70 S530 Parametric Test System Reference Manual Section 6: Software To specify subsite X,Y coordinates: For a site that is defined as a die, specify subsite coordinates relative to the dimensional origin of the die (typically the lower left corner of the die). See the following figure. Figure 32: Subsite coordinates 0,200 for a site that is defined as a single 300 mil x 300 mil die For a site that is defined as a reticle, specify subsite coordinates relative to the dimensional origin of the reticle (typically the lower left corner of the reticle), even though the subsite may be a test...
Page 71 Section 6: Software S530 Parametric Test System Reference Manual Find Subsite Location: Opens a dialog box that lets you enter the coordinates of the subsite location you want to change. Reset Site/Subsite List: Removes all sites and subsites from the Editor window. Open .tsf: Opens the corresponding test structure file in the Test Structure Editor (TSE).
Page 72 S530 Parametric Test System Reference Manual Section 6: Software Wafer Graph Editor window The Wafer Graph Editor window, shown in the following figures, works with single-project .wdf files only. This window displays a single probe pattern at a time or all probe patterns contained in a .wdf file the Show All Patterns button is above the wafer display).
Page 73 Section 6: Software S530 Parametric Test System Reference Manual Note that in the previous figure, the graphical site display at left shows both the full reticles and the individual dies within each reticle. Large control buttons Probe All: Selects all possible sites on the wafer. Clear All: Clears all selected sites on the wafer.
Page 74 S530 Parametric Test System Reference Manual Section 6: Software Graphical editing features The wafer Graph Editor Window has the following graphical editing features. Graphical site displays In the following figure, the specific sites represented in the large pattern at left correspond to the sites inside the selection frame of the small pattern at right.
Page 75 Section 6: Software S530 Parametric Test System Reference Manual Zoom settings The Zoom settings at the far right control the size of the selection frame and the magnification of the sites displayed in the large graphical pattern. See the following figure. Figure 38: Using Zooms Controls located above the graphical site displays Next Pattern: Selects the next pattern in the Probe Pattern Editor’s sequential list of patterns to...
Page 76 S530 Parametric Test System Reference Manual Section 6: Software Figure 39: Effects of selecting Show All Patterns for a Sites are Dies Figure 40: Effects of selecting Show All Patterns for a Sites are Reticles Note that color codes distinguish the sites in the current probe pattern from the sites in other probe patterns.
Page 77 Section 6: Software S530 Parametric Test System Reference Manual Controls located below the graphical site displays Allow edge adjust: This allows the relative positioning of the die grid on the wafer to be shifted up to one die size in both the X and Y directions. Shifting the wafer outline does not affect any of the information used for the test process.
Page 78 S530 Parametric Test System Reference Manual Section 6: Software Figure 43: Scenario that results in Tgt Prb Oth (magenta) color-coded target site Tgt Prb Oth (magenta): Target-only site (not tested) in the current probe pattern, overlapping at least one other target site that is tested in another probe pattern (applicable only when Show All Patterns is selected).
Page 79 Section 6: Software S530 Parametric Test System Reference Manual Figure 45: Example of overlapping probed sites in current and non-current probe patterns Move target arrow buttons and location display The Target X and Target Y values display the target site X,Y location. The arrow buttons let you change this location in one of the following ways.
Page 80 S530 Parametric Test System Reference Manual Section 6: Software X and Y offset fields These fields list the subsite X and Y offsets within each site. The values are in mils or millimeters, depending on the units selected in the Wafer Setup window. User-Defined Values window The User-Defined Values window contains the fields shown in the following figures.
Page 81: Test Structure File Editor (Tse)
Section 6: Software S530 Parametric Test System Reference Manual In these fields, optionally enter information that you would like to be available to the Keithley Test Execution Engine (KTXE). For example, enter parameters for the user access point (UAP) code that you write.
Page 82 S530 Parametric Test System Reference Manual Section 6: Software Title bar The title bar lists the name of the currently open test structure file and the read-write status of the file. TSE File menu New: Clears the editor screen of all data. Open: Opens a currently existing test structure file.
Page 83 Section 6: Software S530 Parametric Test System Reference Manual Device list The Device List is located on the left side of the main window. It provides a list of all of the device parameters that are available for the current subsite. Clicking one of the devices listed opens that device’s parameters into the Device Data window.
Page 84 S530 Parametric Test System Reference Manual Section 6: Software 2. A device name text box opens. Enter the name of the device and click OK. To add additional devices to the current list, click the last device in the Device List and select the Add Device After icon or the menu item from the Edit menu.
Page 85: Keithley Interactive Test Tool (Kitt)
Section 6: Software S530 Parametric Test System Reference Manual Figure 51: Completed test structure file Keithley Interactive Test Tool (KITT) The Keithley Interactive Test Tool (KITT) provides a software environment that gives you immediate access to standard test libraries. KITT provides language-independent calls to create test macros and allows interactive, immediate execution of test macros and prober calls.
Page 86 S530 Parametric Test System Reference Manual Section 6: Software Figure 52: KITT main window Title bar The title bar lists the name of the currently open test macro file and the read-write status of the file. KITT File menu The File menu items let you: Start a new Keithley Test Module (KTM).
Page 87 Section 6: Software S530 Parametric Test System Reference Manual KITT View menu The View menu contains: Command Help: Opens or closes the Command Help window. This can also be done from the Help button in the parameter entry window or Keithley Interactive Test Tool (KITT) main window. Parameter Entry: Opens or closes the KITT Parameter Entry window for the presently selected test command.
Page 88 S530 Parametric Test System Reference Manual Section 6: Software The user-defined level of the error log. Whether or not the results are overwritten in the KITT results window when a test macro is run. Whether all of the results are shown in the KITT results window, or only those selected to be viewed in the Results Settings window.
Page 89 Section 6: Software S530 Parametric Test System Reference Manual This information is written into the macro file (.ktm) so future work in the Keithley Interactive Test Tool (KITT) can be continued without reentering these selections. However, the wafer files, probe card files, and global data files used in production runs by the execution engine are specified in the wafer plan and cassette plan editors.
Page 90 S530 Parametric Test System Reference Manual Section 6: Software Prober The Prober displays the name of the currently configured prober driver. You can toggle between Fake and Real Prober by clicking the Prober selection box. The commands supported by the currently configured prober driver will be displayed in the Commands box when Prober Library is selected under the Libraries menu.
Page 91 Section 6: Software S530 Parametric Test System Reference Manual Division ‘/’ Parentheses ‘(‘ and ‘)’ The parentheses ‘(’ and ‘)’ operators may be used to define precedence of the math operations int abs(int val); abs() returns the absolute value of its int operand double fabs(double x);...
Page 92 S530 Parametric Test System Reference Manual Section 6: Software Restrictions Operators are not valid with parameter set identifiers. Parameters with operators will not be saved in parameter sets. Variable must not be named with a digit and an E or e as the last two characters. For example: The variable name foo2e is invalid.
Page 93 Section 6: Software S530 Parametric Test System Reference Manual Restrictions There are some minor restrictions on result array assignment notation. No nested array notation and no complex math expressions are allowed as index expressions. The following list of examples should help explain. Supported: gdfArray[1] = function() pdiArray[x + 2] = function()
Page 94 S530 Parametric Test System Reference Manual Section 6: Software Array as Output In the following example, result_array is an output parameter and number_of_elements_in_array is input parameter. TestSweep(param1, param2, result_array, number_of_elements_in_array) This is already supported in version 3.2 and later. Array as Input In the following example, result_array and number_of_elements_in_array are input parameters.
Page 95 Section 6: Software S530 Parametric Test System Reference Manual Restrictions When using the if statement, the open and close braces must be used and they must be on separate lines. Example: if (a > b) value = 4 else value = 0 Nesting is supported up to 32 levels.
Page 96 S530 Parametric Test System Reference Manual Section 6: Software Selecting a parameter set in the Keithley Interactive Test Tool (KITT) Parameter Entry window places the parameter set data identifiers in all symbolic value fields that have a matching parameter. If a parameter's symbolic value field contains test structure data and a parameter set contains a matching parameter, the parameter set data identifier will replace the test structure data identifier in the field.
Page 97 Section 6: Software S530 Parametric Test System Reference Manual Data sources The following data sources are used in the Keithley Test Environment (KTE). Local predefined identifiers A local predefined identifier (PDI) is a value local to a Keithley test module (KTM). A local PDI is highest in the data precedence.
Page 98 S530 Parametric Test System Reference Manual Section 6: Software KTXE supports loading of multiple global data files. Can be used to change execution behavior of KTXE. User access points (UAPs) can access this data. Global predefined identifiers A global predefined data identifier (PDI) value is available to the defining Keithley test module (KTM).
Page 99: Parameter Set Editor (Pse)
Section 6: Software S530 Parametric Test System Reference Manual nvth5x10 = vth_ext(p9,p11,p13,p24,0.1,0.0,2.0,1e-6,100, lope_5x10) KTM: calc.ktm deltaw(slope_5x20, 20, slope_5x10, 10, result) Use of ibupu functions in the Keithley Interactive Test Tool In the Keithley User Library Tool (KULT) user library routines, the ibupu() functions are called using the following syntax: ibupu(unit, IBUPU_CLEAR, slot) ibupu(unit, IBUPU_DEFINE, slot, tad, lad, sad, rmd, eod, wmd)
Page 100 S530 Parametric Test System Reference Manual Section 6: Software PSE main window There are two main areas of the Parameter Set Editor (PSE), shown in the following figure. The Library Browser: Allows you to navigate through a directory tree of available user libraries and modules to select the parameter data you want.
Page 101 Section 6: Software S530 Parametric Test System Reference Manual PSE Edit menu The Parameter Set Editor (PSE) Edit menu contains the following items: Cut: Removes highlighted text, which can be restored to a new location using the Paste function. Copy: Copies highlighted text, which can be placed in a new location using the Paste function. Paste: Places cut or copied text in a new location.
Page 102: Keithley User Library Tool (Kult)
S530 Parametric Test System Reference Manual Section 6: Software The first column displays the parameter set name. If the library has defaults set for any parameters, the parameter set name Defaults will displayed in the first column with the values in the appropriate field.
Page 103 Section 6: Software S530 Parametric Test System Reference Manual KULT libraries are created to allow for easy and quick extensions to the capabilities of the parameter test routines (PAR), prober drivers, and the production test execution engine (KTXE). Once a user library is developed, it is available for test macro development in the Keithley Interactive Test Tool (KITT).
Page 104 S530 Parametric Test System Reference Manual Section 6: Software Title bar The title bar lists the name of the currently open library module and the read-write status of the file. KULT File menu The File menu shown in the following figure contains the following items: New Library: Produces the new library name dialog box and initializes the new library.
Page 105 Section 6: Software S530 Parametric Test System Reference Manual KULT Edit menu The Edit menu shown in the following figure contains file-editing functions. The edit options are: Cut: Removes highlighted text, which can be restored to a new location using the Paste function. Copy: Copies highlighted text, which can be placed in a new location using the Paste function.
Page 106 S530 Parametric Test System Reference Manual Section 6: Software KULT View menu The View menu lets you display or conceal the parameter box or the description box. See the following figure for the View menu options. Figure 59: KULT view menu KULT Options menu The Options menu shown in the following figure contains the following functions: Compile: Compiles source files into object files and checks for errors in the module.
Page 107 Section 6: Software S530 Parametric Test System Reference Manual Module identification area The module identification area is located directly below the menu bar and defines the active library and module. The components of this area are: Library Name: Defines the active library. Module Name: Defines the active module.
Page 108 S530 Parametric Test System Reference Manual Section 6: Software The Parameter window components are: Parameter definition area Include files area Control button area Figure 61: Parameter window Parameter definition area The parameter definition area is the primary function of the Parameter window. The parameter definition area defines the Parameter Name, Data Type, and I/O field for all data included in the module call.
Page 109 Section 6: Software S530 Parametric Test System Reference Manual long: 32-bit integer data long*: Pointer to 32-bit integer data F_ARRAY_T: Float array type I_ARRAY_T: Integer array type D_ARRAY_T: Double-precision array type I/O field The I/O field defines whether the parameter is an input or output type. Clicking the arrow to the right of the I/O field activates a pop-up menu that shows the input and output selections.
Page 110 S530 Parametric Test System Reference Manual Section 6: Software Description window The Description window, shown in the following figure, is located at the bottom of the Keithley User Library Tool (KULT) screen. Information entered in this window is for module documentation and Keithley Interactive Test Tool (KITT) user library help.
Page 111 Section 6: Software S530 Parametric Test System Reference Manual When cutting, copying, and pasting between the main window and the Description window, remember to use the Cut or Copy command from the window that contains the text, and the Paste command from the window where the text is being placed.
Page 112 S530 Parametric Test System Reference Manual Section 6: Software Command line interface The Keithley User Library Tool (KULT) command-line interface lets you load, build, or delete libraries and add or delete modules from the command line. The format for command line instruction is: kult subcommand [options] [filename...] The subcommands are listed in the following table.
Page 113 Section 6: Software S530 Parametric Test System Reference Manual Example The following is an example of how to use the command line to create a new library, add an existing module to the library, and then build the new library. This need can occur when you want to add a usrlib module from another facility or project to the current project.
Page 114 S530 Parametric Test System Reference Manual Section 6: Software > ls ~/libfiles/*.c file1.c file2.c file3.c > kult_copy_lib -lmy_lib2 -d~/libfiles file1.c file3.c Library "my_lib2" was created! module file1 added to library my_lib2 module file3 added to library my_lib2 Library my_lib2 built. done.
Page 115 Section 6: Software S530 Parametric Test System Reference Manual 2. The S530 uses SMUs, not VIMS. As a result, any references to VIMS need to be changed to SMU. 3. The S530 LPTLib library returns data as "double" instead of "float." Your usrlib modules may need to be modified to support double data types instead of float.
Page 116 S530 Parametric Test System Reference Manual Section 6: Software When a module is opened, a lock file is created at $KI_KULT_PATH/"libname"/lock in the following manner: The lock file is named X - Y .lck, where X is the library name and Y is the module name. The following information is contained in the lockfile: PID:**** The processor ID USER:**** User name...
Page 117 Section 6: Software S530 Parametric Test System Reference Manual Using the command line, enter the following: kult bld_lib -l<library_name> -hide To make a user library visible in KITT, use either of the following methods. To make a user library visible using the KULT window: 1.
Page 118 S530 Parametric Test System Reference Manual Section 6: Software Setting library availability at UAPs Some libraries that you create may contain modules that do not work in user access points (UAPs). The UAP Library toggle, when deselected, and the - nouap command-line option make these libraries unavailable at UAPs and in the Keithley Test Plan Manager (KTPM).
Page 119 Section 6: Software S530 Parametric Test System Reference Manual LIBRARY reader locks for KTXE, KSOX, and KITT LIBRARY reader locks for Keithley Test Execution Engine (KTXE), Keithley Sequential Executor (KSOX), and Keithley Interactive Test Tool (KITT). These locks are set when a process opens the library for use.
Page 120: Limits File Editor (Lfe)
S530 Parametric Test System Reference Manual Section 6: Software KULT checks for the presence of any reader locks before attempting a build library operation. If a read lock exists, a warning message is displayed and the library build does not occur. KULT creates a write lock before the build operation starts.
Page 121 Section 6: Software S530 Parametric Test System Reference Manual LFE data is also used by the Keithley Summary Utility (KSU) and the Lot Summary program to create reports. These reports show the acquired data compared against the Valid, Spec, Ctrl, and Engr limit pairs.
Page 122 S530 Parametric Test System Reference Manual Section 6: Software The following paragraphs contain a brief overview of each menu. LFE File menu You can use the File menu to do the following tasks: Reinitialize the main window (new) Load or save limits files Delete limit files Generate limits from Keithley Test Macros (KTM) files Set a limit as the default limit...
Page 123 Section 6: Software S530 Parametric Test System Reference Manual The ID uniquely identifies each test parameter. This entry must be a legal C language name. The string may contain a maximum of 128 characters. This field is required. Name The name field provides for a descriptive name that describes the parameter more clearly than the ID. The data in this field is used by the Keithley Summary Utility (KSU).
Page 124 S530 Parametric Test System Reference Manual Section 6: Software Abort Limit The Abort Limit field specifies the limits to use for the Abort Action results comparison in the execution engine. If an abort flag is triggered by the measured value, the sequencer loops to the sequencer level specified by the Abort Action field.
Page 125: Keithley Test Plan Manager (Ktpm)
Section 6: Software S530 Parametric Test System Reference Manual Limits Editor Dialog window The Limits Editor Dialog window displays all of the elements for a parameter, one parameter at a time, as shown in the following figure. A single parameter in the spreadsheet format is one row. The parameter that appears in this window is the parameter that is highlighted in the main window.
Page 126 S530 Parametric Test System Reference Manual Section 6: Software Wafer plan builder The Wafer Plan Builder is used to create a wafer-testing plan. The most important function performed in the wafer plan builder is the binding of tests to wafer probe patterns. This can be simplified for many wafer plans by using the feature of grouping test macros into site plans.
Page 127 Section 6: Software S530 Parametric Test System Reference Manual Figure 68: Wafer plan builder Title bar The title bar lists the name of the currently open wafer plan file and the read-write status of the file. Wafer plan builder File menu The File menu contains the following selections: New: Clears the Wafer Plan Builder main screen to prepare for creating a new wafer plan file.
Page 128 S530 Parametric Test System Reference Manual Section 6: Software Wafer plan builder Help menu The Help menu provides online help and release version information about the wafer plan builder. The Documentation option allows access to the online Keithley Test Plan Manager (KTPM) manual. The About option displays the software revision information.
Page 129 Section 6: Software S530 Parametric Test System Reference Manual Sort subsites button When this button is selected, the subsites are sorted for testing by their increasing X-axis and Y-axis values. When this button is not selected, the subsites are tested in the order they appear on the subsite list.
Page 130 S530 Parametric Test System Reference Manual Section 6: Software New site plan button This button appears when the plan type selection button is set to Site Plan. Clicking this button opens a dialog box that lets you enter the name and description of a new site plan. Once a site plan description is entered and a site plan is formed, it cannot be viewed or edited in the wafer plan editor, and will only appear in the .wpf file whenever the site plan is used in that .wpf.
Page 131 Section 6: Software S530 Parametric Test System Reference Manual Figure 70: Cassette plan builder Title bar The title bar lists the name of the currently open cassette plan file and the read-write status of the file. Cassette plan builder File menu The File menu contains the following selections: New: Clears the cassette plan builder main screen to create a new cassette plan file.
Page 132 S530 Parametric Test System Reference Manual Section 6: Software Cassette plan builder Options menu The Options menu contains the following selections: Wafer Plan Editor: Opens the wafer plan editor window, allowing you to create or modify a wafer plan. Test Documentation Tool: Opens the Test Documentation Tool, allowing you to view the cassette plan as it will be executed by the selected execution engine.
Page 133 Section 6: Software S530 Parametric Test System Reference Manual Figure 71: Wafer plan entry warning box Lot ID data field This is an optional field that lets you identify the lot that will be tested. This data is used as the default if none is specified at run time by the operator or shop floor control system.
Page 134 S530 Parametric Test System Reference Manual Section 6: Software Test documentation tool The test documentation tool is used to view the test that will be performed by the cassette plan file specified in the Keithley Test Plan Manager (KTPM). The tool provides a report that shows each user access point (UAP) and .ktm file that is executed, in the order of execution for all wafers, sites, and subsites.
Page 135 Section 6: Software S530 Parametric Test System Reference Manual File menu The File menu contains the following selections: Save As: Saves the information to a new file. Print: Provides a complete printout of the report. Exit: Exits the Test Documentation Tool. Help menu The Help menu provides online help and release version information about the Test Documentation Tool.
Page 136 S530 Parametric Test System Reference Manual Section 6: Software Display toggle This toggle button is used to enable or disable displaying the test plan sequence report after the report has been created. A printout of the report can be created even if the report is not displayed on screen.
Page 137: Adaptive Testing
Section 6: Software S530 Parametric Test System Reference Manual Enable or disable the appropriate options for your report and press the Create Report button. The system creates and displays the execution report in the display window. From this window you can review your cassette plan to ensure that the test plan will perform the tests in the proper sequence.
Page 138 S530 Parametric Test System Reference Manual Section 6: Software Zone-based test modes Zone-based testing can be initiated using two different methods. The first method, described below, is a command line switch for use with the Keithley Test Execution Engine (KTXE). The second method, (on page 6-96), is with the use of the KTXE_RP_test_mode described under Global data variables...
Page 139 Section 6: Software S530 Parametric Test System Reference Manual KTXE_RP user library Zone-based testing is accomplished with the use of calls to the user library KTXE_RP at various user access points (UAPs). The following routines are included in the KTXE_RP user library. For more information about the commands in this user library, see the Keithley Test Environment (KTE) Programmer's Manual (part number S500-904-01).
Page 140: Result-Based Testing
S530 Parametric Test System Reference Manual Section 6: Software KTXE_RP_test_mode: This global data variable allows for all tests executed by the Keithley Test Execution Engine (KTXE) to be conducted using one of the zone-based testing modes. This has the same effect as using the four options for the command line argument -u. If you use KTXE_RP_test_mode to define the test mode, remove any KTXE_RP_GetUserArgs from the user access point (UAP) list.
Page 141 Section 6: Software S530 Parametric Test System Reference Manual Result-based test modes There are four test modes available for use with result based testing. These four modes operate as follows: Alternate Sites on Current Wafer: When testing on the current site fails, an additional alternate site is tested when the current site is completed.
Page 142 S530 Parametric Test System Reference Manual Section 6: Software KTXE_AT_limit_code: This variable defines which specific limit is used for a critical parameter. The following values are used to determine which limit is used: Value Limit used Valid Spec Control Engineering KTXE_AT_alternate_test_class: This variable defines the class of extra tests to be enabled when a site fails.
Page 143 Section 6: Software S530 Parametric Test System Reference Manual General procedure for result-based testing The following is a general procedure for setting up an existing cassette plan to use result-based testing. This procedure assumes that a cassette plan file has already been created using the tests to be included.
Page 144 S530 Parametric Test System Reference Manual Section 6: Software After all the component files have been set up, the test is set up as normal with the Keithley Test Plan Manager (KTPM). The only exception is that the appropriate global data files (GDF) and user access point (UAP) files must be added to the test plan.
Page 145 Section 6: Software S530 Parametric Test System Reference Manual In addition to specifying the critical parameters, the additional tests must also be specified. These are specified by setting the eClass of the parameter to the value defined in the global data item KTXE_AT_alternate_test_class.
Page 146: Installation Of Adaptive Testing User Libraries
S530 Parametric Test System Reference Manual Section 6: Software KTXE_AT user library Result-based testing is accomplished with the use of calls to the user library KTXE_AT at various user access points (UAPs). The following routines are included in the KTXE_AT user library. For more information about the commands in this user library, see the Keithley Test Environment (KTE) Programmer's Manual (part number S500-904-01).
Page 147: Installation Of Demonstration Files
Section 6: Software S530 Parametric Test System Reference Manual Installation of demonstration files Keithley has provided a collection of demonstration files for zone and result-based testing. To install these files, execute the script KTXE_RP_demo_install for zone-based files and KTXE_AT_demo_install for result-based files. These scripts will copy the files for these demos to the current projects directories.
Page 148: Keithley Operator Interface Editor (Koped)
S530 Parametric Test System Reference Manual Section 6: Software This section describes the tools required to execute a completed test plan. In this section, the following will be discussed: Keithley Operator Interface Editor (KOPED): How to create a series of test processes that can be activated from the Keithley Operator Interface (KOP).
Page 149 Section 6: Software S530 Parametric Test System Reference Manual Figure 75: KOPED main window KOPED File menu The Keithley Operator Interface Editor (KOPED) File menu contains the following selections: New: Clears the KOPED main window to create a new initialization file. Open: Opens an existing initialization file.
Page 150: Keithley Test Execution Engine (Ktxe)
S530 Parametric Test System Reference Manual Section 6: Software KOPED Help menu The Keithley Operator Interface Editor (KOPED) Help menu provides online help and KOPED version information. The Documentation option allows access to online Help. The About option displays the release version.
Page 151 Section 6: Software S530 Parametric Test System Reference Manual Limit Id data field: This field is used by the operator to enter the limit file that will be used during testing. System Id data field: This field is used to identify the system that is running the test. Test Station field: This field is used to select the test station that the test will be run on.
Page 152 S530 Parametric Test System Reference Manual Section 6: Software Test execution from KTXE It is also possible to execute your cassette plan by directly accessing the Keithley Test Execution Engine (KTXE). 1. Start KTXE from the command line by entering the following: ktxe -cpf fname.cpf where fname.cpf is the name of the cassette plan.
Page 153 Section 6: Software S530 Parametric Test System Reference Manual Command-line options for KTXE The following is a listing of all the command-line options that can be entered when starting the Keithley Test Execution Engine (KTXE). Switch Type Description text Lot information comment field; this switch can be used to add comment text to the lot header.
Page 154 S530 Parametric Test System Reference Manual Section 6: Software Switch Type Description n [fname] Error reporting mode n: 0 through 3  (numeric) 0: None (valid filename and path)  1: Display messages  2: Log messages  3: Display and log message n [fname] Event reporting mode n: 0 through 3 ...
Page 155 Section 6: Software S530 Parametric Test System Reference Manual Switch Type Description text User argument; this switch can be used for additional user command-line arguments (command-line arguments are concatenated to the switch argument until the next switch occurs) fname Wafer description filename; this switch will specify the wafer description file to use for processing test (valid filename and path) data;...
Page 156 S530 Parametric Test System Reference Manual Section 6: Software The execution process Once test execution has begun, the execution engine begins working its way through the cassette plan you specified. The Keithley Test Execution Engine (KTXE) uses the engine you selected for your cassette plan as the format for how KTXE will proceed when accessing and executing the data files specified in the cassette plan file.
Page 157 Section 6: Software S530 Parametric Test System Reference Manual The execution engine begins at the cassette level, gathering cassette information and collecting lot and prober information. The engine then moves on to the wafer level. Here, the engine loads all the data specified in the wafer plan.
Page 158 S530 Parametric Test System Reference Manual Section 6: Software UAP_CASSETTE_LOAD Check for empty slot list. Exit if empty. Collect any additional lot related information at this user access point (UAP) before displaying lot dialog screen to operator. UAP_LOT_INFO Display Lot dialog screen and gather information from the operator. Display status dialog on the screen.
Page 159 Section 6: Software S530 Parametric Test System Reference Manual If "ALL" mode "where All Mode means test ALL WAFERS" Build a slot list using all available wafers in cassette. If "Relative" Mode find the nth slot with a wafer in cassette. If no more wafers are found unprobed, no errors are generated.
Page 160 S530 Parametric Test System Reference Manual Section 6: Software UAP_POST_LOT_INFO This UAP may be used to add tag data to the lot file before the first wafer is tested. Do we skip the first wafer? Reload from data pool in case a UAP modified the value. This data pool value can be set for probers that need the first wafer manually loaded.
Page 161 Section 6: Software S530 Parametric Test System Reference Manual UAP_WAFER_PREPARE Get wafer plan name from the slot list entry. Keep count of wafers defined in cassette wafers_tested++. Determine if the previous wafer plan is the same as the current wafer plan. If the previous wafer had the same wpf, do not reload the working wafer plan (WWP), test enable all tests in WWP since there may have been a previous abort.
Page 162 S530 Parametric Test System Reference Manual Section 6: Software UAP_SITE_CHANGE Write site data to LOT file. Move probe chuck to the test subsite if changed. Raise the chuck to make contact with pins. UAP_SUBSITE_CHANGE Save copy of this subsite as the prev or last subsite. UAP_TEST_BEGIN Execute the Keithley test module (KTM).
Page 163 Section 6: Software S530 Parametric Test System Reference Manual UAP_SITE_END increment to next test. Update "current_wwp_list" data pool value with new entry. END LOOP: (Execute only tests that are enabled in wafer plan) Do a Prober PrRelReturn to clean up for the next wafer. Call EndSite to close up KDF file.
Page 164 S530 Parametric Test System Reference Manual Section 6: Software UAP_ALIGN_ERROR If cassette is complete... Clean up the working wafer plan (WWP) list else Advance to next slot in slot list. If no more slots, or next slot uses different Wafer Plan: Clean up the WWP list Set flag saying different WPF for next slot else...
Page 165 Section 6: Software S530 Parametric Test System Reference Manual UAP_ABORT_EXIT_HDLR At UAP_ABORT_EXIT_HDLR, KUI functions may not be used to display information. An external program may be used to check Keithley Test Execution Engine (KTXE) exit status and prompt with a GUI if necessary. void KTXEAbortExitHdlrStub() We only want to do this if we abort...
Page 166 S530 Parametric Test System Reference Manual Section 6: Software User library files required for KTXE execution During Keithley Test Execution Engine (KTXE) execution, not all user library files are required to be on a tester. If a file server is used to store and develop user libraries, it may be convenient to only copy the files needed for executing tests.
Page 167 Section 6: Software S530 Parametric Test System Reference Manual The KTXE ErrorHandler function The Keithley Test Execution Engine ErrorHandler function will output additional information to you. A data pool item, ktxe_error_gui, can be set by you and will have the following effect: If ktxe_error_gui is set to 1: The operator will be prompted with a choice of continuing with the error or aborting the test program.
Page 168 S530 Parametric Test System Reference Manual Section 6: Software An example of an event log is shown in the following figure. Figure 79: Event log window Lot suspend and resume When the Abort button is pressed on the Status Dialog window, the operator can abort immediately, suspend, or cancel.
Page 169 Section 6: Software S530 Parametric Test System Reference Manual Multicassette Multilot Testing Utility The multicassette multilot Keithley Test Execution Engine (KTXE) launcher (multi_cassette) utility will collect the standard lot dialog information for one to four cassettes to be tested. For each lot the wafer ids for each wafer may be entered. After all data is available, the cassettes will be tested without further information from the operator.
Page 170 S530 Parametric Test System Reference Manual Section 6: Software Limits checking After the Keithley Test Execution Engine (KTXE) executes a test macro at a subsite, it checks all the results against the limits specified in the limits file. For each result, the acceptable range is determined using the specified abort limit for that result.
Page 171 Section 6: Software S530 Parametric Test System Reference Manual In the include files section in the KULT parameter window, append: #include "COM_usrlib.h" #include "ktxe_types.h" In the KULT main window, type code similar to the following: int abort; /* get the abort flag from the data pool */ abort = *(int *) dpGetPointer("abort_level", INT_P);...
Page 172 S530 Parametric Test System Reference Manual Section 6: Software If the failed results information in the event log is not sufficient, you also have access to the failed results linked list at UAP_HANDLE_ABORT. The structure for a node of the linked list (defined in ktxe_types.h) is: typedef struct _failed_result_list char...
Page 173 Section 6: Software S530 Parametric Test System Reference Manual The following are notes about the abort action flag and the failed results linked list: The user access point UAP_HANDLE_ABORT is encountered after the execution of every test (for example, a Keithley test module). Therefore, the abort flag and the failed results list are created for each test.
Page 174: Data Analysis
S530 Parametric Test System Reference Manual Section 6: Software result_list typedef struct _result_list char id[PARAM_ID_LENGTH]; float value; log; /* True or False Flag to determine if the result is logged*/ user; /* True or False Flag for User Data Logging */ struct _result_list *next;...
Page 175: Preview
Section 6: Software S530 Parametric Test System Reference Manual Preview This section describes in detail the Keithley Summary Utility (KSU) interface including menu options, controls, and report formats. KSU takes measurement data from a Keithley data file (.kdf) and applies limits from a Keithley limits file (.klf) to create a report with summary statistics. Keithley Summary Utility (KSU) The Keithley Summary Utility (KSU) takes parameter information and measured data from a Keithley data file (.kdf) and applies limits from a Keithley limits file (.klf) to create a report with summary...
Page 176 S530 Parametric Test System Reference Manual Section 6: Software If a test is aborted, all data gathered up to and including the last test performed is recorded in the .kdf file. This means that the summary reflects the abort data, and out-of-range values are flagged to show that they meet the criteria required to abort, as specified in the limits file.
Page 177 Section 6: Software S530 Parametric Test System Reference Manual SpecL and SpecH Specification constraints from the limits file. These values let you quickly identify data points that are out of range. If no limits file is specified, they default to -1.00e+15 and 1.00e+15, respectively. Mean The mean for each parameter is calculated from the data of all test sites.
Page 178 S530 Parametric Test System Reference Manual Section 6: Software 3. The relative information for the other data points in the parameter or test can be found by reading down the column until the mean, minimum, and maximum are found. The following figure is a raw report generated from the same .kdf file as the standard report shown in the previous figure.
Page 179 Section 6: Software S530 Parametric Test System Reference Manual After activating KSU, the KSU main window, shown in the following figure is displayed. Figure 83: KSU main window KSU main window The Keithley Summary Utility (KSU) main window menu bar contains the following selections: File menu View menu Options menu...
Page 180 S530 Parametric Test System Reference Manual Section 6: Software Figure 84: KSU file menu KSU lot browser window The Lot Browser window, shown in the following figure, is displayed when you select Open from the File menu. Figure 85: KSU lot browser window S530-901-01 Rev.
Page 181 Section 6: Software S530 Parametric Test System Reference Manual The lot browser allows data entry in all of the provided fields. These fields are defined in the .kdf file, and only those defined are available to the lot browser search fields. Undefined fields appear blank. The lot browser search fields support the asterisk (*) and question mark (?) standard wildcard characters.
Page 182 S530 Parametric Test System Reference Manual Section 6: Software Print menu When the Print option in the File menu is selected, the menu shown in the following figure is displayed with the following options: Text: Prints to non-postscript printers according to formatting data in the print setup. PostScript: Prints to postscript printers according to formatting data in the print setup.
Page 183 Section 6: Software S530 Parametric Test System Reference Manual 2. Select the page options:  Paper Type  Paper Width  Paper Height The width and height of the paper can only be changed if a paper type of Other is selected. ...
Page 184 S530 Parametric Test System Reference Manual Section 6: Software Options menu The Options menu shown in the following figure contains the following selections: Figure 88: KSU options menu Limit File: Select a limit file to apply to the Keithley Summary Utility (KSU). Limit Type: Choose specific limits from the chosen limits file (see the following figure).
Page 185 Section 6: Software S530 Parametric Test System Reference Manual Set Delimiter: Choose a delimiter to apply when the KSU file is exported using the Export option. Figure 90: Set delimiter menu All Param: Include all available parameters in the KSU report. Raw Report: Access all information contained in the selected lot file.
Page 186 S530 Parametric Test System Reference Manual Section 6: Software Other KSU main window controls The Keithley Summary Utility (KSU) main window contains the following control selections. Figure 91: Control selections Create Report: Initiate KSU report generation using the selected parameters. All Params: Include all available data file information in the KSU report.
Page 187 Section 6: Software S530 Parametric Test System Reference Manual Command-line options for KSU The following list contains the command-line options that can be entered when starting the Keithley Summary Utility (KSU). -a Report on all parameters, even if they are not in the limits file. -c Disable the graphical user interface (GUI) (use the lotsummary interface).
Page 188: Keithley Curve Analysis Tool (Kcat)
S530 Parametric Test System Reference Manual Section 6: Software Keithley Curve Analysis Tool (KCAT) The following topics describe the windows and features associated with the Keithley Curve Analysis Tool (KCAT). The main function of KCAT is to graph results data and calculate slopes, intercepts, and tangents on the resulting curves.
Page 189 Section 6: Software S530 Parametric Test System Reference Manual Menu bar The menu bar contains the following menus: File: Load, save, or print Keithley plot files, and exit the Keithley Curve Analysis Tool (KCAT). Edit: Customize the X and Y axis labels. View: Display the full KCAT main window, show the KCAT Data window, and the KCAT Scaling window.
Page 190 S530 Parametric Test System Reference Manual Section 6: Software Scaling window The Scaling window, shown in the following figure, lets you manipulate the graph by turning selecting the following options or scaling the range of the axes. Log: Change either the X axis data or the Y axis data to the logarithmic equivalent. Invert: Invert either the X axis data or the Y axis data.
Page 191: Kdftokcs File Conversion Utility
Section 6: Software S530 Parametric Test System Reference Manual Data window The Data window contains a listing of all the data points associated with the present graph. Figure 94: Data window Pop-up tools menu The pop-up tools menu contains a listing of all of the tools in the tool bar. It is accessed by pressing the center mouse button when the cursor is anywhere over the graph area.
Page 192 S530 Parametric Test System Reference Manual Section 6: Software Syntax of command: KDFtoKCS [-c category][-f substitution_string][-h] [-l limit_file][-o outfile][-p] kdf Where: category = The limits category of interest substitution_string = An optional string to be substituted into the .kcs file wherever the data value is invalid limit_file = The name of an appropriate Keithley Limits File (.klf) outfile = The name of the intended output .kcs file...
Page 193 Section 6: Software S530 Parametric Test System Reference Manual -osets = The output .kcs file name. -puses = The parameters as they appear in the .klf file (default is to get the parameters from the first site entry in the .kdf file). Example Given the following .kdf and .klf files: 4 lotData1.kdf...
Page 194: System Administration
S530 Parametric Test System Reference Manual Section 6: Software The extension was changed from .kcs to .csv so that Excel can recognize the format. System administration The following topics discuss setting up and using the Keithley Test Environment (KTE) software for use with the KTE system.
Page 195: Kptm.ini File
Section 6: Software S530 Parametric Test System Reference Manual When you make changes that you do not want other users to be affected by, copy the kth.ini file from $KIHOME to your present or login directory and edit it there. For example, assume you want to modify the Summary Report Generator <SUM>...
Page 196 S530 Parametric Test System Reference Manual Section 6: Software UAP7 = UAP_POST_PROBER_INIT # before writing lot information UAP8 = UAP_WRITE_LOT_INFO # write usertag data after LOT header UAP9 = UAP_POST_LOT_INFO # after a wafer load and the wafer is rejected UAP10 = UAP_WAFERLOAD_STATUS # error recovery after wafer alignment UAP11 = UAP_ALIGN_ERROR...
Page 197: Environment Variables
Section 6: Software S530 Parametric Test System Reference Manual The ktpm.ini file searches through the different directories for the data associated with each UAP in the following order: $KI_KTXE_CPF $KIHOME $HOME To modify the ktpm.ini file, use textedit or any other ASCII text editor program. Environment variables The following list contains the environment variables used by the Keithley Test Environment (KTE) tools and execution engines.
Page 198 S530 Parametric Test System Reference Manual Section 6: Software WPE (part of KTPM) Open: Uses $KI_KTXE_WPF Wafer Desc: Uses $KI_KTXE_WDF Limits: Uses $KI_KTXE_KLF Probe Card: Uses $KI_KTXE_PCF Keithley Interactive Test Tool (KITT) Open: Uses $KI_KTXE_KTM Wafer Desc: Uses $KI_KTXE_WDF Global Data: Uses $KI_KTXE_GDF Probe Card: Uses $KI_KTXE_PCF Test Structure: Uses $KI_KTXE_TSF Parameter Set: Uses $KI_KTXE_PSF...
Page 199: Keithley Directory Environment Variables
Section 6: Software S530 Parametric Test System Reference Manual Keithley Operator Interface (KOP) .ini file load: Uses $KIDAT The Keithley startup and login files define the environment variables shown in the following tables. It is good programming practice to use these variables whenever possible. This allows you to move the location of the Keithley directory tree without affecting your programs and scripts.
Page 200: System Environment Variables
S530 Parametric Test System Reference Manual Section 6: Software System environment variables Variable Definition Meaning KI_SYSTEM System name string KI_PRB_CONFIG ${KIDAT}/prbconfig_xxx Prober configuration for x.dat system KI_CONFIGURATION ${KIDAT}/acconfig_QMO. Configuration file for system KI_KUI_CLASSIC Default state Undefined. Set Provides a way to use to 1 to use old-style Keithley existing KUI.
Page 201: Diagnostics Environment Variables
Section 6: Software S530 Parametric Test System Reference Manual Diagnostics environment variables Variable Definition Meaning KI_PLATFORM S530, S535, or S540 Platform type. KI_DIAGTOOLS_CONFIG ${KIHOME}/dat Configuration file. KI_DIAGTOOLS_LOG ${KIHOME}/log Log output file. User library tool environment variables Variable Definition Meaning KI_KULT_PATH ${KIHOME}/usrlib Location of user libraries.
Page 202: Log File Environment Variables
S530 Parametric Test System Reference Manual Section 6: Software Log file environment variables Variable Definition Meaning KI_KTXE_ERROR_LOG Defined by user Keithley Test Execution Engine (KTXE) error log file location. KI_KTXE_EVENT_LOG Defined by user KTXE event log file location. KI_KTXE_DEBUG_LOG KTXE debug log file location KI_PRB_AUDIT_LOG Defined by user...
Page 203 Section 6: Software S530 Parametric Test System Reference Manual Using log file environment variables Classification of errors: Prober Errors: Recover if possible. Notify, user abortable, logable. LPT Errors: No recovery. Logable, abort on fatal errors. Data Logging Errors: Notify and abort, logable. Engine Data Errors: Non-fatal: Notify and continue, logable.
Page 204: File Management
S530 Parametric Test System Reference Manual Section 6: Software File management The system disk on the Keithley Test Environment (KTE) system contains the standard operating system partitions /, /user, and /home. All of the KTE software is located under the /opt/ki path. The following is a list of all of the directories located under the /opt/ki/ path: bin: Keithley executable files and shell scripts.
Page 205: Keithley Component Manager (Kcm) Utility Description
Section 6: Software S530 Parametric Test System Reference Manual Keithley Component Manager (KCM) utility description Use the Keithley Component Manager (KCM) utility to package and transfer test plans from one location to another. This utility selects all files required by the test plan and places them into a *.tar file.
Page 206 S530 Parametric Test System Reference Manual Section 6: Software The script prompts for each of these possibilities and creates the directories as necessary. In the case of the usrlib directory, the original KIHOME/usrlib directory is copied to the new location. The following example creates a new project named dev1Area, and the tree root of the project is placed in /kte/ProjectTree.
Page 207 Section 6: Software S530 Parametric Test System Reference Manual The process used by the select_project script sets the following environment variables: KIPROJ: Points to the base path of the project tree. KI_PROJ_DB: Points to path of directory where Keithley Data Files (KDF) and Keithley Logic Files (KLF) are stored.
Page 208: Select Tester
S530 Parametric Test System Reference Manual Section 6: Software Select tester The following topics describe how to select the tester. Setup information A $KIDAT/kitester.dat file contains a list of the QMO numbers of the testers to which the workstation is permitted to connect. To allow connection to additional testers, modify the $KIDAT/kitester.dat file to include the QMO numbers.
Page 209 ~/.kth_startup select_tester 2 source ~/.ki_define_config Sample display The following example display shows select_tester being executed with the operator choosing the current tester, QMO 4001. prompt>source select_tester ------------------------------------------- Keithley S530 System Selection Utility: ------------------------------------------- Number System Name ---------- -------- ------------------------- -->...
Page 210 S530 Parametric Test System Reference Manual Section 6: Software S530 environment variables The following environment variables are defined by select_tester that allow the Keithley Test Environment (KTE) toolset to communicate with the proper tester: setenv KI_CONFIGURATION ${KIDAT}acconfig_$QMO.ini setenv KI_PRB_CONFIG ${KIDAT}prbcnfg_$QMO.dat setenv KI_SYSTEM $SystemName Where: $QMO = The QMO of the tester selected by the select_tester script.
Page 211: System Customization
Section 6: Software S530 Parametric Test System Reference Manual System customization The following topics discuss system customization. Logging in to the workstation The Keithley Test Environment (KTE) system ships with four default user accounts installed: System Administrator: This account is for the person responsible for overall operation of the system and workstation.
Page 212 S530 Parametric Test System Reference Manual Section 6: Software The first line of each category within the tool.tpi file is defined by the category name enclosed by less than (<) and greater than (>) symbols. The following paragraphs describe the contents for one entry within a category: ICON#=iconfile,scriptfile,infofile,terminal,warning Where:...
Page 213: System Integration
Section 6: Software S530 Parametric Test System Reference Manual Here is an example of the tool.tpi file: <Keithley-Tools> ICON1=config.ico,config.scr,config.inf,Y,N ICON2=diags.ico,diags.scr,diags.inf,Y,Y ICON3=ksu.ico,ksu.inf,N,N ICON4=download.ico,download.scr,download.inf,Y,Y ICON5=kitt.ico,kitt.src,kitt.inf,N,N ICON6=limitx.ico,limitx.scr,limitx.inf,N,N ICON7=ktpm.ico,ktpm.scr,ktpm.inf,N,N ICON8=wdu.ico,wdu.scr,wdu.inf,N,N ICON9=kop.ico,kop.scr,kop.inf,N,N ICON10=koped.ico,koped.scr,koped.inf,N,N ICON11=kult.ico,kult.scr,kult.inf,N,N ICON12=kcat.ico,kcat.scr,kcat.inf,N,N <Unix-Tools> ICON1=terminal.ci,terminal.scr,terminal.inf,N,N ICON2=textedit.ico,textedit.scr,textedit.inbf,N,N ICON4=calendar.ico,calendar.scr,calendar.inf,N,N ICON5=clock.ico,clock.scr,clock.inf,N,N ICON6=mail.ico,mail.scr,mail.inf,N,N <Unix Administration> ICON1=xman.ico,xman.scr,xman.inf,N,N <User Programs> ICON1=user.ico,user.scr,user.inf,N,N Here is an example of the script file for KITT: <KTP>...
Page 214: Keithley Data Files Library
S530 Parametric Test System Reference Manual Section 6: Software Linear Parametric Test Library The Linear Parametric Test Library (LPTLib) is a high-speed data acquisition and instrument control software system. It is the lowest level of command interface to the systems instrumentation. This library contains commands to program the system instrumentation for parametric testing.
Page 215 Section 6: Software S530 Parametric Test System Reference Manual Data logging The following paragraphs describe control and handling of the test data. Keithley Data Files library The Keithley Data Files (KDF) library is a set of routines to organize and save parametric test data into simple ASCII data files.
Page 216 S530 Parametric Test System Reference Manual Section 6: Software Optional lot-header parameters Lot header KDF tag Length Description parameters 50 character lot identification (used for lot name) process 50 character process name device 50 character device name testname 255 character test name system 20 character system identification teststation...
Page 217 Section 6: Software S530 Parametric Test System Reference Manual Keithley Data File library commands The following tables contain a brief description of each of the Keithley Data File library (KDF) commands. For detailed descriptions of these commands, see the Keithley Test Environment (KTE) Programmer's Manual (part number S500-904-01).
Page 218 S530 Parametric Test System Reference Manual Section 6: Software Data logging routines Command Description DeleteParam Deletes the parameter information for the specified lot, wafer, site, and parameter. DeleteLimitCode Deletes entire sets of limits defined by a limit code. DeleteLimit Deletes limit records from the DB. Update comment routines Command Description...
Page 219: Using Limits Files
Section 6: Software S530 Parametric Test System Reference Manual Structure handling routines Command Description AddNew[STRUCTURE] Adds new to the list following current. CreateNew[STRUCTURE] Allocates the memory for and returns a pointer to the new LIMIT CODE, LOT, WAFER, SITE, or PARAM. FindFirst[STRUCTURE] Returns the first LIMIT CODE, LOT, WAFER, SITE, or PARAM that current points to in the list.
Page 220 S530 Parametric Test System Reference Manual Section 6: Software Limits file structure A limits file is an ASCII file organized into records. Each record consists of multiple attributes that identify and process each measured test result. The following list describes each attribute: ID, limit record ID tag NAM, limit record name UNT, limit record units...
Page 221 Section 6: Software S530 Parametric Test System Reference Manual CAT,test RPT,1 CRT,1 TAR,1.32 AF,N AL,VAL VAL,-1.0000e+16, 1.0000 SPC,-1.0000e+16, 1.0000e+16 CNT,-1.0000e+16, 1.0000e+16 ENG,-1.0000e+16, 1.0000e+16 ENA,1 CLA,main USR1,user 1 USR2,user 2 USR3,user 3 <EOL> ID,i_res NAM,ires test UNT,ohms CAT,test RPT,1 CRT,0 TAR,1.000000 AF,SS AL,SPC VAL,-1.0000e+20, 1.0000e+21...
Page 222: Programming Examples
S530 Parametric Test System Reference Manual Section 6: Software Each result ID record within a limits file can be viewed individually. By selecting Dialog from the View menu, you can view and modify the currently selected limit in the Limits Editor Dialog window, shown in the following figure.
Page 223 Section 6: Software S530 Parametric Test System Reference Manual /**************** S T A R T C O D E ******************/ /* Initialize kdf data structures */ testlot = CreateNewLot (); testwafer = CreateNewWafer(); testsite = CreateNewSite (); testparam = CreateNewParam(); /* Initialize some of the lot header items */ strcpy (testlot->id, "test1");...
Page 224 S530 Parametric Test System Reference Manual Section 6: Software /* Insert prober code here to move to next site */ /* Lot complete. Close data file */ EndLot(); /* Initialize kdf data structures */ status = LogLot("test2", 0, "CMOS", "TNG-121", "Test1", "", "", "Limits", "", CREATELOT);...
Page 225 Section 6: Software S530 Parametric Test System Reference Manual The two data files created by this example are shown in the following table. PUTxxx and LotLog/LogWat/LogSit data files File created by File created by LogLot/LogWaf/ LogLot/LogWaf/ File created by Putxxx File created by Putxxx Interface LogSit Interface...
Page 226 S530 Parametric Test System Reference Manual Section 6: Software Data retrieval using KDF The following sample program demonstrates how to read data from a .kdf file. The program attempts to read all of the data from test1.kdf (created in the previous example) and display the results on the screen.
Page 227 Section 6: Software S530 Parametric Test System Reference Manual while (gotparam != NULL) printf("\t\t\tId, Value = %s, %e\n", gotparam->id, gotparam->value); gotparam = FindNextParam(gotparam); gotsite = FindNextSite(gotsite); gotwafer = FindNextWafer(gotwafer); /************* CLEANING UP MEMORY *****************/ RemoveParam(searchparam); RemoveSite (searchsite); RemoveWafer(searchwafer); RemoveLot (searchlot); RemoveLot (gotlot);...
Page 228: Keithley Data File User Tag Data
S530 Parametric Test System Reference Manual Section 6: Software Keithley Data File user tag data The Keithley Data File (KDF) library supports user-defined data. This information is contained within the .kdf file with the following format: <TAG>"tagName",tag value string The <TAG> field is required. The "tagName"...
Page 229 Section 6: Software S530 Parametric Test System Reference Manual PutTag will write a user tag into the KDF file using tagName and valueString. tagName can contain any printable ASCII character except the double-quote character. Maximum length is PARAM_ID_LENGTH, or 128 characters. tagName must be null-terminated. valueString has a maximum length of 512 characters and can contain any printable ASCII.
Page 230: Example Of Use Within A Cassette Plan
S530 Parametric Test System Reference Manual Section 6: Software ClearTagList is a routine that will free the tagList created by a call to GetTag. Example The following code sequence will return a list of all user tags for all wafers and sites in the specified lot file.
Page 231: User Access Points
Section 6: Software S530 Parametric Test System Reference Manual In the example above, the system is identified as S530; if you have a different system, this number will be different. User access points The following is a list of user access points (UAP) within the Keithley Test Execution Engine (KTXE) and when the Keithley Data Files (KDF) logging routines are executed.
Page 232: Logging One Param At A Time, Data Retrieval Through Get Routines
S530 Parametric Test System Reference Manual Section 6: Software Structure definitions For structure definitions of LOT, WAFER, SUBSITE, SITE PARAM, LIMITCODE, and LIMIT, refer to the include file in $KIINCLUDE/kdf.h. Sample programs The following topics contain sample programs. Logging one PARAM at a time, data retrieval through Get routines #include <stdio.h>...
Page 233 Section 6: Software S530 Parametric Test System Reference Manual for (siteloop = 1; siteloop <= 10; siteloop++) sprintf(testsite->id,"%i",siteloop); status = PutSite(testlot,testwafer,testsite); if (status < 0) return(status); strcpy(testparam->id, "beta1"); /* calculate the beta*/ testparam->value = beta1(1, 4, 7, -1, 0.5e-3, 2.0, ’N’); status = PutParam(testlot,testwafer,testsite,testparam);...
Page 234 S530 Parametric Test System Reference Manual Section 6: Software while (gotwafer != NULL) gotsite = CreateNewSite(); /* Get all the sites in this wafer */ strcpy(testsite->id, "*"); GetSite(gotlot, gotwafer, testsite, gotsite); while (gotsite != NULL) gotparam = CreateNewParam(); /* Get all the parameters in this site */ strcpy(testparam->id, "*");...
Page 235: Logging A Linked List Of Params, Data Retrieval Using Getlotdata
Section 6: Software S530 Parametric Test System Reference Manual Logging a linked list of PARAMs, data retrieval using GetLotData #include <stdio.h> #include <stdlib.h> #include "kdferr.h" #include "kdf.h" void main(void) LOT *testlot, *gotlot; WAFER *testwafer, *gotwafer; SITE *testsite, *gotsite; PARAM *testparam, *gotparam;...
Page 236 S530 Parametric Test System Reference Manual Section 6: Software testparam->value = voltagetest(1e-1); /* Add current into the list following testparam */ AddNewParam(testparam,new); testparam = FindNextParam(testparam); new = CreateNewParam(); strcpy(new->id, "Volts 1"); /* voltagetest is an example test routine that would return a voltage */ testparam->value = voltagetest(1);...
Page 237: Keithley User Interface Library
Section 6: Software S530 Parametric Test System Reference Manual /* If the result was greater than 1, remove that site from the lot */ if (gotparam->value > 1) DeleteSite(gotlot,gotwafer,gotsite) gotsite = FindNextSite(gotsite); gotwafer = FindNextWafer(gotwafer); Keithley User Interface Library The Keithley User Interface (KUI) Library contains commands that provide the program developer with a basic set of user interfaces for operator data entry and program status monitoring program specifically for test programs.
Page 238 S530 Parametric Test System Reference Manual Section 6: Software Constants that can be used to determine the look and feel of the user interface dialogs. They are intended for use with the InitUI command. DLG_LOOK_MOTIF DLG_LOOK_MSW DLG_LOOK_OPENLOOK DLG_LOOK_PM DLG_LOOK_PM2 Constants are provided for those dialogs which allow selecting which of the dialog's fields can be edited by the user by passing a field edit enable array as a part of a dialog's command call.
Page 239: User Interface Library Variables
Section 6: Software S530 Parametric Test System Reference Manual TEST_NAME SYSTEM_ID TEST_STATION SEARCH_KEY1 SEARCH_KEY2 SEARCH_KEY3 LIMIT_FILE LOT_COMMENT User interface library variables lot_dlg_fields[] Array that assigns an element to each field in the Lot Information Dialog (LotDlg). The value for the element determines whether the field can be edited by the operator when the lot information dialog is displayed.
Page 240: User Interface Library Commands
S530 Parametric Test System Reference Manual Section 6: Software User interface library commands The following table provides a brief description of the Keithley user interface (KUI) user library commands. For detailed descriptions of the KUI user library commands, see the Keithley Test Environment (KTE) Programmer's Manual (part number S500-904-01).
Page 241: Kte Kui Localization
Section 6: Software S530 Parametric Test System Reference Manual KTE KUI localization The KI_LOCALIZE_CFG environment variable is used to define an alternate localization file. Simply set KI_LOCALIZE_CFG to a file of the form below, and localization will automatically take place within The Keithley User Interface (KUI).
Page 242 S530 Parametric Test System Reference Manual Section 6: Software KI_GDFNAME_LBL,"Global Data" KI_WDFNAME_LBL,"Wafer Desc" KI_TIME_LBL,"Total Time" KI_WAFID_LBL,"Wafer Id" KI_CURWAF_LBL,"Wafer" KI_OF_LBL,"Of" KI_SLOT_LBL,"Slot" KI_SPLIT_LBL,"Split" KI_CASS_LBL,"Cassette" KI_X_LBL,"X" KI_Y_LBL,"Y" KI_COL_LBL,"X" KI_SSID_LBL,"SubSite" KI_ROW_LBL,"Y" KI_SID_LBL,"Site" KI_OF_LBL,"Of" KI_WFRIDSDLG_LBL,"Wafer Information - " # Wafer Ids Dlg title KI_WFRIDDLG_LBL,"Wafer Information - " # Wafer ID Dlg Title KI_CBCASS_LBL,"Cassette"...
Page 243: Kte File Formats
Section 6: Software S530 Parametric Test System Reference Manual KI_FRONT_LOAD_MSG,"Manually Load/Profile/Align Wafer.\n\nMove chuck to target die" KI_FRONT_UNLOAD_MSG,"Manually UnLoad Wafer" KI_NO_MAP_MSG,"Could not map any cassettes." #----------------------------------------------------------------------------- # The following values have sprintf arguments embedded within. The arguments # MUST EXIST in any changes that you make #----------------------------------------------------------------------------- KI_PROBER_ERROR_MSG,"PROBER ERROR %i has occurred.\nPlease clear the error.\nPress 'Continue' for current wafer\nPress 'Skip' to skip current wafer\nPress 'Abort' to...
Page 244: Wafer Description File Format
S530 Parametric Test System Reference Manual Section 6: Software .uap: The user access point (UAP) file used by KTPM and the Keithley Test Execution Engine (KTXE). .kpf: The Keithley Plot File created by KITT, to be used by the Keithley Curve Analysis Tool (KCAT).
Page 245 Section 6: Software S530 Parametric Test System Reference Manual Header This section contains general information about the file. Version: Contains the current version number. File: Contains the path and filename (with .wdf extension) of the Wafer Plan Definition File. Date: Contains the date the file was last edited, in Y2K-compliant form. Comment: May contain any relevant text, up to 256 characters.
Page 246 S530 Parametric Test System Reference Manual Section 6: Software AutoAlignLocation: Contains the offset coordinates (using the orientation of the Axis, above) from the notch or flat, to the alignment die. This is an optional line used to help position the wafer on the prober so the operator must only validate the position and, if necessary, do some fine adjustments.
Page 247: Test Structure File Format
Section 6: Software S530 Parametric Test System Reference Manual General Notes Lines that begin with a # are ignored. If a file is multiple-project, that means that multiple site types are possible. A site name must be entered for each site to be probed. A list of subsites will be entered for each site type (each site type has a unique site name).
Page 248: Keithley Test Macro (.Ktm)
S530 Parametric Test System Reference Manual Section 6: Software Comment: May contain any relevant text, up to 255 characters. The header section terminates with the <EOH> tag. Devices These sections define the devices of the test structure. Each line contains these fields: The data name.
Page 249 Section 6: Software S530 Parametric Test System Reference Manual /* Local Pre-Defined Identifiers */ datatype constant_name = value; /* Constant Declaration */ datatype constant_name = value; /* Constant Declaration */ /*>> KTM TEST MODULE CONSTANTS SETTINGS constant_name, datatype,constant_type,value, constant_name, datatype,constant_type,value, END CONSTANTS SETTINGS*/ /*>>...
Page 250 S530 Parametric Test System Reference Manual Section 6: Software KTM TEST MODULE VARIABLES: Contains the declarations for the variables necessary to run the macro. The first, untitled segment of this section declares the variables first used in the body of the macro;...
Page 251: Probe Card File Format
Section 6: Software S530 Parametric Test System Reference Manual Probe card file format Filename probecard_file.pcf Format #Keithley Probe Card Definition File Version,n.n File,file_path_and_name.pcf Date,mm/dd/yyyy Id,id_string Comment,comment_string RevID,$Revision: n.n $ <EOH> pin_name,datatype,pin_number pin_name,datatype,pin_number <EOPINS> Header This section contains general information about the file. Version: Contains the current version number.
Page 252: Global Data File Format
S530 Parametric Test System Reference Manual Section 6: Software General Notes Any line that begins with a # is ignored. Probe Card Files are generated by the Keithley Data Editor in KITT and can be found in the $KI_KTXE_PCF directory. Global data file format Filename global_data_file.gdf...
Page 253: Parameter Set File Format
Section 6: Software S530 Parametric Test System Reference Manual General Notes Any line that begins with a # is ignored. Global Data Files are generated by the Keithley Data Editor in KITT and can be found in the $KI_KTXE_GDF directory. Parameter set file format Filename Userlibrary_paramset.psf...
Page 254: Parameter Limits File Format
S530 Parametric Test System Reference Manual Section 6: Software Modules This section defines a module by listing all the parameter sets associated with it. One line is needed before getting into the parameter sets: MODULE: Contains the module name. This one-word string must start with a nonnumeric character, and must contain only letters (a through z, A through Z), digits (0 to 9), and the underscore character (_).
Page 255 Section 6: Software S530 Parametric Test System Reference Manual NAM,parameter_name UNT,parameter_units CAT,parameter_category RPT,y_or_n CRT,critical_flag TAR, target_value AF,abort_destination AL,abort_action VAL,val_low, val_high SPC,spc_low, spc_high CNT,cnt_low, cnt_high ENG,eng_low, eng_high ena,enabled flag cla,class data usr1,user data field 1 usr2,user data field 2 usr3,user data field 3 <EOL>...
Page 256 S530 Parametric Test System Reference Manual Section 6: Software RPT: Contains either a Y for yes or an N for no, depending on whether or not the limit is to be included in the lot summary report compiled by the Keithley Summary Utility (KSU). CRT: Contains 0 (zero) if the parameter is noncritical and any single digit number from 1 to 9 if the parameter is critical;...
Page 257: Wafer Test Plan File Format
Section 6: Software S530 Parametric Test System Reference Manual Wafer test plan file format Filename wafer_plan_file.wpf Format #Keithley Wafer Plan Definition File Version,n.n File,file_name.wpf Date,mm/dd/yyyy Comment,comment string Wafer,wafer_file_name.wdf Limits,limits_file_name.klf Probe,probe_file_name.pcf SS_SORT,yes_or_no RevID,$Revision: n.n $ <EOH> Siteplan,siteplan_name,description of siteplan macro_file_name.ktm macro_file_name.ktm Siteplan,siteplan_name,description of siteplan macro_file_name.ktm macro_file_name.ktm...
Page 258 S530 Parametric Test System Reference Manual Section 6: Software Limits: Contains the name of the appropriate Parameter Limits File (with .klf extension). This may be preceded by the path to the file, but if the path is not specified the file is assumed to reside in the $KI_KTXE_KLF directory.
Page 259: Cassette Test Plan File Format
Section 6: Software S530 Parametric Test System Reference Manual Cassette test plan file format Filename cassette_plan_file.cpf Format #Keithley Cassette Plan Definition File Version,n.n File,file_name.cpf Date,mm/dd/yyyy Comment,comment string Data,lot_id Engine,execution_engine Probe,probe_card_file_name.pcf Wafer,wafer_card_file_name.wdf Global,global_data_file_name.gdf UAPdefaults,uap_defaults_file_name.uap RevID,$Revision: n.n $ <EOH> slot_id,wafer_id,wafer_plan_name.wpf slot_id,wafer_id,wafer_plan_name.wpf <EOS> uap_name,library_name,uam uap_name,library_name,uam <EOUAP>...
Page 260 S530 Parametric Test System Reference Manual Section 6: Software Probe: Contains the name of the appropriate Probe Card File (with .pcf extension). This may be preceded by the path to the file, but if no path is specified then the file is assumed to reside in the $KI_KTXE_PCF directory.
Page 261 Section 6: Software S530 Parametric Test System Reference Manual It must be noted that having multiple wafer plans will have an impact on the Keithley Summary Utility (KSU). Summaries could be per wafer plan (for example, there could be different parameters or different limits).
Page 262: Keithley Data File Format
S530 Parametric Test System Reference Manual Section 6: Software Keithley data file format Filename data_file.kdf Format TYP,file_typ LOT,lot_name PRC,process_name DEV,device_name TST,test_name SYS,system_name TSN,test_station_id_string OPR,operator_name_string STT,dd,mmm,yyyy, tt:tt SK1,usr_data_1 SK2,usr_data_2 SK3,usr_data_3 LMT,limit_file_name WDF,wafer_description_file_name COM,comment_string <EOH> wafer_id,wafer_split,wafer_boat,wafer_slot site_id,row,column param_id,value param_id,value <EOS> site_id,row,column param_id,value param_id,value <EOS>...
Page 263 Section 6: Software S530 Parametric Test System Reference Manual PRC: Contains the process name. This string may contain up to 50 characters. DEV: Contains the device name. This string may contain up to 50 characters. TST: Contains the test name. This string may contain up to 255 characters. SYS: Contains the system name.
Page 264: User Access Point File Format
S530 Parametric Test System Reference Manual Section 6: Software This line is followed by a list of all the measurements that were taken for that site, one per line. Each line contains these fields: The parameter ID. This is the C-style identifier string that matches a parameter ID in the Parameter Limits File.
Page 265: Keithley Plot File Format
Section 6: Software S530 Parametric Test System Reference Manual User access points This section defines the user access points (UAPs). Each line contains these fields: The UAP name. The user library name of the module you want to use at this UAP. A routine name or an expression using the routine name.
Page 266: Kult Module File Format
S530 Parametric Test System Reference Manual Section 6: Software General Notes Plot files are generated by the Results Window in KITT, and can be found in the $KI_KTXE_KDF directory. KULT module file format Filename kult_module_file_name.c Format /* USRLIB MODULE INFORMATION MODULE NAME: kult_module_name MODULE RETURN TYPE: datatype NUMBER OF PARAMS: n...
Page 267 Section 6: Software S530 Parametric Test System Reference Manual ARGUMENTS: Details information about each of the parameters, one per line. Each line contains these fields:  The name of the parameter. This one-word string should be a valid C-style identifier; it must start with a nonnumeric character, and must contain only letters (a through z, A through Z), digits (0 to 9), and the underscore character (_).
Page 268: Data Pool
S530 Parametric Test System Reference Manual Section 6: Software General Notes Every KULT Module File is a C-language document, but not every C-language document is a KULT Module File. To be a KULT Module File, the C-language document must conform to the format explained above.
Page 269: Ki_Ktxe_Redo_Macro
Section 6: Software S530 Parametric Test System Reference Manual KI_ktxe_redo_macro Name Type Initial value First available Last usable KI_ktxe_redo_macro UAP_SITE_CHANGE UAP_SITE_END Flag that allows a macro to be re-executed. Set this at or before UAP_TEST_END or UAP_TEST_DATA_LOG to retest. Any non-zero value means retest.
Page 270: Kui_User
S530 Parametric Test System Reference Manual Section 6: Software KUI_User Name Type Initial value First available Last usable KUI_User LONG_P &KUI_User UAP_PROG_ARGS UAP_LOT_INFO Pointer to the KUI_User structure. This allows access to two user-defined fields on the KTXE Status Dialog window. The KUI_User structure is initialized to NULL by default, causing the user fields to be invisible.
Page 271: Uap_Abort_Level
Section 6: Software S530 Parametric Test System Reference Manual UAP_abort_level Name Type Initial value First available Last usable after a UAP is after a UAP is UAP_abort_level uap_abort_level executed executed Return value of a UAP routine if assigned in KTPM. Can be used to cause KTXE to abort after a UAP is executed. If the UAP returns the value KI_ABORT, KTXE will exit.
Page 272: Cl_Kwf_Fname
S530 Parametric Test System Reference Manual Section 6: Software cl_kwf_fname Name Type Initial value First available Last usable cl_kwf_fname CHAR_P cl_kwf_fname UAP_PROG_ARGS UAP_ENGINE_EXIT Wafer description filename entered from "-w" command-line switch. confirm_oper_wafers Name Type Initial value First available Last usable confirm_oper_wafers If this value is set to 1 and the operator selects an empty slot for OPERATOR MODE, an error message will be displayed.
Page 273: Current_Slot_List
Section 6: Software S530 Parametric Test System Reference Manual current_slot_list Name Type Initial value First available Last usable current_slot_list LONG_P & current_slot_list UAP_LOT_INFO UAP_ENGINE_EXIT Pointer to the current_slot_list element. Updated each wafer. Example: long *tmp ; slot_list_t *slot ; /* Get the current slot list pointer.. tmp = ( long *)dpGetPointer( "current_slot_list", LONG_P ) slot = ( slot_list_t *) *tmp ;...
Page 274: Cur_Wwp_List_Ptr
S530 Parametric Test System Reference Manual Section 6: Software cur_wwp_list_ptr Name Type Initial value First available Last usable cur_wwp_list_ptr LONG_P &current_wwp_list UAP_SITE_CHANGE UAP_SITE_END This is a pointer to the current_wwp_list pointer value. This allows execution flow adjustment by manipulation of the current_wwp_list pointer value.
Page 275: Ktm_List
Section 6: Software S530 Parametric Test System Reference Manual ktm_list Name Type Initial value First available Last usable ktm_list LONG_P ktm_list_head UAP_VALIDATE_OCR UAP_WAFER_END Pointer to the list of all KTMs used in a wafer plan. This is updated each wafer before UAP_WAFER_BEGIN. Structure definition: typedef struct _ktm_list char ktmfname[MAXFILENAMESIZE];...
Page 276: Ktxe_Disable_Kdf
S530 Parametric Test System Reference Manual Section 6: Software ktxe_disable_kdf Name Type Initial value First available Last usable ktxe_disable_kdf FALSE UAP_PROG_ARGS UAP_WAFER_END Flag for disabling standard kdf data logging. ktxe_disable_ktm Name Type Initial value First available Last usable ktxe_disable_ktm FALSE UAP_PROG_ARGS UAP_LOT_END Flag for disabling macro test execution.
Page 277: Ktxe_Disable_Statdlg
Section 6: Software S530 Parametric Test System Reference Manual ktxe_disable_prober Name Type Initial value First available Last usable ktxe_disable_prober FALSE UAP_PROG_ARGS UAP_WAFER_END Flag for disabling default KTXE prober routines. ktxe_disable_statdlg Name Type Initial value First available Last usable ktxe_disable_statdlg UAP_PROG_ARGS UAP_LOT_INFO Flag for disabling KTXE status dialog window.
Page 278: Ktxe_Error_Gui
S530 Parametric Test System Reference Manual Section 6: Software ktxe_error_gui Name Type Initial value First available Last usable ktxe_error_gui UAP_PROG_ARGS UAP_ENGINE_EXIT Flag for defining the behavior of KTXE when an error occurs. Default, (ktxe_error_gui undefined or set to other than 1 or 2), errors are written to the error log.
Page 279: Ktxe_Report_No_Klf
Section 6: Software S530 Parametric Test System Reference Manual ktxe_report_no_klf Name Type Initial value First available Last usable ktxe_report_no_klf UAP_PROG_ARGS UAP_WAFER_PREPARE This flag defaults to value 1 and if set to 0 will cause KTXE to suppress the generation of a "Missing Limits File" error message.
Page 280: Limit_List
S530 Parametric Test System Reference Manual Section 6: Software limit_list Name Type Initial value First available Last usable limit_list LONG_P limit_list UAP_VALIDATE_OCR UAP_WAFER_END Pointer to the limits list returned by GetLimit. Updated each wafer, if the Wafer Plan file has a limits file specified. limithashtab Name Type...
Page 281: Lotid
Section 6: Software S530 Parametric Test System Reference Manual lotid Name Type Initial value First available Last usable lotid CHAR_P lot->id UAP_PROBER_INIT UAP_ENGINE_EXIT Lot id string. maxErrEvtLines Name Type Initial value First available Last usable maxErrEvtLines INT_P maxErrEvtLines UAP_PROG_ARGS UAP_PROG_ARGS Pointer to the maxErrEvtLines variable used to determine the maximum buffer size of the Error/Event Message Dialog window.
Page 282: Previous_Wwp_List
S530 Parametric Test System Reference Manual Section 6: Software previous_wwp_list Name Type Initial value First available Last usable previous_wwp_list LONG_P &previous_wwp_list UAP_SITE_CHANGE UAP_SITE_END Pointer to the previous WWP list node that was actually executed. This is updated each time a macro is executed. See type definition for wwp_list_t in $KIHOME/include/ktxe_types.h.
Page 283: Site
Section 6: Software S530 Parametric Test System Reference Manual site Name Type Initial value First available Last usable site LONG_P site UAP_SITE_CHANGE UAP_SITE_END Pointer to the site structure. Updated before UAP_SITE_CHANGE. sites_tested Name Type Initial value First available Last usable sites_tested INT_P &sites_tested...
Page 284: Total_Sites
S530 Parametric Test System Reference Manual Section 6: Software total_sites Name Type Initial value First available Last usable total_sites INT_P &total_sites UAP_WAFER_BEGIN UAP_ENGINE_EXIT Pointer to total number of sites to be tested. Updated before UAP_WAFER_BEGIN. total_wafers Name Type Initial value First available Last usable UAP_POST_ENGINE_EXI...
Page 285: Wpf_Info
Section 6: Software S530 Parametric Test System Reference Manual wpf_info Name Type Initial value First available Last usable wpf_info LONG_P wpf_info UAP_VALIDATE_OCR UAP_ENGINE_EXIT Pointer to the wafer plan structure. Used by the Analysis Software. wwp_list Name Type Initial value First available Last usable wwp_list LONG_P wwp_list...
Page 286: Data Pool Function Descriptions
S530 Parametric Test System Reference Manual Section 6: Software Adding items to the data pool: int dpAddData(char *name, int type, ...); int dpAddPointer(char *name, int type, void *valuep); int dpAddArray(char *name, int type, void *valuep, int elements); Getting items from the data pool: void *dpGetDataPtr(char *name, int type);...
Page 287: Example
Section 6: Software S530 Parametric Test System Reference Manual Example dpAddData/dpGetDataPtr example: /* create/initialize value in data pool int value ; value = 4 ; dpAddData( "nameOfElement", INT, value ) ; /* get value from data pool int value ; value = *(( int *)dpGetDataPointer( "nameOfElement", INT )) ;...
Page 288: User Access Points (Uaps)
S530 Parametric Test System Reference Manual Section 6: Software double *dblPtr ; double dbl ; dlbPtr = ( double *)dpGetPointer( "myPtrName", DOUBLE_P ) ; dbl = *dlbPtr ; /* dbl = 7.8 now */ /* CHAR_P usage: char *stringVar ; /* Create and initialize data pool entry stringVar = ( char *)malloc( 128 ) ;...
Page 289 Section 6: Software S530 Parametric Test System Reference Manual UAPs are defined for all execution engines in the system ktpm.ini file. An example follows: /* Start of File */ <Engine_List> Engine1 = ktxe,$KIBIN,Initial KI Execution Engine for V5.x <ktxe> UAP1 = UAP_PROG_ARGS,process user’s ktxe command line arguments UAP2 = UAP_CASSETTE_LOAD,start processing the cassette plan UAP3 = UAP_LOT_INFO,start setting up the lot file UAP4 = UAP_PROBER_INIT,start of prober initialization...
Page 290: User Access Point Usage
S530 Parametric Test System Reference Manual Section 6: Software User access point usage User access points (UAPs) can access data items stored or referenced through the data pool. See Data pool (on page 6-223) for more information. The following is an explanation of what data is accessed or passed at each UAP: UAP_PROG_ARGS: At this access point, program arguments passed on the command line are available.
Page 291 Section 6: Software S530 Parametric Test System Reference Manual UAP_VALIDATE_OCR: At this access point, the wafer ID read from the prober can be verified or altered. This is the last UAP point before the wafer ID is written to the Keithley Data File (.kdf) file.
Page 292: Types Of User Access Points
S530 Parametric Test System Reference Manual Section 6: Software Types of user access points There are two different types of user access points (UAPs): User library modules: Created by the Keithley User Library Tool (KULT) Keithley Test Module (.ktm) files: Created by the Keithley Interactive Test Tool (KITT) User library modules The format for user library modules created by the Keithley User Library Tool (KULT) is: UAP_aaaa,user_library_name,module_name(argl,arg2)
Page 293: Uap Locations
Section 6: Software S530 Parametric Test System Reference Manual Examples: UAP_WAFER_BEGIN, ,measure_air.ktm UAP_WAFER_BEGIN, ,/mydirectory/for/uap/ktms/measure_air.ktm UAP_WAFER_BEGIN,,$MYUAPKTMS/measure_air.ktm UAP locations User access points (UAPs) are defined in three different locations: Within a UAP file pointed to $KI_KTXE_SYSTEM_AP Within a standard UAP file Within a cassette plan The UAPs are executed in the order listed above.
Page 294: Test Macro Debugging
S530 Parametric Test System Reference Manual Section 6: Software KI_DEBUG: Debug routines to allow display of datapool and KTE prober structure contents. Also a routine is provided that creates a global data file (.gdf) file from the current contents of the data pool.
Page 295 Section 6: Software S530 Parametric Test System Reference Manual The KI_KTXE_DEBUG_LOG environment variable must be set to a valid filename prior to calling DBG_gdfCreate. An example of this would be setenv KI_KTXE_DEBUG_LOG /tmp/log. KI_KTXE_DEBUG_LOG must not be set to /dev/tty or /dev/null if this log file is used as temporary storage for the data pool data during the creation of the .gdf file.
Page 296: Version Control
Section 7 Version control In this section: Overview .................. 7-1 Version control in the production environment ......7-2 The recipe execution process in operator mode ...... 7-4 Version control in the engineering environment ....... 7-6 File version tracking ..............7-8 The primary version control areas ..........
Page 297 Section 7: Version control S530 Parametric Test System Reference Manual The following list describes the key elements in the revision path: 1. Files, revisions, and other information for all versions of recipes and supporting files (including .cpf, .wdf, .klf, and user libraries) are stored in the archive. The archive is a protected directory that is located on the system server.
Page 298: Version Control In The Production Environment
S530 Parametric Test System Reference Manual Section 7: Version control Version control in the production environment The following topics describe version control in the production environment. Revised file movement the production environment The following figure and list describe the movement of revised files into the production environment. Figure 98: Version-controlled movement of revised files into the production environment S530-901-01 Rev.
Page 299: The Recipe Execution Process In Operator Mode
Section 7: Version control S530 Parametric Test System Reference Manual 1. An InstallRequest.log file maintains a list of all files that are waiting to be installed from the archive. 2. A Keithley Recipe Manager (KRM) Install action creates, from the archive, bundles for the waiting recipes and individual files and places the bundles into staging directories - one for each client system.
Page 300 S530 Parametric Test System Reference Manual Section 7: Version control Recipe execution in operator mode proceeds as follows: 1. Log in and start KRM in operator mode. 2. In KRM, select a recipe using the recipe navigator, which displays a graphical hierarchy of processes, product families, and recipes.
Page 301: Version Control In The Engineering Environment
Section 7: Version control S530 Parametric Test System Reference Manual Version control in the engineering environment A common engineering mode procedure is to modify an existing recipe and its supporting files, test the changes, and release the revised files into production. This commonly requires the following: Accessing the archive to check out appropriate files.
Page 302 S530 Parametric Test System Reference Manual Section 7: Version control The following steps show the process for the revision and version control of a single recipe or supporting file: 1. Start KRM in engineering mode. 2. Using KRM, select either of the following: ...
Page 303: File Version Tracking
Section 7: Version control S530 Parametric Test System Reference Manual File version tracking File version tracking is a key feature of the Keithley Recipe Manager (KRM). Checking in an updated copy of a file creates a new version in the archive. KRM increments the version number for the file and, upon release, assigns it a production-ready (PROD) label.
Page 304: The Primary Version Control Areas
S530 Parametric Test System Reference Manual Section 7: Version control The primary version control areas Before developing recipes, you should understand the primary areas of a Keithley Recipe Manager (KRM) version control system. The following topics describe these areas. Local areas A local area is made up of a series of directory locations that are used to hold recipe files and supporting files during development.
Page 305 Section 7: Version control S530 Parametric Test System Reference Manual Understanding the head version and the PROD label of a file Head: Keithley Recipe Manager (KRM) normally designates the latest version of a recipe or supporting file as head. The term head is used unless, in the krm.ini (on page 8-93) file, you specify a different designation for the latest version.
Page 306 S530 Parametric Test System Reference Manual Section 7: Version control Figure 102: Example of the View Install Request log action The Install Request file includes all edited files that have been released using Version Control > Release, but have not yet been installed on a tester. Entries in the Install Request file can include recipe files (.krf) and user libraries and supporting files (.cpf, .klf, .wdf, .ktm, and other files).
Page 307: Staging Directories
Section 7: Version control S530 Parametric Test System Reference Manual Understanding the archive CopyOfProd directory The CopyOfProd directory stores a complete, unbundled set of the currently installed PROD-labeled recipes and supporting files, including all updates contained in the staging area file bundles. If a new client system is added to the system, you can copy the entire set of production files to the new client system from the CopyOfProd directory.
Page 308 S530 Parametric Test System Reference Manual Section 7: Version control Editing the krm_testers.ini file The krm_testers.ini file, located in the directory pointed to by $KIHOME, lists the testers that are included in your system. To view and edit the krm_testers.ini file, select the Keithley Recipe manager (KRM) Options >...
Page 309: Directory File Structures
Section 7: Version control S530 Parametric Test System Reference Manual Directory file structures The following topics provide file structure information for the following directories: Archive Normal and specific production areas in the client system Projects Archive directory structure The following figure identifies the environment variable for the archive root directory and shows how recipes and supporting files are distributed in this directory.
Page 310: Production Directory Structure
S530 Parametric Test System Reference Manual Section 7: Version control Production directory structure The following figure identifies the location of the normal and specific production directories and shows how recipes and supporting files are distributed in these directories. In the Normal production area .krf files are located in the plans directory, rather than in a separate recipe directory as in the archive.
Page 311: Projects Directory Structure
Section 7: Version control S530 Parametric Test System Reference Manual Projects directory structure A project is a series of environment variables that point to the directory locations of KTE files and user libraries. You can view the names for all available projects that are located in $KIDAT as follows: 1.
Page 312: Monitoring Staging Directories For Stagnant Files
S530 Parametric Test System Reference Manual Section 7: Version control Monitoring staging directories for stagnant files Periodically check the content of each staging directory. A staging directory should always be empty except under the following conditions: Recipes or supporting files have recently been installed to the staging directory and the associated client system is busy, and is not ready to transfer the files.
Page 313: Populate The Production Environment Of A New Client System
Section 7: Version control S530 Parametric Test System Reference Manual Populate the production environment of a new client system The $KIBIN/tester_prod_util.pl Perl script allows you to create a bundle containing the normal and specific production-area files. You can execute the script on a client system by selecting the Create Bundle button. This causes all files in the normal and specific production areas to be bundled together and placed into the client system's $KI_STAGING_DIR directory.
Page 314: Transferring Production File Bundles To The Client Systems
S530 Parametric Test System Reference Manual Section 7: Version control Transferring production file bundles to the client systems Files are transferred from staging areas to testers automatically. Each client system automatically updates its normal production area by transferring and unbundling any normal file bundles found in its staging area.
Page 315: Viewing The History Of A File
Section 7: Version control S530 Parametric Test System Reference Manual Viewing the history of a file You can view the revision history, locked or unlocked status, and which versions of files have the head designation and PROD label using most Keithley Test Environment (KTE) tools. You can view the history of a file in Keithley Test Plan Manager (KTPM), Wafer Description Utility (WDU), Keithley Interactive Test Tool (KITT), Limits File Editor (LFE), Parameter Set Editor (PSE), Test Structure File Editor (TSE), Keithley Data Editor (KDE), and Keithley Recipe Manager (KRM)
Page 316: Comparing Versions Of A File
S530 Parametric Test System Reference Manual Section 7: Version control Comparing versions of a file The compare operation compares one version of a recipe or supporting file with another version of the same file and reports the differences. For example: You check out a recipe from the archive and then change the cassette plan (.cpf), the limits file (.klf), and the wafer description file (.wdf), as shown in the following figure.
Page 317: Viewing Where A Supporting File Is Used
Section 7: Version control S530 Parametric Test System Reference Manual Figure 110: The compare process Creation dates for the compared versions Identities of the versions being compared; a < symbol signifies an item in the earlier version that was changed in the later version; a > signifies a new or changed item in the later version The list of items that have changed between versions Compare process information (only this displays if no changes were made to the local version) Viewing where a supporting file is used...
Page 318: Removing A Kult Module From Production
S530 Parametric Test System Reference Manual Section 7: Version control Figure 111: Using Where Used Removing a KULT module from production Removal of a KULT module from the normal production area is a multi-step process. This process is summarized as follows: 1.
Page 319: Step A: Fetch And Load The Library To Be Modified
Section 7: Version control S530 Parametric Test System Reference Manual Step A: Fetch and load the library to be modified 1. Start the Keithley User Library Tool (KULT). 2. In KULT, select File > Delete Library. The Delete Library window opens. 3.
Page 320: Step C: Delete The Module From The Local Kult Library
S530 Parametric Test System Reference Manual Section 7: Version control Step C: Delete the module from the local KULT library 1. In the Keithley User Library Tool (KULT), select File > Delete Module. The module selection window opens. 2. In the module selection window, select the module to be deleted. 3.
Page 321: Step G: Install The Updated Kult Library
Section 7: Version control S530 Parametric Test System Reference Manual Step G: Install the updated KULT library 1. Start Keithley Recipe Manager (KRM). 2. In KRM, select Version Control > Install. The Enter Password window opens. 3. Enter the password for installing files to production (the default password is kthadm). For more information about Keithley Recipe Manager passwords, see System and software passwords...
Page 322: Version Control Menu In Kult
S530 Parametric Test System Reference Manual Section 7: Version control Version control menu in KULT The Version Control menu in KULT resembles the Version Control menus in other KTE tools. However, because KULT works with user libraries and user modules, its main Version Control menu items (and its Header Files submenu items) are different.
Page 323: Library Control Submenu In Kult
Section 7: Version control S530 Parametric Test System Reference Manual Figure 112: Comparison of default and alternate version-control menu layouts Library Control submenu in KULT The Keithley User Library Tool (KULT) includes these added options: Show Local Library Status: Shows the Version Control status of the local library contents. Compare Library Revisions: Allows you to compare the contents of two different versions of a library.adm file.
Page 324 S530 Parametric Test System Reference Manual Section 7: Version control KULT Version Control > Fetch & Load Library The Fetch & Load Library option allows you to choose a user library from the archive and performs the following: Places a read-only copy of each file of the selected library into the local area. Compiles all library modules and builds the library.
Page 325 Section 7: Version control S530 Parametric Test System Reference Manual KULT Version Control > Check Out & Load Library The Check Out & Load Library item allows you to choose a user library from the archive and performs the following: Locks the archive copy of the library.
Page 326 S530 Parametric Test System Reference Manual Section 7: Version control KULT Version Control > Revert & Build Library The Revert & Build Library item performs the following: Restores, to the local area, the Head versions of all library files. Sets the local area permissions for the library files back to read-only. Unlocks the archive copy of the library files.
Page 327 Section 7: Version control S530 Parametric Test System Reference Manual The following figure shows the Check In & Build Library on-screen actions. Figure 116: Check In & Build in KULT KULT Version Control > Release Library The Release Library item assigns the PROD label to the Head version of the user library’s modules. The following figure shows the Release Library actions.
Page 328: Advanced Kult Version Control Menu Items
S530 Parametric Test System Reference Manual Section 7: Version control KULT Version Control > Remove Library Label The Remove Library Label item reverts a change from the Release Library action. It removes the PROD label from all modules in the user library. The following figure shows the Remove Library actions.
Page 329 Section 7: Version control S530 Parametric Test System Reference Manual The following figure shows a Fetch operation that includes a user-library module, a Library Settings file, and Library Prototypes file. Figure 119: Fetch window showing library settings, module, and library prototypes files The following four Advanced Version Control menu items allow you to individually check out, change, check in, and release user modules and other user-library files: Library Module submenus.
Page 330 S530 Parametric Test System Reference Manual Section 7: Version control The following figure shows the Version Control > Library Module submenus. Figure 120: Library module submenus in KULT KULT Version Control > Library Settings submenus The Version Control > Library Settings submenus are similar to the KTE Version Control menus. However, in this case they enable you to: Check out the library’s settings file Change the settings file using the KULT Options menu...
Page 331 Section 7: Version control S530 Parametric Test System Reference Manual KULT Version Control > Library Prototypes submenus The Version Control > Library Prototypes submenus allow you to perform version control operations on the library prototypes file. The following figure shows the Version Control > Library Prototypes submenus.
Page 332 S530 Parametric Test System Reference Manual Section 7: Version control KULT Version Control > Header Files submenu The KULT Version Control > Header Files > Fetch option allows you to place a read-only copy of a header file from the archive into your local area. The KULT Version Control >...
Page 333: Recipe Manager
Section 8 Recipe Manager In this section: Overview .................. 8-1 Setting up Keithley Recipe Manager ........8-3 The Keithley Recipe Manager user interface ......8-15 The primary version control areas .......... 8-21 Normal and specific recipes ........... 8-22 Getting started ................ 8-22 Using Keithley Recipe Manager with KTE tools .....
Page 334: Additional Features
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Recipes contain all the information needed to test a specific product, including: Test structures on which tests should be run Location of the test structures on the wafer Tests to run on the test structures Adaptive testing rules Test result control bands that define when to bin the results Operator instructions...
Page 335: Setting Up Keithley Recipe Manager
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Setting up Keithley Recipe Manager Keithley Recipe Manager (KRM) is part of the Keithley Test Environment (KTE) software that comes installed on your system. If this is the first time you have used KRM, you will need to configure it for your system. See the following topics for instructions.
Page 336: Changing Passwords
Section 8: Recipe Manager S530 Parametric Test System Reference Manual There are several operations in KTE and KRM that require special release privileges to complete. For example, when you release and install a recipe file or other KTE files, you are prompted for a password.
Page 337: System Configurations For Keithley Recipe Manager
S530 Parametric Test System Reference Manual Section 8: Recipe Manager 4. Enter the password again in the Confirm Password box and select OK. To change the release password, change the password for the kthadm account. The password assigned to this account is the one you will need when prompted for passwords in the Keithley Test Environment (KTE) tools and in Keithley Recipe Manager (KRM).
Page 338 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Multiple networked systems checklist Server system Server hostname System QMO number (serial number) System operator account name (kthopr is default) Archive directory location (<path/name>) Staging directory location (<path/name>) Client system 1 Client hostname System QMO number...
Page 339 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Client system 2 Client hostname System QMO number (serial number) System operator account name (kthopr is default) Archive root mount point on this system (<path/name>) Staging directory mount point on this system (<path/name>) Server hostname Client system 3...
Page 340: Single-System Setup
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Client system 4 Client hostname System QMO number (serial number) System operator account name (kthopr is default) Archive root mount point on this system (<path/name>) Staging directory mount point on this system (<path/name>) Server hostname Single-system setup...
Page 341 S530 Parametric Test System Reference Manual Section 8: Recipe Manager  Staging directory name for the client (confirm or enter a different name)  Create another tester (client) staging area (answer no for a single-system setup). The script closes and returns you to the command prompt. 5.
Page 342: Multiple Networked Systems Setup
Section 8: Recipe Manager S530 Parametric Test System Reference Manual 8. If you want to populate the archive with existing files, open a new terminal and run the /opt/kiS530/bin/setuparc script from the command line. Syntax for the script is setuparc -f <cpf | all >, where cpf checks in KTE files used by existing cassette plans only, and all checks in all available KTE files.
Page 343 S530 Parametric Test System Reference Manual Section 8: Recipe Manager The script continues, prompting you for information about the clients in the network.  Create tester (client) staging area (answer yes for a multiple networked systems configuration)  Development-only workstation? (yes or no) ...
Page 344 Section 8: Recipe Manager S530 Parametric Test System Reference Manual The script prompts you for the following information for the client:  Development-only workstation? (yes or no)  Server computer the same as this client computer? (answer no for networked client systems) ...
Page 345: Development-Only System Setup
S530 Parametric Test System Reference Manual Section 8: Recipe Manager 5. If the server and the client do not share the same computer, reboot the system. 6. At the command prompt, enter select to initialize client environment variables. A dialog box similar to the following figure is displayed in the terminal.
Page 346: Add Kte Files From The Local Area To The Krm Archive
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Add KTE files from the local area to the KRM archive If you have existing supporting files (for example, .cpf, .wdf, .klf, or .ktm) that you want to add to the Keithley Recipe Manager (KRM) archive after setting up KRM, check them in using the following procedure.
Page 347: The Keithley Recipe Manager User Interface
S530 Parametric Test System Reference Manual Section 8: Recipe Manager The Keithley Recipe Manager user interface A recipe is single point of reference for all of the Keithley Test Environment (KTE) files and parameters needed to test a specific product. Keithley Recipe Manager (KRM) allows you to create, edit, and version-control recipes for use in a production test environment.
Page 348: File Menu
Section 8: Recipe Manager S530 Parametric Test System Reference Manual File menu The options on the File menu are described in the following table. Menu item Description New Process Create a new process, product family, and reference recipe in the local area (see Creating a new process and product family (on page 8-42)).
Page 349: Batch Menu
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Batch menu The Batch menu allows you to perform certain common operations to multiple marked product families or recipes at the same time. Batch operations are only available in the local view. The options in the Batch menu are described in the following table.
Page 350: View Menu
Section 8: Recipe Manager S530 Parametric Test System Reference Manual View menu The options on the View menu are described in the following table. Menu item Description Parameter List Toggles the view of the Parameters tab on and off; the Parameters tab displays the name of each parameter, test macro, and user module in which each parameter is used.
Page 351: Options Menu
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Options menu The selections on the Options menu are described in the following table. Menu item Description View/Set Recipe Displays all files in the presently selected recipe with revision labels. This allows Contents you to view PROD-labeled versions of the recipe or specify non-PROD versions of the files to create a specific recipe (a recipe for use in the local area, typically...
Page 352 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Menu item Description Show Status Displays the file name and directory path, file lock status, read/write permissions, current revision number in the local area, most recent (head) version in the archive, and the PROD-labeled version in the archive.
Page 353: The Primary Version Control Areas
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Menu item Description Install Bundles each newly released PROD recipe file with copies of all its supporting files into a single bundle (.tar file). In other KTE tools, bundles newly released PROD supporting files.
Page 354: Staging Directories
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Staging directories A staging directory is a directory that temporarily stores installed recipes and supporting files as file bundles (.tar files). A recipe bundle stores a complete, production-ready normal or specific recipe and all of its supporting files.
Page 355: Getting Started
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Getting started The following topics describe starting KRM and give an overview of the user interface. Starting Keithley Recipe Manager You can start Keithley Recipe Manager (KRM) in one of the following modes: Operator mode.
Page 356 Section 8: Recipe Manager S530 Parametric Test System Reference Manual 2. At the password prompt, enter your password (if you have not been assigned a password, the default password is kthopr). Figure 134: Keithley operator enter password Right-click in an open area of the desktop and select Scripts > KRM in the shortcut menu that is displayed.
Page 357 S530 Parametric Test System Reference Manual Section 8: Recipe Manager The operator mode has the same menus that the engineering mode has, but some of the menu selections are disabled. Though most user inputs are restricted in this mode, you can still view recipe information on the Recipe Contents and Parameters tabs.
Page 358: Setting Up A Project
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Setting up a project A project is a series of environment variables that point to the directory locations of Keithley Test Environment (KTE) files and user libraries. This collection of directory locations defines a local area (for more information about local areas, see Local areas (on page 7-9)).
Page 359 S530 Parametric Test System Reference Manual Section 8: Recipe Manager When the KTE make_project Tool first opens, updated paths are not visible; you must update the paths, as described in the text following this figure. To update the paths, select the square button before each top-level item in the window. When you select a box next to the path in the PLANS, DB, PGM, and USERLIB boxes, the path is automatically populated in the subpaths in the project.
Page 360 Section 8: Recipe Manager S530 Parametric Test System Reference Manual The following figure shows the interface once you have updated the paths. Figure 137: The KTE make_project interface after updating paths To verify that your project was created: 1. At the command prompt, type select_project. A list of existing projects is returned; your project should be visible in the list.
Page 361 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 2. Select the project. 3. Check the environment variables in your project using the ki? command. A list of all the project variables and related files is returned, as shown in the following figure. Figure 139: Project environment variables for the local area S530-901-01 Rev.
Page 362 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Selecting a project A local area is a directory on a system that is reserved for recipe and supporting file development. File directories in a local area are specified by a project, which lists environment variables that point to the directories.
Page 363 S530 Parametric Test System Reference Manual Section 8: Recipe Manager To select a project from the command line: 1. At the command prompt, enter select_project. A list of available projects is returned. Figure 141: Viewing available projects 2. Enter the number of the project you want to select at the command prompt. 3.
Page 364: Using Keithley Recipe Manager With Kte Tools
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Using Keithley Recipe Manager with KTE tools When developing a recipe, you may need to create new supporting files or edit existing supporting files that were created in other Keithley Test Environment (KTE) tools. You can access these tools through Keithley Recipe Manager (KRM).
Page 365: Accessing Ktpm, Wdu, And Lfe From The Recipe Contents Tab
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Accessing KTPM, WDU, and LFE from the Recipe Contents tab You can open the Keithley Test Plan Manager (KTPM), Wafer Description Utility (WDU), and Limits File Editor (LFE) tools from the Keithley Recipe Manager (KRM) Recipe Contents tab. To open KTPM, WDU, and LFE from the KRM Recipe Contents tab: 1.
Page 366: Accessing Kitt And Tse From The Parameters Tab
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Figure 144: Accessing KTPM, WDU, and LFE from the Recipe Contents tab Accessing KITT and TSE from the Parameters tab You can access the Keithley Interactive Test Tool (KITT) and Test Script Editor (TSE) tools from the Keithley Recipe Manager (KRM) Parameters tab.
Page 367 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 2. In the shortcut menu, select one of the following:  Select View to open (fetch) a read-only copy of the file in the local area.  Select Modify to check out the file and lock it in the archive. The related tool opens as specified.
Page 368: Accessing Kult From The Krm Parameters Tab
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Accessing KULT from the KRM Parameters tab You can open the Keithley User Library Tool (KULT) from the Keithley Recipe Manager (KRM) Parameters tab by right-clicking a module name or library name and selecting Start KULT. The module or library that you right-clicked is opened in KULT.
Page 369: Searching For Files From The Krm Parameters Tab
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Searching for files from the KRM Parameters tab You can use the Parameters tab in Keithley Recipe Manager (KRM) to search for a parameter name in the list of parameters on the tab. This is useful when you have a long list of parameters in your recipe.
Page 370: Selecting And Executing Recipes In Operator Mode
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Selecting and executing recipes in operator mode You can use Keithley Recipe Manager (KRM) instead of the Keithley Operator (KOP) Utility as the operator interface for launching test plans. The system that an operator will use can be set up so that KRM is the default program.
Page 371: Executing A Recipe In Operator Mode
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Executing a recipe in operator mode To execute a recipe in operator mode: 1. In the recipe navigator, expand the process and product family that are related to the recipe you need to run.
Page 372 Section 8: Recipe Manager S530 Parametric Test System Reference Manual 4. In the Lot Information dialog box that opens, enter any additional information or comments for the execution of this recipe and select OK. Figure 152: Lot Information dialog box 5.
Page 373: The Keithley Recipe Manager Engineering Mode Process
S530 Parametric Test System Reference Manual Section 8: Recipe Manager The Keithley Recipe Manager engineering mode process The Keithley Recipe Manager (KRM) engineering mode workflow typically follows the process in the following figure. Figure 154: Typical recipe development process The following topics describe this process in detail. To get familiar with how the individual tasks work as complete process, see the Examples (on page...
Page 374: Creating A New Process And Product Family
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Creating a new process and product family Recipes in Keithley Recipe Manager (KRM) are organized in the local area under a process (a group of products sharing common testing requirements) and product family (specific model). Before creating a new recipe, you must create a new process and process family.
Page 375: Creating A New Product Family Under An Existing Process
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Creating a new product family under an existing process You can have multiple product families (specific product models) under a process (a group of products sharing common testing requirements). To create a new product family under an existing process: 1.
Page 376: Creating A New Recipe
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Creating a new recipe Recipes are organized under a process (products with similar test requirements) and product family (specific model) in Keithley Recipe Manager (KRM). You can create a new recipe under an existing process-product family combination, or you can create a new process-product family combination for your recipe.
Page 377 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 4. Select OK. The new recipe is displayed in the recipe navigator. The recipe is populated as follows:  If the product family that was selected in step 1 contains a reference recipe, the new recipe is a copy of the reference recipe.
Page 378: Creating A New Recipe Under An Existing Product Family
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Creating a new recipe under an existing product family To create a new recipe under an existing product family: 1. Select a product family. 2. Select File > New Recipe. An Enter Recipe dialog box is displayed. 3.
Page 379: Creating A New Recipe Using An Existing Recipe
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Creating a new recipe using an existing recipe To create a new recipe using an existing recipe: 1. Select an existing recipe (you do not need to check out the recipe). 2.
Page 380: Creating A Specific Recipe
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Creating a specific recipe In Keithley Recipe Manager (KRM), there two types of recipes: Normal recipe: A normal recipe only calls files labeled for production (PROD). Specific recipe: A specific recipe calls at least one non-PROD labeled version of a supporting file, commonly for diagnostic purposes.
Page 381: Creating New Supporting Files
S530 Parametric Test System Reference Manual Section 8: Recipe Manager 3. Double-click the revisions of one or more PROD-labeled supporting files to change them to non-PROD labeled versions. 4. Select Update to create the specific recipe. A copy of the recipe and its supporting files is saved in the local area.
Page 382: Validating A Recipe
Section 8: Recipe Manager S530 Parametric Test System Reference Manual 5. Select File > Save to save a completely new supporting file or File > Save As to save a modified supporting file with a new name in the appropriate location. 6.
Page 383 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 3. Select Create Report. The recipe is validated, and the selected details are visible in the Keithley Test Documentation Tool window. When prompted to load recipe files before validating, do not select Yes unless you are sure that the checked-out supporting files in the local area may be safely overwritten.
Page 384: Editing Existing Recipes
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Recipe validation reports The recipe validation report contains information about the contents of the recipe and version numbers of files. Figure 160: Recipe validation report Version control in KRM (on page 8-96) for more information about version control in Keithley Recipe Manager.
Page 385 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Figure 161: Rename Recipe dialog box A complete recipe name includes the process, product family, and recipe name (for example, Process-A__ProdFamily-A1__Recipe-A1.krf). This combination must be unique. For more information about naming recipes, see Naming recipes (on page 8-45).
Page 386 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Checking out recipes and supporting files to the local area for revision Before you can modify an existing recipe or supporting file, you must check it out of the archive. To check a recipe out of the archive: The Check Out operation applies to only one file at a time.
Page 387 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Loading all needed supporting files into the local area at once Before you can verify and install a selected recipe in the recipe navigator, all supporting files for the recipe must be in the local area. You can load a PROD-labeled copy of all necessary files to the local area at once using the Load Recipe option.
Page 388 Section 8: Recipe Manager S530 Parametric Test System Reference Manual A read-only copy of the file is inserted into the local area. The file remains unlocked in the archive. In archive view, selecting a recipe automatically results in a fetch operation. If the recipe was not previously present in your local area, it is now present when you switch back to the local view, being displayed in the recipe navigator.
Page 389 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Adding a new recipe to the local area from the archive When a new recipe is checked in to the archive, you can add the recipe to the recipe navigator (local area) without locking the version in the archive.
Page 390 Section 8: Recipe Manager S530 Parametric Test System Reference Manual The recipe is added to the recipe navigator under the appropriate process and product family. If the appropriate process and product family were not previously displayed in the recipe navigator, these are also added.
Page 391 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Figure 164: Differences between files in local view versus archive view 4. When you finish making changes, select File > Save to save the modified recipe in your local area. 5.
Page 392: Checking Files Into The Archive
Section 8: Recipe Manager S530 Parametric Test System Reference Manual When you right-click a file on the Recipe Contents or Parameters tab to start a tool, the file automatically opens when the tool starts. For example, when you start the Keithley Interactive Test Tool (KITT) by right-clicking and selecting KITT c13cu_modc.ktm on the Parameters tab and selecting KITT (Modify), the c13cu_modc.ktm macro is displayed in the KITT Test Macro Editor.
Page 393: Reverting Files To Precheck-Out Status
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Start with a revision offset on initial entry into source control You can check a file into the archive for the first time with a revision number offset. This is useful when you want to use identical limits files with the same revision number on different model systems.
Page 394 Section 8: Recipe Manager S530 Parametric Test System Reference Manual If a recipe has been released, but not yet installed, the release operation can be reversed by selecting Version Control > Other Operations > Remove Label. This removes the PROD label. If the files have been installed, you cannot reverse the release and installation.
Page 395 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 6. Select the options you want and select OK. The Enter Password dialog box is displayed. 7. Enter the release password (default release password is kthadm). 8. Select OK. A Start Install? dialog box is displayed. Figure 167: Start Install? dialog box 9.
Page 396 Section 8: Recipe Manager S530 Parametric Test System Reference Manual 10. Select Yes to continue the installation. When the installation is complete, a dialog box is displayed that says Successfully installed. Figure 169: Install log and successfully installed dialog box 11.
Page 397 S530 Parametric Test System Reference Manual Section 8: Recipe Manager To set up the alternate production-file installation: Edit the $KIHOME/.ki_setup_option_5_vc file to include setenv KI_ALT_KRM_INSTALL $KIBIN/install_files.pl. The install_files.pl script processes the files in the following steps: 1. Makes a copy of the InstallReq.log file. 2.
Page 398: Moving Recipes Between Sites
Section 8: Recipe Manager S530 Parametric Test System Reference Manual You can use another script instead of install_files.pl to provide additional capabilities or different behavior than described above. Moving recipes between sites Use the Keithley Component Manager (KCM) utility to move recipes between sites, as described in the following topics.
Page 399: Deleting Items From The Local Area
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Deleting items from the local area The following topics describe the tasks necessary to delete a recipe and related files from the local area. Deleting a recipe from the local area Do not delete a checked-out recipe or supporting file.
Page 400: Using Batch Operations To Do Common Tasks In Krm
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Deleting a product family from the local area To delete a product family: 1. Make sure the Keithley Recipe Manager (KRM) recipe navigator is in local view by selecting View >...
Page 401: Batch Marking
S530 Parametric Test System Reference Manual Section 8: Recipe Manager The progress of the tests is displayed in the Run window. Recipes are listed in the window with pass or fail information as they are processed. A failure may or may not abort the batch operation, depending on the type of failure.
Page 402: Save Copies To Batch Operation
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Save Copies To batch operation Copies the selected recipe to all marked families, and updates the Name and Time fields. If the selected recipe was archived, then it archives the new recipes. If the head label of the selected recipe was PROD, the new recipes are assigned a PROD label and are added to the Install Request log.
Page 403: Search/Replace/Release Batch Operation
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Search/Replace/Release batch operation If recipes are marked and an item on the Recipe Contents tab is highlighted, the contents of the highlighted edit field are written to all marked recipes. As required, the recipes may be checked out, altered, checked back in, and released.
Page 404: Label Batch Operation
Section 8: Recipe Manager S530 Parametric Test System Reference Manual If a recipe is locked, the lock must be held by the user performing the batch operation. Label batch operation This batch operation labels the head version of all marked files that have been archived with the specified label.
Page 405: Delete Batch Operation
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Delete batch operation The batch operation deletes all marked recipes from the local directory. If the recipes are not archived, this operation is not reversible. A release password is required for this operation. Prerequisites for the Delete batch operation: The recipes must exist in the local directory.
Page 406 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Figure 170: Keithley Recipe Manager user interface 5. In the recipe navigator on the left side of the screen, select a product family. This is where you will create a new recipe. Figure 171: Select existing product family S530-901-01 Rev.
Page 407 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 6. In the File menu, select New Recipe. The Enter Recipe dialog box is displayed. Figure 172: Create a new recipe 7. Enter myRecipe as the new recipe name and select OK. See Creating a new recipe (on page 8-44) for more specific information on recipe naming requirements.
Page 408 Section 8: Recipe Manager S530 Parametric Test System Reference Manual If your recipe has no files shown on the Recipe Contents tab, there may not be a reference recipe for the product family where you created the new recipe. If this is true, you can select the supporting files using the following instructions.
Page 409 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Figure 175: Available limits files 11. Select OK. In the Recipe Contents tab, the Limits File box shows the name of the new limits file. Figure 176: Existing limits file in new recipe 12.
Page 410 Section 8: Recipe Manager S530 Parametric Test System Reference Manual 15. In the Check In window, enter a comment to record relevant information about the new recipe. 16. Select OK. The Check In window closes. 17. With the new recipe still selected in the recipe navigator, select Options > Validate Recipe.
Page 411 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Figure 181: Recipe validation report 19. Select File > Exit to close the Keithley Test Documentation Tool. 20. Test the validated recipe by selecting the new recipe and selecting the Execute Recipe button in the upper left corner of the KRM interface.
Page 412: Example 2: New Recipe, Wafer Description File From Existing Files
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Example 2: New recipe, wafer description file from existing files This example guides you through the following: Creating a new .wdf file by saving a .wdf file in an existing recipe under a new name. Modifying the new .wdf file.
Page 413 S530 Parametric Test System Reference Manual Section 8: Recipe Manager One or more dialog boxes similar to the following figure are displayed if one or more supporting files are already checked out into the local area. A checked-out file may be in the process of revision. Selecting Yes causes the local-area supporting file to be overwritten with the PROD (production-labeled) archive version.
Page 414 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Figure 186: Wafer description file (.wdf) open in the Wafer Description Utility (WDU) 7. Select the Wafer Graph Editor window of the Wafer Description Utility tool. Figure 187: The Wafer Graph Editor window S530-901-01 Rev.
Page 415 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 8. Move a probe-pattern site:  Locate the middle site in the left column of the probe-pattern sites.  Select the site immediately to the left of the middle site in the left column of sites. ...
Page 416 Section 8: Recipe Manager S530 Parametric Test System Reference Manual 11. Select OK. The MyWDF.wdf file is added to the available .wdf files in the local area. You can verify this by reopening and then canceling the Save As dialog box. Figure 190: Verifying new .wdf file was created 12.
Page 417 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 13. In the Wafer Description Utility, select Version Control > Other Operations > Release. A .wdf Release File/Set Label dialog box is displayed. Figure 192: Releasing the new .wdf file in the Wafer Description Utility (WDU) 14.
Page 418 Section 8: Recipe Manager S530 Parametric Test System Reference Manual 19. In KRM, select File > Save As to save the new recipe with a different name. The Enter Recipe dialog box is displayed. Figure 194: Saving the edited recipe with a new name 20.
Page 419 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 21. On the KRM Recipe Contents tab, select the yellow L folder to the right of the Wafer Desc File box. The local area Wafer Description Files dialog box is displayed. Figure 196: Selecting the revised wafer description file 22.
Page 420 Section 8: Recipe Manager S530 Parametric Test System Reference Manual 23. Select Version Control > Other Operations > Check In. The Check In dialog box is displayed, showing the name and path of the new recipe in the local area. Figure 198: Checking in the new recipe 24.
Page 421 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Figure 201: Building Report KTDT message Figure 202: Recipe validation report If you plan to continue with example 3, do not delete the recipe that you created in this example. The recipe is the starting point for example 3.
Page 422: Example 3: Release And Install A Recipe
Section 8: Recipe Manager S530 Parametric Test System Reference Manual Example 3: Release and install a recipe This example leads you through the release and installation of a recipe, starting with the MyRecipe2 recipe that you created in Example 2: New recipe and wafer description file from existing files page 8-80).
Page 423 S530 Parametric Test System Reference Manual Section 8: Recipe Manager 4. Select Yes. The Test Program Messages: Lock Check window and Number of Locked Files dialog box are displayed. Figure 206: Lock Check dialog box showing locked files The supporting files listed in the Test Program Messages: Lock Check window are checked out and may be in the process of revision.
Page 424 Section 8: Recipe Manager S530 Parametric Test System Reference Manual 7. Enter your release password and select OK (the default release password is kthadm). A Start install? dialog box is displayed. Figure 209: Start Install? dialog box 8. Select Yes. A Testers Found dialog box is displayed. Figure 210: Testers found dialog box 9.
Page 425: Administration
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Administration The following topics describe administrative tasks for user accounts and user-defined fields and files. For more in-depth information about version control systems, see Version Control (on page 7-1). Configuring user-defined recipe contents fields and terminology You can configure the krm.ini file to define user-defined fields in the Keithley Recipe Manager (KRM) interface and customize the name used for the latest revision of a recipe or supporting file.
Page 426 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Figure 212: Example krm.ini file showing settings for user-specified fields S530-901-01 Rev. B / January 2019 8-94...
Page 427: Environment Variables For User-Defined Files In Keithley Recipe Manager
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Entry Description headLabel Specifies the KRM term for the latest revision of a recipe, supporting KTE file, or supporting user library. The default term in the KRM interface is Head. numFields Specifies the maximum number of fields that KRM displays.
Page 428: Version Control In Krm
Section 8: Recipe Manager S530 Parametric Test System Reference Manual For more detailed information about environment variables, see the Software (on page 6-1) section of this manual. Version control in KRM Files, revisions, and other information for all versions of existing recipes and supporting files (.cpf, .wdf, and other files and user libraries) are stored in the archive, which is a protected directory on the server (or in a separate archive directory in a single-system configuration).
Page 429: Recipe Management And Version Control Terminology
S530 Parametric Test System Reference Manual Section 8: Recipe Manager Recipe management and version control terminology The following terms are used in this documentation in the context of Keithley Recipe Manager (KRM) and version control. Term Description Archive Also called the revision control directory. A directory that securely stores every version of every test recipe and supporting files that are in use and have been used in the past.
Page 430 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Term Description InstallRecord.log A file in the archive that contains a history of each file installation operation for each file bundle in each staging directory. Install request file See InstallRequest.log. InstallRequest.log A file in the archive that contains a list of files that have been released but not yet installed on test systems.
Page 431 S530 Parametric Test System Reference Manual Section 8: Recipe Manager Term Description Recipe Manager Keithley Recipe Manager (KRM) is the primary tool for combined recipe version control and file development. The user interface allows you to select recipes, product families, processes, and primary supporting files.
Page 432 Section 8: Recipe Manager S530 Parametric Test System Reference Manual Term Description Version control KRM features that control storage, retrieval, modification, and use of every recipe and supporting file version that is being used in the present and has been used in the past. Version control provides traceability for the algorithms, input conditions, and collected data for a test each time that it is executed.
Page 433: Frequency Analysis
To use the frequency analysis option in your system, you should be familiar with fundamental C programming, as well as with the operation of your Keithley S530 parametric test system. If you are not familiar with this programming language or the test system, become familiar with them before...
Page 434: Ring Oscillator Structures And Measurement
Section 9: Frequency analysis S530 Parametric Test System Reference Manual Ring oscillator structures and measurement The main purpose of ring oscillator structures is to allow chip designers to characterize the switching speed and propagation delays of logic gates. Propagation delay is calculated using the following formula: Equation 1: Propagation delay formula n is the number of stages in the CMOS inverter chain...
Page 435 S530 Parametric Test System Reference Manual Section 9: Frequency analysis Figure 213: Using KITT to make a scope card measurement Figure 214: Using KITT to make a measurement with the RSA306B S530-901-01 Rev. B / January 2019...
Page 436: Measurement Commands For Ring Oscillator Applications
Section 9: Frequency analysis S530 Parametric Test System Reference Manual Measurement commands for ring oscillator applications The measurement commands for ring oscillator measurement are C-language commands that measure the following signal characteristics: Inverter chain CMOS ring oscillators (see the following figure) Differential ring oscillators (supported types only) Figure 215: Generalized inverter chain ring RSA306B LPTLib commands...
Page 437: Scope Lptlib Commands
S530 Parametric Test System Reference Manual Section 9: Frequency analysis Scope LPTLib commands You can use the following LPTLib commands to make measurements with the S530 only if you have a 4200-SCP2HR scope card in your system. For more detailed information about these commands, see the "LPTLib command reference" section in the Keithley Test Environment (KTE) Programmer's Manual (part number S500-904-01).
Page 438 Section 9: Frequency analysis S530 Parametric Test System Reference Manual Scope card macro double vcc = 5.0 conpin(SMU1, vcc_pin, vccb_pin, 0) conpin(vss_pin,GND, 0) conpin(SCP1A, out_pin, 0) forcev(SMU1, vcc) status_1 = scp_init() status_2 = scp_setup(0e6, 15e6, 1e6) status_3 = scp_measure(frequency,level) S530-901-01 Rev. B / January 2019...
Page 439: Pulse Generation
To use the 4220-PGU in your system, you should be familiar with fundamental C programming, as well as with the operation of your Keithley S530 parametric test system. If you are not familiar with this programming language or the test system, become familiar with them before proceeding.
Page 440 Section 10: Pulse generation S530 Parametric Test System Reference Manual Period: The period of a burst of pulses is the time between the 50% point of two consecutive leading edges of the pulse stream and is expressed in seconds. Rise time: The rise time of a pulse is the time it takes for the leading edge of a pulse to rise from the 10% level to the 90% level and is expressed in seconds.
Page 441 S530 Parametric Test System Reference Manual Section 10: Pulse generation Command summary The following table contains brief descriptions of the high-level software commands in the control software. For more detailed information, see the Keithley Test Environment (KTE) Programmer's Manual (part number S530-904-01). These commands are only compatible with systems that have 4220-PGU pulse cards.
Page 443 Section 11 Diagnostics and troubleshooting In this section: Overview ................11-1 The diagnostics process ............11-1 User interface ................. 11-3 Selection area tabs ..............11-7 Menu and toolbar selections ..........11-12 Command-line arguments ............ 11-13 Configuration ................ 11-13 Troubleshooting diagnostics software startup ...... 11-14 Test sequence ..............
Page 444: Diagnostics And Troubleshooting
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The 9139A probe card may not be used in testing that exceeds 200 V. Testing in excess of 200 V may damage test equipment, or cause injury or death due to electrical shock. Hazardous voltages may be present on the probe card adapter, even after you disengage the interlock.
Page 445: User Interface
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting The diagnostics and system verification tests output voltage at the output cables and the probe card. Ensure safe operation by properly using safety interlocks, as described in the "Safety interlocks" section of the S530 Administrative Guide (part number S530-924-01). User interface The images in this section may look different on your system;...
Page 446: Selection Area
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Selection area The selection area is on the upper left side of the user interface. Figure 219: Selection area The selection area contains the following tabs: Dashboard tab (on page 11-7) Matrix tab (on page 11-8) SMU tab...
Page 447: Control Area
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Control area The control area is on the right side of the user interface. Figure 220: Control area The selections in this area allow you to execute, pause, continue, and stop selected tests. You can also choose a loop count to run one or more tests multiple times.
Page 448: Status And Result Area
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Use the All option under the Execute button to select all of the diagnostic tests available on your system. Use the Selected option to execute diagnostic tests selected in the Matrix, SMU, and Optional Instruments tabs.
Page 449: Selection Area Tabs
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting This area of the user interface contains the Status and Result tabs. These tabs display test information as the diagnostic tests execute. To monitor the testing process, select the Status tab to see the status of a test, or select the Result tab to view test result information.
Page 450: Matrix Tab
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The Tests Configured list updates during test execution to provide a high-level summary of the diagnostics testing state. You can choose between executing only diagnostic tests or system verification tests in the Testing Mode area of the tab.
Page 451 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Figure 223: Diagnostics Matrix tab You can choose one or more tests individually by clicking the Selected option on the right side of the interface (the control area) and selecting the tests you want to run in the selection area of the tab. Select all of the tests by choosing All in the control area.
Page 452: Smu Tab
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual SMU tab You can select and execute the SMU diagnostics tests in the SMU tab (shown in the following figure). Figure 225: S530 diagnostics SMUs tab You can select all SMUs or specific SMUs for testing. You can also select all SMU ranges, specific voltage ranges, or specific current ranges to test.
Page 453: Optional Instruments Tab
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Optional Instruments tab The Optional Instruments tab, shown in the following figure, allows you to select and execute only the diagnostics tests available for optional instruments: Capacitance meter (CMTR) Oscilloscope (Scope) or spectrum analyzer Digital multimeter (VMTR) Pulse generator (PGU)
Page 454: Menu And Toolbar Selections
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Menu and toolbar selections Menu bar You can load and save diagnostic tests in the user interface using the File menu. Figure 227: Menu The File and Help menus are summarized in the following table. Menu selection Description Load Test Selections...
Page 455: Command-Line Arguments
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Command-line arguments The following command-line arguments are supported by the diagnostics software user interface: -c testSelectionFileName Load the test selection file. -o resultsFileName Set the output file name to resultsFileName. Enable stop on failure mode.
Page 456: Troubleshooting Diagnostics Software Startup
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Troubleshooting diagnostics software startup If you are having trouble starting the S530 diagnostics software, review the following topics for possible solutions to the problem. If you do not find a solution to your problem here, contact your Keithley field service engineer (FSE). Project environment settings To run the diagnostics software, the S530 project environment must be set to the default setting.
Page 457: Hosts Entries In Nsswitch.conf File
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Hosts entries in nsswitch.conf file If you are having problems starting the S530 diagnostics program, the problem may be the order in which hosts are listed in the /etc/nsswitch.conf file. To check this, open the nsswitch.conf file and make sure that the files host is listed first on the hosts: line, as shown in the following figure.
Page 458: Test Sequence
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Test sequence The following list is an outline of the diagnostic testing sequence. Each of these steps is described in detail in the rest of this section. System information (on page 11-17) Details about system instruments, matrix cards, software, and relay usage.
Page 459: System Information
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting System information Before prerequisite tests begin, the diagnostics software queries the system to identify all of the instruments and matrix cards in the S530 system. Information shown in the diagnostics log includes: System: Name of the S530 system (for example, S5300q3333) Model: System type (for example, S530) KTE Version: Version of the Keithley Test Environment (KTE) software installed on the system...
Page 460: Prerequisite Tests
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Prerequisite tests The prerequisite tests determine if the instruments in the system are working properly, if a minimum number of source-measure units (SMUs) exist in the system, and if matrices in the system are functioning.
Page 461 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting SMU 2-wire prerequisite test for SMUs with 707B matrix The following sequence is completed for each source-measure unit (SMU) in your system. SMU 2-wire prerequisite test sequence (SMUs and 707B matrix): 1.
Page 462 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Figure 230: S530 SMU1 and pin 1 connected The following figure shows SMU1 and pin12 connected during the Kelvin-pin detection. The blue pathway shows pin1 connected to GND to complete the LO-sense LO portion of the Kelvin connection.
Page 463: Diagnostic Tests
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Figure 231: S530 SMU1 and pin 12 connected Diagnostic tests Once prerequisite testing has completed and all tests have passed, diagnostic testing can begin. The following topics describe the diagnostic tests. Installed probe card Before the diagnostic tests begin, the diagnostic software determines the type of probe card that is installed in the system.
Page 464 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Kelvin pin tests (4-wire systems only) This diagnostic test is the same as the prerequisite Kelvin pin tests (on page 11-19). You can run this Kelvin pin-connection test separately to validate connections from the system to the probe card.
Page 465 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting The following figures show the differences in the matrix arrangement and card numbering. Figure 232: Matrix arrangement with 24 pins or fewer in the system Figure 233: Matrix arrangement with more than 24 pins in the system In the test descriptions that follow, the figures show matrix arrangements for systems with only one matrix mainframe.
Page 466 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Isolation relay tests All of the relay cards used in the S530 KTE systems contain isolation relays for row connections. In high-voltage systems, the 7072-HVD cards also have isolation relays between certain pathways. The 707B mainframe cannot directly control the isolation relays.
Page 467 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting The following figure shows the matrix connection for testing pathway A. Figure 234: Validate all pathways for card 1 S530-901-01 Rev. B / January 2019 11-25...
Page 468 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The following figure shows the matrix connections to verify pathways A and B. Figure 235: Check card 1 and card 2 isolation relays S530-901-01 Rev. B / January 2019 11-26...
Page 469 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting The following figure shows the connections to check card 1 and card 3 isolation relays. Figure 236: Check card 1 and card 3 isolation relays Results: If all of the above tests pass and fail at the appropriate times, the row isolation relays for pathway A to B between card 1 and card 2 are operational.
Page 470 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Test details During the test, current is forced and measured with SMU1. If current flows, the test concludes that the row isolators for card 1 and card 2 are closing. The test must also verify that these isolation relays open correctly.
Page 471 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Figure 237: Sense card 5 and card 4 isolation relays S530-901-01 Rev. B / January 2019 11-29...
Page 472 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The matrix connections used to validate the isolation relays for pathway A and B between cards 5 and 6 are shown in the following figure. Figure 238: Sense card 5 and card 6 isolation relays Results: Once testing has completed for card 6, the diagnostics software determines if the row isolation relays are good.
Page 473 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Force-side column isolation relays This test is for the 7072-HVD cards only. This test measures and validates that the column isolation relays are operating correctly. At the start of the test, the minimum number of Kelvin connections is detected and the source-measure unit (SMU) is tested to ensure it can force current into the ground (GND) connection.
Page 474 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Figure 239: S530 diagnostics force-side column isolation relay (pretest) S530-901-01 Rev. B / January 2019 11-32...
Page 475 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting The following figure shows the matrix connection used to validate the column isolation relay for column 2. The red path shows where current should not flow due to the isolation relay being open. This is expected behavior.
Page 476 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The following figure shows the matrix connections used to validate the column isolation relay for column 2 on card 2. Figure 241: Force-side column 2 on card 2 isolation relay test Test sequence measurement details The test sequence used is as follows: Close relay(s)
Page 477 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Sense-side column isolation relays This test is for the 7072-HVD cards only. This test measures and validates that the column isolation relays are operating correctly. At the start of the test, the diagnostics software validates that the minimum number of Kelvin connections is available and that card 4 pathways B and C are functional.
Page 478 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Figure 243: Sense-side column isolation relay (pretest pathway C) Once valid pathways are confirmed, the column isolation relay test may be run. The following figure shows the matrix connection used to test the isolation relay for column 1 on matrix card 4.
Page 479 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Figure 244: Sense-side column isolation relay test The previous test sequence is repeated for all columns in matrix cards 4, 5 and 6. Column isolation relay driver test This test is for the 7072-HVD cards only. The 7072-HVD matrix card contains isolation relays for each column between pathways B and C.
Page 480 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The driver circuitry for these isolation relays can sometimes be damaged, which causes intermittent behavior of the matrix card. All of the configured pins in the system must have a valid Kelvin connection. If the system does not have a valid connection, the column isolation relay test will not execute.
Page 481 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting The relays on pathway B on card 5 are closed and opened, one at a time, and current flow is measured by the SMU. For example, the relay on column 49 is closed, and SMU1 forces 1mA of current. If the isolation relay driver circuitry works correctly, current flows from the SMU to GND.
Page 482 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Sense-side isolation relay driver test This sense-side isolation relay driver test of the matrix is tested next. A scheme similar to the force-side isolation test is used, except the connections are slightly different (shown in the following figures).
Page 483 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Pins 1 through 3 on the sense card are tested using pin 4 for the GND connection. Each of the three relays on columns 13, 14, and 15 are closed and opened, one at a time, to test the isolation relays on the sense card.
Page 484 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The SMU is placed in 2-wire test mode. The test connects a circuit from a forcing SMU to ground (GND). The test forces 1 mA and measures voltage and current using the SMU (voltage limit set to 5 V). 707B force-side relay test Two relays from a column are tested at one time, with an open-test or close-test approach (similar to the force-side row isolation tests).
Page 485 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting The following figure shows the connections: SMU1 1A01,1B09, 1A02,1B02 Figure 249: Testing force-side relays on card 1 S530-901-01 Rev. B / January 2019 11-43...
Page 486 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The following figure shows a later step in the 2-wire relay test. Figure 250: Testing force-side relays on card 2 Model 7072-HVD matrix card discharge circuit test This test is for the high-voltage system 7072-HVD cards only. The 7072-HVD matrix card provides a hardware mechanism to discharge any stored energy in connected cables or devices under test (DUTs).
Page 487 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Sense-side relay tests This test does not apply to the 7530 matrix card. These tests connect various pathways to validate the relays on the sense-side of the matrix (cards 4 through 6 on systems with up to 24 pins;...
Page 488 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Figure 252: Sense-side relay testing example 2 For sensitive systems, the diagnostics routine runs the force-side tests and skips the sense-side tests. For high-voltage systems, diagnostics runs both force-side and sense-side tests, each with an additional discharge test.
Page 489 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting 2. The measuring SMU measures the current on the adjacent pathway. A measurement higher than the leakage threshold is a failure; leakage limits vary by system type (see the results information in the user interface for specific leakage limits).
Page 490 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Matrix continuity tests This test measures the resistance of the pathways to make sure that relay contacts are working properly. 707B matrix continuity test The diagnostics software repeats the following sequence for each pathway. Matrix continuity test sequence: 1.
Page 491 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Pin leakage tests There are three parts to the pin leakage test: 1. Pin leakage test: Check for leakage or shorts between adjacent pathways 2. Pin-guard test: Check for leakage or shorts on the guard signal of the pathways 3.
Page 492 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Figure 255: Pin 1 to pin 2 leakage test connection Pin-guard test The pin-guard test is similar to the pathway shorts test where a quasistatic, SMU-based capacitance measurement is used to test for guard-to-ground shorts. The maximum capacitance value is 150 pF. Pin settling test The third part of the pin leakage test is the pin settling test.
Page 493 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting This test works according to the following pseudocode: conpin(SMU1, test_pin, 0) conpin(GND, all_other_pins, 0) limit(SMU, 1e-3) lorangei(SMU, 1e-10) rangei(SMU1, 10e-9) setauto(SMU1) forcev(SMU, 100) delay(1000) intgi(SMU1, settling_leakage) SMU range tests The SMU range tests are used to verify that each source-measure unit (SMU) can force and measure properly on each of the available voltage and current ranges.
Page 494 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The following figure shows the matrix connection used to test the ranges for SMU1. SMU2 is used as the measuring SMU for this test. Figure 256: SMU range test connection Tests for other instruments The diagnostics software can perform tests for other instruments: Capacitance meters, oscilloscopes, pulse generators, digital multimeters, and prober chucks.
Page 495 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Oscilloscope test The oscilloscope (SCP) test uses the built-in self-test function of the 4200-SCP2HR card. Pulse generator test The diagnostics software performs the following test on the pulse generator (PGU). Pulse generator test sequence: 1.
Page 496: System Verification
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual System verification The system verification routines test and measure the instruments in the test system to ensure that they are operating within the system specifications. The diagnostics routines described in the previous section must be executed before the system verification tests can run.
Page 497: Verification Probe Card
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Verification probe card The system verification routines require the use of a specific probe card that is included when ordering the 9139A-PCA or 9139B-PCA probe card adapter with the S530 system. These probe cards have pins shorted together to create pathways from the system to the probe card and back to the system.
Page 498 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual The following images show examples of shorted verification probe cards and blank probe cards. Figure 257: Shorted 9139A verification probe card Figure 258: Blank 9139A probe card S530-901-01 Rev. B / January 2019 11-56...
Page 499: Verification Tests To Execute
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Figure 259: 9139B shorted probe card Figure 260: 9139B blank probe card Verification tests to execute The tests used to verify the system specifications are similar to those used for diagnostics testing. The main difference is that the pathways include a round-trip to and from the probe card through the shorted pins, and the verification measurement data is compared against a different set of limits than the diagnostics tests.
Page 500: Smu Verification
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual SMU verification This test connects the force source-measure unit (SMU) to pin A and measures SMU to pin B (where pin A and pin B are shorted together). It then executes the diagnostics SMU range tests against tighter limits than the limits used for diagnostic testing.
Page 501: Troubleshooting Overview
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting During execution of a test, the Status and Result tabs provide information pertaining to executed tests. Any time you want to interrupt the automatic scrolling during an active diagnostics session, click the window and scroll.
Page 502: Troubleshooting Flow Chart
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Troubleshooting flow chart The troubleshooting flow chart represents the procedures that you should use. Refer to the Troubleshooting procedure steps (on page 11-61) after this flow chart for detailed, step-by-step information.
Page 503: Troubleshooting Procedure Steps
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Troubleshooting procedure steps To use the diagnostics software to troubleshoot problems, follow the steps described below. To prevent damage to the pins on your shorted probe card, use the blank probe card (supplied with your system) when troubleshooting.
Page 504 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual 1. Review the Status and Result tabs for test result information. 2. Find the specific test that results in the failure. If there is more than one failure, address the first failure that appears in the Status or Result log.
Page 505: Troubleshooting Prerequisite Tests
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Troubleshooting prerequisite tests The following tables are presented in chronological test order and represent the tests that are done during prerequisite diagnostic testing. They contain guidance on the failures that may occur during the prerequisite diagnostic tests.
Page 506 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual 2-wire force side prerequisite test troubleshooting (continued) Test failures or symptoms Possible solutions 1. Check the Result tab for LPT error code E0020 or E0029. If this error occurred, see the troubleshooting A failing SMU.
Page 507 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Kelvin prerequisite test troubleshooting Test failures or symptoms Possible solutions Issue with relay on matrix card. Failure with all SMUs on the same pin and Contact your local Keithley Instruments field service engineer matrix path for Kelvin detection.
Page 508 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual 4-wire sense-side troubleshooting Test failures or symptoms Possible solutions Potential short between matrix card pathways: All SMUs fail two adjoining pathways. 1. Remove power from the system (refer to the procedure "Remove system power"...
Page 509: Troubleshooting Matrix Diagnostic Tests
S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Troubleshooting matrix diagnostic tests The following tables provide information about failures that may occur during matrix diagnostic testing. If you cannot find a comparable solution to your issue, contact your local Keithley Instruments field service engineer (FSE).
Page 510 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Test failures or symptoms Possible solutions A faulty relay: 1. If intermittent, this test may pass, then fail the next time. Sense-side row isolation failure. To check for this, update the loop count field, select Only this test from the Matrix tab and run the selected test.
Page 511 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Sense-side relay test troubleshooting Test failures or symptoms Possible solutions A faulty relay: Sense-side failure 1. If intermittent, this test may pass, then fail the next time. To check for this, update the loop count field, select Example: Only this test from the Matrix tab and run the selected test.
Page 512 Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Matrix leakage test troubleshooting (continued) Test failures or symptoms Possible solutions 1. Verify SMU1 cable connections are valid from the rear panel of the SMU to the matrix. Failing SMU1 measured capacitance for all 2.
Page 513 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting Kelvin connection pin leakage test troubleshooting Test failures or symptoms Possible solutions A faulty relay: One or more pins fail the Kelvin check. 1. If intermittent, this test may pass, then fail the next time. To check for this, update the loop count field, select Only this test from the Matrix tab and run the selected Example:...
Page 514: Troubleshooting Smu And Other Instrument Diagnostic Tests
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Troubleshooting SMU and other instrument diagnostic tests The following tables contain guidance on the failures that may occur during the diagnostic tests on source-measure units (SMUs), capacitance meters (CMTRs), and pulse cards (PGUs). If you cannot find a comparable solution to your issue, contact your local Keithley Instruments field service engineer (FSE).
Page 515 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting CMTR test troubleshooting Test failures or symptoms Possible solutions Check the capacitance meter (CMTR) HI Pot and HI Cur connections to LO Pot and LO Cur cables. Bias test failure on all path pairs (A & B, C & D, and so on) due to swapped HI and LO Verify that the connections to CMTR and CMTR protection signal connections.
Page 516: Advanced Troubleshooting Information
Section 11: Diagnostics and troubleshooting S530 Parametric Test System Reference Manual Advanced troubleshooting information The following topics contain advanced troubleshooting information. Force-side isolation card tests When you test the force-side of the matrix to verify the row isolation relays (see the Force-side row isolation relays (on page 11-24) topic for more information):...
Page 517 S530 Parametric Test System Reference Manual Section 11: Diagnostics and troubleshooting The location of this file: system using ACS version 5.4 is C:\ACS\Diagnostics\Report\ On a Windows ® system using KTE version 5.8 is $KILOG directory (default = /opt/kiS530/log) ® On a Linux IC log file ®...
Page 518: Maintenance
Section 12 Maintenance In this section: Introduction ................12-1 Repair and replacement ............12-1 Adjustment ................12-1 Power distribution and emergency off ........12-3 Data hub license ..............12-4 Decommissioning an S530 test system ......... 12-6 Introduction This section describes routine maintenance that should be done on the S530 System. Replacement of system hardware should be done by qualified service personnel only.
Page 519 Section 12: Maintenance S530 Parametric Test System Reference Manual Hazardous voltages may be present on the probe card adapter, even after you disengage the interlock. Cables can retain charges after the interlock is disengaged, exposing you to live voltages that, if contacted, may cause personal injury or death. Never attempt to touch or change a probe card when tests are running.
Page 520: Power Distribution And Emergency Off
S530 Parametric Test System Reference Manual Section 12: Maintenance Power distribution and emergency off The following figure contains a simplified example layout of various components in the S530 system. Figure 262: S530 system cabinet rear view S530-901-01 Rev. B / January 2019 12-3...
Page 521: Data Hub License
Section 12: Maintenance S530 Parametric Test System Reference Manual Data hub license The data hub license allows the Keithley Test Environment (KTE) software to communicate with a prober. This license is installed on all systems when they are shipped. If you upgrade or reinstall the KTE software, you may need to reinstall the data hub license. To upgrade systems with KTE versions earlier than version 5.5.0: ®...
Page 522 S530 Parametric Test System Reference Manual Section 12: Maintenance 5. At the prompt, enter 1 and press Enter to select the DMH (datahub) option. 6. Follow the remaining prompts and press Enter after each response you type. 7. Once the installation has completed, type $KIBIN/shutdown_S530.pl and press Enter to power down the S530 system.
Page 523: Decommissioning An S530 Test System
The S530 system may be used with other equipment such as automatic probers and third-party probe card adapters. Tektronix is not in control of these products and the original equipment manufacturer should always be contacted for proper recycling procedures.
Page 524: Index
Index Add KTE files from the local area to the KRM archive • 8-14 %SDEV • 6-132 Adding a new recipe to the local area from the %Spec • 6-132 archive • 8-57 %Vld • 6-132 Additional features • 8-2 Adjustment •...
Page 525 Index S530 Parametric Test System Reference Manual cassette plan builder • 6-85 Commands scroll box • 6-44 file menu • 6-86 Comparing versions of a file • 7-21 help menu • 6-87 Configuration • 11-13 options menu • 6-87 Configuring the tool.tpi file • 6-166 Cassette plan builder •...
Page 526 S530 Parametric Test System Reference Manual Index cur_wwp_list_ptr • 6-229 description window • 6-65 current_slot_list • 6-228 Description window • 6-65 current_wwp_list • 6-228 Development-only system setup • 8-13 Custom Identifier Separators • 6-51 Device data window • 6-38 Device list • 6-38 Diagnostic tests •...
Page 527 Index S530 Parametric Test System Reference Manual error and event logging • 6-122 probe card file format • 6-206 Error and event logging • 6-122 test structure file format • 6-202 Error and warning message area • 6-62 user access point file format • 6-219 Example •...
Page 528 S530 Parametric Test System Reference Manual Index GPIB commands • 5-3 Isolation relay test troubleshooting • 11-67 Graph area • 6-144 Isolation relay tests • 11-24 Graphical editing features • 6-29 Graphical site displays • 6-29 KCAT KCAT main window • 6-143 Help menu •...
Page 529 Index S530 Parametric Test System Reference Manual KSU main window • 6-134 KI_ktxe_skip_limits_check • 6-224 other KSU main window controls • 6-141 KITT Starting KSU • 6-133 KITT main window • 6-40 KITT results window • 6-45 Keithley Test Environment (KTE) KTE data usage •...
Page 530 S530 Parametric Test System Reference Manual Index ktxe_disable_statdlg • 6-232 KTE data usage • 6-51 ktxe_disable_uap • 6-232 KTE Support Utilities • 6-7 ktxe_enable_cl_log • 6-232 KTE data usage • 6-51 ktxe_enable_doc • 6-232 KTE file formats • 6-198 ktxe_error_gui • 6-233 KTE KUI localization •...
Page 531 Index S530 Parametric Test System Reference Manual KULT Version Control > Library Settings submenus • data entry area • 6-77 7-35 using limits files • 6-174 KULT Version Control > Release Library • 7-32 Limits checking • 6-125 KULT Version Control > Remove Library Label • Limits data entry area •...
Page 532 S530 Parametric Test System Reference Manual Index lotid • 6-236 migrating user libraries with migrate_usrlib • 6-69 Low-voltage SMU range test • 11-51 Migrating user libraries with migrate_usrlib • 6-69 Min and Max • 6-132 Model 2636B System SourceMeter Instrument • 2-3 macro Model 7072-HV High-Voltage Semiconductor Matrix Keithley test macro (.ktm) •...
Page 533 Index S530 Parametric Test System Reference Manual Normal and specific recipes • 8-22 Pin leakage tests • 11-49 NPLC default differences • 4-11 Pin settling test • 11-50 Pin-guard test • 11-50 Plan type selection button • 6-83 Open interface environment variables • 6-154 plot Operating environment conditions •...
Page 534 S530 Parametric Test System Reference Manual Index prober_wafer_id • 6-237 Recovering from an emergency shutdown • 4-4 Procedures • 6-71 Release batch operation • 8-72 product_file • 6-237 Releasing and installing a recipe or supporting file • 8-61 Production directory structure • 7-15 Remove Label batch operation •...
Page 535 Index S530 Parametric Test System Reference Manual Sample programs • 6-187 Shadow log file • 11-74 Samples • 6-160 Shut down using KTE • 4-3 Save Copies To batch operation • 8-70 Single-system checklist • 8-5 scaling window • 6-145 Single-system setup •...
Page 536 S530 Parametric Test System Reference Manual Index SpecL and SpecH • 6-132 Build the local KULT library • 7-25 Spectrum analyzer commands • 5-5 Step F Staging directories • 7-12, 8-22 Deliver the updated Library Prototypes file • 7-25 standard Step G UAP file field •...
Page 537 Index S530 Parametric Test System Reference Manual Target • 6-78 Tool bar • 6-144 Target Setup window • 6-21 total_sites • 6-239 Test data fields • 6-43 total_wafers • 6-239 Test details • 11-28 Transferring production file bundles to the client test documentation tool •...
Page 538 S530 Parametric Test System Reference Manual Index UAP_POST_INITIAL_WAFER_LOAD • 6-115 Understanding the archive InstallRecord.log file • 7-11 UAP_POST_LOT_INFO • 6-115 Understanding the archive InstallRequest.log file • UAP_POST_PROBER_INIT • 6-114 7-10 UAP_PRB_ERR_HDLR • 6-120 Understanding the head version and the PROD label UAP_PROBER_INIT •...
Page 539 Index S530 Parametric Test System Reference Manual User Library files required for KTXE execution • wafer description file description field • 6-85 6-121 wafer description file format • 6-199 User library modules • 6-247 wafer description file selection field • 6-83 User library tool environment variables •...
Page 540 S530 Parametric Test System Reference Manual Index wdfptr • 6-239 WDU File menu • 6-16 WDU Help menu • 6-17 WDU main window • 6-14 WDU Options menu • 6-16 WDU Window menu • 6-17 When you receive your system • 1-3 wpf_info •...
Page 541 Specifications are subject to change without notice. All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www.tek.com/keithley 12/17...

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