Table of Contents
Advertisement
HVG-2020B Instruction Manual
S68
Instrument ID (Read/Factory Write)
The Instrument's ID string. This is a text field which accepts a maximum of 63 characters.
S75
Control Board Id (Factory Read Only)
The Hex ID and Software Version of the Control Board.
PFS
Piezo Full Scale (Factory Read/Write)
The piezo sensor full-scale output used to normalize the pressure reading for curve fitting.
The value should always be 1000 Torr.
C1
Piezo Linearization Coefficient #1 (Factory Read/Write)
The linear term of the equation used to fit the calibration data to improve accuracy. If no
curve fit was required, this term will be 1 and the others 0.
C2
Piezo Linearization Coefficient #2 (Factory Read/Write)
The quadratic term of the equation used to fit the calibration data to improve accuracy.
C3
Piezo Linearization Coefficient #3 (Factory Read/Write)
The third-order term of the equation used to fit the calibration data to improve accuracy.
PSF
Piezo Span Factor (Factory Read/Write)
The factor used to scale the normalized curve fit. Used with PFS, C1, C2 and C3. Pressure =
PFS/PSF. If no curve fit was required, this term will be 1.
R4
Pirani R Zero (Read/Factory Write)
Pirani resistance
R5
Pirani Alpha Coeff (Read/Factory Write)
Pirani Alpha coefficient
R6
Pirani Scale Factor (Read/Factory Write)
Pirani scale factor. Determined using RMID command
R7
Pirani B Coeff (Read/Factory Write)
Pirani B coefficient. Determined using RHIGH command.
R8
Pirani Gas (Read/Write)
R9
Pirani Gas Factor (Read/Unlock Write)
Pirani gas conversion factor. Can only be written to when R8 is set to 7 or 8.
EAR99 Technology Subject to Restrictions Contained on the Cover Page
0 = Nitrogen
1 = Air
2 = Helium
3 = Argon
4 = Hydrogen
5 = CF4
6 = SF6
7 = Custom Gas 1
8 = Custom Gas 2
Page 36 of 40
Advertisement
Table of Contents
