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BRONKHORST IQ+FLOW Series Instruction Manual

Digital mass flow / pressure controllers for gases
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Instruction manual
IQ
FLOW
series
+
®
Digital Mass Flow / Pressure
Controllers for gases
Doc. no.: 9.17.045L Date: 07-01-2013
ATTENTION:
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.

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Summary of Contents for BRONKHORST IQ+FLOW Series

  • Page 1 Instruction manual FLOW series ® Digital Mass Flow / Pressure Controllers for gases Doc. no.: 9.17.045L Date: 07-01-2013 ATTENTION: Please read this instruction manual carefully before installing and operating the instrument. Not following the guidelines could result in personal injury and/or damage to the equipment.

  • Page 2: Disclaimer

    The material in this manual is for information purposes only, and is subject to change without notice. Bronkhorst High-Tech B.V. January 2013 Symbols Important information.

  • Page 3: Warranty

    Warranty The products of Bronkhorst High-Tech B.V. are warranteed against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and the instructions in this manual and that they are not subjected to abuse, physical damage or contamination.

  • Page 4: Table Of Contents

    Table of Contents Disclaimer ..................................2 Symbols ................................... 2 Receipt of equipment ..............................2 Equipment storage ................................. 2 Warranty ..................................3 Scope of this manual ............................. 5 Introduction ................................ 5 References to other applicable documents ......................5 Starting up ............................... 6 Check properties ..............................

  • Page 5: Scope Of This Manual

    FLOW® Manifold (multi-channel) (document nr. 9.16.090) Dimensional drawing IQF/IQP (document nr. 7.05.545) Dimensional drawing IQFD/IQPD (document nr. 7.05.656) Dimensional drawing IQM (document nr. 7.05.760) These documents are available on: http://www.bronkhorst.com/en/downloads or can be applied for at our local sales & service representatives 9.17.045 page 5...

  • Page 6: Starting Up

    Starting up Check properties Before installing it is important to read the attached label and check: - Instrument type: • gas (IQF) red label or • pressure (IQP) yellow label - Flow rate - Fluid to be measured / controlled - Up- and downstream pressure - Input and output signals IQ(F/M) - Gas Flow...

  • Page 7: Leak Check

    However compliance with the EMC requirements is not possible without the use of proper cables and connector/gland assemblies. Bronkhorst High-Tech B.V. recommends the use of their standard cables. These cables have the right connectors and if loose ends are used, these will be marked to prevent wrong connection.

  • Page 8: Analog / Digital Operation

    Using a RS232 cable or a USB-RS232 conver- ter with a PC will allow you to use (free) Bronkhorst® software for Windows, such as FlowDDE and FlowPlot. See also section 3.4. Digital RS485 operation With digital operation over RS485 a bus-system with multiple instruments can be set up.

  • Page 9: Zeroing

    2.11 Calibration Each IQ FLOW® instrument is factory calibrated. Bronkhorst High-Tech B.V. certifies that all instruments meet the rated accuracy. Calibration is performed using measurement standards traceable to the standards of the Dutch Metrology Institute (VSL). Calibration certificates are included in the shipment.

  • Page 10: Product Description

    2.13 Product description The IQ FLOW® series is one of the smallest mass flow sensors of its kind. Due to the use of micro system technology, ultra compact flow controllers are realised with dimensions of only 20 x 40 x 60 mm. The (IQF) flow controllers are able to measure and control flow rates of 10 ml /min full scale (FS) up to 5000 ml /min FS.

  • Page 11: Basic Operation

    Refer to the “Hook-up diagram IQ+FLOW®” or use an When using a Bronkhorst readout unit use only an RJ-45 RJ-45 loose-end cable (7.03.419) to connect the required cable (7.03.236) in combination with the RJ-45 to 9-pin sub-D signals.

  • Page 12: Manual Interface: Micro-Switch, Leds And Rotary Switches

    Manual interface: micro-switch, LEDs and rotary switches In this section the manual instrument interfaces are described. In section 3.3.1 the micro-switch operation is discussed (if present), section 3.3.2 specifies the LED functionality and in section 3.3.3 the rotary switch operation is described. 3.3.1 Micro-switch operation (single-channel versions only) By means of manual operation of the micro push-button switch some important actions for the instrument can be selected or started.

  • Page 13: Led Functions

    3.3.2 LED functions The LEDs on top of the instrument can also be used for manual operation of some options. The green LED will indicate in what mode the instrument is active. The red LED will indicate error/warning situations. For details see “Manual interface: micro-switch and LEDs ” in Operation Instructions Digital Instruments (document nr.

  • Page 14: Basic Rs232 Operation

    Dynamic Data Exchange (DDE) RS232 communication can be used for operating the instrument using the Bronkhorst FlowDDE server application. Dynamic Data Exchange (DDE) provides the user a basic level of interprocess communication between Windows applications. FlowDDE is a DDE server application. Together with a client-application, either self-made or with a SCADA-program from third parties, it is possible to create an easy way of data exchange between the flow controller and a Windows application.
  • Page 15 DDE are for example MS-Office, LabView, Intouch and Wizcon. Bronkhorst® software programs “FlowView” (left) and “FlowPlot” (right) FlowDDE and other Bronkhorst applications are available on the support CD or can be downloaded from the Bronkhorst internet site: http://www.bronkhorst.com/en/downloads FlowDDE parameter numbers Reading/changing parameter values via FlowDDE offers the user a different and user-friendly interface to the instrument.

  • Page 16: Basic Rs485 Operation

    Basic RS485 operation This section is limited to the description of the interface between the IQ FLOW® instrument with a master device. FLOW® instruments always serve as slaves in a Modbus system. There is no mutual communication between Modbus slaves; only between master and slave. The master device is for example a pc. More detailed information about Modbus can be found at http://www.modbus.org or any website of the (local) Modbus organisation of your country (when available).
  • Page 17 Software When using a pc to communicate with IQ FLOW® instruments only the FLOW-BUS protocol is supported by Bronkhorst software. When using Modbus operation, software from third parties, such as LabView, ModScan or a Modbus PLC must be used to serve as Modbus master.

  • Page 18: Basic Parameters And Properties

    Most instrument parameters can only be accessed with digital communication. For each communication protocol the instrument parameters are accessed differently. When using Bronkhorst® software programs FlowView or FlowPlot, easy access is provided to the mostly used parameters by menu interfaces. When using other communication methods...

  • Page 19: Basic Measurement And Control Parameters

    The ‘User Tag’ parameter allows the user to give the instrument a custom tag name, with a maximum of 16 characters. It is advised however to limit the user tag name up to 7 characters when using the Bronkhorst® E-7000 readout and control modules.

  • Page 20: Advanced Operation

    Advanced operation Reading and changing instrument parameters 4.1.1 Special parameters All parameters described in this chapter have influence on the behaviour of the mass flow meter. Please be aware that wrong settings can disorder the output. To avoid unintential changes, some parameters are locked (shown by the ...

  • Page 21: Identification

    After power-up the control mode will be set to ‘Analog input’ or ‘BUS/RS232’, depending on the customer’s default setting for analog or digital operation. Except when the actual control mode setting is other than 0, 1, 9 or 18 the actual control mode setting is maintained.

  • Page 22: Advanced Measurement And Control Parameters

    The controlling algorithm for the valve handled by the micro-controller consists of several parameters which can be set. Although many parameters could be accessed, Bronkhorst® advises not to change these parameters because during manufacturing the controller is optimized. Changing of controller settings should be performed by or under supervision from trained service personnel only.

  • Page 23: Display Filter

    Controller Speed (Kspeed) Type Access Range FlowDDE FlowBus Modbus Float RW  0…3.4E+38 114/30 0xF2F0…0xF2F1/62193…62194 This parameter is the controller speed factor. PID-Kp is multiplied by this factor. Ti (PID-Ti) Type Access Range FlowDDE FlowBus Modbus Float RW  0…1E+10 114/22 0xF2B0…0xF2B1/62129…62130 PID controller integration action in seconds.

  • Page 24: Alarm / Status Parameters

    Dynamic Display Factor Type Access Range FlowDDE FlowBus Modbus Float RW  0…1.0 117/1 0xF508…0xF509/62729…62730 This value should not be changed. Static Display Factor Type Access Range FlowDDE FlowBus Modbus Float RW  0…1.0 117/2 0xF510…0xF511/62737…62738 This value should not be changed. CycleTime Type Access...

  • Page 25: Special Instrument Features

    Special instrument features 4.2.1 Auto zeroing To start the auto zero-procedure by digital operation two parameters should be written: Control Mode Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 0…255 0x0024/37 Calibration Mode Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW...

  • Page 26: Disabling Micro Switch (Single-Channel Versions Only)

    4.2.3 Disabling micro switch (single-channel versions only) It is possible to disable the micro-switch on top of the instrument. This can prevent undesired use of this button. Disabling the micro-switch can be performed with the following parameter: IOStatus Type Access Range FlowDDE FLOW-BUS...

  • Page 27: Troubleshooting And Service

    Continuously Critical error message A serious error occurred in the instrument Instrument needs service before further use For more information check the instruction manual for digital communication 9.17.023 at http://www.bronkhorst.com/en/downloads/instruction_manuals/ Troubleshooting summary general Symptom Possible cause Action No output signal...

  • Page 28: Service

    If the instruments have been used with toxic or dangerous fluids the customer should pre-clean the instrument. Important: Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely: NL801989978B01 If applicable, contact your distributor for local arrangements.

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