Thermo Scientific 3490M Manual page 13

Section 3
Specifications
3-2 Clean Room Oven
Temperature Rise Times
3490M, -1, 3492M-1 . . . . . . . . . . . . . .22.0 minutes
3494M-1, 3495M-1 . . . . . . . . . . . . . . .18.0 minutes
3496M-1, 3497M-1 .1.0 minutes (ambient to 90°C)
3498M-1, 3499M-1 . . . . . . . . . . . . . . .20.5 minutes
Temperature Recovery Time of Load
3490M, -1, 3492M-1 . . . . . . . . . . . . . . . . .8 minutes
3494M-1, 3495M-1 . . . . . . . . . . . . . . . . . .4 minutes
3496M-1, 3497M-1 . . . . . . . . . . . . . . . . .11 minutes
(@90°C: after 1 min., door opening of 90 degrees)
3498M-1, 3499M-1 . . . . . . . . . . . . . . . . . .7 minutes
Method
Door open 90° for 1 minute. Oven loaded with 9, 4" wafer boats filled
with wafers and evenly distributed in the oven. A thermocouple measured
wafer temperature in the center wafer boat. Time recorded equals elapsed
time for wafer temperature to reach 90% of setpoint (150°C).
Note Performance measured under controlled laboratory conditions. Your
oven's performance may be slightly different, depending on application.
Dimensions
3490M, -1, 3492M-1
Interior: 13"W x 18"D x 19-1/2"H (33 x 46 x 50 cm)
Exterior : 21-5/8"W x 24-1/4"D x 35"H (55 x 62 x 89 cm)
Capacity: 2.6 cubic feet
3494M-1, 3495M-1
Interior: 18"W x 18"D x 19-1/2"H (46 x 46 x 50 cm)
Exterior: 26-5/8"W x 24-1/4"D x 35"H (68 x 62 x 89 cm)
Capacity: 3.6 cubic feet
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Thermo Scientific