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Tektronix Keithley S500 Administrative Manual

Integrated test system
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Keithley Instruments
28775 Aurora Road
Cleveland, Ohio 44139
1-888-KEITHLEY
http://www.keithley.com
System Description
The S500 Integrated Test System is an instrument-based system configuration from Keithley Instruments used
primarily for semiconductor parametric characterization testing. The S500 has a wide degree of hardware
flexibility, allowing users to configure a system best suited for their applications. Table 1 lists general S500
configuration options, while Table 2 lists configurations used specifically for High Voltage and/or High Current
testing of high-power semiconductor devices.
Table 1
S500 system configuration choices
Series 2600 System SourceMeter
Model 4200-SCS/C Semiconductor
Characterization System
Switching
Cabinet selection
Computer selection – Industrial PC with RAID
®
Linux
or Microsoft Windows
system
Flat panel display selection
Other options
Specifications are subject to change without notice
PA-939 Rev. C / October 2014
•
®
Instruments
0 to 22*
•
Any combination of 2612s or 2636s
•
0 to 4*
•
With 4200-SMUs, 4210-SMUs, 4210-CVU, 4220-PGUs, 4225-PMUs,
or 4200-PAs
•
/F or /C chassis (with or without flat panel display, respectively)
One of the following four choices:
•
None
•
0 to 4 ea. 708B*. Choice of switching card:
•
0 to 3 ea. 707B*. Choice of switching cards:
•
0 to 6 ea. 3706A*. Choice of switching cards (per mainframe):
•
37U with or without vented front door
•
37U with or without advanced seismic reinforcement
•
23U with or without partially-vented front door
•
None
®
operating
•
Internal computer
•
None
•
Monitor with support arm
•
Monitor installed externally
•
Adjustable cable support arm
S500 Integrated Test System
Administrative Guide
a) 1 ea. 7072, or
b) 1 ea. 7072-HV, or
c) 1 ea. 7174A
a) 1 to 6 ea. 7072, or
b) 1 to 6 ea. 7072-HV, or
c) 1 to 6 ea. 7174A
a) 1 to 6 ea. 3720, or
b) 1 to 6 ea. 3721, or
c) 1 to 6 ea. 3722, or
d) 1 to 6 ea. 3723, or
e) 1 to 6 ea. 3730, or
f) 1 to 6 ea. 3740
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  • Page 1 S500 Integrated Test System Keithley Instruments Administrative Guide 28775 Aurora Road Cleveland, Ohio 44139 1-888-KEITHLEY http://www.keithley.com System Description The S500 Integrated Test System is an instrument-based system configuration from Keithley Instruments used primarily for semiconductor parametric characterization testing. The S500 has a wide degree of hardware flexibility, allowing users to configure a system best suited for their applications.
  • Page 2 S500 Integrated Test System Administrative Guide *Maximum number depends on system cabinet height of 37U as well as other items selected. Table 2 S500 high power semiconductor testing configuration choices • ® Series 2600 System SourceMeter Instruments 0 to 3 •...
  • Page 3 S500 Integrated Test System Administrative Guide Figure 1: Block diagram for a typical Standard and High Power S500 configuration Specifications are subject to change without notice PA-939 Rev. C / October 2014 3 of 33...

  • Page 4: Site Preparation & Installation

    S500 Integrated Test System Administrative Guide Power distribution unit (PDU) connections and power distribution basics The Model 42000-PDU consists of a 24 V DC output to supply EMO circuitry with power. This supply also provides 24 V DC out through banana jacks. Additional outlets provided are two specially switched power outlets (factory configuration: Always on), and three strips of four switched outlets (off only with EMO condition).
  • Page 5 S500 Integrated Test System Administrative Guide Unpacking system components Inspect the shock sensor located on the outside of the shipping box (see next figure). If the shock sensor indicates a shock condition, conduct a very thorough inspection of all components contained in the system cabinet. Also, check the "TIP N TELL"...
  • Page 6 S500 Integrated Test System Administrative Guide Figure 6: Opening the front of the crate Attach the ramp using the two bolts that are attached to the bottom front part of the crate. Figure 7: Front of crate with ramp down Specifications are subject to change without notice PA-939 Rev.
  • Page 7 S500 Integrated Test System Administrative Guide Remove the padding from the front of the S500 system cabinet. Figure 8: Removing padding from cabinet Specifications are subject to change without notice PA-939 Rev. C / October 2014 7 of 33...
  • Page 8 S500 Integrated Test System Administrative Guide Remove clamps and slide the outer box cover off of the crate. Figure 9: Front of crate outer box off Make sure that you retract the leveling feet on the bottom of the system (next to the casters), in order to put weight on the casters and prepare the system so that it can be rolled down the ramp.
  • Page 9 S500 Integrated Test System Administrative Guide Remove the four bolts from the bottom of the crate that are attached to the bottom of the S500 system cabinet using a 19 mm socket head on a socket wrench. Figure 11: S500 system bolted to crate Figure 12: Removing bolts from crate Figure 13: S500 system crate hardware Specifications are subject to change without notice...
  • Page 10 S500 Integrated Test System Administrative Guide Unlock the two wheels (casters) that are on the front of the S500 system cabinet by moving the locks up. Figure 14: Cabinet caster locks moved up 10. With two people, slide the S500 system cabinet down the ramp. Figure 15: S500 sliding down ramp 11.
  • Page 11 S500 Integrated Test System Administrative Guide 12. Move the S500 system cabinet to its final destination. The system cabinet is shipped from the factory with all of the instruments installed. Most equipment connections and wiring in the system’s cabinet instruments were made at the factory. Note that the accessories that come with the system are in a separate container.
  • Page 12 S500 Integrated Test System Administrative Guide Figure 18: Typical S500 system accessories Figure 19: S500 monitor arm accessory Figure 20: 8020 support arm accessory (S500 high power units only) Specifications are subject to change without notice PA-939 Rev. C / October 2014 12 of 33...

  • Page 13: Power And Operating Conditions

    S500 Integrated Test System Administrative Guide Figure 21: S500 keyboard tray and arm accessory Keithley Field Service Engineer (FSE) The Keithley FSE will perform the following tasks: • Install the keyboard arm and monitor arm to the system. • Install the keyboard and the mouse on the keyboard arm, and the monitor to the monitor arm. •...
  • Page 14 S500 Integrated Test System Administrative Guide Severe personal injury or death due to electric shock or electrocution or equipment damage may occur if you do not have the correct circuit amperage. For S500 systems that are configured to operate between 100 V and 120 V, a 20 A circuit must be used, and for systems that are configured to operate between 200 V and 240 V, a 15 A circuit must be used.
  • Page 15 S500 Integrated Test System Administrative Guide Triaxial connector handling and contamination Keep source-measure triaxial cable connectors (if applicable) clean and free of any foreign contaminants. Do not touch the connector pins of the triaxial connectors. Contamination can cause current leakage in the source-measure signal paths to the DUT, which can significantly degrade the test results.

  • Page 16: Installation And Connections

    S500 Integrated Test System Administrative Guide Remove system power You must shut down the software, and remove all power from the computer and the system (see Shut down using ACS (on page 25). Before proceeding, you must make sure the power indicator on the front door is NOT illuminated.

  • Page 17: Floor Plan

    S500 Integrated Test System Administrative Guide Floor plan The following floor plan information is for the system cabinet only. Refer to the documentation for the prober or other test fixture equipment to determine its floor space requirements. The system cabinet requires a floor space of approximately 1.2 m x 2.1 m (4 ft. x 7 ft.). The next figures show a top view of the floor plan for the S500 37U and 23U and an overall cabinet dimension diagram for both units.
  • Page 18 S500 Integrated Test System Administrative Guide Figure 24: S500 23U system floor plan, top view Specifications are subject to change without notice PA-939 Rev. C / October 2014 18 of 33...
  • Page 19 S500 Integrated Test System Administrative Guide Figure 25: S500 37U cabinet dimensions Specifications are subject to change without notice PA-939 Rev. C / October 2014 19 of 33...
  • Page 20 S500 Integrated Test System Administrative Guide Figure 26: S500 High Power 23U cabinet dimensions Specifications are subject to change without notice PA-939 Rev. C / October 2014 20 of 33...

  • Page 21: Seismic Securement

    S500 Integrated Test System Administrative Guide Seismic securement Seismic securement is required for the S500 system cabinet. You must bolt down the system to the floor for safety purposes and to ensure the cabinet will not tip over. In the next figure, you will see a label that indicates a tip-over hazard located on the keyboard tray.

  • Page 22: Optional Advanced Seismic Securement

    S500 Integrated Test System Administrative Guide The next figure shows how a floor mounting bracket is installed. Keithley part numbers are included for the required hardware. Figure 29: S500 system cabinet floor mount Optional advanced seismic securement If you ordered a system with the advanced seismic fastening, follow these mounting instructions. Position the cabinet in the desired location on a smooth, level floor.
  • Page 23 S500 Integrated Test System Administrative Guide Transfer the mounting hole locations to the floor with a marker. Remove the mounting brackets and also mark the location of the cabinet leveling legs. Lower the cabinet and move as needed for drilling and installing the customer supplied floor anchors. Anchors should have a minimum pullout rating of 1000 pounds each (450 Kg).

  • Page 24: System Cabinet Size And Weight

    S500 Integrated Test System Administrative Guide System cabinet size and weight The size and weight specifications for the system cabinet are listed in Table 3. Table 3 System cabinet size and weight Weight (typical) Model Size (width x depth x height) Low End (min.) configuration High End configuration 60.1 cm x 92 cm x 192 cm...

  • Page 25: System Startup

    S500 Integrated Test System Administrative Guide System startup Make sure that the power switch on the PDU is set to on. Set the power button on the front door of the system to the ON position. If the computer has not started to boot, then open the front cabinet door and press the Power/standby switch on the host computer.
  • Page 26 S500 Integrated Test System Administrative Guide Recovering from an emergency shut down Verify that the hazardous condition or emergency situation is no longer present. Rotate the Emergency OFF button to release it. Toggle the power switch from ON to OFF, and then back to ON again. All of the system instruments should power up.

  • Page 27: Safety Interlocks

    S500 Integrated Test System Administrative Guide Safety interlocks For operator safety, the S500 has interlocks on both the front and back cabinet doors and at the device under test (DUT). If you open a cabinet door or open the DUT interlock while instruments are sourcing, the interlock is activated, causing the output from the source-measure instruments to output no voltage (0 volts;...

  • Page 28: Hardware Replacement

    S500 Integrated Test System Administrative Guide • You must make sure that all of the instruments are connected with the appropriate interface cable and a ® TSP-Link™ connection between any Series 2600A System SourceMeter instruments. • Assign GPIB or TCP/IP addresses (as appropriate) and node numbers to the hardware and instruments. •...

  • Page 29: Electrical Hazard Tasks

    S500 Integrated Test System Administrative Guide Special handling of static-sensitive devices System components can be damaged by electrostatic discharge (ESD). Wear a ground strap and attach the clip lead to the grounding bar in the test head or the system cabinet frame before working on the unit.
  • Page 30 S500 Integrated Test System Administrative Guide Remove system power Severe personal injury or death due to electrical shock or electrocution may result if power is not removed before moving, removing, or installing equipment. Do not attempt to perform these procedures unless you are qualified to do so. Make sure the system and instruments that are being installed, moved, or removed are turned off with all power source/cables unplugged.

  • Page 31: Power Distribution And Emergency Off

    S500 Integrated Test System Administrative Guide Close the rear cabinet door. Make sure the system computer and all instrument power switches are in the ON position. Close the front cabinet door. With the system cabinet POWER switch in the OFF position, the EMO light should be off. If the EMO light stays on, the power is not restored.

  • Page 32: Patch Panel

    S500 Integrated Test System Administrative Guide Power distribution unit connections and power distribution basics The Model 42000-PDU consists of: • 24 V DC output to Emergency OFF (EMO) circuits and cabinet fans with power • 24 V DC output through banana jacks •...

  • Page 33: Protection Modules

    S500 Integrated Test System Administrative Guide Interlock The S500 must have a single, direct connection between instrument lows and safety (earth) ground. Keithley recommends that a high quality, low impedance connection between low and safety ground be made at the prober used with the S500. Because this is not always possible, the LO patch panel provides alternative connections, as listed in the next table.

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