Tektronix KEITHLEY S530 Manuals

Manuals and User Guides for Tektronix KEITHLEY S530. We have 1 Tektronix KEITHLEY S530 manual available for free PDF download: Reference Manual

Tektronix KEITHLEY S530 Reference Manual (541 pages)

Parametric Test System

Brand: Tektronix | Category: Test Equipment | Size: 18.59 MB

Table of Contents
6
Introduction
14
Contact Information
14
Systems Documentation
14
System Description
15
Optional Accessories
16
When You Receive Your System
16
Inspect for Damage
17
Move the Shipping Crate to the Installation Location
18
Overview of System Instruments
19
Introduction
19
Switching
20
Model 707B Switch Matrix Mainframe
20
Sourcing and Measuring
21
Model 2636B System Sourcemeter Instrument
21
Optional Instrumentation
22
Installation
23
Site Preparation
23
Site Preparation Checklist
23
Line Power Requirements
24
Operating Environment Conditions
25
Floor Plan
25
System Cabinet Size and Weight
27
Required System Securement
28
Keithley Field Service Engineer Installation Tasks
28
System Connections
28
Getting Started
29
Initial Equipment Startup
29
System Startup
30
System Software
30
Start the KTE Software
31
Shut down Using KTE
31
Emergency off Button
32
Emergency Shutdown Procedure
32
Recovering from an Emergency Shutdown
32
Safety Interlocks
33
Prober Safety
34
System Communications
34
S530 KTE Communications
34
Editing the Icconfig_<Qmo>.Ini File
37
Using Nplcs to Adjust Speed and Accuracy
37
Setting the Number of Power Line Cycles
38
Setting a Custom System Speed
38
NPLC Default Differences
39
Using Function Libraries
40
Introduction
40
The KTE Linear Parametric Test Library (Lptlib) Library
41
Combination Commands
41
Dual-Site Commands
41
General Commands
42
GPIB Commands
42
Matrix Commands
42
Measure Commands
42
Pulse Generator Commands
43
Range Commands
43
Scope Card Commands
44
Spectrum Analyzer Commands
44
Source Commands
44
Timing Commands
45
The KTE Parametric Test Subroutine (Parlib)
45
Software
46
Introduction
46
Keithley Test Environment System Software
47
KTE Process Overview
49
KTE Software Tools
51
KTE Support Utilities
52
Building and Executing Tests
54
Creating Test Plans
56
Keithley Tool Palette
57
Wafer Description Utility (WDU)
59
Test Structure File Editor (TSE)
81
Keithley Interactive Test Tool (KITT)
85
Parameter Set Editor (PSE)
99
Keithley User Library Tool (KULT)
102
Limits File Editor (LFE)
120
Keithley Test Plan Manager (KTPM)
125
Adaptive Testing
137
Zone-Based Testing
137
Result-Based Testing
140
Installation of Adaptive Testing User Libraries
146
Installation of Demonstration Files
147
Test Execution
147
Keithley Operator Interface Editor (KOPED)
148
Keithley Test Execution Engine (KTXE)
150
Data Analysis
174
Data Output Formats
174
Preview
175
Keithley Summary Utility (KSU)
175
Keithley Curve Analysis Tool (KCAT)
188
Kdftokcs File Conversion Utility
191
System Administration
194
System Configuration: Kth.ini File
194
Kptm.ini File
195
Environment Variables
197
Keithley Directory Environment Variables
199
Open Interface Environment Variables
199
System Environment Variables
200
Diagnostics Environment Variables
201
User Library Tool Environment Variables
201
Test Plan Manager Environment Variables
201
Log File Environment Variables
202
File Management
204
Keithley Component Manager (KCM) Utility Description
205
Project Environments
205
Select Tester
208
System Customization
211
System Integration
213
Keithley Data Files Library
214
Using Limits Files
219
Programming Examples
222
Keithley Data File User Tag Data
228
Example of Use Within a Cassette Plan
230
User Access Points
231
Logging One PARAM at a Time, Data Retrieval through Get Routines
232
Logging a Linked List of Params, Data Retrieval Using Getlotdata
235
Keithley User Interface Library
237
User Interface Constants
237
User Interface Library Variables
239
User Interface Library Commands
240
KTE KUI Localization
241
KTE File Formats
243
Wafer Description File Format
244
Test Structure File Format
247
Keithley Test Macro (.Ktm)
248
Probe Card File Format
251
Global Data File Format
252
Parameter Set File Format
253
Parameter Limits File Format
254
Wafer Test Plan File Format
257
Cassette Test Plan File Format
259
Keithley Data File Format
262
User Access Point File Format
264
Keithley Plot File Format
265
KULT Module File Format
266
Data Pool
268
Ki_Ktxe_Redo_Macro
269
Ki_Ktxe_Retest_Wafer
269
Ki_Ktxe_Skip_Limits_Check
269
Kui_User
270
Manualprobertype
270
Manualwaferload
270
Uap_Abort_Level
271
Abort_Code
271
Abort_Level
271
Cl_Kwf_Fname
272
Confirm_Oper_Wafers
272
Cpf_Info
272
Current_Slot_List
273
Current_Wwp_List
273
Cur_Wwp_List_Ptr
274
Display_Lotdlg
274
Failed_Result_List
274
Ktm_List
275
Ktxe_Abort_Logging
275
Ktxe_Cpf_Mode
275
Ktxe_Debug
275
Ktxe_Disable_Exec_Log
275
Ktxe_Disable_Kdf
276
Ktxe_Disable_Ktm
276
Ktxe_Disable_Kui
276
Ktxe_Disable_Load_Cassette_Msg
276
Ktxe_Disable_Plan_Complete_Msg
276
Ktxe_Disable_Prober
276
Ktxe_Disable_Statdlg
277
Ktxe_Disable_Uap
277
Ktxe_Enable_Cl_Log
277
Ktxe_Disable_Exec_Log
277
Ktxe_Enable_Doc
277
Ktxe_Error_Gui
278
Ktxe_Fill_Opr_Dlg
278
Ktxe_Min_Ss_Touch
278
Ktxe_Missingss_Ok
278
Ktxe_Reload_Wafer_Plan
278
Ktxe_Report_No_Klf
279
Ktxe_Report_No_Pcf
279
Ktxe_Sort_Subsite_Ktms
279
Last_Prober_Call
279
Last_Prober_Error
279
Last_Subsite
279
Limit_List
280
Limithashtab
280
Lot
280
Lotadd
280
Lotid
281
Maxerrevtlines
281
Maxscrolllines
281
Next_Wwp_List
281
Next_Wwp_List_Ptr
281
Previous_Wwp_List
282
Prev_Wwp_List_Ptr
282
Prober_Wafer_Id
282
Product_File
282
Result_List
282
Site
283
Sites_Tested
283
Skip_First_Wafer_Load
283
Skip_Next_Wafer_Load
283
Subsite
283
Sum_Report_Options
283
Total_Sites
284
Total_Wafers
284
User_Arg
284
Wafer
284
Wafers_Tested
284
Wdfptr
284
Wpf_Info
285
Wwp_List
285
Advanced Data Pool Use
285
Data Pool Function Descriptions
286
Example
287
User Access Points (Uaps)
288
User Access Point Usage
290
Types of User Access Points
292
UAP Locations
293
Use of Lptlib Functions at Uaps
293
Distributed User Libraries
293
Test Macro Debugging
294
Version Control
296
Overview
296
Version Control in the Production Environment
298
Revised File Movement the Production Environment
298
The Recipe Execution Process in Operator Mode
299
Version Control in the Engineering Environment
301
File Version Tracking
303
The Primary Version Control Areas
304
Local Areas
304
Archive
304
Staging Directories
307
Directory File Structures
309
Archive Directory Structure
309
Production Directory Structure
310
Projects Directory Structure
311
Protecting and Monitoring Software Operation
311
Protecting the Normal and Specific Production Areas
311
Monitoring Staging Directories for Stagnant Files
312
Copying the Archive to Another Site
312
Populate the Production Environment of a New Client System
313
Start with a Revision Offset on Initial Entry into Source Control
313
Transferring Production File Bundles to the Client Systems
314
Clean up Archive Files and Normal Production Environment
314
Viewing the History of a File
315
Comparing Versions of a File
316
Viewing Where a Supporting File Is Used
317
Removing a KULT Module from Production
318
Step A: Fetch and Load the Library to be Modified
319
Step B: Remove the PROD Label from the Module
319
Step C: Delete the Module from the Local KULT Library
320
Step D: Check out the Library Prototypes File for Modification
320
Step E: Build the Local KULT Library
320
Step F: Deliver the Updated Library Prototypes File
320
Step G: Install the Updated KULT Library
321
Client Systems
321
Version Control Menu in KULT
322
Automatic Version Control Functions
322
Alternate Version-Control Menu
322
Library Control Submenu in KULT
323
General KULT Version Control Menu Items
323
Advanced KULT Version Control Menu Items
328
Recipe Manager
333
Overview
333
Additional Features
334
Setting up Keithley Recipe Manager
335
System and Software Passwords
335
Changing Passwords
336
System Configurations for Keithley Recipe Manager
337
Preparing Information for Keithley Recipe Manager Set up
337
Single-System Setup
340
Multiple Networked Systems Setup
342
Development-Only System Setup
345
Add KTE Files from the Local Area to the KRM Archive
346
Setting up Separate User Accounts
346
Setting up an Administrative Group Maintenance Account
346
The Keithley Recipe Manager User Interface
347
File Menu
348
Batch Menu
349
View Menu
350
Options Menu
351
Version Control Menu
351
The Primary Version Control Areas
353
Local Area
353
Archive
353
Staging Directories
354
Normal and Specific Recipes
354
Getting Started
355
Starting Keithley Recipe Manager
355
Setting up a Project
358
Using Keithley Recipe Manager with KTE Tools
364
Accessing KTPM, WDU, and LFE from the Recipe Contents Tab
365
Accessing KITT and TSE from the Parameters Tab
366
Accessing KULT from the KRM Parameters Tab
368
Searching for Files from the KRM Parameters Tab
369
Selecting and Executing Recipes in Operator Mode
370
The Recipe Execution Process in Operator Mode
370
Executing a Recipe in Operator Mode
371
The Keithley Recipe Manager Engineering Mode Process
373
Examples
373
Creating a New Process and Product Family
374
Creating a New Product Family under an Existing Process
375
Creating a New Recipe
376
Creating a New Recipe under an Existing Product Family
378
Creating a New Recipe Using an Existing Recipe
379
Creating a Specific Recipe
380
Creating New Supporting Files
381
Validating a Recipe
382
Editing Existing Recipes
384
Checking Files into the Archive
392
Reverting Files to Precheck-Out Status
393
Releasing and Installing a Recipe or Supporting File
393
Moving Recipes between Sites
398
Deleting Items from the Local Area
399
Using Batch Operations to Do Common Tasks in KRM
400
Batch Operation Phases
400
Batch Marking
401
Batch Icon Marking and Level Indicators
401
Save Copies to Batch Operation
402
Search/Replace Batch Operation
402
Search/Replace/Release Batch Operation
403
Check out Batch Operation
403
Check in Batch Operation
403
Label Batch Operation
404
Remove Label Batch Operation
404
Release Batch Operation
404
Unrelease Batch Operation
404
Delete Batch Operation
405
Unmark All Batch Operation
405
Examples
405
Example 1: Create a New Recipe Using Existing Files
405
Example 2: New Recipe, Wafer Description File from Existing Files
412
Example 3: Release and Install a Recipe
422
Administration
425
Configuring User-Defined Recipe Contents Fields and Terminology
425
Environment Variables for User-Defined Files in Keithley Recipe Manager
427
Version Control in KRM
428
Recipe Management and Version Control Terminology
429
Frequency Analysis
433
Introduction
433
Prerequisites
433
Ring Oscillator Structures and Measurement
434
Making a Measurement
434
Measurement Commands for Ring Oscillator Applications
436
RSA306B Lptlib Commands
436
Scope Lptlib Commands
437
Create a KITT Macro
437
Pulse Generation
439
Introduction
439
Pulse Measurement Considerations
439
Command Summary
439
Diagnostics and Troubleshooting
444
The Diagnostics Process
444
User Interface
445
Selection Area
446
Control Area
447
Status and Result Area
448
Selection Area Tabs
449
Dashboard Tab
449
Matrix Tab
450
SMU Tab
452
Optional Instruments Tab
453
Menu and Toolbar Selections
454
Command-Line Arguments
455
Configuration
455
Troubleshooting Diagnostics Software Startup
456
Project Environment Settings
456
Hosts Entries in Nsswitch.conf File
457
Test Sequence
458
System Information
459
Prerequisite Tests
460
Diagnostic Tests
463
System Verification
496
Verification Probe Card
497
Verification Tests to Execute
499
Matrix Leakage Tests
499
SMU Verification
500
Troubleshooting
500
Troubleshooting Overview
501
Troubleshooting Flow Chart
502
Troubleshooting Procedure Steps
503
Troubleshooting Prerequisite Tests
505
Troubleshooting Matrix Diagnostic Tests
509
Troubleshooting SMU and Other Instrument Diagnostic Tests
514
Advanced Troubleshooting Information
516
Maintenance
518
Introduction
518
Repair and Replacement
518
Power Distribution and Emergency off
520
Data Hub License
521
Decommissioning an S530 Test System
523
Index
524

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