Tektronix KEITHLEY 4200A User Manual
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Tektronix KEITHLEY 4200A User Manual

Parameter analyzer
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Model 4200A-SCS
Parameter Analyzer
User's Manual
4200A-900-01 Rev. C / January 2019
*P4200A-900-01C*
4200A-900-01C
tek.com/keithley

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  • Page 1 tek.com/keithley Model 4200A-SCS Parameter Analyzer User’s Manual 4200A-900-01 Rev. C / January 2019 *P4200A-900-01C* 4200A-900-01C...
  • Page 2 Model 4200A-SCS Parameter Analyzer User's Manual...
  • Page 3 © 2019, Keithley Instruments Cleveland, Ohio, U.S.A. All rights reserved. Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments is strictly prohibited. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, LLC.
  • Page 4 Safety precautions The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present. This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury.
  • Page 5 For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired. Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.

  • Page 6: Table Of Contents

    Table of contents Introduction ......................1-1 Welcome ..........................1-1 Introduction to this manual ....................1-1 Extended warranty ....................... 1-2 Contact information ......................1-2 Organization of manual sections ..................1-2 Application examples ......................1-3 General ratings ........................1-4 Getting started ......................2-1 Front panel overview ......................
  • Page 7 Table of contents Model 4200A-SCS Parameter Analyzer User's Manual Set up the measurements in Clarius ..................4-5 Create a new project ......................... 4-6 Add a device ..........................4-7 Search for and select existing tests in the Test Library ............. 4-8 Configure the vfd test ........................
  • Page 8 Model 4200A-SCS Parameter Analyzer User's Manual Table of contents View and analyze the test results .................... 7-13 Use the 4200A-CVIV Multi-Switch ................8-1 Introduction .......................... 8-1 Equipment required ......................8-1 Device connections ......................8-2 Connection schematic ....................... 8-3 Set up the measurements in Clarius ..................8-4 Create and rename a project for I-V and C-V measurements with compensation .....

  • Page 9: Introduction

    Section 1 Introduction In this section: Welcome .................. 1-1 Introduction to this manual ............1-1 Extended warranty ..............1-2 Contact information ..............1-2 Organization of manual sections ..........1-2 Application examples ............... 1-3 General ratings ................. 1-4 Welcome Thank you for choosing a Keithley Instruments product. The Model 4200A-SCS Parameter Analyzer performs laboratory-grade DC, I-V, C-V, and pulse device characterization, real-time plotting, and analysis with high precision and subfemtoamp resolution.

  • Page 10: Extended Warranty

    Section 1: Introduction Model 4200A-SCS Parameter Analyzer User's Manual Extended warranty Additional years of warranty coverage are available on many products. These valuable contracts protect you from unbudgeted service expenses and provide additional years of protection at a fraction of the price of a repair. Extended warranties are available on new and existing products. Contact your local Keithley Instruments office, sales partner, or distributor for details.

  • Page 11: Application Examples

    Model 4200A-SCS Parameter Analyzer User's Manual Section 1: Introduction Application examples This manual provides application examples that show you how to perform tests from the front panel and over a remote interface. The applications include:  Create a new project and test (on page 3-1) ...

  • Page 12: General Ratings

    Section 1: Introduction Model 4200A-SCS Parameter Analyzer User's Manual General ratings The general ratings and connections of the 4200A-SCS instrument are listed in the following table. Category Specification Supply voltage range 100 V to 240 V , 50 Hz or 60 Hz Current rating 1000 VA Input and output connections...

  • Page 13: Getting Started

    Section 2 Getting started In this section: Front panel overview ..............2-1 Rear panel overview ..............2-4 Installation ................2-5 Front panel overview Many controls and interfaces are on the front panel of the 4200A-SCS Parameter Analyzer. The next figure shows the front panel of the 4200A-SCS. The components are summarized following the figure. Figure 1: 4200A-SCS front panel Display A 1920 x 1080 full HD resolution, touch-screen display.

  • Page 14: Touch Screen Basics

    Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Headphone connector Provides a 1/8" stereo output connection. Interlock indicator Illuminates when the 12 VDC interlock circuit is closed. Operate indicator Illuminates when any internal cards are energized. 4200A-SCS-ND has no display and requires an external monitor. Touch screen basics You can operate the 4200A-SCS using the touch screen.

  • Page 15: Connect A Keyboard And Mouse

    Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Connect a keyboard and mouse Connect the keyboard to the 4200A-SCS with a USB cable. You can plug it into any of the eight USB ports. To ensure proper operation, be sure that the keyboard is connected before power-up. Figure 2: Keyboard and mouse connections If you want to use an optional mouse, connect a USB mouse to any of the 4200A-SCS USB ports.

  • Page 16: Rear Panel Overview

    Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Rear panel overview The following figure shows the rear panel of the 4200A-SCS. The connectors and components are summarized following the figure. Figure 3: 4200A-SCS rear panel Provides system cooling. DP port Provides a standard DisplayPort connection.

  • Page 17: Connect An External Monitor

    Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Four v3.0 USB Allows you to connect to peripherals such as keyboards, pointing devices, connectors printers, flash drives, external hard drives, and printers that are compatible with the USB v3.0 standard. Microphone and speaker Provides microphone, left speaker, and right speaker connections.

  • Page 18: Locating The System

    Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Locating the system Locate the 4200A-SCS so that it will operate within the following ambient temperature and humidity limits:  Temperature: +10 °C to +40 °C  Relative humidity: 5% to 80%, non-condensing SMU and preamplifier accuracy specifications are based on operation at 23 °C ±5 °C and between 5% and 60% relative humidity.
  • Page 19 Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Connecting to protective earth The 4200A-SCS must be connected to protective earth (safety ground) using the supplied green-yellow ground cable. Failure to attach the ground wires to a known protective earth may result in electric shock.
  • Page 20 Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Connecting a LAN cable The two LAN connectors on the 4200A-SCS are standard RJ-45 connectors intended for use with unshielded twisted pair (UTP) cable. For best results, use only CAT 5 UTP cables equipped with RJ-45 connectors to connect your LANs, as shown in the following figure.
  • Page 21 Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Connecting GPIB instruments You can use the 4200A-SCS to control one or more external instruments using the IEEE-488 general purpose instrument bus (GPIB). An example of typical instruments used in a test system with the 4200A-SCS are a switching system and an external C-V meter.

  • Page 22: Smu Connections

    Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Figure 7: Interlock connector on the rear panel of the 4200A-SCS 2. Connect the other end of the interlock cable to a compatible test fixture, such as the Keithley Instruments LR:8028. For more information, see the "Configuring the safety interlock"...
  • Page 23 Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Triaxial cables Triaxial cables are supplied to make connections to the DUT (device under test). With preamplifiers installed, use the low-noise triaxial cables, which are terminated with 3-slot triaxial connectors on both ends.
  • Page 24 Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Basic connections The simplest method to connect SMUs to the device under test (DUT) is to use one SMU for each terminal of the device. When setting up a test, the FORCE terminal (center conductor) of the SMU is used to apply voltage or current to the device.
  • Page 25 Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Figure 10: SMU (with preamplifiers) connections to DUT 4200A-900-01 Rev. C / January 2019 2-13...
  • Page 26 Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Mounting preamplifiers in a probe station You can mount the preamplifiers remotely on a probe station using an optional mounting kit. Follow the steps below to mount and connect a remote preamplifier on a probe station. Details are provided in the documentation provided with the mounting kit.

  • Page 27: Powering The 4200A-Scs

    Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started For additional preamplifier details, see the Model 4200A-SCS Reference Manual. Figure 11: Installing a preamplifier on the probe station Powering the 4200A-SCS Operating the instrument on an incorrect line voltage may cause damage, possibly voiding the warranty.
  • Page 28 Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual The 4200A-SCS operates from a line voltage in the range of 100 VAC to 240 VAC at a frequency of 50 Hz or 60 Hz. Line voltage is automatically sensed, but line frequency is not. The 4200A-SCS power switch allows you to either shut down the instrument without shutting down the software, or shut down the instrument and the software.

  • Page 29: Create A New Project And Test

    Section 3 Create a new project and test In this section: Introduction ................3-1 Equipment required ..............3-1 Device connections ..............3-2 Set up the measurements in Clarius ........3-3 Introduction This section provides an example of how to create a new blank project and configure a new blank test. You will create a test to be performed on a MOSFET, but the procedure is general and can be applied to different devices and applications.

  • Page 30: Device Connections

    Section 3: Create a new project and test Model 4200A-SCS Parameter Analyzer User's Manual Device connections Using the supplied cables, connect the output terminals of the instruments directly to the MOSFET terminals in the shielded test fixture. The triaxial terminals on the shielded test fixture allow you to connect to the device and maintain a completely shielded and guarded test setup.

  • Page 31: Connect The 4200A-Scs To The Dut

    Model 4200A-SCS Parameter Analyzer User's Manual Section 3: Create a new project and test Connect the 4200A-SCS to the DUT The hardware connections from the output of the instruments in the 4200A-SCS chassis to the test fixture that contains the MOSFET are shown in the next figure. Figure 14: Rear panel connections from the 4200A-SCS to a MOSFET Set up the measurements in Clarius This section describes how to set up the 4200A-SCS to generate a V...

  • Page 32: Select And Rename A New Project

    Section 3: Create a new project and test Model 4200A-SCS Parameter Analyzer User's Manual Select and rename a new project To select and rename a new project: 1. Choose Select. Figure 15: Select highlighted 2. In the Library, select Projects. 3.

  • Page 33: Add A Device

    Model 4200A-SCS Parameter Analyzer User's Manual Section 3: Create a new project and test Add a device Tests must be placed in the project under a device. To add a device: 1. Select Devices. 2. From the Filters pane, select the 3 under the Terminals heading and Transistor under the Device Type option.

  • Page 34: Select A Custom Test

    Section 3: Create a new project and test Model 4200A-SCS Parameter Analyzer User's Manual Select a custom test To select a custom test: 1. Select Tests. 2. Select Custom Test, then select Add to create a new 3-terminal, n-type MOSFET test in the project tree.

  • Page 35: Configure The Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 3: Create a new project and test Configure the test To configure the test: 1. Select Configure. Figure 21: Configure highlighted 2. In the project tree, select vds-id. Because this test is custom, you must assign functions to all terminals connected to the MOSFET before you can run the test.
  • Page 36 Section 3: Create a new project and test Model 4200A-SCS Parameter Analyzer User's Manual 3. Set the Gate terminal connection to SMU2. 4. Set the Operation Mode to Voltage Step. 5. Change the Start, Stop, Step, and Compliance settings to match the next figure or to the gate settings appropriate for your device.

  • Page 37: Execute The Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 3: Create a new project and test Execute the test Select Run to execute the test. Figure 25: Run View and analyze the test results While the test is running, you can view the data in the spreadsheet of the Analyze pane. Because you created a new test, the data must be assigned to the axes of the graph before you can view graphical results.
  • Page 38 Section 3: Create a new project and test Model 4200A-SCS Parameter Analyzer User's Manual 5. Select OK. 6. The graph displays the vds-Id family of curves. Figure 28: Analyze Pane showing test results 3-10 4200A-900-01 Rev. C / January 2019...

  • Page 39: Use The Rpm To Switch The Smu, Cvu, And Pmu

    Section 4 Use the RPM to switch the SMU, CVU, and PMU In this section: Introduction ................4-1 Equipment required ..............4-2 Update the RPM configuration in KCon ........4-2 Device connections ..............4-3 Set up the measurements in Clarius ........4-5 Introduction The 4225-RPM Remote Amplifier/Switch Module is an accessory for the 4225-PMU 2-Channel UltraFast I-V Module.

  • Page 40: Equipment Required

    Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Equipment required  One 4200A-SCS with the following instruments:  Two 4200-SMUs or 4210-SMUs  Two 4200-PAs  One 4210-CVU  One 4225-PMU ...

  • Page 41: Device Connections

    Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Device connections Using the supplied cables, make connections from the output terminals of the instruments to the input terminals of the two RPMs. Connect the output terminals of the RPMs to the diode in a 4-wire configuration to provide the best measurement accuracy and eliminate the lead resistance effects on I-V and C-V measurements.

  • Page 42: Connection Schematic

    Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Connection schematic The hardware connections from the output terminals of the instruments in the 4200A-SCS are connected to the input terminals of the two 4225-RPMs and then from the output terminals of the two RPMs to the diode under test, as shown in the next figure.

  • Page 43: Connect The 4200A-Scs To The Dut

    Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Connect the 4200A-SCS to the DUT The next figure shows the 4200A-SCS rear panel connections to the input terminals of two 4225-RPMs and from the outputs of the 4225-RPMs to the diode. Figure 31: Rear panel connections to the inputs of the 4225-RPM units and from the units to the device Set up the measurements in Clarius...

  • Page 44: Create A New Project

    Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Create a new project To create a new project: 1. Choose Select. Figure 32: Select highlighted 2. In the Library, select Projects. 3.

  • Page 45: Add A Device

    Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Add a device To add a device: 1. Select Devices. 2. Type diode into the search box. 3. Select Search. 4. Select the Diode, 2 terminal device. 5.

  • Page 46: Search For And Select Existing Tests In The Test Library

    Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Search for and select existing tests in the Test Library To search for and select an existing test: Select Tests. To find a diode test in the Test Library, type the word diode in the search box, then select Search.

  • Page 47: Configure The Vfd Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Your project tree now has three tests. Figure 38: Three tests added to project tree Configure the vfd test To configure the vfd test: 1.
  • Page 48 Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual 2. In the project tree, select the vfd test. 3. Adjust the Anode settings in the Key Parameters pane as needed. Figure 40: Forward I-V sweep, vfd terminal settings 4.
  • Page 49 Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU 6. Select OK to accept the settings. 7. Select Terminal Settings. 8. Select Advanced. 9. Adjust the voltage source and current measurement parameters as needed. Figure 42: Terminal Settings pane and Terminal Settings Advanced dialog box 10.

  • Page 50: Configure The Cv-Diode Test

    Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Configure the cv-diode test To configure the cv-diode test: 1. Select the cv-diode test from the project tree. 2. Select the Anode terminal of the diode in the Key Parameters pane 3.
  • Page 51 Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU 4. On the Test Settings pane, select Advanced. Adjust the timing parameters as needed. Be sure to include the sweep delay time in your adjustments. Figure 44: Test Settings pane and the Test Settings Advanced and Formulator dialog boxes for the cv-diode sweep test 4200A-900-01 Rev.
  • Page 52 Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual 5. On the Terminal Settings pane and the Terminal Settings Advanced dialog box of the Anode terminal, adjust the parameters. If you are including cable compensation values, run the Tools menu option CVU Connection Compensation.

  • Page 53: Configure The Pulse-Diode Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Configure the pulse-diode test To configure the pulse-diode test: 1. In the project tree, select the pulse-diode test. 2. From the Key Parameters pane, change the Cathode terminal setting from PMU1-GND to PMU1-2, as shown in the following figure.
  • Page 54 Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual 4. Select the Anode terminal. 5. Select Terminal Settings. 6. Select Advanced to configure the measurements as needed, including spot mean, PMU compensation, and PMU threshold levels.
  • Page 55 Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU 7. Select OK. 8. Select the Cathode terminal. 9. Select Test Settings. 10. Select Advanced to adjust the test mode and pulse timing settings, as needed. Figure 48: Test Settings pane and the Test Settings Advanced dialog box for the Pulse-Diode test 11.

  • Page 56: Run The Test

    Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Run the test Once the tests have been configured, you can execute every test under the device. To run the tests for the device: 1.
  • Page 57 Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Select a test from the project tree to display its results. The data for the vfd test is displayed in the next figure. Both the data and the graph are displayed in this view. Figure 51: Analyze pane for the vfd test 4200A-900-01 Rev.

  • Page 58: Configure And Use A Series 700 Switching System

    Section 5 Configure and use a Series 700 Switching System In this section: Introduction ................5-1 Equipment required ..............5-2 Device connections ..............5-2 Update the switch configuration in KCon ......... 5-6 Set up the measurements in Clarius ........5-11 Introduction In this tutorial, you will configure a Keithley Instruments Series 700 Switching System (707, 707A, 707B, 708, 708A, or 708B) in the Keithley Configuration Utility (KCon).

  • Page 59: Equipment Required

    Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual Equipment required  One 4200A-SCS with the following instruments:  Three 4200-SMUs or 4210-SMUs  One 4210-CVU  Eight 4200-MTRX-X triaxial cables or 4200-TRX-X cables if using preamplifiers ...

  • Page 60: Connect The 7072 To The Dut

    Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System Connect the 7072 to the DUT The hardware connections from the 7072 Matrix Card to the 4-terminal MOSFET DUT are shown in the following figure. Use four triaxial cables to connect to the input terminals of your test fixture. For systems without a preamplifier, use 4200-MTRX-X triaxial cables.

  • Page 61: Connect The 4200A-Scs To The 7072

    Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual Connect the 4200A-SCS to the 7072 This section describes connections to the 7072. To connect the 4200A-SCS and SMUs to the 7072: Using four 4200-MTRX-X or 4200-TRX-X triaxial cables, make the following connections: ...
  • Page 62 Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System 2. Using four CA-447A SMA cables, make the following connections:  4210-CVU HCUR to adapter tee assembly 1  4210-CVU HPOT to adapter tee assembly 1 ...

  • Page 63: Update The Switch Configuration In Kcon

    Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual Update the switch configuration in KCon After completing the switch and device connections, use KCon to manage the configuration of all instrumentation controlled by the 4200A-SCS software. You use KCon to: ...
  • Page 64 Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System 4. Select OK. 5. Select Add External Instrument again. 6. Select Test Fixture. Figure 56: Add External Instrument dialog box, Test Fixture highlighted 7. Select OK. 8.
  • Page 65 Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual 10. From the configuration navigator, select the switching system you just added (MTRX1). 11. In the Properties pane, add the 7072 Matrix Card to the correct slot of the switching system. 12.
  • Page 66 Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System 13. Select the arrow next to MTRX1 to see the settings for the 7072 Matrix Card. 14. Select CARD1. 15. Complete the Card Rows Assignments according to how you connected the instruments to the 7072.
  • Page 67 Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual 18. Select Save to save the system configuration. 19. Select System Configuration Summary, then scroll down to the Connections section. You need the names from the Terminal ID column when setting the switching system connections in Clarius. You can select Save Configuration As or Print Configuration to record the terminal IDs.

  • Page 68: Set Up The Measurements In Clarius

    Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System Set up the measurements in Clarius After closing KCon, open the Clarius application from the desktop. In this section, you use the Clarius application to configure and run two tests on an n-channel MOSFET transistor: A plot of drain current versus drain voltage using the SMUs and a C-V sweep.

  • Page 69: Add A Device

    Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual 5. Select Yes when prompted to replace the existing project. Add a device To add a device: 1. Select Devices. 2. Enter MOSFET in the search box. 3.

  • Page 70: Configure The Connectpins Action

    Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System Configure the connectpins action To configure the connectpins action: 1. Select the first connectpins action you added to the project tree. 2. Select Configure. Figure 65: Configure highlighted 3.
  • Page 71 Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual In this example, assigning TermIdStr1 to SMU1 and Pin 1 to 3 connects SMU1 to Pin 3 on the matrix. Figure 66: connectpins device connections If the OpenAll check box is selected, the connectpins action opens all crosspoints before closing the specified pairs.
  • Page 72 Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System 4. Select Save. 5. Select the second connectpins action you added to the project tree. 6. Make the following connections using the pairs of TermIdStr# and Pin# text fields in the action: ...

  • Page 73: Search For And Add Existing Tests From The Test Library

    Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual Search for and add existing tests from the Test Library To search for and add existing tests from the Test Library: 1. Choose Select. Figure 68: Select highlighted 2.

  • Page 74: Run The Project And View The Tests

    Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System Run the project and view the tests To run the project and view the tests: 1. In the project tree, select New Project. 2. Make sure the items in the project tree are checked. 3.

  • Page 75: Make I-V Measurements On A Solar Cell

    Section 6 Make I-V measurements on a solar cell In this section: Introduction ................6-1 Equipment required ..............6-1 Device connections ..............6-2 Setting up measurements in the Clarius software ....6-4 Introduction This example shows how to use a 4200-SMU or 4210-SMU instrument to perform a forward-biased voltage sweep on a solar cell in a 4-wire configuration.

  • Page 76: Device Connections

    Section 6: Make I-V measurements on a solar cell Model 4200A-SCS Parameter Analyzer User's Manual Device connections Connect your preamplifier or SMU output terminals to the solar cell in a 4-wire configuration. This provides the best measurement accuracy and eliminates the effects of the resistance of the test leads and unwanted voltage drops.

  • Page 77: Connect The 4200A-Scs To The Dut

    Model 4200A-SCS Parameter Analyzer User's Manual Section 6: Make I-V measurements on a solar cell Connect the 4200A-SCS to the DUT The following two figures show the 4200A-SCS rear panel connections for the two methods mentioned in the Device connection schematic (on page 6-2) topic.

  • Page 78: Setting Up Measurements In The Clarius Software

    Section 6: Make I-V measurements on a solar cell Model 4200A-SCS Parameter Analyzer User's Manual Setting up measurements in the Clarius software This section demonstrates how to set up the 4200A-SCS to perform an I-V sweep on a solar cell. The fwd-ivsweep test measures current at each step of a user-configured voltage sweep.

  • Page 79: Search For And Select A Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 6: Make I-V measurements on a solar cell Search for and select a test To search for and select the test: 1. Select Tests. 2. In the Filters pane, select Solar Cell. Figure 76: Use filters to select the fwd-ivsweep test 3.

  • Page 80: Configure The Test

    Section 6: Make I-V measurements on a solar cell Model 4200A-SCS Parameter Analyzer User's Manual Configure the test To configure the test: 1. Select the fwd-ivsweep solar cell I-V test in the project tree. 2. Select Configure. Figure 78: Configure highlighted 3.
  • Page 81 Model 4200A-SCS Parameter Analyzer User's Manual Section 6: Make I-V measurements on a solar cell 4. In the Test Settings pane, adjust the Measure Settings and Test Mode as needed. Figure 80: Test Settings pane 4200A-900-01 Rev. C / January 2019...
  • Page 82 Section 6: Make I-V measurements on a solar cell Model 4200A-SCS Parameter Analyzer User's Manual The Formulator is also in the Test Settings pane. If you select the Formulator in the Test Settings pane, the Formulator dialog box appears as shown in the figure below. Figure 81: Formulator dialog box This test calculates V , and other device parameters.

  • Page 83: Run The Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 6: Make I-V measurements on a solar cell Run the test 1. Highlight the fwd-ivsweep test in the project tree. 2. Select Run to execute the test. Figure 82: Run Analyze the test results You can select Analyze when you run the project to view test results in real-time.

  • Page 84: Additional Tests

    Section 6: Make I-V measurements on a solar cell Model 4200A-SCS Parameter Analyzer User's Manual The sheet displays the results with the voltage and current data labeled Anode V and Anode I, respectively. The formulas calculated in the Formulator are shown in the right-most columns. They include the maximum power (PMAX), open circuit voltage (VOC), short circuit current (ISC), and fill factor (FF).

  • Page 85: Make C-V Measurements On A Moscap

    Section 7 Make C-V measurements on a MOSCAP In this section: Introduction ................7-1 Equipment required ..............7-1 Device connections ..............7-2 Set up the measurements in Clarius ........7-4 Introduction Capacitance-voltage (C-V) measurements are commonly used to study gate-oxide quality in detail. These measurements are made on two-terminal devices called MOS capacitors, which are MOSFETs without a source and drain.

  • Page 86: Device Connections

    Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual Device connections Using the supplied cables, make connections from the output terminals of the 4210-CVU to the MOS capacitor. Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on.

  • Page 87: Connect The 4200A-Scs To The Dut

    Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP Connect the 4200A-SCS to the DUT The hardware connections from the output terminals of the CVU to the MOS capacitor are shown in the following figure. Connect one cable to each of the CVU terminals, then connect one SMA female to BNC male adapter to the end of each cable.

  • Page 88: Set Up The Measurements In Clarius

    Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual Set up the measurements in Clarius This section describes how to set up the Clarius application to make a C-V sweep on a MOS capacitor. You select an existing project from the project library and configure a C-V sweep test. For this example, you will use Clarius to: ...

  • Page 89: Configure The Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP The project is displayed. This project has three C-V tests for a MOS capacitor, as shown in the next figure. Figure 88: MOS capacitor C-V project tree with three tests Configure the test To configure the C-V sweep test, you set the source and measure parameters, define the timing parameters, and adjust the constants and formulas for extracting parameters from the C-V data.
  • Page 90 Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual 2. In the project tree, select the moscap-cvsweep test. 3. In the Key Parameters pane, adjust the voltage sweep and test frequency values as needed. Figure 90: Key parameters for the C-V sweep of a MOS capacitor 4200A-900-01 Rev.
  • Page 91 Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP 4. In the Test Settings pane, set the Speed to Quiet for sensitive capacitance measurements. Figure 91: Test Settings pane 4200A-900-01 Rev. C / January 2019...
  • Page 92 Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual 5. Adjust the Sweep Delay as needed. 6. Select Formulator. In this test, the Formulator contains equations for deriving common MOS capacitor parameters from the C-V data. Examples of these parameters include the oxide capacitance, oxide thickness, flatband voltage, flatband capacitance, threshold voltage, and doping concentration.
  • Page 93 Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP The next figure shows some of the equations that are included with this test. In the Constants area of the Formulator, you can change the constants that are used in the formulas, such as the gate area and temperature.

  • Page 94: Perform Offset Compensation

    Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual In this test, the CVH1 terminals are internally connected to the AC ammeter and the HI of the DC voltage source by default. The CVH1 terminals are externally connected to the gate of the MOS capacitor.
  • Page 95 Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP 2. Select CVU Connection Compensation from the Clarius Tools dialog box. Figure 96: Clarius Tools dialog box 3. Disconnect the probes from the DUT. 4. Select Measure Open. Figure 97: CVU Connection Compensation dialog box 4200A-900-01 Rev.
  • Page 96 Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual 5. Select OK. You are prompted to verify that the probes have been disconnected from the DUT. Figure 98: Prompt to remove probes from DUT 6. Make sure that the probes have been disconnected from the DUT, then select OK. The compensation runs, and a dialog box confirms that the compensation has run successfully.

  • Page 97: Run The Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP Run the test Select Run to execute the test. Figure 100: Run View and analyze the test results Select Analyze when you run the project to view test results in real-time. Figure 101: Analyze highlighted The C-V data is plotted on the graph as the moscap-cvsweep test executes.
  • Page 98 Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual You can also click the data only view of the Analyze sheet, as highlighted in the next figure, to display more data. For example, you can display a holistic view of the parameters for a device. Figure 103: C-V data in the sheet 7-14 4200A-900-01 Rev.

  • Page 99: Use The 4200A-Cviv Multi-Switch

    Section 8 Use the 4200A-CVIV Multi-Switch In this section: Introduction ................8-1 Equipment required ..............8-1 Device connections ..............8-2 Set up the measurements in Clarius ........8-4 Introduction This section shows you how to use the 4200A-SCS and Model 4200A-CVIV Multi-Switch to perform I-V and C-V measurements on the same device without having to manually change connections to the device between tests.

  • Page 100: Device Connections

    Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual Device connections To use 4200-PA preamplifiers with the 4200A-CVIV, the preamplifiers are installed in the 4200A-CVIV chassis. If you are not using 4200-PA preamplifiers, you must install 4200A-CVIV-SPT Pass-Thru modules in the 4200A-CVIV chassis and connected to a 4200-SMU or 4210-SMU using triaxial cables.

  • Page 101: Connection Schematic

    Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch Connection schematic Make the hardware connections from the output terminals of the 4200A-CVIV to the MOSFET, as shown in the following figure. In this example, 2-wire (local sense) measurements are made at the MOSFET, so four triaxial cables are connected from each Force output terminal of the 4200A-CVIV to the device.

  • Page 102: Set Up The Measurements In Clarius

    Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual Set up the measurements in Clarius This section describes how to set up the 4200A-SCS to control the 4200A-CVIV to automatically switch between I-V and C-V measurements. For this example, you use the Clarius application to: ...

  • Page 103: Create And Rename A Project For I-V And C-V Measurements With Compensation

    Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch Create and rename a project for I-V and C-V measurements with compensation To create and rename a project for I-V and C-V measurements with compensation: 1. Choose Select. Figure 105: Select highlighted 2.

  • Page 104: Add An Action To Perform Cvu Compensation

    Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual Add an action to perform CVU compensation The cvu-cviv-comp-collect action configures the 4200A-CVIV to the selected channel configuration and performs compensation. To add an action: 1. Select Actions. 2.
  • Page 105 Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch 2. From the project tree, select the cvu-cviv-comp-collect action. Figure 109: cvu-cviv-comp-collect Action 3. From the CVIV Multi-Switch Configuration terminal settings box, set the output mode of the 4200A-CVIV to Two Wire.
  • Page 106 Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual 8. A dialog box is displayed with instructions to remove the device-under-test (DUT) from the test fixture or lift the probes before performing open compensation. Remove the DUT before selecting 9.

  • Page 107: Add A Device

    Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch Add a device To add a device: 1. Choose Select. 2. Select Devices. 3. In the Filters pane, select 4 under the Terminals column and Transistor under the Device Type column.

  • Page 108: Configure The Action

    Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual Configure the action To configure the action: 1. Select Configure. Figure 112: Configure highlighted 2. In the project tree, select the cviv-configure action. 3. In the CVU 2/4 Wire Mode settings, set the output mode of the 4200A-CVIV to Two Wire. 4.

  • Page 109: Add A Test For Making I-V Measurements

    Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch 5. In the CVIV Multi-Switch Channel Config box, set all of the terminals to SMU. Figure 113: cviv-configure action for I-V testing Add a test for making I-V measurements To add a test: 1.

  • Page 110: Add An Action For Switching The Cvu To The Output Terminals Of The 4200A-Cviv

    Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual 2. Select Tests. 3. To find the test, type vds-id into the search bar, then select Search. 4. Select the vds-id test, then select Add to copy it to the project tree. 5.

  • Page 111: Configure The Action

    Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch 2. Select Actions. 3. To find the action, type cviv into the search bar, then select Search. 4. Select the cviv-configure action, then select Add to copy it to the project tree. Configure the action To configure the action: 1.

  • Page 112: Add A Test For Making C-V Measurements

    Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual 3. In the CVU 2/4 Wire Mode box, set the output mode of the 4200A-CVIV to Two Wire. 4. In the CVIV Display Config box, change the name of each channel to match the corresponding MOSFET terminal they are connected to.
  • Page 113 Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch 5. Select Configure to configure the test. Figure 122: Configure highlighted 6. Select the Gate terminal. Figure 123: Selected Gate terminal 4200A-900-01 Rev. C / January 2019 8-15...
  • Page 114 Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual 7. Configure the voltage settings and test frequency as needed. 8. In the right pane, select Terminal Settings and enable Open compensation. Figure 124: Terminal Settings panel with Open compensation selected 8-16 4200A-900-01 Rev.

  • Page 115: Run The Project And Review The Results

    Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch Run the project and review the results To run the project and review the results: 1. Select the test name at the top of the project tree. In this example, it is CVIV_COMPENSATION. 2.

  • Page 116: Pmu For Pulsed I-V Measurements On A Mosfet

    Section 9 PMU for pulsed I-V measurements on a MOSFET In this section: Introduction ................9-1 Equipment required ..............9-2 Device connections ..............9-2 Set up the measurements in Clarius ........9-4 Introduction The Model 4225-PMU Ultra-Fast I-V Module can be used to make both pulsed I-V measurements and transient I-V measurements (waveform capture) on a device.

  • Page 117: Equipment Required

    Section 9: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Parameter Analyzer User's Manual Equipment required  One 4200A-SCS with the following instruments:  One 4225-PMU  Two 4225-RPMs  Two CA-547-2A RPM interconnect cables (supplied with the 4225-RPM) ...

  • Page 118: Connection Schematic

    Model 4200A-SCS Parameter Analyzer User's Manual Section 9: PMU for pulsed I-V measurements on a MOSFET Connection schematic The hardware connections from the output terminals of the PMU and the two RPMs to the MOSFET are shown in the following figures. Connect one CA-547-2A RPM interconnect cable from each PMU channel to the appropriate RPM.

  • Page 119: Set Up The Measurements In Clarius

    Section 9: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Parameter Analyzer User's Manual At the output of each RPM, connect the triaxial to BNC adapter, BNC to SMA adapter, and finally the SMA-to-SMA cable. Connect the SMA cables to either probes or a test fixture that is connected to the MOSFET. RPM1 is connected to the gate of the MOSFET and RPM2 is connected to the drain of the MOSFET.

  • Page 120: Create A New Project

    Model 4200A-SCS Parameter Analyzer User's Manual Section 9: PMU for pulsed I-V measurements on a MOSFET Create a new project To create a new project: 1. Choose Select. Figure 128: Select highlighted 2. In the Library, select Projects. 3. Select New Project. 4.

  • Page 121: Search For And Select An Existing Test

    Section 9: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Parameter Analyzer User's Manual Search for and select an existing test To search for and select an existing test: 1. Select Tests. 2. Type MOSFET into the search bar, then select Pulse in the Filters pane under Measurements. 3.

  • Page 122: Configure The Test

    Model 4200A-SCS Parameter Analyzer User's Manual Section 9: PMU for pulsed I-V measurements on a MOSFET Configure the test To configure the test: 1. Select Configure. Figure 131: Configure button highlighted 2. From the Key Parameters pane, adjust the pulse voltage sweep levels of PMU1-2 on the Drain terminal and the Pulse Step Voltage of PMU1-1 on the Gate terminal, as needed.
  • Page 123 Section 9: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Parameter Analyzer User's Manual 3. From the Test Settings pane and Advanced Test Settings dialog box, adjust the Pulse Settings and Timing Parameters, as needed. Figure 133: Test Settings pane and Test Settings Advanced dialog box 4.

  • Page 124: Run The Test And Analyze The Results

    Model 4200A-SCS Parameter Analyzer User's Manual Section 9: PMU for pulsed I-V measurements on a MOSFET Run the test and analyze the results Select Run to execute the test. Figure 135: Run You can select Analyze when you run the project to view test results in real-time. Figure 136: Analyze highlighted 4200A-900-01 Rev.
  • Page 125 Section 9: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Parameter Analyzer User's Manual The data and the graph are displayed in the Analyze pane as shown in the next figure. Figure 137: Analyze results pane with data and graph displayed 9-10 4200A-900-01 Rev.

  • Page 126: Next Steps

    Section 10 Next steps In this section: Additional information ............. 10-1 Additional information This manual has prepared you to start using your new 4200A-SCS Parameter Analyzer for your applications. For more detailed information, refer to the Learning Center, which you can access by selecting this icon on your desktop: Figure 138: 4200A-SCS Learning Center icon...
  • Page 127 Section 10: Next steps Model 4200A-SCS Parameter Analyzer User's Manual The Learning Center contains a variety of content to help you learn how to use your 4200A-SCS, including:  The Model 4200A-SCS Parameter Analyzer Reference Manual  Videos  Application notes ...
  • Page 128 Specifications are subject to change without notice. All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www.tek.com/keithley 12/17...

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