Page 1 tek.com/keithley Model 4200A-SCS Prober and External Instrument Control 4200A-913-01 Rev. A December 2020 *P4200A-913-01A* 4200A-913-01A...
Page 2 Model 4200A-SCS Prober and External Instrument Control...
Page 3 © 2020, Keithley Instruments Cleveland, Ohio, U.S.A. All rights reserved. Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments is strictly prohibited. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, LLC.
Page 4 Safety precautions The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present. This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury.
Page 5 For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired. Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
Page 6: Table Of Contents
Table of contents Introduction ......................1-1 Introduction .......................... 1-1 Using switch matrices ..................... 2-1 Typical test systems using a switch matrix ................2-1 Matrix card types ........................2-2 Switch matrix mainframes ......................2-7 Switch matrix connections....................2-7 Typical SMU matrix card connections ..................2-7 Typical preamplifier matrix card connections ................
Page 7 Model 4200A-SCS Prober and External Instrument Control Table of contents Search for and add existing tests from the Test Library ............3-15 Run the project and view the tests ..................3-16 Using a Model 590 C-V Analyzer ................4-1 Introduction .......................... 4-1 C-V measurement basics .....................
Page 8 Model 4200A-SCS Prober and External Instrument Control Table of contents Front-panel connections ......................6-6 Rear-panel connections ......................6-7 Make power and GPIB connections ..................6-8 Using KCon to add Model 82 C-V System ................6-9 Model 82 projects ......................... 6-9 Cable compensation tests ......................
Page 9 Model 4200A-SCS Prober and External Instrument Control Table of contents Understanding site coordinate information ................8-5 Reference site (die) ........................8-6 Probe sites (die) ........................8-7 Chuck movement ........................8-7 PRBGEN user library ......................8-9 PrInit ............................8-10 PrChuck ..........................8-11 PrSSMovNxt ..........................
Page 10 Model 4200A-SCS Prober and External Instrument Control Table of contents Probesubsites Clarius project example ................10-23 Use KCon to add a prober..................... 10-25 Clarius ........................... 10-26 Commands and error symbols ..................10-28 Using a manual or fake prober ................11-1 Using a manual or fake prober software ................
Page 11 Model 4200A-SCS Prober and External Instrument Control Table of contents Use KCon to add a prober..................... 13-14 Clarius project example....................13-15 Probesites Clarius project example ................. 13-18 Probesubsites Clarius project example ................13-19 Commands and error symbols ..................13-20 Using an MPI Probe Station................... 14-1 MPI prober software ......................
Page 12: Introduction
Section 1 Introduction In this section: Introduction ................1-1 Introduction This document contains information about using switch matrices, probers, and other external equipment with the 4200A-SCS.
Page 13: Using Switch Matrices
Section 2 Using switch matrices In this section: Typical test systems using a switch matrix ....... 2-1 Switch matrix connections ............2-7 Connection scheme settings ..........2-13 Switch matrix control .............. 2-16 Signal paths to a DUT ............2-17 Use KCon to add a switch matrix to the system ..... 2-23 Switch matrix control example ..........
Page 14: Matrix Card Types
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Figure 1: Typical systems using a switch matrix Matrix card types The recommended Keithley Instruments matrix cards are: • Model 7071 8 x 12 General Purpose Matrix Card, <100 pA offset current •...
Page 15 Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Figure 2: Test system using 7071 matrix cards 7072 Semiconductor Matrix Card The 7072 provides two two-pole low-current paths that have <1 pA offset current (rows A and B), two one-pole CV paths for characterization from DC to 1 MHz (rows G and H), and four two-pole paths for general purpose switching (rows C, D, E, and F).
Page 16 Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Figure 3: Test system using 7072 matrix cards 7174A Low Current Matrix Card The 7174A provides high quality, high performance switching of I-V and C-V signals. This matrix card uses 3-pole switching (HI, LO, Guard) with 10 fA typical offset current.
Page 17 Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices 7174A connections for local sensing The following figure shows a system that uses local sensing. Note that coaxial tees are used to adapt the Keysight 4284A C-V meter for two-terminal operation. Figure 4: Test system using 7174A matrix cards 7174A connections for remote sensing The following figure shows how to connect instrumentation for remote sense operation.
Page 18 Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control In the following figure, the C-V Analyzer signal paths (on page 2-20) for the Keysight Model 4980A Keysight Model 8110A pulse generator signal path (on page 2-23) show how signals are routed through 7174A matrix switches to a DUT.
Page 19: Switch Matrix Mainframes
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Switch matrix mainframes The 4200A-SCS provides a user library that contains preconfigured data acquisition and control user modules for the Series 700 Switch System. You can use the 4200A-SCS with switch matrices from other vendors. However, you will need to develop software to control these matrices from Clarius .
Page 20 Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Figure 6: Typical SMU matrix card connections 4200A-913-01 Rev. A December 2020...
Page 21: Typical Preamplifier Matrix Card Connections
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Typical preamplifier matrix card connections The following figure shows typical preamplifier matrix card connections using local sensing. This configuration is similar to the SMU configuration shown in the previous figure, except that preamplifiers are added for low-current source-measure capabilities.
Page 22: Typical Cvu Matrix Card Connections
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Typical CVU matrix card connections In your project, you can automate the use of a CVU and other instrumentation using a switching matrix and actions to control the switching. When the project is run, the switching matrix automatically makes the required instrument connections for each test in the project.
Page 23: Typical Cvu Test Connections To A Dut
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices The following figure shows connections for remote (4-wire) sensing. Figure 9: Test connections for a switch matrix - remote (4-wire) sensing The 7078-TRX-BNC adapters must be used in order to extend SMA shielding through the matrix card.
Page 24 Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Figure 10: Measurement circuit (simplified) You can swap the HCUR and HPOT and LCUR and LPOT terminal functionality in Clarius. The following figure shows typical connections to a DUT installed in a test fixture that has BNC bulkhead connectors.
Page 25: Connection Scheme Settings
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Connection scheme settings The following connection scheme settings are set from the Keithley Configuration Utility (KCon) when the switch matrix is added to the system configuration. See Using KCon to add a switch matrix to the system (on page 2-23).
Page 26 Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Figure 12: Row-Column, Local Sense Connection Scheme example Instrument card scheme for local sense Use local sense when the measurement-pathway resistance is small and the associated voltage errors are negligible. The measurement pathway is comprised of the following conductors, connected in series: •...
Page 27 Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Figure 13: Instrument Card, Local Sense Connection Scheme example Instrument card scheme for remote sense Use remote sense to eliminate the effects of measurement pathway resistance. The following figure illustrates the use of remote sense in an instrument card configuration.
Page 28: Switch Matrix Control
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control When remote sense is selected, rows and columns are paired together as shown in this table. Row A paired with row B Column 1 paired with Column 2 Row C paired with row D Column 3 paired with Column 4 Row E paired with row F...
Page 29: Signal Paths To A Dut
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Signal paths to a DUT The following figures show signal path examples from the various test instruments through the matrix switches to a DUT. 4200A-SCS signal paths The following figure shows remote sensing (4-wire) signal paths through a matrix card using two-pole switching.
Page 30 Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Sense setting To make the connections shown in 4200A-SCS signal paths (on page 2-17), you must select remote sensing. When remote sensing is selected, the rows and columns are paired together as follows: Row A (force) paired with row B (sense) Column 1 (force) paired with column 2 (sense) Row E (force) paired with row F (sense)
Page 31 Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Figure 17: Instrument card connection scheme The 4200A-SCS automatically selects the first available rows to make connections to the DUT. In this example, rows A through D are the first available rows. The following shows 4200A-SCS signal paths through a 3-pole 7071 matrix card using remote sensing.
Page 32: C-V Analyzer Signal Paths
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Figure 18: 4200A-SCS signal paths through a 3-pole matrix card using remote sensing C-V Analyzer signal paths The following figures show local sense C-V Analyzer signal paths through rows B and H of a 7072 matrix card.
Page 33 Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Figure 19: 590 signal paths through 7072 matrix card using local sensing Figure 20: Keysight Model 4980A signal paths through 7072 matrix card using local sensing 4200A-913-01 Rev. A December 2020 2-21...
Page 34 Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control The following figure shows the remote sense signal paths for the Keysight Model 4980A LCR meter through a 2-pole matrix card. Since row pairing is required, the remote sense setting must be used. Figure 21: Keysight Model 4980A signal paths through a two-pole matrix card using remote sensing 2-22...
Page 35: Keysight Model 8110A Pulse Generator Signal Path
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Keysight Model 8110A pulse generator signal path The following figure shows the HI signal path through the 7174A matrix card. However, the pulse generator can also be used with other matrix card types. Note that the pulse generator LO is not routed through the matrix card.
Page 36: Step 1. Exit Clarius And Open Kcon
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control These and other KCon switch matrix settings result in simplified matrix connections. Initially, you need to: • Add the test fixture or probe station. • Configure the Instrument Connection Scheme and Switch Cards areas. •...
Page 37 Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices 5. From the Model list, select the appropriate test fixture. 6. Enter the number of pins. You can enter 2 to 72 pins. The number of pins defined in the test fixture properties determines the pins that are available to assign to a switch matrix card column.
Page 38: Step 3. Add Switching System Mainframe
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Figure 24: Probe station properties 5. From the Model list, select the prober. 6. Enter the Number of Pins / Positioners. 7. Select the options that are appropriate for your prober. The number of pins defined in the probe station properties determines the pins that are available to assign to a switch matrix card column.
Page 39: Step 4. Set Gpib Address
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Figure 25: KCon MTRX1 Properties Step 4. Set GPIB address The GPIB address setting in the properties must match the actual GPIB address of the mainframe. The address for the switch system mainframe is briefly displayed during its power-on sequence. To set the GPIB address: 1.
Page 40: Step 5. Configure The Instrument Connection Scheme
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Step 5. Configure the instrument connection scheme To configure the instrument connection scheme: 1. Select the Connection Scheme from the list: ▪ If you are connecting the instrumentation to matrix rows and the device under test (DUT) to matrix columns, select Row-Column.
Page 41: Step 7. Set Matrix Card Properties
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Step 7. Set matrix card properties The matrix card properties set the connections: • Between the measurement instrumentation and the matrix card • Between the matrix card and the test system (prober or test fixture) The number of pins defined in the properties for a probe station or test fixture determines the pins that are available to assign to a switch matrix card column.
Page 42: Step 8. Save Configuration
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Figure 27: Keithley 7071 Matrix Card Properties Step 8. Save configuration To save the KCon configuration: 1. Select Save. Step 9. Close KCon and open Clarius To close KCon and open Clarius: 1.
Page 43: Set Up And Run A Switch Matrix In Clarius
Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices Set up and run a switch matrix in Clarius To set up and run the connectpins action: 1. Choose Select. 2. Select Actions. 3. Search for connectpins. 4. Select the connectpins action. 5.
Page 44: Matrixulib User Library
Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control Matrixulib user library The Matrixulib connects instrument terminals to output pins using a Keithley Instruments Series 700 Switching System. It is for use with switching systems that are configured as a general purpose, low current, or ultra-low current matrix.
Page 45 Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices The rest of the input parameters are structured as terminal/pin pairs. Each terminal/pin pair specifies the signal path through the matrix. For example, if the specified pin parameter for SMU1 is 4, then SMU4 will connect to pin 4 of the test fixture or prober when the UTM is run.
Page 46 Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control If the OpenAll parameter is less than one, then the matrix is NOT cleared before making connections; if OpenAll is 1, then all previous matrix connections are cleared before making the new connections.
Page 47: Configure And Use A Series 700 Switching System
Section 3 Configure and use a Series 700 Switching System In this section: Introduction ................3-1 Equipment required ..............3-2 Device connections ..............3-2 Update the switch configuration in KCon ......... 3-5 Set up the measurements in Clarius ........3-10 Introduction This section describes how to configure a Keithley Instruments Series 700 Switching System (707, 707A, 707B, 708, 708A, or 708B) in the Keithley Configuration Utility (KCon).
Page 48: Equipment Required
Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control Equipment required • One 4200A-SCS with the following instruments: ▪ Three 4200-SMUs, 4201-SMUs, 4210-SMUs, or 4211-SMUs ▪ One 4210-CVU or 4215-CVU • Eight 4200-MTRX-X triaxial cables or 4200-TRX-X cables if using preamplifiers •...
Page 49: Connect The 7072 To The Dut
Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System Connect the 7072 to the DUT The hardware connections from the 7072 Matrix Card to the 4-terminal MOSFET DUT are shown in the following figure. Use four triaxial cables to connect to the input terminals of your test fixture. For systems without a preamplifier, use 4200-MTRX-X triaxial cables.
Page 50: Connect The 4200A-Scs To The 7072
Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control Connect the 4200A-SCS to the 7072 This section describes connections to the 7072. To connect the 4200A-SCS and SMUs to the 7072: Using four 4200-MTRX-X or 4200-TRX-X triaxial cables, make the following connections: •...
Page 51: Update The Switch Configuration In Kcon
Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System Figure 32: 4200A-SCS to 7072 Matrix Card connections Update the switch configuration in KCon After completing the switch and device connections, use KCon to manage the configuration of all instrumentation controlled by the 4200A-SCS software.
Page 52 Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control To add a switching system to the 4200A-SCS configuration: 1. From the desktop, open the KCon application. 2. In the bottom left of the KCon window, select Add External Instrument. 3.
Page 53 Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System Figure 34: Add External Instrument dialog box, Test Fixture highlighted 7. Select OK. 8. From the System Configuration list, select the test fixture you just added (TF1). 9.
Page 54 Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control 13. Open MTRX1 in the System Configuration list. 14. Select CARD1. The Properties for the 7072 Matrix Card are displayed, as shown in the following figure.
Page 55 Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System 18. Select Save to save the system configuration. 19. Select Summary, then scroll down to the Connections section. You need the names from the Terminal ID column when setting the switching system connections in Clarius.
Page 56: Set Up The Measurements In Clarius
Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control Set up the measurements in Clarius After closing KCon, open the Clarius application from the desktop. In this section, you use the Clarius application to configure and run two tests on an n-channel MOSFET transistor: A plot of drain current versus drain voltage using the SMUs and a C-V sweep.
Page 57: Add A Device
Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System Add a device To add a device: 1. Select Devices. 2. Enter MOSFET in the search box. 3. Select Search. 4. Scroll to the MOSFET, n-type, 4 terminal (4terminal-n-fet) device. 5.
Page 58: Configure The Connectpins Action
Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control Configure the connectpins action To configure the connectpins action: 1. Select the first connectpins action you added to the project tree. 2. Select Configure. Figure 41: Configure highlighted 3.
Page 59 Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System Figure 42: connectpins device connections If the OpenAll check box is selected, the connectpins action opens all crosspoints before closing the specified pairs. This is the default and is usually the preferred behavior. However, since connectpins only has eight field pairs, the action can only close eight crosspoints during each run.
Page 60 Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control 4. Select Save. 5. Select the second connectpins action you added to the project tree. 6. Make the following connections using the pairs of TermIdStr# and Pin# text fields in the action: ▪...
Page 61: Search For And Add Existing Tests From The Test Library
Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System Search for and add existing tests from the Test Library To search for and add existing tests from the Test Library: 1. Choose Select. Figure 44: Select highlighted 2.
Page 62: Run The Project And View The Tests
Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control Run the project and view the tests To run the project and view the tests: 1. In the project tree, select New Project. 2.
Page 63: Introduction
Section 4 Using a Model 590 C-V Analyzer In this section: Introduction ................4-1 C-V measurement basics ............4-1 Capacitance measurement tests ..........4-2 Connections ................4-2 Cable compensation ..............4-4 Using KCon to add 590 C-V Analyzer to system ...... 4-5 Model 590 test examples ............
Page 64: Capacitance Measurement Tests
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control The following figure shows the three regions of a typical C-V curve for a MOS capacitor. Figure 47: Typical C-V curve for a MOS capacitor Capacitance measurement tests The 4200A-SCS provides the following tests to perform C-V tests using the 590: •...
Page 65: Signal Connections
Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Signal connections Basic signal connections for the 590 are shown in the following figure. The center conductors of the BNC connectors are connected to the device under test (DUT). The outer shield of one of the coaxial cables is typically connected to a Faraday shield.
Page 66: Gpib Connections
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control The figure below shows the equivalent circuit for the adapter. Figure 50: 7078-TRX-BNC equivalent circuit GPIB connections The 4200A-SCS controls the 590 through the General Purpose Interface Bus (GPIB). Use the 7007-1 or 7007-2 GPIB cable to connect the GPIB of the 590 to the GPIB of the 4200A-SCS.
Page 67: Cable Compensation User Modules
Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Cable compensation user modules The 4200A-SCS KI590ulib user library includes the following user modules for cable compensation: • SaveCableCompCaps590: Enter and save capacitance source values: The user enters the actual capacitance values of the capacitance sources.
Page 68: Model 590 Test Examples
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Model 590 test examples The test examples for the Model 590 C-V Analyzer are controlled by user test modules (UTMs) in the ivcvswitch project. The following figure shows the tree for the project. A switch matrix is not used for these examples.
Page 69 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Enter and save capacitance source values (save-cap-file) To enter and save the capacitance source values: 1. Select Configure. 2. In the project tree, select save-cap-file. The default parameters for the user module are displayed, as shown in the following figure.
Page 70 Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Place capacitance source values in a spreadsheet (display-cap-file) To place the source values in the Analyze sheet: 1. Select display-cap-file. The default parameters are displayed, as shown in the following figure. Figure 53: DisplayCableCompCaps590 default parameters 2.
Page 71 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Perform cable compensation (CableCompensate) To do cable compensation: 1. Select Configure. 2. In the project tree, select cable-compensate to open the action. The figure below shows the default parameters for the action.
Page 72: C-V Sweep Example
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Clicking Cancel in a cable compensation dialog box aborts the cable compensation process. You can start over by clicking Run. Figure 56: Cable compensation dialog boxes C-V sweep example This example demonstrates how to control a Keithley Instruments 590 C-V Analyzer to acquire capacitance verses voltage (CV) data from a MOS capacitor.
Page 73 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Figure 57: CvSweep590 user module (590-cvsweep UTM) 7. Change the test parameters as needed. 8. Execute the test by clicking Run. This test uses the CvSweep590 user module. For details on this test description, see CvSweep590 user module (on page 4-26).
Page 74: Ki590Ulib User Library
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Figure 58: C-V linear staircase sweep KI590ulib user library The user modules in the KI590ulib user library are used to control the 590 C-V Analyzer. These user modules are summarized in the following table.
Page 75: Cablecompensate590 User Module
Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer CableCompensate590 user module The CableCompensate590 routine performs the 590 cable compensation procedure using the capacitor values that are stored in the specified cable compensation file. The resultant compensation values generated by the compensation process are stored in the same file.
Page 76 Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Figure 59: CableCompensate590 default parameters If the default parameters are used, cable compensation is done for the 2 pF, 20 pF, 200 pF, and 2 nF ranges and for the 100 kHz and 1 MHz test frequencies.
Page 77: Cmeas590 User Module
Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Procedure For each range and test frequency specified by the input parameters: 1. You are prompted to open the circuit so that an offset capacitance measurement can be made. 2.
Page 78 Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Model Measurement model: ▪ Series model: 0 ▪ Parallel model: 1 Filter Enables or disables the analog filter: ▪ Disable: 0 ▪ Enable (can minimize the amount noise in the readings, but increases measurement time): 1 ReadingRate The reading rate used to acquire the measurements (0 to 4);...
Page 79 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation parameters are used. When entering the path, use two backslash (\\) characters to separate each directory.
Page 80: Ctsweep590 User Module
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Procedure 1. You are prompted to open the circuit so that an offset capacitance measurement can be made, if needed. 2. If a cable compensation file is specified, the compensation information in that file for the selected range and frequency is loaded.
Page 81 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Filter Enable or disable the analog filter, which can minimize the amount of noise that appears in the readings; however, it increases the measurement time: ▪...
Page 82 Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control In this example, the 590 is set to source −5 V and performs 100 capacitance measurements using a 5 ms time interval, as shown in the following figure. Figure 63: C-t measurements If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation parameters are used.
Page 83: Cvpulsesweep590 User Module
Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Returned values are placed in the Analyze sheet. • 0: OK. • -10000 (INVAL_INST_ID): The specified instrument ID does not exist. • -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the specified cable compensation file.
Page 84 Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control InputPin The DUT pin to which the 590 input terminal is attached (−1 to 72); if a value of less than 1 is specified, no switch matrix connection is made; see Details OutPin The DUT pin to which the 590 output terminal is attached (−1 to 72);...
Page 85 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer The array of time stamps for each measurement step Tsize Set to a value that is equal to or greater than the G_or_Rsize or number of voltage steps in the sweep, or is equal to ((LastBias −...
Page 86 Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Figure 65: C-V pulse sweep measurements If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation parameters are used. When entering the path, use two backslash (\\) characters to separate each directory.
Page 87 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer The reading rates and resolutions for the ReadingRate parameter are described in the following table. Reading rate Nominal reading rate Display readings Resolution (per second) (digits) 1000 C,G,V...
Page 88: Cvsweep590 User Module
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control CvSweep590 user module The CvSweep590 routine does a capacitance versus voltage (C-V) sweep using the Keithley Instruments 590 C-V Analyzer. You can make an offset correction measurement and use cable compensation. Usage status = CvSweep590(char *CabCompFile, char *InstIdStr, int InputPin, int OutPin, int OffsetCorrect, int Waveform, double FirstBias, double LastBias, double StepV, int...
Page 89 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Filter Enable or disable the analog filter, which can minimize the amount of noise that appears in the readings; however, it increases the measurement time: ▪...
Page 90 Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control In general, the 590 outputs a linear staircase voltage sweep from −4 V to +6 V in 50 mV steps. As shown in the following figure, a capacitance measurement is made on each step of the sweep. A test example demonstrates how to perform a C-V sweep (see Model 590 test examples (on page 4-6)).
Page 91 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer The reading rates and resolutions for the ReadingRate parameter are described in the following table. Reading rate Nominal reading rate Display readings Resolution (per second) (digits) 1000 C,G,V...
Page 92: Displaycablecompcaps590 User Module
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control DisplayCableCompCaps590 user module DisplayCableCompCaps590 reads the nominal cable compensation values that are stored in the compensation file, and returns them to the calling function or, in the case of Clarius, to the Analyze sheet. Usage status = DisplayCableCompCaps590(char *CabCompFile, double *Range, int RangeSize, double *Values100k, int Values100kSize, double *Values1M, int Values1MSize);...
Page 93: Loadcablecorrectionconstants
Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Reading_rate valid inputs Range 100 kHz values 1 MHz values 2E-12 2 pF low comp value 2 pF low comp value 2E-12 2 pF high comp value 2 pF high comp value 20E-12 20 pF low comp value...
Page 94: Savecablecompcaps590 User Module
Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Details If the file specified by CapCompFile does not exist, it is created. The path that you specify must exist. When entering the path information, be sure to use two \ characters to separate each directory level. For example, if your cable compensation file is in file C:\calfiles\590cal.dat, you would enter C:\\calfiles\\590cal.dat.
Page 95 Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer Hi2p1M The nominal value of the high-range capacitor used for cable compensation for the 2 pF range and 1 MHz frequency: 1E-12 F to 2E-12 F Lo20p100k The nominal value of the low-range capacitor used for cable compensation for the 20 pF range and 100 kHz frequency: 0 F to 9.5E-12 F...
Page 96 Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control Example 1: Cable compensation (on page 4-6) demonstrates how cable compensation is done. If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation parameters are used.
Page 97: Using A Keysight 4284/4980A Lcr Meter
Section 5 Using a Keysight 4284/4980A LCR Meter In this section: Introduction ................5-1 Using KCon to add a Keysight LCR Meter to the system ..5-6 Model 4284A or 4980A C-V sweep test example ..... 5-6 HP4284ulib user library ............5-8 Introduction This section contains information on using the 4200A-SCS with the Keysight Models 4284A and 4980A.
Page 98: Capacitance Measurement Tests
Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control A user-configured voltage sweep allows capacitance measurements that can span the three regions of a C-V curve: The accumulation region, depletion region, and inversion region. The following figure shows the three regions of a typical C-V curve for a MOS capacitor.
Page 99: Signal Connections
Model 4200A-SCS Prober and External Instrument Control Section 5: Using a Keysight 4284/4980A LCR Meter Signal connections Basic 4-wire signal connections for the Model 4284A or 4980A are shown in the following figure. The center conductors of the BNC connectors are connected to the device under test (DUT). The outer shield of one of the coaxial cables is typically connected to a Faraday shield.
Page 100 Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control 4-wire remote sensing The following figure shows 4-wire remote sense connections. The 7078-TRX-BNC is a 3-lug triaxial-to-BNC adapter. As shown in the figure, connect the adapters to the 3-slot triaxial connectors, and then use a 7051-5 BNC cable to make the connections to the Model 4284A or 4980A.
Page 101: Gpib Connections
Model 4200A-SCS Prober and External Instrument Control Section 5: Using a Keysight 4284/4980A LCR Meter 2-wire remote sensing For 2-wire local sense connections, coaxial tees are required to adapt dual BNC cables to single BNC cables, as shown in the following figure. Figure 74: 2-wire local sense connections to equipment using triaxial connectors Figure 75: Equivalent circuit GPIB connections...
Page 102: Using Kcon To Add A Keysight Lcr Meter To The System
Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control Using KCon to add a Keysight LCR Meter to the system To use the 4200A-SCS to control an external instrument, you must add the instrument to the 4200A-SCS system configuration.
Page 103 Model 4200A-SCS Prober and External Instrument Control Section 5: Using a Keysight 4284/4980A LCR Meter Figure 76: CvSweep4284 user module example A configured sweep is shown in the following figure. Figure 77: C-V linear staircase sweep 4200A-913-01 Rev. A December 2020...
Page 104: Hp4284Ulib User Library
Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control A typical graph that is generated by this test is shown below. Figure 78: Typical C-V curve for a MOS capacitor HP4284ulib user library You use the user modules in the HP4284ulib user library to control the Keysight 4284A or 4980A LCR Meter.
Page 105 Model 4200A-SCS Prober and External Instrument Control Section 5: Using a Keysight 4284/4980A LCR Meter SignalLevel The oscillator output voltage level (5e-3 V to 20 V) Frequency Measurement frequency of the sweep: 20 Hz to 1e6 Hz Range The measurement range to use (in ohms): 0 (Auto), 100, 300, 1000, 3000, 10000, 30000, or 100000 Model Measurement model: Series or Parallel...
Page 106 Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control Returned values are placed in the Analyze spreadsheet. • 0: OK. • -10030 (HP4284_NOT_IN_KCON): No Keysight 4284A or Keysight 4980 LCR is defined in your system configuration.
Page 107: Cmeas4284 User Module
Model 4200A-SCS Prober and External Instrument Control Section 5: Using a Keysight 4284/4980A LCR Meter Cmeas4284 User Module The Cmeas4284 routine measures capacitance and conductance using the Keysight Model 4284A or 4980 LCR Meter. Usage status = Cmeas4284( char *InstIdStr, int LoPin, int HiPin, double SignalLevel, double Frequency, double BiasV, double Range, int Model, int IntegrationTime, double *C, double *V, double *G_or_R);...
Page 108 Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control Returned values are placed in the Analyze spreadsheet. • 0: OK. • -10000 (INVAL_INST_ID): The specified instrument ID does not exist. • -10030 (HP4284_NOT_IN_KCON): No Keysight 4284A or Keysight 4980 LCR is defined in your system configuration.
Page 109 Section 6 Using a Model 82 C-V System In this section: Introduction ................6-1 Capacitance measurement tests ..........6-2 Cable compensation ..............6-5 Connections ................6-6 Using KCon to add Model 82 C-V System ....... 6-9 Model 82 projects ..............6-9 Choosing the right parameters ..........
Page 110: Using A Model 82 C-V System
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Capacitance measurement tests The 4200A-SCS provides the following user modules for capacitance testing using the Model 82: • CtSweep82: C-t measurements: Performs a specified number of capacitance measurements at a specified time interval.
Page 111 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Figure 80: C-t waveform 4200A-913-01 Rev. A December 2020...
Page 112: Simultaneous C-V Measurements
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Simultaneous C-V measurements For simultaneous C-V measurements, the 590 and 595 both measure capacitance during the same voltage sweep. The readings from the two instruments are synchronized using external triggering and are taken alternately during the sweep.
Page 113: Cable Compensation
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System As shown in the following figure, the first high frequency measurement (CH1) is made during the second phase of the voltage sweep. Only quasistatic capacitance (C1) is measured during the first phase and is disregarded.
Page 114: Cable Compensation User Modules
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Cable compensation involves these steps: 1. The Model 82 calculates the compensation parameters based on the comparison between the given and measured values. 2. The Model 82 performs a probe-up offset measurement and suppresses any remaining offset capacitance.
Page 115: Rear-Panel Connections
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System 3. Connect two more low-noise cables to the front of the Model 5951, where the input and output to the device are located. 4. Connect the dark box to the cable grounds only. If this is not possible, connect a #18 AWG wire between the dark box and the white banana jack on the back of the Model 595.
Page 116: Make Power And Gpib Connections
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Figure 83: System 82 C-V system rear-panel connections Make power and GPIB connections To attach the power and GPIB connections: 1. Use the ribbon cable to connect the DIGITAL I / O PORT on the back of the Model 230-1 to the TO 230-1 DIGITAL I / O on the back of the Model 5951.
Page 117: Using Kcon To Add Model 82 C-V System
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Using KCon to add Model 82 C-V System To use the 4200A-SCS to control instruments in the C-V system, you must add the system to the 4200A-SCS system configuration.
Page 118 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Enter and save capacitance source values (SaveCableCompCaps82) To enter and save capacitance source values: 1. Open the project. 2. Select save-cap-file or savecablecompfile. These actions use the SaveCableCompCaps82 user module 3.
Page 119 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Place capacitance source values in a spreadsheet (DisplayCableCompCaps82) To place capacitance source values in a spreadsheet: 1. In the project tree, select display-cap-file or displaycablecomp. The parameter list for the DisplayCableCompCaps82 user module is shown in the figure below.
Page 120 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control 4. Enable or disable cable compensation: Use the frequency and range fields to either disable (0) or enable (1) cable compensation for the test frequencies and ranges. The following figure shows cable compensation enabled for all ranges and test frequencies.
Page 121: Capacitance Tests
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Figure 89: Cable compensation dialog boxes Clicking Cancel in a cable compensation dialog box aborts the cable compensation process. To start over, click Run. Capacitance tests The following topics describe the user modules that can be made into tests Clarius.
Page 122 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control 7. Modify the test parameters as needed. Refer to QTsweep82 user module (on page 6-37) for parameter definitions. If you use the parameters shown in the figure below, the Model 82 makes 20 quasistatic capacitance measurements using 20 mV pulses (V_Step) ranging from 0.07 seconds to 1 second (Delay_Max).
Page 123 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Figure 91: Equilibrium test The generated graph for this test plots: • Quasistatic capacitance (CQS) vs. delay time • Leakage current (Q / t) vs. delay time A typical graph for the equilibrium test is shown here.
Page 124 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Simultaneous C-V sweep The Model 82 uses the Models 595 and 590 to perform simultaneous C-V measurements. Refer to Simultaneous C-V measurements (on page 6-4) for detail on simultaneous C-V measurements. This example assumes that the Model 82 is connected directly to the DUT.
Page 125 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System cvsweep test description As described in Simultaneous C-V sweep (on page 6-16), the cvsweep UTM uses the SIMCVsweep82 user module to make simultaneous C-V measurements. A 595 quasistatic measurement is a two-step process that requires at least two charge measurements.
Page 126 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Figure 95: cvsweep graph C-t sweep The Model 82 uses the Model 590 to make a specified number of capacitance measurements using a specified time interval between reading samples. The specified voltage bias is held constant for this test.
Page 127 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System CtSweep test description (on page 6-18), the CtSweep UTM uses the CTsweep82 user module to As shown in C-t sweep make C-t measurements. Refer to CtSweep82 user module (on page 6-32) for definitions of the input parameters.
Page 128: Formulas For Capacitance Tests
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Formulas for capacitance tests Formulas to calculate data for graphs are in the Formulator for each test. To open the Formulator dialog box, click Formulator in the Test Settings pane for the selected test. The following figure shows the Formulator for the system82-cvsweep test used in the simcv project.
Page 129 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System The values for constants used in the formulas are in the Constants area in the Formulator. The constants include: • Area, with a value of 0.012 mm •...
Page 130 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Formula name Description and formula N90W Doping density at 90% of maximum depletion depth: N90W = AT(NDOPING,FINDLIN(DEPTHM,0.9*MAX(DEPTHM),2)) DEBYEM Debye length (in meters): DEBYEM = SQRT(ES*K*TEMP/(ABS(N90W)*Q^2))*1E-2 Flatband capacitance: CFB = (COX*ES*AREA/(DEBYEM*1E2))/(COX+(ES*AREA/(DEBYEM*1E2))) Flatband voltage:...
Page 131: Choosing The Right Parameters
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Formulas for cvsweep test (stvs project) Formula name Description and formula Gate voltage: VGS = -VSub Serial resistance calculated by high frequency CV: RS = AT(MAVG(G_OR_R,5)/(WF*MAVG(CHF,5)),MAXPOS(MAVG(CHF,5))))^2/ ((1+(AT(MAVG(G_OR_R,5)/(WF*MAVG(CHF,5)),MAXPOS(MAVG(CHF,5))))^2) *(AT(MAVG(G_OR_R,5),MAXPOS(MAVG(CHF,5))))) Intermediate parameter for calculation of CC:...
Page 132 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Start, stop, and step voltages Most C-V data is derived from the sweep transition, or depletion region of the C-V curve. For that reason, start and stop voltages should be chosen so that the depletion region makes up about 1/3 to 2/3 of the voltage range.
Page 133: Determining The Optimal Delay Time
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Sweep direction For C-V sweeps, you can sweep either from accumulation to inversion, or from inversion to accumulation. Sweeping from accumulation to inversion will allow you to achieve deep depletion, profiling deeper into the semiconductor than you otherwise would obtain by maintaining equilibrium.
Page 134 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control For long delay times, the measurement process can become very long with some devices. You may be tempted to speed up the test by using a shorter delay time. However, doing so is not recommended because it is difficult to quantify the amount of accuracy degradation in any given situation.
Page 135: Correcting Residual Errors
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Corrected capacitance can be enabled for simultaneous C-V measurements by setting the LeakageCorrection parameter to 1 (see line 12 of the SIMCVsweep82 user module (on page 6-42)). Figure 103: Capacitance and leakage current curves of leaky device Testing slow devices A decaying noise curve, such as the dotted line shown in the figure in...
Page 136 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Suppression can be enabled for simultaneous C-V measurements by setting the "OffsetCorrect" parameter to "1" (see line 14 of the SIMCVsweep82 user module (on page 6-42)). Gain and nonlinearity errors Gain errors are difficult to quantify.
Page 137: Ki82Ulib User Library
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System ki82ulib user library The user modules in the ki82ulib user library control the Model 82 C-V System. They perform simultaneous C-V, C-t, and Q/t measurements and cable compensation. The following table lists the user modules.
Page 138 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Usage status = CableCompensate82(char *CabCompFile, char *InstIdStr, int InputPin, int OutPin, int Freq100 k, int Freq1M, int Range2p, int Range20 p, int Range200 p, int range2n);...
Page 139 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System For details on the procedure to perform cable compensation, see Cable compensation tests page 6-9). Figure 104: CableCompensate82 user module The return values from status can be: •...
Page 140: Ctsweep82 User Module
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Procedure For each range and test frequency specified by the input parameters: 1. You are prompted to open the circuit so that an offset capacitance measurement can be made. 2.
Page 141 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Filter590 Enable or disable the analog filter; see Details: ▪ Disable the filter: 0 ▪ Enable the filter: 1 CabCompFile The complete name and path for the cable compensation file; see Details OffsetCorrect Enable or disable an offset correction measurement: ▪...
Page 142 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control The analog filter, enabled with Filter590, can minimize the amount of noise that appears in the readings. It does, however, increase the measurement time. Reading_rate valid inputs Reading rate Nominal reading rate Readings...
Page 143: Displaycablecompcaps82 User Module
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Procedure 1. If set, you are prompted to open the circuit so that an offset capacitance measurement can be made. 2. If a cable compensation file is specified, the compensation information in that file for the selected range and frequency will be loaded.
Page 144 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control To prevent unpredictable results, the array size values for the RangeSize, Values100kSize, and Values1MSize arrays must be set to 8. For details on the procedure to perform cable compensation, refer to Cable compensation tests page 6-9).
Page 145: Qtsweep82 User Module
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System QTsweep82 user module This user module uses the 595 to determine the equilibrium point for a device by measuring quasistatic capacitance using different delay times. Usage status = QTsweep82(double Test_Bias, int LeakageCorrection, double Hold_time, double V-Step, char *InstldStr, int InputPin, int OutPin, double Delay_Max, int Range,...
Page 146 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control The following figure shows the default parameters for the QTsweep82 user module. Figure 107: QTsweep82 user module The Q/T sweep in Equilibrium test (QTsweep) description (on page 6-14) acquires 20 quasistatic capacitance readings.
Page 147 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System The return values from status can be: • 0: OK. • -10000 (INVAL_INST_ID): The specified instrument ID does not exist • -10045 (KI82_NOT_IN_KCON): There is no CMTR defined in your system configuration •...
Page 148: Savecablecompcaps82 User Module
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control SaveCableCompCaps82 user module The user module saves the nominal values of the capacitors used with the 590 cable compensation procedure to a file. Usage status = SaveCableCompCaps82(char *CabCompFile, double Lo2p100k, double Lo2p1M, double Hi2p100k, double Hi2p1M, double Lo20p100k, double Lo20p1M, double Hi20p100k, double Hi20p1M, double Lo200p100k, double Lo200p1M, double Hi200p100k, double 200p1M, double Lo2n100k, double Lo2n1M, double Hi2n100k, double Lo2n1M);...
Page 149 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Details This user module is used for 590 cable compensation. The user enters precise capacitance source values. When this test is run, the capacitance source values are saved to a user-specified file. If no cable compensation file exists, this module creates one.
Page 150: Simcvsweep82 User Module
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control If CabCompFile does not exist, or if there is no path specified (null string), the default compensation parameters are used. When entering the path, be sure to use two \ characters to separate each directory.
Page 151 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Filter Enable or disable the digital filter: ▪ 1 reading: 0 ▪ 3 readings: 1 ▪ 9 readings: 2 ▪ 24 readings: 3 Delay595 Delay time for 595; maximum 199 s (default 0.07 s) LeakageCorrection Enable or disable the leakage current correction of the 595: ▪...
Page 152 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Figure 109: SIMCVsweep82 user module It performs a staircase sweep from −3 V to +3 V in 20 mV steps, as shown in cvsweep test description (on page 6-17).
Page 153: Simultaneous C-V Analysis
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System The return values from status can be: • 0: OK. • -10000 (INVAL_INST_ID): The specified instrument ID does not exist • -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the specified cable compensation file •...
Page 154: Basic Device Parameters
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Figure 110: C-V characteristics of p-type material Figure 111: C-V characteristics of n-type material Basic device parameters The following topics provide additional detail on device parameters and how they are calculated. 6-46 4200A-913-01 Rev.
Page 155 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Determining device type The semiconductor conductivity type (p or n dopant ions) can be determined from the relative shape of the C-V curves (see Analysis methods (on page 6-45)).
Page 156 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Figure 112: Simplified model to determine series resistance From Nicollian and Brews 224, the correction capacitance, C , and corrected conductance, G , are calculated as follows: and: Where: •...
Page 157 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Flatband capacitance and flatband voltage The Model 82 uses the flatband capacitance method of finding flatband voltage, V . The Debye length is used to calculate the ideal value of flatband capacitance, C .
Page 158 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Threshold voltage , is the point on the C-V curve where the surface potential  The threshold voltage, V , equals twice the bulk potential,  .
Page 159 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System In tests, the values for W , and E are listed in the Formulator as constants. You can change the values depending on the type of materials. For silicon, silicon dioxide, and aluminum: Where: •...
Page 160 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control charge is in a sheet at the silicon-silicon dioxide interface. From Nicollian and Brews, Eq. 10. 10, we have: Note that C here is per unit of area. So that, However, since C is in F, we must convert to pF by multiplying by 10 as follows:...
Page 161: Doping Profile
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Doping profile The doping profile of the device is derived from the C-V curve based on the definition of the differential capacitance (measured by the 590 and 595) as the differential change in depletion region charge produced by a differential change in gate voltage (Nicollian and Brews 380-389).
Page 162: Interface Trap Density
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Where: • N = doping concentration (cm • = quasistatic capacitance (pF) • = oxide capacitance (pF) • (1-C )/1-C ) = voltage stretchout term •...
Page 163: Mobile Ion Charge Concentration
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Interface trap capacitance CIT and density DIT The density of interface traps (D ) is a function of the silicon orientation and the fabrication process. It is determined by performing simultaneous high frequency and quasistatic C-V sweeps.
Page 164 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control The STVS library can perform the corresponding mobile ion charge analysis. It has a built-in correction algorithm to eliminate the problems associated with leakage current. Many parameters, including mobile ion charge concentration, can be extracted from this measurement.
Page 165 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System So that: For the common case of thermally grown oxide, x (before) = X and x (after) = 0, so that Where Q is the effective charge. Divide Q by the gate area to obtain mobile ion charge density per unit area.
Page 166: Generation Velocity And Generation Lifetime (Zerbst Plot)
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control The following figure demonstrates what a contaminated oxide should produce for a STVS curve. This method has four advantages over the BTS method: 1. It determines the mobile charges without interference from the interface trap charges. 2.
Page 167 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System G/nI computation Where: • G = generation rate (s •  = permittivity of semiconductor (F/cm) • A = gate area (cm • = average doping concentration (cm •...
Page 168: Constants, Symbols, And Equations Used For Analysis
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Determining generation velocity and generation lifetime The generation lifetime,  , is equal to the reciprocal of the slope of the linear portion of the Zerbst plot, while the generation velocity, s, is the y-axis (G/n ) intercept of the same linear section of the Zerbst plot.
Page 169: Summary Of Analysis Equations
Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Data symbols Symbol Description Units Density or concentration of interface states. 1/cm Energy of conduction band edge (valence band is E Interface trap energy. High-frequency conductance, as measured by the Model 590 at either 100 kHz or 1 MHz.
Page 170 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control Doping concentration Effective oxide charge Effective charge concentration Flatband capacitance Where  = extrinsic DeBye length = = N at 90% W , or N , or N when input by the user Flatband voltage shift...
Page 171 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Mobile ion charge concentration – STVS method Oxide thickness / gate area Series resistance compensation +  a = G - (G SERIES Threshold voltage Work function Zerbst plot (generation lifetime and velocity) 4200A-913-01 Rev.
Page 172: References
Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control References The references below are cited in this chapter: Nicollian, E.H. and Brews, J.R., MOS Physics and Technology. Wiley, New York (2003). Sze, S.M., Physics of Semiconductor Devices 2nd edition. Wiley, New York (1985). Snow, E.H.
Page 173 Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System Q-C Method and Simultaneous High-low Frequency C-V Nicollian, E.H. and Brews, J.R., "Instrumentation and Analog Implementation of the Q-C Method for MOS Measurements," Solid State Electronics, 27, 953 (1984). Boulin, D.M., Brews, J.R., and Nicollian, E.H., "Digital implementation of the Q-C Method for MOS Measurements,"...
Page 174 Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control MOS Process Characterization Zaihinger, K.H. and Heiman, F.P., "The C-V Technique as an Analytical Tool", Solid State Technology, 13:5-6 (1970). McMillian, L., "MOS C-V Techniques for IC Process Control," Solid State Technology, 15, 47 (1972). Zerbst, M., Relaxationseffekte an Halbeiter Isolator-Grenzflaechen, Z.Angnew, Phys.
Page 175: Using A Keysight 8110A/8111A Pulse Generator
Section 7 Using a Keysight 8110A/8111A Pulse Generator In this section: Introduction ................7-1 Pulse generator tests ............... 7-2 Signal connections ..............7-2 GPIB connections ..............7-4 Using KCon to add a Keysight pulse generator to the system . 7-4 HP8110ulib user library ............
Page 176: Pulse Generator Tests
Section 7: Using a Keysight 8110A/8111A Pulse Generator Model 4200A-SCS Prober and External Instrument Control Pulse generator tests The 4200A-SCS includes the following user modules to run tests using a Keysight pulse generator: • PguInit8110: Initialization: Disables the pulse generator output and returns it to a default setup configuration.
Page 177 Model 4200A-SCS Prober and External Instrument Control Section 7: Using a Keysight 8110A/8111A Pulse Generator Figure 116: Connections to prober or test fixture equipped with triaxial connectors Switch matrix connections: When using a switch matrix that is equipped with triax connectors, separate HI-to-LO matrix paths are required for the pulse generator.
Page 178: Gpib Connections
Section 7: Using a Keysight 8110A/8111A Pulse Generator Model 4200A-SCS Prober and External Instrument Control The following figure shows the actual pulse output signal path through the switch matrix to the device under test (DUT), and back to the pulse generator. A more detailed look at signal paths is provided in Using Switch Matrices (on page 2-1).
Page 179: Hp8110Ulib User Library
Model 4200A-SCS Prober and External Instrument Control Section 7: Using a Keysight 8110A/8111A Pulse Generator HP8110ulib user library Use the user modules in the HP8110ulib user library to control a Keysight Model 8110A Pulse Generator. These user modules are summarized in the following table. The table also lists the user test modules (UTM) created by Keithley Instruments that use the user modules.
Page 180: Pgusetup8110 User Module
Section 7: Using a Keysight 8110A/8111A Pulse Generator Model 4200A-SCS Prober and External Instrument Control Details The user module used by the pgu1-init UTM. The PguInit8110 user module initializes the Keysight 8110A pulse generator as follows: • Disables the output of the specified channel. •...
Page 181 Model 4200A-SCS Prober and External Instrument Control Section 7: Using a Keysight 8110A/8111A Pulse Generator DelayTime The amount of time to delay after receiving the trigger (0 s to 0.999 s) RiseTime Sets the pulse rise time (2e-09 s to 0.2 s) FallTime Sets the pulse fall time (2e-09 s to 0.2 s) Width...
Page 182: Pgutrigger8110 User Module
Section 7: Using a Keysight 8110A/8111A Pulse Generator Model 4200A-SCS Prober and External Instrument Control Figure 120: pgu1-setup UTM pulse specifications Also see PguTrigger8110 (on page 7-8) PguTrigger8110 user module This user module specifies number of pulses to output and triggers the start of the pulse output process. Usage status = PguTrigger8110(char *InstIdStr, double Count);...
Page 183: Set Up A Probe Station
Section 8 Set up a probe station In this section: Prober control overview ............8-1 Understanding site coordinate information ....... 8-5 PRBGEN user library ............... 8-9 Tutorial: Control a probe station ..........8-14 Prober control overview Semi-automatic and fully-automatic probe stations are typically controlled programmatically through a GPIB or RS-232 communications interface.
Page 184 Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control Turning the 4200A-SCS output off does not place the instrument in a safe state (an interlock is provided for this function). Hazardous voltages may be present on all output and guard terminals.
Page 185: Supported Probers
Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station Supported probers Supported probe station Additional information Cascade Microtech Model PA200 Cascade Microtech PA200 Prober (on page 9-1) Micromanipulator Model 8860 Micromanipulator 8860 Prober (on page 10-1) Manual or Fake Using a Manual or Fake Prober (on page 11-1)
Page 186: Example Test Execution Sequence: Probesites Project
Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control If you use a semi-automatic prober, understand that a Clarius probe action only triggers movements that are already programmed in the prober controller. Each execution of the action advances the probe to the next site in this programmed sequence.
Page 187: Example Test Execution Sequence: Probesubsites Project
Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station Example test execution sequence: probesubsites project In this example, the probesubsites project is selected. When you run the test for the site, tests are run for each of the subsites. Figure 123: probesubsites project tree Understanding site coordinate information The next topics describe the reference site, probe sites, and chuck movement.
Page 188: Reference Site (Die)
Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control Reference site (die) The designated reference site is defined in the prober-init action by selecting Configure and entering the parameters. This is the first stopping point of the prober once aligned. The physical location of the reference site may be any coordinate that is selected on the wafer and is selected for probing or marked for probing through the prober software.
Page 189: Probe Sites (Die)
Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station Probe sites (die) Dies marked as probe sites in the prober software define the areas to be tested. The physical location of the probe site can be any coordinates selected on the wafer. Marking a die as a probe site also selects the site for probing.
Page 190 Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control Figure 126: Chuck movement 4200A-913-01 Rev. A December 2020...
Page 191: Prbgen User Library
Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station At the conclusion of a test, the site coordinates are recorded in the sheet settings. These coordinates are only valid if a project uses the remote prober control (real prober). The coordinate system is based on the xstart_position and ystart_position parameters of the prober-init action.
Page 192: Prinit
Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control The user modules in the PRBGEN user library are provided as actions in Clarius. PRBGEN user modules User module Clarius action Description PrChuck prober-contact Directs the prober to have the probe pins make contact with the wafer or separate the pins from the wafer.
Page 193: Prchuck
Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station The PrInit function returns the values: • 1: Success (OK) • -1005: Failure setting units • -1008: Failure setting mode • -1009: Failure setting die size •...
Page 194: Prssmovnxt
Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control Example status = PrChuck(1); Also see None PrSSMovNxt In learn mode, the PrSSMovNxt command causes the prober to move to the next subsite. If needed, you can specify the inker to fire before the move.
Page 195: Prmovnxt
Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station • -1013: Unintelligible response • -1014: Movement failure • -1015: Unexpected error • -1027: Invalid parameter Example status = PrSSMovNxt(0); Also see None PrMovNxt In learn mode, the PrMovNxt command causes the prober to move to the next site. If needed, you can specify the inker to fire before the move.
Page 196: Tutorial: Control A Probe Station
Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control Details The PrMovNxt function returns the values: • 1: Success (PR_OK) • 4: Next wafer loaded (confirmed) • -1008: Invalid mode • -1011: Operation invalid in mode •...
Page 197: Test System Connections
Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station Figure 128: Sample wafer organization Test system connections A typical test system for this tutorial is shown in the following figure. The 4200A-SCS and probe station are connected to a 7174A matrix card. The matrix card is installed in the switch matrix, and the switch matrix and probe station are controlled through the GPIB bus.
Page 198: Kcon Setup
Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control Figure 129: System configuration for the probesubsites project KCon setup Refer to Use KCon to add a switch matrix to the system (on page 2-23). Test flow When you run the probesubsites project, the following occurs: 1.
Page 199 Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station Figure 130: Connect SMUs to N-channel MOSFET 5. The test runs vds-id-1x, which generates a family of curves (I vs. V ) for the MOSFET. 6. The test moves to 3terminal-npn-bjt. 7.
Page 200 Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control 8. The test runs vce-ic-1x, which generates a collector family of curves (I vs. V ) for the transistor. 9. The action prober-ss-move moves the prober to the next subsite. 10.
Page 201: Using A Cascade Microtech Pa200 Prober
Section 9 Using a Cascade Microtech PA200 Prober In this section: Cascade Microtech PA200 prober software ......9-1 Probe station configuration............9-3 Set up communications ............9-3 Set up wafer geometry ............9-11 Create a site definition and define a probe list ....... 9-14 Load, align, and contact the wafer .........
Page 202 Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control NI-GPIB for ProberBench NT Product Name: 3.10 (Feb 12, 1999) Product Version: © Karl Suss 1998 - All Rights Reserved Copyright: 3.000000 ProberBench Kernel Version 3.10 12-7-98 Kernel: 2.400000 ProberBench Control Box 2.4 Control Box:...
Page 203: Probe Station Configuration
Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober Probe station configuration ® Make sure that you are familiar with the Cascade MicroTech PA200 Prober and its supporting documentation before you attempt setup, configuration, or operation. To set up and configure the PA200 prober for use with the 4200A-SCS, you will: •...
Page 204 Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Figure 132: 4200A-SCS and PA-200 serial port connection 4200A-913-01 Rev. A December 2020...
Page 205: Gpib Control Connector Terminals
Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober GPIB control connector terminals The contact numbers are shown in the following figure. The GPIB designation and type are shown in the following table. Figure 133: IEEE-488 connector contact numbers GPIB control connector terminals Contact number GPIB designation...
Page 206: Set Up Communications On The 4200A-Scs
Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Set up communications on the 4200A-SCS On the 4200A-SCS, you need to set the communications through the prober configuration file. The configuration file for use with serial communications is shown below. To configure the prober for use with a GPIB communications setup, use a text editor to comment out (#) the lines after "Configuration for PA200 probers"...
Page 207: Set Up Communications On The Prober
Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober # Configuration for direct GPIB probers: PA200 #PROBER_1_PROBTYPE=PA200 #PROBER_1_OPTIONS=0,0,0,0,1,0 #PROBER_1_IO_MODE=GPIB #PROBER_1_GPIB_UNIT=0 #PROBER_1_GPIB_SLOT=1 #PROBER_1_GPIB_ADDRESS=8 #PROBER_1_GPIB_WRITEMODE=0 #PROBER_1_GPIB_READMODE=2 #PROBER_1_GPIB_TERMINATOR=13 #PROBER_1_TIMEOUT=300 #PROBER_1_SHORT_TIMEOUT=5 #PROBER_1_MAX_SLOT=25 #PROBER_1_MAX_CASSETTE=1 Set up communications on the prober You can configure the PA-200 prober for serial or GPIB communication.
Page 208 Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Set up serial communications To set up communications for RS232: 1. On the prober computer, double-click the ProberBench NT icon. 2. Double-click the Service Programs file. 3.
Page 209 Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober Set up GPIB communications To set up GPIB communications: 1. Double-click the ProberBench NT icon (shortcut) on desktop. 2. Double-click the Service Programs file. 3. Double-click the Prober Setup file in the Service Programs directory. The Prober Setup window appears (see the following figure).
Page 210 Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Figure 137: ProberBench NT window 8. From the ProberBench GPIB Interface, from the Configure menu, select Interface Driver. Figure 138: ProberBench: GPIB interface 9-10 4200A-913-01 Rev. A December 2020...
Page 211: Set Up Wafer Geometry
Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober 9. From the Interface Configuration dialog box, change Response Terminator to CR. Figure 139: Interface Configuration dialog box 10. GPIB only: Ensure that the GPIB address matches the address in the configuration file. 11.
Page 212 Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control 2. From the ProberBench NT window, select the Wafer Map file. Figure 141: ProberBench NT window 3. From the WaferMap dialog box, create or open a WaferMap. Figure 142: WaferMap dialog box 9-12 4200A-913-01 Rev.
Page 213 Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober 4. From the Configure menu, select Edit Map. 5. Enter the wafer geometry values and click Apply. 6. Click OK. Figure 143: Wafer Edit dialog box 7.
Page 214: Create A Site Definition And Define A Probe List
Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control 9. Click OK. Refer to Clarius probesites and probesubsites examples for specifics on selecting sites to probe. 10. Select File > Project > Save to save the WaferMap settings. Figure 146: Save WaferMap settings Create a site definition and define a probe list Creating a site definition for single subsites for each die involves using the software to create a...
Page 215 Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober To load a previously defined and saved site definition and a probe list: 1. Select the ProberBench NT icon on the desktop. Figure 147: ProberBench NT icon 2.
Page 216: Load, Align, And Contact The Wafer
Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Load, align, and contact the wafer Using the ProberBench NT computer: 1. From the WaferMap Chuck menu, select Load Position. This brings the chuck to the front of the prober.
Page 217 Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober 6. Choose the home die on the WaferMap. When choosing the home die: ▪ The wafer should be on the chuck and physically in the correct HOME position. ▪...
Page 218: Aligning The Wafer
Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Aligning the wafer 1. Enter Point 1 and Point 2 distances from the center using specific X die size multiples. See the following figure. In other words, if the die size is: X = 13.573 mm, and Y = 14.818 mm, set up to move four die to the left and also the right at 54.292 mm (4 •...
Page 219: Verify Wafer Alignment
Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober 5. Manually align pins and pads (POINT 2) and select Finish. Figure 154: Aligning the wafer: Point 2 Verify wafer alignment Confirm that the alignment is correct (the alignment procedure is repeated). To check, manually use the joystick to move the chuck in index moves and confirm that the pins and pads are aligned.
Page 220: Set The Chuck Heights
Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control If the alignment is not correct, repeat the alignment. If the alignment is correct, click Finish. Figure 156: Aligning the wafer: Point 2 Set the chuck heights To set the chuck heights: 1.
Page 221 Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober 3. Click Set-Z. The Set Chuck Heights dialog box is displayed. Figure 158: Set chuck heights 4. Click Read. The contact height value changes to the present height. 5.
Page 222: Clarius Probesubsites Project Example
Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control 8. Select File > Project > Save to save the WaferMap configuration. Figure 160: PA200 WaferMap: Save Clarius probesubsites project example The following is a step-by-step procedure to configure the PA-200 so the probesubsites Clarius project executes successfully.
Page 223 Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober 2. From the ProberBench NT window, select WaferMap file. Figure 162: ProberBench NT window 3. From the WaferMap window, from the Mark Dies menu, select Mark to Skip. Figure 163: Mark Dies menu 4.
Page 224 Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Figure 164: View menu 6. Set up the die map. 7. From the View menu, select the Table editor. The spreadsheet portion of the Die Map is displayed.
Page 225: Set The Wafer Map
Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober 8. From the Options menu, select units (Microns or Mils). 9. Edit the table with the coordinates of the subsites. 10. From the Table menu, select Save or Save As. An x in the On column defines the subsites that will be probed when using the subsite probing project (in other words, when using PrSSMovNxt).
Page 226 Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control 3. From the Mark Dies menu, use Mark to Skip and Mark to Probe to set dies. Click a die in the WaferMap window to either set or clear the die. The color of the die indicates status (probes white dies, skips blue dies).
Page 227: Use Kcon To Add A Prober
Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober Use KCon to add a prober On the 4200A-SCS, use KCon to add the prober to the configuration: 1. Open KCon. 2. At the bottom of the System Configuration list, select Add External Instrument. The Add External Instrument dialog box is displayed.
Page 228: Running Projects
Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Figure 171: Use KCon to select a prober 5. Select the Karl Suss PA200 Prober as the model. 6. Ensure that the Number of Pins / Positioners is correct. The number of pins defined here determines the pins that are available to assign to a switch matrix card column.
Page 229: Clarius
Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober Clarius Use Clarius to load and run the probesites or probesubsites project using the new KCon configuration file, which allows you to execute the project for this prober. On the 4200A-SCS: 1.
Page 230: Commands And Error Symbols
Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control Commands and error symbols The following table contains error and status symbols listed by command. Available commands and responses PrChuck PrInit PrMovNxt PrSSMovNxt PR_OK BAD_CHUCK INVAL_MODE UNINTEL_RESP INVAL_PARAM...
Page 231: Using A Micromanipulator 8860 Prober
Section 10 Using a Micromanipulator 8860 Prober In this section: Micromanipulator 8860 prober software ......... 10-1 Probe station configuration............. 10-2 Probesites Clarius project example ........10-18 Probesubsites Clarius project example ........ 10-23 Commands and error symbols ..........10-28 Micromanipulator 8860 prober software You need to have the following software programs on the Micromanipulator 8860 to configure and operate the 8860 prober with the Keithley Instruments 4200A-SCS: •...
Page 232: Probe Station Configuration
Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control pcNav Product Name: 2.0.9 Product Version: pcWafer Product Name: 2.0.8 Product Version: pcRouter Product Name: 2.0.9 Product Version: Probe station configuration Ensure that you are familiar with the Micromanipulator 8860 prober and its supporting documentation before attempting setup, configuration, or operation.
Page 233 Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Figure 174: Prober setup: Serial connections 4200A-913-01 Rev. A December 2020 10-3...
Page 234 Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control 5. Double-click the pcBridge icon on the desktop to open the main pcBridge window. Figure 175: pcBridge icon Figure 176: Main pcBridge window 6. Select the Setup menu. The pcBridge Communications Setup window is displayed. Figure 177: pcBridge Communications Setup window 7.
Page 235 Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober 8. Click OK. 9. Click the pcLaunch icon to open the main pcLaunch window. Figure 178: pcLaunch icon Figure 179: pcLaunch window 10. From the pcLaunch window, set the Joystick Mode for Linear. Figure 180: Joystick modes Modify the prober configuration file The default prober configuration file is shown below.
Page 236: Set Up Wafer Geometry
Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control # prbcnfg.dat - EXAMPLE Prober Configuration File for MM40 Prober # The following tag, "PRBCNFG", is used by the engine in order to determine # the MAX number of SLOTS and CASSETTES for a given prober at runtime. <PRBCNFG>...
Page 237 Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Figure 182: pcNav window When starting pcNav for the first time, the warning in the following figure is displayed. Click OK and continue the configuration (the device will be initialized when the chuck is homed). Figure 183: pcNav Boot warning Since the platen moves to make or break contact between the pins and pad, selecting Auto Raise will automatically separate the pins from the pads.
Page 238: Create A Site Definition And Define A Probe List
Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control Create a site definition and define a probe list On the pcBridge computer, create a site definition for a single subsite for each die. To do this, use the software to create a selection of dies to probe.
Page 239: Load, Align, And Contact The Wafer
Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Multiple subsites per die To open the file: 1. Click the pcIndie button in the pcLaunch window. The pcIndie window will appear. Figure 186: pcIndie button 2.
Page 240 Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control Figure 189: pcLaunch window 2. To home the chuck, from the pcLaunch window, click the pcNav button. The pcNav window opens. See the following two figures. Figure 190: pcNav button Figure 191: pcNav window 10-10...
Page 241 Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober The OVD button toggles the state of the overdrive (on or off). 3. Click the Home button on the Tools panel of the pcNav window. The Initialize positioners to Home window opens.
Page 242 Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control Load the wafer Load the wafer: 1. Make sure that the vacuum is off. 2. Click the Load wafer button on the Tools panel of the pcNav window. The Load Wafer dialog box appears.
Page 243 Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Set the Z-height To set the Z-height: This part of the procedure sets Z-height (contact height). The platen moves up and down (Z) while the chuck moves X and Y but not Z. When changing Z-height (moving the platen up or down), a higher number moves closer to contact while a lower number moves away from contact (for example, if 300 is contact, 200 would be noncontact).
Page 244 Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control Figure 198: Set Z-height 4. Use the manual Z-dial to lower the platen to make initial contact with pads (this assumes that the pins are planar). 5.
Page 245 Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober 8. Set overdrive (user preference). 9. In the pcNav window, click the DN button, then press the Set Z UP/DN button. 10. When the SET Prb8860 Up/Down/Ovd window opens, press the Set Base Pt button. 11.
Page 246 Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control 7. Use the joystick (low mode) and theta adjustment to align the pins to the same pads as the first die (both along the same row of die). 8.
Page 247 Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Calculate die sizes To calculate die sizes: 1. Place pins over pads in upper left corner of wafer (although the upper left corner die is used in this example, any die may be selected as a base point).
Page 248: Probesites Clarius Project Example
Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control Probesites Clarius project example The following is a step-by-step procedure to configure the 8860 so the probesites Clarius project executes successfully. On the pcBridge computer: 1. Use the pcWafer program to probe a single subsite on multiple dies. 2.
Page 249: Set Spline Pattern (Optional)
Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Figure 209: Units of measure list Figure 210: Setup Options window 6. Select Set X, Y die size button in the Setup Options window. The Set X, Y Die size dialog box opens.
Page 250 Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control 2. Click the Spline Pattern button on the Edit Die Program Parameters window. The Spline Pattern window opens. Figure 212: Spline Pattern window 3. Select the spline pattern. The icon of the active spline pattern is transferred to the Edit Die Program Parameters window, as shown in the following figure.
Page 251: Use Kcon To Add A Prober
Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Use KCon to add a prober On the 4200A-SCS, use KCon to add the prober to the configuration: 1. Open KCon. 2. At the bottom of the System Configuration list, select Add External Instrument. The Add External Instrument dialog box is displayed.
Page 252: Clarius
Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control 5. Select the Micromanipulator 8860 Prober as the model. 6. Ensure that the Number of Pins / Positioners is correct. The number of pins defined here determines the pins that are available to assign to a switch matrix card column.
Page 253: Probesubsites Clarius Project Example
Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Probesubsites Clarius project example The following is a step-by-step procedure to configure the 8860 so the probesubsites Clarius project executes successfully. When using pcIndie, ensure that the project and the program listing on the Micromanipulator match (the program listing is a list of absolute chuck moves in the order of execution).
Page 254 Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control To start pcIndie: 1. Click the pcIndie button in the pcLaunch window. The pcIndie window is displayed. See the following two figures. Figure 218: pcIndie button Figure 219: pcIndie window 2.
Page 255: Use Kcon To Add A Prober
Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober 5. Save by clicking the pcIndie save button and assigning the listing a unique file name (*.idp). Figure 220: pcIndie save button 6. To open an existing program listing file, click the pcIndie open button in the pcIndie window. Select the file and click OK.
Page 256: Clarius
Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control Figure 223: Use KCon to select a prober 5. Select the Micromanipulator 8860 Prober as the model. 6. Ensure that the Number of Pins / Positioners is correct. The number of pins defined here determines the pins that are available to assign to a switch matrix card column.
Page 257 Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober Figure 224: probesubsites project tree 6. Click Run. 4200A-913-01 Rev. A December 2020 10-27...
Page 258: Commands And Error Symbols
Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control Commands and error symbols The following list contains error and status symbols listed by command. Available commands and responses PrChuck PrInit PrMovNxt PrSSMovNxt PR_OK BAD_CHUCK UNINTEL_RESP UNEXPE_ERROR SET_MODE_FAIL INVAL_PARAM...
Page 259: Using A Manual Or Fake Prober
Section 11 Using a manual or fake prober In this section: Using a manual or fake prober software ........ 11-1 Manual prober overview ............11-1 Fake prober overview ............. 11-2 Modifying the prober configuration file ........11-3 Probesites Clarius project example ........11-5 Probesubsites Clarius project example ........
Page 260: Fake Prober Overview
Section 11: Using a manual or fake prober Model 4200A-SCS Prober and External Instrument Control 4. Issue a PrChuck command to tell the user to ensure that the first test site is ready for testing. The PrChuck dialog box opens and the user continues by clicking OK. Tests on the site are executed.
Page 261: Modifying The Prober Configuration File
Model 4200A-SCS Prober and External Instrument Control Section 11: Using a manual or fake prober Modifying the prober configuration file You can modify these files using the 4200A-SCS. The default prober configuration file for a manual prober (MANL) is listed below. The only relevant line for this prober type is PROBER_1_PROBTYPE=MANL.
Page 262 Section 11: Using a manual or fake prober Model 4200A-SCS Prober and External Instrument Control The default prober configuration file for a fake prober is represented below. The only relevant line for this prober type is PROBER_1_PROBTYPE=FAKE. # prbcnfg.dat - EXAMPLE Prober Configuration File, FAKE prober # The following tag, "PRBCNFG", is used by the engine in order to determine # the MAX number of SLOTS and CASSETTES for a given prober at runtime.
Page 263: Probesites Clarius Project Example
Model 4200A-SCS Prober and External Instrument Control Section 11: Using a manual or fake prober Probesites Clarius project example The following is a step-by-step procedure to configure the manual prober so the probesites Clarius project executes successfully. The user is responsible for the probe station setup. Use KCon to add a prober On the 4200A-SCS, use KCon to add the prober to the configuration: 1.
Page 264: Clarius
Section 11: Using a manual or fake prober Model 4200A-SCS Prober and External Instrument Control Figure 229: Use KCon to select a prober 5. Select the Manual Prober or the Fake Prober as the model. 6. Ensure that the Number of Pins / Positioners is correct. The number of pins defined here determines the pins that are available to assign to a switch matrix card column.
Page 265: Probesubsites Clarius Project Example
Model 4200A-SCS Prober and External Instrument Control Section 11: Using a manual or fake prober Figure 230: probesites project tree 6. Click Run. Probesubsites Clarius project example The following is a step-by-step procedure to configure the manual prober so the probesubsites Clarius project executes successfully.
Page 266 Section 11: Using a manual or fake prober Model 4200A-SCS Prober and External Instrument Control Figure 231: Add a prober in KCon 3. Select Probe Station. 4. Select OK. KCon displays the properties for the prober. Figure 232: Use KCon to select a prober 5.
Page 267: Clarius
Model 4200A-SCS Prober and External Instrument Control Section 11: Using a manual or fake prober Clarius Use Clarius to load and run the probesites or probesubsites project using the new KCon configuration file, which allows you to execute the project for this prober. On the 4200A-SCS: 1.
Page 268: Using A Cascade Summit-12000 Prober
Section 12 Using a Cascade Summit-12000 Prober In this section: Cascade Summit 12000 prober softwareError! Bookmark not defined. Probe station configuration............. 12-1 Probesites Clarius Project example ........12-20 Probesubsites Clarius Project example ........ 12-23 Commands and error symbols ..........12-28 Cascade Summit 12000 prober software The Summit 12000 prober will have one of the following software products installed.
Page 269: Set Up Communications
Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control Set up communications The Summit-12000 prober is configured for GPIB communications only. Connect the 4200A-SCS and the probe station To connect the equipment, connect the 4200A-SCS GPIB port and the probe station PC GPIB port using a GPIB cable (Model 7007).
Page 270 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober The following figure shows connections between the Cascade Summit-12000 prober to the Keithley Instruments 4200A-SCS. Figure 235: Connection diagram Set up probers using the Velox prober control software For probers using the Velox prober control software: On the probe station computer, refer to the Velox user manual and help content for information on how to setup and configure the GPIB interface.
Page 271 Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control Set up probers using the Nucleus UI prober control software For probers using the Nucleus UI prober control software: 1. On the probe station computer, double-click the Nucleus icon. Figure 236: Nucleus icon 2.
Page 272 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober Figure 238: Component list and status window If the Communications: GPIB component is not on the list, you must add it. To add it, click Add from the Add component dialog box, then select Communications: GPIB.
Page 273 Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control 8. Change the address as needed. The default value is 28. 9. Save the configuration file by clicking Save. Figure 242: Save button 10. Start the component by clicking GO. Figure 243: GO button 11.
Page 274 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober Figure 246: Remote window 13. Select the Talker / Listener and Response On boxes in the Remote Window. 14. Click Setup on the Remote Window to display the Remote Setup dialog box. Figure 247: Remote setup window 15.
Page 275: Set Up Wafer Geometry
Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control Set up wafer geometry For probers using the Velox prober control software: On the probe station computer, refer to the Velox user manual and help content for information on how to create wafer maps.
Page 276 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober Figure 250: Wafer Map window 4. From the File menu of the Wafer Map window, select Wizard to start the Wafer Map wizard. Figure 251: Step 1: Wafer Map Wizard 4200A-913-01 Rev.
Page 277 Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control 5. Enter the label and wafer diameter in the Wafer Map Wizard window. 6. Click Next. 7. Select Flat or Notch based on the actual wafer. 8.
Page 278 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober 12. Click Next. 13. Select the die position. Optionally, select Show Partial Die. Figure 254: Step 4: Wafer Map Wizard 14. Click Next. 15. Set the reference position. 16.
Page 279: Create A Site Definition And Define A Probe List
Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control Refer to the probesites and probesubsites Clarius project examples for specifics on selecting sites to probe. 18. Click Next. 19. Specify the test sequence. Figure 256: Step 6: Wafer Map Wizard 20.
Page 280 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober For probers using the Velox prober control software For probers using the Velox prober control software: On the probe station computer, refer to the Velox user manual and help content for information on how to add and edit sites (dies) and subsites (subdies).
Page 281 Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control 5. From the Wafer Map window, select File > Open. Figure 259: Wafer Map window 6. Open the wafer map file. Figure 260: Open a wafer map file window 12-14 4200A-913-01 Rev.
Page 282: Load, Align, And Contact The Wafer
Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober Load, align, and contact the wafer Velox prober-control software For probers using the Velox prober-control software: On the probe station computer, refer to the Velox user manual and help content for information on how to load, unload, set chuck heights, align, contact, and set the home (also called reference) position of the wafer.
Page 283 Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control 2. From the Motion Control window, click the Chuck to front button. Figure 263: Chuck to front button 3. From the Nucleus toolbar, click the Enable Joystick button. Figure 264: Enable Joystick button 4.
Page 284 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober 8. From the Wafer Map window, click the Reference Die button. The Align dialog box opens. See the following two figures. Figure 268: Reference Die button Figure 269: Move the Reference Die 9.
Page 285 Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control 13. From the Nucleus UI toolbar, click the Hard Align button to display the Hard Align dialog box. Figure 271: Hard Align button Figure 272: Hard Align tab 14.
Page 286 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober Align the wafer To align the wafer: 1. Move to wafer center by clicking the Center button on the Motion Control window. 2. Click Start Align on the Hard Align dialog box. Raise the platen arm if prompted (a prompt will only appear if the platen arm is down when you start the alignment).
Page 287: Probesites Clarius Project Example
Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control 10. Either using the Z Up/Z Down buttons on the Motion Control window, or the joystick if set for Scan Z Axis (see CAUTION), make contact with the wafer. 11.
Page 288 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober Figure 275: Add a prober in KCon 3. Select Probe Station. 4. Select OK. KCon displays the properties for the prober. Figure 276: Use KCon to select a prober 5.
Page 289: Clarius
Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control Clarius Use Clarius to load and run the probesites project using the new KCon configuration file, which allows you to execute the project for this prober. On the 4200A-SCS: 1.
Page 290: Probesubsites Clarius Project Example
Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober Probesubsites Clarius Project example The following is a step-by-step procedure to configure the Summit-12000 so the probesubsites project executes successfully. For probers using the Velox prober control software: On the probe station computer, refer to the Velox user manual and help content for information on setting up and loading a wafer map that contains sites (dies) and subsites (subdies).
Page 291 Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control Figure 280: Wafer Map window 4. From the Wafer Map window, select File > Open to open a wafer map file. 5. Click Wafer > Sub Die from the Wafer Map menu. A subsite dialog box opens. Figure 281: Open Sub Die dialog 12-24 4200A-913-01 Rev.
Page 292 Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober 6. Click Subsites >New Subsite to create a new subsite Label 1. Figure 282: Select New Subsite on the Subsites menu 7. Enter the corresponding X and Y offset of the new subsite. Figure 283: Enter x and y offset 8.
Page 293: Use Kcon To Add A Prober
Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control 9. Click on the label name and type in a new description to relabel each subsite. Figure 285: Relabel the subsites 10. To choose a subsite for testing, select the box at the front of each label. To skip testing the subsite, clear the box at the front of each label.
Page 294: Clarius
Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober 3. Select Probe Station. 4. Select OK. KCon displays the properties for the prober. Figure 287: Use KCon to select a prober 5. Select the Cascade 1200 prober as the model. 6.
Page 295: Commands And Error Symbols
Section 12: Using a Cascade Summit-12000 Prober Model 4200A-SCS Prober and External Instrument Control Figure 288: probesubsites project tree 6. Click Run. Commands and error symbols The following table contains error and status symbols listed by command. Available commands and responses PrChuck PrInit PrMovNxt...
Page 296: Using A Signatone Cm500 Prober
Section 13 Using a Signatone CM500 Prober In this section: Signatone CM500 prober software ......... 13-1 Probe station configuration............. 13-1 Clarius project example for probe sites ........ 13-14 Clarius project example ............13-15 Probesites Clarius project example ........13-18 Probesubsites Clarius project example ........ 13-19 Commands and error symbols ..........
Page 297: Set Up Communications
Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control Set up communications The Signatone CM500 prober is configured for GPIB communications only. Make sure the prober configuration is set up properly for the GPIB communications interface. To set up communications: 1.
Page 298: Modify The Prober Configuration File
Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober 3. Select IEEE488 (GPIB). The Signatone GPIB driver window opens. Figure 292: Signatone GPIB driver window 4. Click Addr and verify that the GPIB address matches the GPIB_Address setting in the 4200A-SCS prober configuration file prbcnfg_CM500.dat at C:\s4200\sys\dat.
Page 299: Set Up Wafer Geometry
Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control # Example 01234567890 #PROBER_1_OPTIONS=1,1,1,1,1,1 OcrPresent AutoAlnPresent ProfilerPresent HotchuckPresent HandlerPresent Probe2PadPresent # Configuration for direct GPIB probers: # CM500 PROBER_1_PROBTYPE=CM500 PROBER_1_OPTIONS=0,0,0,0,1,0 PROBER_1_IO_MODE=GPIB PROBER_1_GPIB_UNIT=0 PROBER_1_GPIB_SLOT=1 PROBER_1_GPIB_ADDRESS=28 PROBER_1_GPIB_WRITEMODE=0 PROBER_1_GPIB_READMODE=2 PROBER_1_GPIB_TERMINATOR=10 PROBER_1_TIMEOUT=300 PROBER_1_SHORT_TIMEOUT=5...
Page 300 Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober Figure 295: CM500 Prober Setup Sheet 3. Select the Chuck Setup tab to enter Z chuck information, such as Z travel and overdrive distance. Figure 296: CM500 Chuck Setup Sheet 4200A-913-01 Rev.
Page 301: Load, Align, And Contact The Wafer
Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control 4. After selecting OK, a new wafermap is displayed. Figure 297: CM500 Prober wafermap Load, align, and contact the wafer 1. Click the Load wafer icon on toolbar. Figure 298: CM500 Prober load wafer icon 2.
Page 302 Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober 3. Click the Arrow buttons on the window to move the wafer stage to reference point 1. Figure 300: CM500 Prober manual MOVE buttons 4. Select Set Point1. Figure 301: CM500 Prober 2 Point Alignment 3 5.
Page 303 Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control Set the Home die of the wafermap Set the Home die of the wafermap: 1. To set HOME on the wafermap, click the Edit wafermap icon on the toolbar. Figure 303: CM500 Prober Editmap function icon 2.
Page 304 Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober Figure 305: CM500 Prober Setup softz contact command 2. Follow the instructions on the window to adjust the height of platen and to determine the contact position of the Z Chuck.
Page 305: Set Up Programmed Sites Without A Subsite
Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control 3. Move the Z Chuck up to confirm contact condition using the Contact icon on the toolbar. Figure 307: CM500 Prober Z Chuck Up (CONTACT) icon 4.
Page 306 Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober 2. Select the Enter Site Map function. Figure 311: CM500 Prober Edit Program Site window 3. Move the mouse onto the WAFERMAP window and then do one of the following actions: ▪...
Page 307: Set Up Programmed Sites With A Subsite
Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control 5. Click the To First Site button to move the prober to the first programmed site for testing. Make sure the Subsite (template) is disabled here. Figure 314: CM500 Prober Run Program Site window 6.
Page 308 Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober 2. Select Wafer as the subsite device. Figure 317: CM500 Prober Edit Subsite window 3. Move the wafer stage to the HOME position. All data recorded for the subsite is relative to the corner of the home die. You can record the position of the subsite either by keying in the coordinates of the subsite using the keyboard, or by moving the wafer to the actual position and clicking Enter.
Page 309: Clarius Project Example For Probe Sites
Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control Clarius project example for probe sites The following is a step-by-step procedure to configure the Clarius project to execute testing and automatic wafer stepping to all programmed sites successfully. When the CM500 prober is connected to the 4200A-SCS by GPIB interface, the 4200A-SCS is the GPIB master controller and the CM500 is always in listening mode.
Page 310: Clarius Project Example
Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober 3. Select Probe Station. 4. Select OK. KCon displays the properties for the prober. Figure 320: Use KCon to select a prober 5. For the Model, select the Signatone CM500 (WL250) Prober. 6.
Page 311 Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control Configure the prober project: 1. Select Configure. Make sure prober-init is selected in the project tree. Figure 321: Set prober-init parameters 2. Set the mode to 6. 3.
Page 312 Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober 5. Select the prober-contact_1 action. 6. Rename the action prober-separate. 7. Select Configure. 8. Set chuckposition to 0. This moves the Z chuck to the down (separate) position. 9.
Page 313: Probesites Clarius Project Example
Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control 6. Add the Prober Move to Next Site (prober-move) action. 7. Drag prober-contact so that it is immediately before your test. 8. Drag prober-move so that it is immediately after your test. 9.
Page 314: Probesubsites Clarius Project Example
Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober Figure 324: Set prober-init mode parameters 8. In the project tree, select probesites. 9. Choose Run to execute the entire project. Probesubsites Clarius project example The following procedure configures a Clarius project to execute testing and automatic wafer stepping to all programmed subsites.
Page 315: Commands And Error Symbols
Section 13: Using a Signatone CM500 Prober Model 4200A-SCS Prober and External Instrument Control Figure 325: Set prober-init mode parameters 7. Set the subprobtype. If the CM500 prober is not at its first site, set the subprobtype to 1; otherwise, set it to 0. 8.
Page 316: Using An Mpi Probe Station
Section 14 Using an MPI Probe Station In this section: MPI prober software ............... 14-1 Probe station configuration............. 14-2 Clarius probesites and probesubsites project example ..14-4 Commands and error symbols ..........14-8 MPI prober software MPI supported probers include the TS2000, TS2000-DP, TS2000-HP, TS2000-SE, TS3000, and TS3000-SE.
Page 317: Probe Station Configuration
Section 14: Using an MPI Probe Station Model 4200A-SCS Prober and External Instrument Control Probe station configuration Make sure that you are familiar with the MPI prober and its supporting documentation before attempting setup, configuration, or operation. The general steps required to set up and configure the MPI prober for use with the 4200A-SCS include: •...
Page 318 Model 4200A-SCS Prober and External Instrument Control Section 14: Using an MPI Probe Station 5. Set the Config attribute to BoardName:BoardAddress:VenderCode, where: ▪ BoardName is the name of GPIB interface of the prober, such as GPIB0. Refer to the GPIB documentation to determine the name of the GPIB interface.
Page 319: Load, Align, And Contact The Wafer
Section 14: Using an MPI Probe Station Model 4200A-SCS Prober and External Instrument Control Load, align, and contact the wafer Refer to the MPI Sentio User Manual for information on how to load, unload, set chuck heights, align, contact, and set the home position of the wafer. Set up wafer geometry Refer to the MPI Sentio User Manual for information on how to set up the wafer map.
Page 320 Model 4200A-SCS Prober and External Instrument Control Section 14: Using an MPI Probe Station Figure 326: Add a prober in KCon 3. Select Probe Station. 4. Select OK. KCon displays the properties for the prober. Figure 327: Use KCon to select a prober 4200A-913-01 Rev.
Page 321: Clarius
Section 14: Using an MPI Probe Station Model 4200A-SCS Prober and External Instrument Control 5. Select MPI Prober as the model. 6. If using a switch matrix, make sure the Number of Pins / Positioners is correct. The number of pins defined here determines the pins that are available to assign to a switch matrix card column.
Page 322 Model 4200A-SCS Prober and External Instrument Control Section 14: Using an MPI Probe Station Figure 329: probesubsites project tree 6. Edit the project so that the number of sites or subsites matches the wafer map. 7. Delete or replace tests with relevant device tests for the wafer being tested. Refer to the Model 4200A-SCS Clarius User's Manual “Configure sites”...
Page 323: Commands And Error Symbols
Section 14: Using an MPI Probe Station Model 4200A-SCS Prober and External Instrument Control Commands and error symbols The following table contains error and status symbols listed by command when using the MPI prober through the PRBGEN user library. Available commands and responses PrChuck PrInit PrMovNxt...
Page 324 Specifications are subject to change without notice. All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • 1-800-833-9200 • tek.com/keithley 07/2020...

Tektronix KEITHLEY 4200A-SCS Manual

Introduction

Using Switch Matrices

Configure and Use a Series 700 Switching System

Using a Model 590 C-V Analyzer

Using a Keysight 4284/4980A LCR Meter

Using a Model 82 C-V System

Using a Keysight 8110A/8111A Pulse Generator

Set up a Probe Station

Using a Cascade Microtech PA200 Prober

Using a Micromanipulator 8860 Prober

Using a Manual or Fake Prober

Using a Cascade Summit-12000 Prober

Using a Signatone CM500 Prober

Using an MPI Probe Station

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