Zeiss SIGMA Series Instruction Manual
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Zeiss SIGMA Series Instruction Manual

Field emission scanning electron microscope
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Instruction Manual
ZEISS SIGMA series
Field Emission Scanning Electron Microscope

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  • Page 1 Instruction Manual ZEISS SIGMA series Field Emission Scanning Electron Microscope...
  • Page 2 Effective from: 11/2020 © 2021 Without the prior written consent of ZEISS, this document or any part of it must neither be translated nor reproduced or transmitted in any form or by any means - including electronic or mechanic methods, by photocopying, recording or by any in- formation or filing system.

  • Page 3: Table Of Contents

    3.2.7 Specimen Stage | Sigma 500 ..............55 Optional Components and Accessories..............56 3.3.1 Optional Detectors ................56 3.3.2 Dual Joystick ..................68 3.3.3 Control Panel ..................69 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 4 Shutting down the System ..................126 5.9.1 Finishing the Work Session..............126 5.9.2 Closing the SmartSEM User Interface ............ 127 5.9.3 De-energizing the Microscope............... 128 5.10 Performing an Emergency Shutdown ..............129 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 5 Layout and Connections................ 159 9.3.2 System Layout..................160 Applicable Standards and Regulations..............161 10 Parts and Tools ................1 62 10.1 Tools and Accessories ..................162 Glossary ..................1 63 Index....................1 67 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 6: General Information

    Press <Ctrl+Alt+Del> Press several keys on the keyboard simultane- ously. Select Tools > Goto Control Panel > Air- Follow a path in the software. lock. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 7: Explanation On Warnings And Additional Information

    CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injury. NOTICE Type and source of danger NOTICE indicates a potentially harmful situation which, if not avoided, may result in property damage. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 8: Further Applicable Documents

    ZEISS Sales & Service Partner. Accessories Also refer to the 3rd Party documentation of the manufacturer. 1.4 Contact If you have any questions or problems, please contact your local ZEISS Sales & Service Partner or one of the following addresses: Headquarters Phone:...
  • Page 9 ZEISS 1 General Information | 1.4 Contact Fax: +49 7364 20 3226 Email: service.microscopy.de@zeiss.com Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 10: Safety

    ZEISS service representative. § The microscope is only to be used by operators who have been trained by a ZEISS service rep- resentative. Basic operator training and safety instructions will be provided within the scope of the initial start-up by ZEISS. Make sure that everyone who operates the microscope only performs the tasks for which he/she is trained.

  • Page 11: General Safety Information

    Microscope System not described in this Instruction Manual, may only be carried out by the manufacturer ZEISS or persons expressly authorized by ZEISS to do 2.2.1 Safe Operation Conditions If the product safety labels are covered or worn or if any of the safety devices are not in proper working condition, operation of the microscope can be hazardous.

  • Page 12: Preventive Maintenance

    Moreover, it is recommended that you conclude a service contract with your local ZEISS service representative or organization. 2.2.4 Safe Handling of Spare Parts Using spare parts that are not provided by ZEISS can be hazardous or can lead to property dam- age: §...

  • Page 13: Chemical Hazards

    Do not remove any parts. Only authorized ZEISS service representatives are allowed to service the microscope. Do not try to service the microscope yourself. Disconnect power before opening. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 14: High Pressure Hazards

    If you wear medical implants that are susceptible to magnetic fields (e.g. cardiac pacemakers), do the following: Keep a distance of at least 30 cm from the ion getter pumps. Follow the safety instructions provided by the pump manufacturer. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 15: Mechanical Hazards

    Fingers can be crushed in the gap between isolated table and plinth. The gap varies during op- eration and while the air feet are adjusted. Do not place your fingers between isolated table and plinth. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 16: Radiation Hazards

    A respective label is attached to the microscope. Outside the EU, the user of the microscope has to comply with the local regulations of the coun- try where the microscope is operated. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 17: Suffocation Hazards

    ZEISS 2 Safety | 2.3 Prevention of Hazards Contact Radiation For questions regarding radiation protection, contact the ZEISS Radiation Safety Officer, Carl Zeiss Protection AG, 73447 Oberkochen, Germany phone: +49 (0) 7364 20 0 2.3.9 Suffocation Hazards WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange.

  • Page 18: Warning Labels And Lights

    Appropriate safety labels on the microscope warn operators of hazards. Each safety label is af- fixed close to the point where a particular hazard exists. Several labels also provide legal informa- tion. Front Side of Microscope Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 19 ZEISS 2 Safety | 2.4 Warning Labels and Lights Rear Side of Microscope Rear Side of Plinth CEE Connector Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 20 Persons with Medical Implants KEEP BACK 12 Interaction with metallic objects inches. may produce Pinch Hazards. Persons with Medical Implants KEEP BACK 12 inches. Reorder no. 347800-0018-000 347800-0018-000 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 21 Instrument must not be operated without sepa- ensure proper grounding Instrument can be damaged rate ground connection Instrument must not be operated without separate ground connection Reorder no. 347800-0004-000 347800-0004-000 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 22: Safety Devices And Interlocks

    In case of damage or defect, the affected parts of the Microscope System must be taken out of operation immediately and be secured against unintentional use. For verifying the safety of the Microscope System, please contact your ZEISS service representa- tive. Please keep the service logs and logbooks.

  • Page 23: Protective Cover Panels

    If the Emergency Off (EMO) Option is installed, the Main Switch of the EMO Option may be used as Main Disconnect Device for the microscope and its components, refer to Emergency Off (EMO) Option External [  24]. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 24: Circuit Breaker

    Fig. 4: Emergency Off (EMO) Circuit With the optional Emergency Off Circuit, the microscope is equipped with the following additional safety equipment. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 25 The Start button must be pushed to switch the mains power to the outputs of the EMO Circuit if the Main Switch is in the ON position and no EMO button is pressed. Fig. 6: Start button Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 26: Vacuum Locking Device

    The microscope can then be restarted, refer to Energizing the Microscope [  78]. 2.5.5 Vacuum Locking Device The vacuum locking device ensures that gun vacuum and system vacuum are better than the re- quired thresholds. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 27: Interlock System Of Optional Airlock

    § must close off the connections to the corresponding media when needed § must be lockable in their off position in order to prevent accidental re-activation Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 28: Product And Functional Description

    Specimen chamber with door handle Refer to Electron Optical Column | Gem- ini 1 [  32] Plinth with ON/STANDBY/OFF buttons Monitors Control panel (optional) Work desk Dual joystick (optional) Personal Computer (PC) Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 29 Refer to Control Panel [  69] Software add-ins and enhancements For full details about the available options and accessories, please contact your local ZEISS service representative, or sales representative. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 30: Main Components

    This is done by the Vent command via the SmartSEM user interface or by pressing the Exchange push button on the optional control panel. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 31: Vacuum System Pressure Modes

    Although it is possible to tolerate these leakage losses at chamber pressures up to a few hundred Pa, it is necessary to carefully se- Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 32: Electron Optical Column | Gemini 1

    Positive electrode that extracts elec- trons from the filament. Anode aperture Multihole aperture (aperture changer) Condenser InLens SE detector / InLens Duo detec- Collects and focuses the electron beam onto the specimen. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 33: Troubleshooting

    Anode aperture di- Multihole aperture Probe current Typical application ameter type 90 μm 6 hole aperture 6 pA to 100 nA High current 30, 10, 20, 60, 120, 300 μm Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 34: Gun Modes

    It also lists some characteristics of each de- tector type. For more information about any of the detectors, contact your local ZEISS service representative. 3.2.5.1 Principle of Signal Detection When a primary electron (PE) beam hits a specimen, certain electron beam interaction processes occur.
  • Page 35 Primary Electrons Primary Electrons (PEs) are electrons forming the scanning beam before hitting the specimen. Secondary Secondary electrons are emitted from the topmost layer of the specimen. Electrons § SE1 Electrons Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 36 Standard Detectors Detected Signals Typical Application InLens SE Detector [  38] Surface structure annular SE detector SE Detector [  44] Topography Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 37 (WDX) tion evaluation Energy dispersive X-ray de- X-ray Materials elemental composi- tector (EDX) tion evaluation For more details, refer to the document Product Specification of the microscope. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 38 The interaction between the primary electron beam and the specimen generates a large number of SEs. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 39 Large angles of specimen tilt also prevent the use of very short working distances. It is therefore recommended to avoid large angles of tilt when using the InLens SE detector. Fig. 17: Changed SE distribution when using a tilted specimen Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 40 Fig. 19: Comparison of surface information at high acceleration voltages. InLens SE detector (left): Clear edge effect with good imaging of the surface structures. SE detector (right): Little surface information. Acceleration voltages: 10 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 41 Homogenous illumination, mapping of actual surface. 1 kV acceleration voltage (top right): Increasing edge effect. 5 kV acceleration voltage (bottom left): Increasing edge effect, reversed contrast of some structures. 10 kV acceleration voltage (bottom right): Transparent surface due to increased penetration depth Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 42 Fig. 24: Compensation for charging using lower acceleration voltage. 7 kV acceleration voltage (left): Poor image quality due to charging effects. 1 kV acceleration voltage (right): No charging effects. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 43: Decommissioning And Disposal

    Parameter Recommended conditions Acceleration voltage 0.02 kV to 20 kV Suitable up to 20 kV, at more than 20 kV the beam booster is switched off Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 44 “chamber detector”. Due to its position in the chamber, the SE detector views the specimen later- ally. Fig. 27: Schematics of the SE detector Preamplifier Photomultiplier Light guide Scintillator Collector grid Specimen Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 45 Applications Unlike the InLens SE detector, which can be used only with acceleration voltages up to 20 kV, the SE detector can be used in the complete high-voltage range. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 46 Initial working distance in the range of 10 mm to 20 mm. § Acceleration voltage of approximately 10 kV. The imaging conditions can be readjusted for a desired application after identifying the area of in- terest on the specimen. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 47: Technical Data And Conformity

    Surfaces tilted towards the detector provide more surface detail with brighter edges; specimens tilted away from the detector display shadowing ef- fects and less surface detail. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 48 Standard value of the collector voltage 0 V to 400 V Variation of the collector voltage at high magnifications to obtain the mixed signal −150 V to 0 V For pseudo-BSE images Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 49 If the pressure is too low, then too few gas molecules are present and the collision prob- ability is too low. This reduces the efficiency of the detector. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 50 However, the detector efficiency is reduced by either of these adjustments. You need to find the optimum parameters for imaging different specimens. It is generally better to reduce the collector bias, because reducing the chamber pressure can cause new charging effects. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 51 The VPSE G4 detector is used mainly in the VP mode. As the VPSE G4 detector detects light, it can be used as a simple cathodoluminescence (CL) detector in high-vacuum mode. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 52 Position The chamber CCD camera is located at the backside of the specimen chamber. Fig. 38: Sample image from chamber CCD camera. Objective lens Specimen holder Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 53: Specimen Stage | Sigma 300

    Always close the chamber door before moving the specimen stage. To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your fingers. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 54 Stage tilt about an axis parallel to the X axis The focus on the stage is not maintained when the specimen is tilted. This can be compensated for by using the Compucentric function in SmartSEM. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 55: Specimen Stage | Sigma 500

    Fig. 41: Specimen stage with dovetail fitting for precise fitting Specimen holder Specimen stage Function The stage can be operated using the dual joystick or using the SmartSEM software. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 56: Optional Components And Accessories

    The SEs and BSEs generated at the impact point of the primary electron beam are intercepted by the low electrical field of the Gemini column. These electrons are accelerated by the field of the electrostatic lens. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 57 When needed, the detector is moved into its “active” position either manually (HDBSD) or automatically (aBSD). Fig. 43: Location of the HDBSD detector Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 58 If different phases exist on the specimen, those with a higher average atomic number display higher brightness than those with a small atomic number. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 59 BSE detector. Low angles of tilt should therefore be used with the BSE detector. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 60 If the energy of the backscattered electrons is high enough, then they can pass through the thin layer of material and create electron-hole pairs in the silicon seg- ments. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 61 The following figures show more examples of shadow mode images created using compositional contrast and topographic contrast modes with a BSD. Fig. 50: Compositional contrast image (left) and “Shadow mode” image (right) acquired using a BSD Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 62: Parts And Tools

    Fig. 51: Compositional contrast image (left) and “Shadow mode” image (right) acquired using a BSD Fig. 52: Compositional contrast image (left) and “Shadow mode” image (right) acquired using a BSD Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 63: Glossary

    The BSD detector has applications mainly in materials analysis and in the life sciences. Material analysis: § Metallurgical sections § Geological sections § Complex materials § Printed circuit boards § Semiconductors § Bond pads Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 64 The HDAsB detector has two operating modes: § Compositional mode: produces images showing the atomic contrast of the specimen § Topography mode: produces images showing the surface details of the specimen Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 65 The STEM unit is equipped with diodes that are switched on or off in order to allow dark field and bright field imaging. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 66 The SmartSEM user interface allows to select different imaging modes (DF or BF). It is also possible to mix the DF and BF signals. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 67: Index

    The detector can be used during energy-dispersive X-ray spectrometer (EDS) measurements and wavelength-dispersive spectrometer (WDS) measurements at any valid magnification. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 68: Dual Joystick

    At higher magnifications the stage movement is slower. The stage is moving with its maximum speed when viewing the specimen with the CCD (Charge Coupled De- vice) camera. The different axes can also be moved simultaneously. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 69: Control Panel

    Adjusts the image acquisition chain offset for the currently selected detector. Each configured detector stores its own brightness. § Contrast Adjusts the gain of the currently selected detector. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 70 Changes the focal point of the column by adjusting the magnitude of the objective lens. § Scan Speed +/− Increases (+) or decreases (−) the scan speed by doubling or halving the beam dwell time with each click step. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 71: Software Description

    Provides quick access to SmartSEM tools. Image Area with Data Zone Displays image information and acquisition parameters from the microscope. Thumbnails Panel Displays thumbnail views of the contents of the eight image buffers. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 72: Graphical Control Elements

    Readout Displays the status of a system entity. Enables you to select an action or a value by opening a dialog with an input field. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 73: User Access Levels And User Privileges

    Change User Direc- Enables the user to change the location where all user specific param- tory eters and configurations are saved. Extractor Enables the user to change the extractor voltage. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 74: Smartsem Program Suite

    Enables you to activate the available specimen holders for SmartSEM. SEM Drift Correc- Enables you to compensate for the drift of the specimen by using a tion reference image and by controlling the beam shift. License: DRIFT-CORR Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 75 Enables you to back up configuration and calibration data Stage Administra- Service activities, for ZEISS service representatives only Upgrade Server Service activities, for ZEISS service representatives only Database Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 76: Installation

    ZEISS 4 Installation Installation and commissioning are carried out by authorized ZEISS service representative. The in- stallation requirements are to be observed and adhered to. After installation or retrofitting, thor- oughly check that the Microscope System is in a safe operational state, making sure in particular that all protective covers (e.g.

  • Page 77: Commissioning And First Operating Steps

    If you wear medical implants that are susceptible to magnetic fields (e.g. cardiac pacemakers), do the following: Keep a distance of at least 30 cm from the ion getter pumps. Follow the safety instructions provided by the pump manufacturer. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 78: Prerequisites For Commissioning And Operation

    Ensure that there is an appropriate exhaust gas line to remove the waste gas of the pre- vacuum pump and to transmit it to the outside. Wear lint-free gloves when touching the inner parts of the specimen chamber or the speci- men. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 79 Procedure 1. Verify that the main shut-off valves for nitrogen at the facility installation are operable. à Otherwise unlock and open the main shut-off valves. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 80: Starting The Microscope

    If the system was powered off for a longer time period, the ion getter pump might fail to start. In this case, bake-out the gun head (supervisor user rights required) or contact your local ser- vice center. Refer to Baking out the Gun Head [  138]. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 81: Starting The Software

    5.3 Starting the Software Procedure 1. Power up the computer and log in. 2. Start the SmartSEM user interface via the ZEISS SmartSEM icon on the desktop. Alternatively, select Windows start menu > SmartSEM > SmartSEM User Interface. à The EM Server opens while loading various drivers. The EM Server implements the inter- nal communication between software and hardware of the microscope.

  • Page 82: Keyboard Shortcuts

    <CTRL + A> Switches Annotation panel ON <CTRL + B> Display Toolbar View dialog <CTRL + D> Toggle Data Zone ON/OFF <CTRL + E> Calls the Export TIFF dialog Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 83: Acquiring An Image

    Loading the Specimen Chamber [  85] § Locating the Specimen [  89] § Switching on the Gun [  90] § Switching on the EHT [  90] § Acquiring an Image [  91] Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 84: Preparing The Specimen Holder

    When disposing of waste that has been generated during a service operation (e.g. used ro- tary pump oil), comply with all national and local safety and environmental protection reg- ulations. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 85: Loading The Specimen Chamber

    Driving the Stage to a Low Position [  86] § Venting the Specimen Chamber [  87] § Mounting the Specimen Holder [  87] § Evacuating the Specimen Chamber [  89] Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 86 4. If the Data Zone is disabled, enable it via Menu Bar > View > Data Zone > Show Data Zone. 5. Use the dual joystick to drive the specimen stage downwards to a low position.  NOTICE  Observe the stage movement via camera to avoid crashing. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 87 Fingers can be pinched when closing the chamber door. Use the door handle to close the chamber door. Ensure not to get your fingers caught in the chamber door gap. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 88 4. Check the chamber view to ensure the specimen does not hit any components when it is introduced into the specimen chamber. 5. Carefully close the chamber door. à The specimen holder and the specimen inside the chamber are visible in the Image Area. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 89: Locating The Specimen

    2. In the SEM Controls panel, select the Detectors tab. 3. In the Detectors section, select USB TV1 from the Signal A drop-down list. à The inside of the specimen chamber is visible in the Image Area. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 90: Switching On The Gun

    Only authorized ZEISS service representatives are allowed to service the microscope. Prerequisite ü The chamber and the gun head have been evacuated. ü The gun has been switched on. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 91: Acquiring An Image

    Signal A drop-down list. INFO: We recommend using the SE detector to obtain the first image. This detector provides a good signal-to-noise ratio even at long working distances. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 92 5.4.6.6 Visualizing Details on the Specimen Surface Procedure 1. Select a detail on the specimen surface. 2. Verify the Magnification/Focus function is activated. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 93: Optimizing The Image

    1. In the SEM Controls panel, select the Apertures tab. 2. Click Beam Shift. 3. To shift the beam, in the Beam Shift navigation box, use the scroll bars or the red marker. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 94 6. In the Aperture Align navigation box, use the scroll bars or the red marker to adjust the aperture alignment until there is no movement of the detail in X- and Y-direction. INFO: The specimen detail should just be pulsating without shifting. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 95 The specimen detail should just be pul- sating without shifting. INFO: To obtain optimum results, alternately correct focus and astigmatism. 6. To deactivate the reduced raster, in the Toolbar, click the REDUCE icon. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 96: Saving The Image

    Imaging gun mode is suitable for lower probe currents. Imaging gun mode is especially useful at low kV to reduce chromatic aberration and to achieve a better resolution. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 97: Measuring The Probe Current

    9. Grab the crosshairs and move them into the hole of the Faraday cup. à The probe current is measured continuously. à The measured probe current is displayed in the Specimen I readout. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 98: Setting The Probe Current

    (± 15 %). 5.5.5 Changing the Extractor Voltage The Extractor voltage is preset by the factory or by the ZEISS service representative. Within certain limits, the operator may carefully increase the extractor voltage in order to optimize the probe current for particular applications.

  • Page 99: Finding Appropriate Detector Settings

     104] § Setting up the Manually Insertable BSD Detector [  107] § Setting up the YAG BSD Detector [  108] § Setting up the CL Detector [  108] Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 100: Setting Up The Inlens Se Detector

    By adjusting the filtering grid, energy- selected BSE images can be obtained. If the filtering grid voltage is set to 0, SE and BSE mixed im- ages can be acquired. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 101: Setting Up The Se Detector

    5.6.4 Setting up the SE Detector The SE detector collects the SE signal, highlighting the topography of the specimen. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 102: Setting Up The Vpse Detector

    The VPSE detector is designed for VP applications. The VP mode enables analyzing and imaging of non-conducting, strongly gassing or moist specimens without any need for specimen preparation. Fig. 67: A rosemary leaf. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 103: Setting Up The C2D Detector

    6. Adjust the C2D Bias scroll bar until you reach saturation. 7. Click C2D Auto Level. If you are unable to reach saturation or if the image quality is not good, repeat the proce- dure in high gain. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 104: Setting Up The Absd1-Lh Detector

    5. Adjust the EHT and the working distance (WD) according to the suggestions in the table in order to optimize the image. 6. In the BSD Control panel, click a quadrant symbol to toggle its status between on (white), inverted (black), and off (gray). Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 105: Setting Up The Hdasb Detector

    Use compositional mode for obtaining an image that is high in atomic number con- trast. § Use topography mode for showing sur- face details. § Use individual settings for channeling contrast. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 106 8. If you want to change the default setting to BSD: TOPO, click BSD: Set TOPO. 9. From the BSD Gain drop-down list, select the appropriate BSD Gain: Low, Medium, High, or Very High. The BSD Gain depends on the signal strength. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 107: Setting Up The Manually Insertable Bsd Detector

    7. Click a segment symbol to change its status between on (white), inverted (black), or off (gray). 8. To select compositional mode, click BSD: COMPO. 9. To select topography mode, click BSD: TOPO. 10. Select the BSD Gain from the drop-down list. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 108: Setting Up The Yag Bsd Detector

    The CL detector is optionally available. The CL detector collects visible or ultraviolet light and is especially useful for internal structural ex- aminations of rocks, ceramics, and semiconductors. Fig. 71: Zircon grains Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 109: Working With Variable Pressure

    The system sets the chamber pressure to the value displayed in the VP Target field. If you have not changed it, it is the value of the last VP session. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 110: Returning To Hv Mode

    The airlock macros can be modified according to your individual requirements. Con- tact your local ZEISS service representative for assistance. The macro automatically performs the following actions: à The EHT is switched off. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 111 4. Click Close Column Chamber Valve. à The column chamber valve is closed in order to separate gun head area and specimen chamber. 5. Select Stage Points List from the Panel Configuration Bar. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 112 2. Turn the knob clockwise to attach the speci- men holder to the airlock rod. 3. Retract the airlock rod. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 113 7. Remove the specimen holder from the dovetail. 8. Mount the exchange specimen holder onto the dovetail. Ensure that the airlock rod mount faces the threaded rod. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 114 1. Insert the stub with the new specimen into the specimen holder and fix the stub to the specimen holder. 2. Check that the airlock rod is fully retracted. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 115 6. To transfer the specimen holder, insert the airlock rod into the specimen chamber. à The specimen holder slides into the dovetail at the specimen stage. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 116 You can now continue working with the microscope. If you acquired an overview image with an airlock camera, you can now navigate the stage by double-clicking in the overview image. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 117 You can now continue working with the microscope. If you acquired an overview image with an airlock camera, you can now navigate the stage by double-clicking in the overview image. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 118: Using The Optional Plasma Cleaner

    2. Switch off the EHT.  NOTICE  The pressure range applied during plasma cleaning can damage the electron source. To protect the electron source from the harmful pressure range, close the column chamber valve. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 119 The Plasma Cleaning Recipe List is displayed and displays the available recipes. INFO: The preset recipes are marked as Fixed in the Type column and cannot be edited or deleted. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 120 The recipe is added to the list of available recipes. à In the Type column, the new recipe is displayed as User, which tells you that the recipe can be edited or deleted. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 121 3. Wait until Vac Status = Ready is displayed in the Vacuum tab of the SEM Controls panel. 4. Switch on gun and EHT. Refer to Switching on the Gun [  90] and Switching on the EHT  90]. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 122: Using The Optional Raman Spectroscopic Microscope

    3. Use the dual joystick to shift the specimen in X direction and in Y direction until the region of interest on the specimen is centered. 4. Use the dual joystick to shift the specimen in Z direction until the image is roughly in focus. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 123 Raman microscope helps. Use the compucentric rotation to ro- tate the specimen. 9. Check that the objective is in the position x = 0, y = 0, and z = 0. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 124 13. Select Use as Overlay in the menu. à The light microscope image is overlaid to the SEM image. à The Image Transform and Overlay window is displayed. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 125 The Raman microscope is correlated with the electron microscope. 16. To extract a bitmap image, click Extract Bit- map. à INFO: For bigger fields of view, use stitching. 17. Acquire Raman spectra or Raman maps. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 126: Shutting Down The System

    5. Close all programs and software. 6. Select Windows start button > Power icon > Shut down. 7. At the front of the plinth, press the Standby button. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 127: Closing The Smartsem User Interface

    1. From the Menu Bar, select File > Exit. à A system message is displayed. 2. Click Yes. 3. Close the EM Server. à A system message is displayed. 4. Click Yes. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 128: Energizing The Microscope

    CEE FEMALE RECEPTACLE of the mains supply. 4. If the EMO circuit is installed, switch the Main Switch to its position. The microscope is completely cut off from the electrical main supply. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 129: Performing An Emergency Shutdown

    CEE connector from the CEE FEMALE RECEPTACLE of the mains supply. 2. If the EMO circuit is installed, press the button on the top of the plinth. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 130: Safety During Cleaning And Maintenance

    Only conduct preventive measures described in the Instruction Manual. All pursuing tasks of main- tenance, service and cleaning not described here must only be performed by an authorized ZEISS service representative. Any unauthorized intervention in the Microscope System or any use outside the scope of the intended use can lead to injuries and property damage, and voids all rights to warranty claims.

  • Page 131: Servicing The Pre-Vacuum Pump

    You can find this documentation in the document folder of your microscope. 6.4 Care and Cleaning Work All care and cleaning work not described here must only be performed by an authorized ZEISS ser- vice representative. NOTICE Functional impairment due to dirt and moisture Dirt, dust and moisture can impair the Microscope System’s functionality and can cause short-...

  • Page 132: Cleaning The Microscope

    Covers of the microscope which have been secured by a screw must not be removed. Please con- tact the Zeiss service in case cleaning is necessary below these covers. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 133 7 Troubleshooting | ​ 7 Troubleshooting The following table provides hints for solving common problems. If you cannot solve the problem or if you are unsure about a certain technical difficulty, contact your local ZEISS service represen- tative. Symptom Cause Measure §...

  • Page 134: Chamber

    To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your fingers. Prerequisite ü The specimen chamber has been evacuated, refer to Loading the Specimen Chamber [  85] ü Requires the Stage Initialise privilege Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 135: Defining The Post Initialization Position Of The Stage

    If you are working with two CCD cameras: The joystick TV angle can only be set for one CCD camera. When selecting the other CCD camera, you have to change the setting. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 136: Resetting The Touch Alarm

    1. In the Panel Configuration Bar, double-click Water Flow/Temperature. à The Water Flow/Temperature panel is displayed. 2. Check the entries. à If a value is critical, it is displayed in red. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 137: Replacing The Chamber Door Seal

    Contamination caused by fingerprints Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping times. Always wear lint-free gloves when touching the specimen, specimen holder, or stage. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 138: Column

    Avoid switching off the gun during the working week. Use Standby mode for the weekend or a break of up to a week. When using the Standby mode, activate the Partial Vent on Standby function. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 139 Standby mode, ensure that the Partial Vent on Standby checkbox is deacti- vated in the SEM Controls panel. 4. To start the bakeout procedure, click Bakeout Start. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 140: Calibrating Optiprobe

    2. If the circuit breaker is tripped, push the circuit breaker upwards. 3. If the rotary pump 1 is not working, check and possibly replace the fuse (F12). Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 141: Detectors

    1. Retract the respective detector. 2. Clean the rod with isopropanol with a clean, lint-free cloth. 3. Spread some drops of TEM oil 300 across the rod. Use a clean, lint-free cloth. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 142: Cleaning Up The Pc

    5. Erase the original log files in the LOG folders. 6. Check that Windows updates are applied and that service packs are applied. INFO: Each service pack includes all the patches since the last major release. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 143: Decommissioning

    Use genuine ZEISS parts exclusively. Ensure that all local safety and X-ray protection regulations are met. Only authorized ZEISS service representatives are allowed to service the microscope. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 144: Transport And Storage

    Maintain a safe distance. Do not walk or place your hands or feet under the load while it is being lowered. Wear safety shoes and gloves. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 145 Due to the heavy weight of microscopes, a forklift has to be used to remove the microscopes Unpacking from the wooden crate: § The forklift used must have a sufficient load capacity. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 146: Disposal

    Info Detailed information on disposal and recycling is available from your ZEISS Sales & Service Part- ner. 8.4 Decontamination A decontamination statement must be submitted before returning any used objects to the ZEISS location.

  • Page 147: Performance Data And Specifications | Sigma 300 And Sigma 300 Vp

    The protective earth connection must not be im- paired by the use of extension cables. Info Your ZEISS Sales & Service Partner will provide you with the detailed installation requirements. Weight and Sizes Main Components...
  • Page 148 SmartSEM user interface operated by mouse and keyboard Windows 10 multilingual operating system Specimen Chamber Parameter Description and Stage § Specimen chamber 365 mm inner diameter dimensions § 275 mm height Free accessory ports Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 149 Fourth generation variable pressure secondary electron detector for imaging in VP mode with up to 85 % improvement in Weber contrast ratio C2D detector (optional; only for VP mode): Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 150 IR illumination. Specimen current Auto ranging for precise current measurement in the range of 1 pA to monitor 10 μA For more details refer to the document Product Specification. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 151: Performance Data And Specifications | Sigma 500 And Sigma 500 Vp

    The protective earth connection must not be im- paired by the use of extension cables. Info Your ZEISS Sales & Service Partner will provide you with the detailed installation requirements. Weight and Sizes Main Components...
  • Page 152 SmartSEM user interface operated by mouse and keyboard Windows 10 multilingual operating system Specimen Chamber Parameter Description and Stage § Specimen chamber 358 mm inner diameter dimensions § 270.5 mm height Free accessory ports Dedicated EDS ports Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 153 Simultaneous usage of the two detection modes is not possible. VP range is limited to 50 Pa. Chamber detectors SE detector: Everhart-Thornley SE detector with optically coupled photomultiplier; collector bias adjustable from −250 to +400 V Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 154 HDAsB detector bottom side. CL detector (optional): Cathodoluminiscence (CL) chamber detector (option for non-VP con- figurations, included in VP option) Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 155: Installation Requirements

    In order to avoid disturbance from other installed machines, ZEISS recommends using a separate power connection to the main distribution panel. Protection class Class I Nominal frequency 50–60 Hz Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 156 (Ø 8 mm) and the microscope (Ø 6 mm). Cross section: Min. AWG10 (between grounding screw terminal and PE of the CEE FEMALE RECEPTACLE) Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 157 Quick exchange connector. One is delivered with the microscope. nection INFO: Due to acoustic noise and vibrations the compressor – if used – should be installed in a separate room. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 158 Less than 50 dB for frequencies up to 200 Hz Less than 40 dB for frequencies from 200 up to 400 Hz Less than 45 dB for frequencies higher than 400 Hz Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 159: Layout And Connections

    Equipotential bonding bar, afety   Pre-vacuum pump earth Vacuum exhaust   Plinth and column Chilled water supply    Computer workplace Dry compressed air Dry nitrogen supply Additional standard local mains power sockets, max. 13 A Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 160: System Layout

    9 Technical Data and Conformity | 9.3 Installation Requirements ZEISS 9.3.2 System Layout Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...

  • Page 161: Applicable Standards And Regulations

    로합니다. European and International Directives / Standards: For more information on ISO, CSA, SEMI certifi- cates or CE Declarations of Conformity, contact your ZEISS Sales & Service Partner. ZEISS works according to a certified Environment Management System according to ISO 14001.

  • Page 162: Tools And Accessories

    10 Parts and Tools NOTICE Spare parts and consumables Using spare parts or consumables that are not provided by ZEISS can lead to property damage. Only genuine spare parts and consumables supplied by ZEISS are to be used in servicing the microscope.
  • Page 163 Sec- ondly, the beam booster technique en- Energy Dispersive X-ray Spectroscopy hances protection against external stray fields. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 164 When the aperture is misaligned a lateral shift is observed. Personal Computer Gas Injection System Protective Earth (ground) Graphical User Interface Primary Electron Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 165 Wavelength Dispersive X-ray Spec- supply chain. troscopy SmartSEM Operating software for ZEISS scanning Wavelength Dispersive X-ray Spec- electron microscopes. troscopy Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 166 / or a clearly defined cus- tomer group. ZEISS service representative Specially trained service expert, either ZEISS staff or authorized service partner of ZEISS. Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 167 General Safety Information  11  71  131 Gun head, bakeout  138 Decontamination  146 Gun mode Detector  36, 99 Analytic  34, 96 Imaging  34, 96 Normal  34, 96 Gun vacuum  134 Hazard Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 168  98 Microscope Shortcuts  82 De-energizing  128 Shutdown Shutdown  143 Emergency  129 Switching on  79, 81 Finishing the work session  126 Microscope  143 Signal detection  34 Nitrogen  134 SmartSEM Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 169 Vacuum system  30, 31 Variable pressure  109 Variable pressure mode  31 VP mode  31 VPSE detector  49, 102 Warning labels  18 lights  18 Weight and Sizes  147, 151 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006...
  • Page 170 Carl Zeiss Microscopy GmbH Carl-Zeiss-Promenade 10 phone: +49 1803 33 63 34 07745 Jena fax: +49 3641 64 3439 Germany info.microscopy.de@zeiss.com www.zeiss.com/microscopy...

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Sigma 300 vpSigma 500 vp356100-9057-000352100-9903-000

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