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Safety precautions The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present. This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury.
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For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired. Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
Table of contents Introduction ......................1-1 Introduction .......................... 1-1 4200A-SCS system overview ....................1-2 Source-measure unit (SMU)...................... 1-3 Preamplifier ..........................1-3 Ground unit (GNDU) ......................... 1-3 Capacitance-Voltage Unit (CVU) ....................1-4 Pulse source-measure hardware ....................1-4 Software features ........................1-5 Front-panel overview ......................
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Table of contents Model 4200A-SCS Setup and Maintenance User's Manual KCon main window ......................3-2 System Configuration ......................3-3 Add an external instrument ....................3-4 Supported external equipment ....................3-6 Add a driver for unsupported equipment ................... 3-7 Use KCon to add equipment to the 4200A-SCS ............... 3-7 Remove an external instrument ...................
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Model 4200A-SCS Setup and Maintenance User's Manual Table of contents System administration ..................... 5-1 System Administration introduction ..................5-1 Embedded computer policy ....................5-1 Default user accounts ......................5-2 Windows 10 compatibility ..................... 5-2 Create new user accounts ....................5-2 System directories and files ....................
Section 1 Introduction In this section: Introduction ................1-1 4200A-SCS system overview ........... 1-2 Front-panel overview ..............1-6 Rear-panel overview ..............1-8 Extended warranty ..............1-9 Contact information ..............1-9 Embedded computer policy ............1-9 General ratings ............... 1-10 Introduction The Keithley Instruments Model 4200A-SCS Setup and Maintenance is a customizable and fully-integrated parameter analyzer that provides synchronized insight into current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V characterization.
Section 1: Introduction Model 4200A-SCS Setup and Maintenance User's Manual 4200A-SCS system overview The 4200A-SCS is an automated system that provides I-V, pulsed I-V, and C-V characterization of semiconductor devices and test structures. Its advanced digital sweep parameter analyzer combines speed and accuracy for deep sub-micron characterization.
Model 4200A-SCS Setup and Maintenance User's Manual Section 1: Introduction Source-measure unit (SMU) The fundamental instrument module used by the 4200A-SCS is the source-measure unit (SMU). The basic function of a SMU is to perform one of the following source-measure operations: •...
Section 1: Introduction Model 4200A-SCS Setup and Maintenance User's Manual Capacitance-Voltage Unit (CVU) The 4210-CVU and 4215-CVU Multi-Frequency Capacitance-Voltage Units are impedance measurement modules that can be installed in the 4200A-SCS. Capacitance-voltage (C-V) measurements are often used to characterize the gate oxide thickness, oxide defect density, and doping profile of MOSFETs.
Model 4200A-SCS Setup and Maintenance User's Manual Section 1: Introduction Software features When you start one of the Clarius applications for the first time, you must agree to the license agreement before continuing. If you do not respond with "Yes", your system will not function until you reinstall the software.
Section 1: Introduction Model 4200A-SCS Setup and Maintenance User's Manual Front-panel overview Many controls and interfaces are on the front panel of the 4200A-SCS Parameter Analyzer. The next figure shows the front panel of the 4200A-SCS. The components are summarized following the figure. Figure 2: 4200A-SCS front panel Display A 1920 x 1080 full HD resolution touchscreen display.
Model 4200A-SCS Setup and Maintenance User's Manual Section 1: Introduction Touchscreen basics You can operate the 4200A-SCS using the touchscreen. You can use your fingers, clean room gloves, or any stylus manufactured for capacitive touchscreens. To select and move on the screen: •...
Section 1: Introduction Model 4200A-SCS Setup and Maintenance User's Manual Rear-panel overview The following figure shows the rear panel of the 4200A-SCS. The connectors and components are summarized following the figure. Figure 4: 4200A-SCS rear panel Provides system cooling. DP port Provides a standard DisplayPort connection.
If you have any questions after you review the information in this documentation, please contact your local Keithley Instruments office, sales partner, or distributor. You can also call the Tektronix corporate headquarters (toll-free inside the U.S. and Canada only) at 1-800-833-9200. For worldwide contact numbers, visit tek.com/contact-us.
Section 1: Introduction Model 4200A-SCS Setup and Maintenance User's Manual General ratings The general ratings and connections of the 4200A-SCS instrument are listed in the following table. Category Specification Supply voltage range 100 V to 240 V , 50 Hz or 60 Hz Current rating 1000 VA Front-panel overview...
Section 2 Installation In this section: Introduction ................2-1 Locating the system ..............2-2 Basic system connections ............2-3 GPIB connections ..............2-8 Preamplifier mounting .............. 2-9 Connections to the device under test ........2-11 Powering the 4200A-SCS ............2-12 Powering off the 4200A-SCS ..........
Section 2: Installation Model 4200A-SCS Setup and Maintenance User's Manual Locating the system Locate the 4200A-SCS so that it will operate within the following ambient temperature and humidity limits: • Temperature: +10 °C to +40 °C • Relative humidity: 5% to 80%, noncondensing SMU and preamplifier accuracy specifications are based on operation at 23 °C ±5 °C and between 5% and 60% relative humidity.
Model 4200A-SCS Setup and Maintenance User's Manual Section 2: Installation Basic system connections This section provides basic system connections to get your 4200A-SCS set up and running. Connecting to protective earth The 4200A-SCS must be connected to protective earth (safety ground) using the supplied green-yellow ground cable.
Section 2: Installation Model 4200A-SCS Setup and Maintenance User's Manual Connecting a LAN cable The LAN connectors on the 4200A-SCS are standard RJ-45 connectors intended for use with unshielded twisted pair (UTP) cable. For best results, use only CAT 5 UTP cables equipped with RJ-45 connectors to connect your LANs, as shown in the following figure.
Model 4200A-SCS Setup and Maintenance User's Manual Section 2: Installation Connecting GPIB instruments You can use the 4200A-SCS to control one or more external instruments using the IEEE-488 general purpose instrument bus (GPIB). An example of typical instruments used in a test system with the 4200A-SCS are a switching system and an external C-V meter.
Section 2: Installation Model 4200A-SCS Setup and Maintenance User's Manual Connecting the interlock The following figure shows the location of the interlock connector on the rear panel of the 4200A-SCS. To connect the interlock: 1. Connect one end of the supplied 236-ILC-3 interlock cable to the interlock connector on the rear panel of the 4200A-SCS (see the following figure).
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Model 4200A-SCS Setup and Maintenance User's Manual Section 2: Installation Figure 9: Interlock connector wiring Turning the 4200A-SCS output off does not place the instrument in a safe state (an interlock is provided for this function). Hazardous voltages may be present on all output and guard terminals.
Section 2: Installation Model 4200A-SCS Setup and Maintenance User's Manual Prober connections Refer to Model 4200A-SCS Prober and External Instrument Control for details on how to enable and configure prober control for supported probers. GPIB connections The built-in IEEE-488 connector allows you to interface the 4200A-SCS to a variety of GPIB-equipped devices, such as a CV meter or switching system.
Model 4200A-SCS Setup and Maintenance User's Manual Section 2: Installation Preamplifier mounting Exposure to electrical shock could result in personal injury or death. Precautions must be taken to prevent a shock hazard by surrounding the test device and any unprotected leads (wiring) with double insulation that is rated for 250 V, Category O.
Section 2: Installation Model 4200A-SCS Setup and Maintenance User's Manual Mounting a preamplifier in a remote location The 4200-PA can be mounted remotely using an optional mounting kits. Follow the steps below to remotely mount and connect the preamplifier. Refer to the instructions provided with the remote mounting kit for detailed information on physically mounting the preamplifier module.
Model 4200A-SCS Setup and Maintenance User's Manual Section 2: Installation Mounting a preamplifier to the rear panel A mounting foot secures the preamplifier to the rear panel. Extra support for all the preamplifiers is provided by a mounting bracket, as shown in the following figure. The preamplifiers are matched to the SMUs to which they were originally connected.
Section 2: Installation Model 4200A-SCS Setup and Maintenance User's Manual Powering the 4200A-SCS 3. Connect the other end of the supplied line cord to a grounded ac line power receptacle. 4. Turn the power ON using the front-panel power switch. Operating the instrument on an incorrect line voltage may cause damage, possibly voiding the warranty.
Model 4200A-SCS Setup and Maintenance User's Manual Section 2: Installation 3. Connect the other end of the supplied line cord to a grounded ac line power receptacle. 4. Turn the power ON using the front-panel power switch. Although the instrument does not sense power line frequency at power-up, Keithley ships your 4200A-SCS with line frequency settings that match the line frequency that was specified on the order —...
Section 2: Installation Model 4200A-SCS Setup and Maintenance User's Manual Configuring the system You do not need to perform system configuration operations if you use only internal instruments, such as factory-installed SMUs, preamplifiers, and the ground unit (GNDU). The 4200A-SCS detects internal instruments and configures the system appropriately for local operation.
Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual KCon main window When KCon starts, the KCon main window shown in the figure below opens. The System Configuration list provides a tree view of all instruments and equipment in the 4200A-SCS system configuration.
Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) System Configuration The System Configuration list displays each component in the system. Selecting a component in the list displays the properties for the selected component. The figure below shows a typical system configuration with some of the System Configuration list items expanded.
Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual Add an external instrument To add a supported external instrument to the system configuration, select Add External Instrument. The supported instrument categories are: • Switch Matrix • Capacitance Meter •...
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Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) Figure 16: Example system connections To add an external instrument: 1. Select Add External Instrument. 2. Select the instrument. You can only make one selection at a time. 3.
Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual Supported external equipment Keithley Instruments provides a number of standard user libraries to control external equipment that is typically used in semiconductor characterization applications. Standard user-module libraries are provided for the equipment shown in the following table.
Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) Supported external equipment Category Instrument User library Additional information “Connections and configuration” in Keithley Instruments Model LR:8028 Test fixture Model 4200A-SCS Source-Measure Component Test Fixture applicable Unit (SMU) User's Manual Keithley Instruments Model 8007 Semiconductor Test Fixture applicable...
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Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual For detail if you are adding a prober, refer to the information for your prober in Model 4200A-SCS Prober and External Instrument Control: • “Suss MicroTec PA-200 Prober” •...
Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) Step 3. Set GPIB addresses The GPIB address setting in KCon must match the actual GPIB address of the instruments in the system. See the documentation for the instruments to determine the GPIB Address. The address for some instruments is briefly displayed during the power-on sequence.
Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual Validate Validate tests the system configuration to determine if there are configuration conflicts or communication problems between the instrumentation and the 4200A-SCS. This test can validate most of the supported internal and external instruments. However, the following instruments are not automatically verified when the configuration is validated: •...
Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) When using interactive test modules (ITMs) for DUT testing, you can configure RPM switching in KCon. After you connect the PMU, SMUs, and CVU to the RPM, update the RPM configuration in KCon.
Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual Summary The Summary displays the system configuration. From this display, you can save the configuration or print it. The sections of the system configuration are: • System Information: Provides a table containing the 4200A-SCS serial number, the network or system name, and pertinent software and platform version information.
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Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) System Properties area The System Properties area of the Properties displays the 4200A-SCS serial number and other software and platform information. You can change the Powerline frequency (on age 3-13), autorange method (on page 3-13), and...
Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual You may need to select a different standby range to tune or correct a test condition or result that is less than optimal. For example, if the test condition always starts the measurement on the 100 µA range, selecting the 100 µA standby range speeds up the measurement.
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Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) Run Self Test Some instruments include a Self Test option. When you run Self Test, the instrument runs a number of internal performance checks to determine if the instrument is operating correctly. You do not need external equipment to run Self Test.
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Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual Add a general-purpose instrument You can add a general-purpose instrument to your system configuration if your application requires an unsupported external instrument. See Supported external equipment (on page 3-6) for a list of supported instruments.
Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) KXCI Settings If you need to set up the 4200A-SCS as a subordinate on a GPIB or ethernet system, you do the initial setup through the KCon KXCI Settings. This allows you to use an external computer to remotely control the 4200A-SCS over GPIB or ethernet.
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Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual Figure 21: KXCI Settings dialog box When KXCI starts, the status messages look similar to the following figure when GPIB is set up. Figure 22: KXCI status when GPIB selected 3-18 4200A-908-01 Rev.
Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) Set up KXCI for ethernet control To set up ethernet control: 1. Open KCon. 2. Select KXCI Settings. The KXCI Settings dialog box is displayed. 3. Set Communications to Ethernet. 4.
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Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual Mode comparison Mode Characteristic 4145 Emulation 4200A (Normal) String reported in response to ID query ID HP4145B 1.1,1.0 KI4200A Vx.x.x (where x.x.x is the version number) GPIB data resolution 5 digits 7 digits Maximum number of sweep points...
Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) To set up 4145B emulation: 1. Open KCon. 2. Select KXCI Settings. The KXCI Settings dialog box is displayed, as shown in the following figure. 3. In the Function column, select the 4145 function that the SMU will emulate. 4.
Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual Command set comparison Command set Characteristic 4145 Emulation 4200A (Normal) String reported in response to ID query ID HP4145B 1.1,1.0 KI4200A Vx.x.x (where x.x.x is the version number) GPIB data resolution 5 digits 7 digits...
Model 4200A-SCS Setup and Maintenance User's Manual Section 3: Keithley Configuration Utility (KCon) The constants include: • PI: is the ratio of the circumference to the diameter of a circle • K: Boltzmann’s constant • Q: The charge of an electron •...
Section 3: Keithley Configuration Utility (KCon) Model 4200A-SCS Setup and Maintenance User's Manual About KCon About KCon displays a dialog box that contains version and copyright information. KCon Learning Center The Learning Center provides access to all 4200A-SCS information, such as: •...
Section 4: Maintenance Model 4200A-SCS Setup and Maintenance User's Manual For continued protection against fire or instrument damage, replace the fuses only with the type and rating shown above. If the instrument repeatedly blows fuses, correct the cause of the problem before replacing the fuses. Front-panel display Do not use sharp metal objects, such as tweezers or screwdrivers, or pointed objects, such as pens or pencils, to touch the touchscreen.
Model 4200A-SCS Setup and Maintenance User's Manual Section 4: Maintenance Figure 26: 4200A-SCS System Monitor Air intake ventilation screens Your 4200A-SCS comes equipped with an internal axial fan for active cooling of the instrument cards. Your instrument must be properly cooled to maintain optimum operating specifications. There are three air inlets on your instrument: One on each side and one on the bottom.
Section 4: Maintenance Model 4200A-SCS Setup and Maintenance User's Manual Solid-state hard drive maintenance Your 4200A-SCS is shipped with a solid-state hard drive (SSD). SSDs offer several advantages over traditional hard drives, such as: • Superior data access time • Increased reliability •...
Model 4200A-SCS Setup and Maintenance User's Manual Section 4: Maintenance Power the 4200A-SCS with an uninterruptable power supply during the firmware upgrade process. Interruption of the firmware upgrade process may damage an instrument card. To upgrade the firmware: 1. From the Windows taskbar, select Start. 2.
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Section 4: Maintenance Model 4200A-SCS Setup and Maintenance User's Manual Before initiating a calibration, allow the system to warm up for at least 30 minutes. Clarius prevents autocalibration if the system is not sufficiently warmed up. To autocalibrate: 1. Allow the system to warm up for at least 30 minutes. 2.
Section 5 System administration In this section: System Administration introduction .......... 5-1 Embedded computer policy ............5-1 Default user accounts .............. 5-2 Windows 10 compatibility ............5-2 Create new user accounts............5-2 System directories and files ............. 5-3 Change touch mode of Adobe Acrobat Reader ......5-4 Disable the touchscreen ............
Section 5: System administration Model 4200A-SCS Setup and Maintenance User's Manual ® ® Do not reinstall or upgrade the Microsoft Windows operating system (OS) on any 4200A-SCS unless the installation is performed as part of authorized service by Keithley Instruments. Violation of this precaution will void the 4200A-SCS warranty and may render the 4200A-SCS unusable.
Model 4200A-SCS Setup and Maintenance User's Manual Section 5: System administration To set up a new user account: ® ® 1. Make sure that you are logged into the Microsoft Windows administrative account. The default administrative account is kiadmin. 2. From the Windows start menu, type settings in the search box. The results display the Windows Settings utility.
Section 5: System administration Model 4200A-SCS Setup and Maintenance User's Manual Change touch mode of Adobe Acrobat Reader ® ® ® You can change the touch mode of Adobe Acrobat Reader . The setting of Touch Mode shifts toolbar buttons, panels, and menus. The Touch reading mode optimizes viewing and supports most common gestures.
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Model 4200A-SCS Setup and Maintenance User's Manual Section 5: System administration 3. Select the arrow next to Human Interface Devices (HID) to display a list of available devices. 4. Right-click HID-compliant touch screen. 5. Select Disable. Figure 30: Disabling the touchscreen 6.
Section 5: System administration Model 4200A-SCS Setup and Maintenance User's Manual To enable the touchscreen: 1. To enable the touchscreen, right-click the HD compliant touchscreen option, then select Enable. Figure 32: Enabling the touchscreen System-level backup and restore software Acronis True Image (OEM) is a software tool that allows 4200A-SCS users to create hard-disk images, including user data, environment settings, and operating system files.
Model 4200A-SCS Setup and Maintenance User's Manual Section 5: System administration Restoring the 4200A-SCS hard drive to factory condition deletes all files written to the hard drive after shipment. Ensure you back up all data and files before you restore the hard drive to factory condition.
Section 5: System administration Model 4200A-SCS Setup and Maintenance User's Manual It is possible to back up the whole hard drive. However, the 4200A-SCS system files and application program files occupy a large portion of the storage and may not be properly recoverable unless backed up using special software.
Model 4200A-SCS Setup and Maintenance User's Manual Section 5: System administration Read and write permission access to USB ports ® For enhanced system security and data integrity, you can use the Microsoft Management Console (MMC) to enable, disable, or deny all access to removable storage devices used with the USB ports of the 4200A-SCS.
Section 5: System administration Model 4200A-SCS Setup and Maintenance User's Manual Add Clarius+ applications to the Windows startup menu ® ® You can add Clarius applications to the Microsoft Windows startup menu to have them start automatically when you log into Windows. Add either Clarius or KXCI to the startup menu.
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Model 4200A-SCS Setup and Maintenance User's Manual Section 5: System administration 5. Select Logon from the main window. 6. Select Add. 7. Enter one of the following application file paths in the Script Name field: ▪ For Clarius+: C:\S4200\sys\bin\Clarius.exe ▪ For KXCI: C:\S4200\sys\bin\KXCI.exe 8.
Section 6 Next steps In this section: Additional information ............... 6-1 Additional information This manual has prepared you to start using your new 4200A-SCS for your applications. For more detailed information, refer to the Learning Center, which you can access by selecting this icon on your desktop: Figure 35: 4200A-SCS Learning Center icon The Learning Center contains a variety of content to help you learn how to use your 4200A-SCS,...
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Specifications are subject to change without notice. All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • 1-800-833-9200 • tek.com/keithley 07/2020...
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