TSI Instruments MSP TURBO 2950 User Manual
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TSI Instruments MSP TURBO 2950 User Manual

TSI Instruments MSP TURBO 2950 User Manual

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Prepared by: MSP - A Division of TSI
5910 Rice Creek Parkway, Suite 300
Shoreview, Minnesota, U.S.A. 55126
Phone:
Fax:
Internet:
Model 2940 Liquid Flow Controller
TM
T
L
URBO
IQUID
651-287-8100
651-287-8140
www.tsi.com
M
ODEL
F
C
LOW
ONTROLLER
U
SER
Patents:
www.tsi.com/patents
6015650, Rev 0
2950
G
UIDE
J
2021
ULY
Page 1 of 55

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  • Page 1 6015650, Rev 0 2950 ODEL URBO IQUID ONTROLLER UIDE 2021 Patents: www.tsi.com/patents Prepared by: MSP - A Division of TSI 5910 Rice Creek Parkway, Suite 300 Shoreview, Minnesota, U.S.A. 55126 Phone: 651-287-8100 Fax: 651-287-8140 Internet: www.tsi.com Model 2940 Liquid Flow Controller Page 1 of 55...
  • Page 2 6015650 Rev 0 EVISION 2950 L ITLE UIDE ODEL IQUID ONTROLLER 6015650, R OCUMENT CAPA / FFECTED ESCRIPTION ELEASE AGES ROJECT D/00380 2021 RELIMINARY ELEASE ©TSI Corporation; July 2021; all rights reserved OPYRIGHT 5910 Rice Creek Parkway, Suite 300, Shoreview, MN 55126, U.S.A. DDRESS +01 (1) 651-287-8100 ELEPHONE...
  • Page 3 6015650 Rev 0 Document Approval Title: User Guide for the Model 2950 Liquid Flow Controller Document No.: 6015650, rev 0 Approved: Date: On behalf of the Product Manager Date: On behalf of Safety Date: On behalf of the Quality Assurance Model 2950 Liquid Flow Controller Page 3 of 55...

  • Page 4: Table Of Contents

    6015650 Rev 0 ABLE OF ONTENTS Safety ..................................5 1.1 Safety Notations ..........................5 1.2 Chemical Safety ..........................5 1.3 High Pressure Safety........................5 1.4 Electrical Safety ..........................6 1.5 Fire Safety ............................. 6 1.6 Temperature Safety ........................6 1.7 Location ............................6 1.8 Orientation / Mounting ........................

  • Page 5: Safety

    6015650 Rev 0 AFETY 1.1 S AFETY OTATIONS The following safety notations that are used throughout the Liquid Flow Controller user documentation: WARNING Significant potential for serious personal injury may exist if instructions are not followed correctly. Text appears in Red. CAUTION Potential damage to the equipment may occur if instructions are not followed correctly, but does not present significant potential for serious...

  • Page 6: Electrical Safety

    6015650 Rev 0 1.4 E LECTRICAL AFETY The Model 2950 requires connection to a 10-30Vdc single fault power supply. (See "Specifications" for power requirements.) The primary supply voltage (ex. 120V) must not contact the secondary voltage (ex. 24V) under a power supply fault. An ‘Information Technology’ supply approved under the EN 60950 or the UL 1950 standard is recommended.

  • Page 7: Orientation / Mounting

    6015650 Rev 0 WARNING: A chemical leak may create an explosive environment. Follow the appropriate precautions for hazardous locations. Check the Lower Explosive Limit of the chemical being sensed and take all precautions necessary 1.8 O RIENTATION OUNTING The 2950 is factory calibrated in the horizontal position (e.g. laying flat on a table with the inlet/outlet running horizontally).

  • Page 8: Introduction

    6015650 Rev 0 NTRODUCTION 2.1 P RODUCT ESCRIPTION Liquid precursors are routinely used for gas-phase processing in microelectronic fabrication The intention of this product is to reliably control a liquid precursor at well- controlled and highly repeatable delivery rates for thin film deposition processes and other gas-phase processes used in semiconductor manufacturing.
  • Page 9 6015650 Rev 0 overshoot using different PID parameters for different flow rate zones and Bias/Offseting/offset if needed. Once the flow controller has been tuned, the flowrate can be set, monitored and adjusted using one of several communication methods. Communication between the 2950 and the outside world can be done using one of several methods, including RS-485 Serial communication, EtherCAT, or an Analog Signal.

  • Page 10: Installation And Setup

    6015650 Rev 0 NSTALLATION AND ETUP Figure 2 Connectors, Switches & Ports on the LFC RS485/Analog IO Port Firmware Port RS 485 Termination Switch M8 5 Pin Power Connector EtherCAT Ports Power Connector EtherCAT Address Setting Piezo Connector DeviceNet Port (M5) Liquid Outlet DeviceNet Termination Switch Status Light...

  • Page 11: Plumbing

    6015650 Rev 0 3.2 P LUMBING ” For ease of installation, stainless steel VCR male fittings are used on standard 2950 models. It is a good practice to Piezo Cable check the chemical compatibility of the tubing and fittings used with the chemical that is intended to be run through the tubing and fitting being used.
  • Page 12 6015650 Rev 0 Korean EMC statement in Appendix C. Description +24V • All DC power cables shall be less than 3m long not connected • DC power shall not be supplied from a DC distribution Power Common network. not connected not connected One power connector option is a screw terminal connector Table 5: M8 pin out...

  • Page 13: Turning The Power On And Communicating With The Unit

    6015650 Rev 0 Be sure that the RS485 termination switch is in the ‘ON’ position to minimize errors in communications (see letter B, Figure 2) Note: All of the return pins are internally connected. Section 4.2 describes how to configure and PID tune the Liquid Flow Controller, including the parameters needed to establish communications.

  • Page 14: Operating The Turbo Tm Liquid Flow Controller

    6015650 Rev 0 When the 2950 LFC is connected in-line with a 2950 LFC Vaporizer, a valve upstream of the 2950 LFC can be shut, and the pneumatic shut valve piezo valve opened to allow the downstream vacuum to pull out all the gases trapped in the 2950 LFC.
  • Page 15 6015650 Rev 0 It is designed to run on a computer that meets the following requirements. Operating system: Windows 7 or greater Speed: At least 2 GHz of processing speed Communication: Serial communication (USB port or DB 9 Port) Framework: Dot Net Framework 4.6.0 The communications parameters are in Table 13.
  • Page 16 6015650 Rev 0 4.2.2 E STABLISHING OMMUNICATION After a cable is connected to the serial port, select the Controller pull down window and select Connect. The Connect pop up window then appears (ref: Figure Figure 17: Establishing Communication 17). Select the com port from the serial port pull down window and click the ‘Ok’...
  • Page 17 6015650 Rev 0 Bias/Offset table to adapt to minor disturbances in the system and adjust the output signal accordingly. To test the effectiveness of the tuning, the ‘Stream Flow Screen’ can be used. 4.2.3.1 Loading or Saving the Recipe Table When communication is first established, the tuning parameters that are on the 2950, are uploaded to the computer and displayed in the Flow Recipe Table.
  • Page 18 6015650 Rev 0 Bias/Offset Voltage: is the piezo voltage that is used for the Bias/Offset Time when the set point is changed from zero to a value in the corresponding zone. These values are located in the Bias/Offset column of the Flow Recipe table (ref: Figure 21). If no Bias/Offset is desired, set the Bias/Offset Time to 0.
  • Page 19 6015650 Rev 0 The other two methods are Dynamic, where the Bias/Offset voltage is determined by using data collected the last time the setpoint was operating in a given zone. Dynamic Bias/Offset also provides improved response time. When Dynamic Bias/Offset is chosen, the Bias/Offset Value is determined by either the Current Method or the Alternate Method.
  • Page 20 6015650 Rev 0 Dynamic Bias/Offset Adder voltage is generally set at 1 or 2 volts and can be entered by the user in the Flow Recipe Table (Figure 21). This value is applied to the stored Dynamic Bias/Offset to allow the piezo to be more closed (positive value) or more open (negative value) than the last stored operating voltage.
  • Page 21 6015650 Rev 0 serial port (pins 6 & 7) to determine the signal sent the piezo valve. DigitalSetpoint will use digital flow setpoint received from either an EtherCAT setting or RS485 command to determine the signal sent the piezo valve. FixedPiezoVoltage will set the signal sent the piezo valve to the set Piezo Voltage.
  • Page 22 6015650 Rev 0 4.2.4 H ARDWARE ONFIGURATION The hardware configuration tab is where analog signals being sent and received through the serial port at the top of the 2950 are configured. This is done using pull down selections in the Input / Output Configuration Box.
  • Page 23 6015650 Rev 0 4.2.5 L IQUID ONFIGURATION The liquid configuration tab is where the liquid being controlled by the Liquid Flow Controller is selected. This tab is also where new liquids can be created and its parameters defined or calibrated. The 2950 LFC can hold the properties of up to five different liquids in its memory and the Service Tool can save up to 10 sets of parameters on the computer.
  • Page 24 6015650 Rev 0 Use a Dynamic Temperature type of calibration if it is known how the liquid’s density and viscosity changes with temperature otherwise a Static Temperature type should be selected. • Then click the ‘Create Liquid’ button and a Calibration Screen will appear corresponding to the Calibration Type selected.
  • Page 25 6015650 Rev 0 The other ‘Calibrate from Factory Liquid’ type is the “Calibrate from Factory Liquid-Dynamic Temperature” type. It should be used when liquid being measured and controlled behaves similar to the Factory calibrated liquid and its viscosity and/or density vary at known rates with respect to temperatures.
  • Page 26 6015650 Rev 0 Cancel Zero ΔP Transducer Flow Setpoint Differential Pressure Number of Calibration Points Differential Pressure Selected Liquid Reference Curve Fitting Graph Actual Measured Figure 44: Calibrating a Liquid using a ‘New Calibration’ method When entering a new liquid using a ‘New Calibration’ method, first press the ‘Zero ΔP Transducer’...
  • Page 27 6015650 Rev 0 4.2.5.3 Editing an existing Liquid After the liquids are entered, they can be edited by highlighting the liquid in the List of Liquids and click the Edit Liquid button If the calibration type was a ‘Calibrate from Factory Liquid’...

  • Page 28: Setting And Monitoring The Flow Rate In The Service Tool

    6015650 Rev 0 4.2.6 E RROR LAGS The Error flags tab allows the user to enable or disable the Error Flags used by the 2950. Figure 47: Setting Error Flags on the Error Flags tab These include: Over Flow: occurs if the flow rate goes 2% above the set point Over Pressure: occurs if the pressure of either pressure sensor goes above 360kPa Over Temperature: occurs if the liquid temperature goes above 45½°C Under Pressure: occurs if the inlet pressure sensor reads less than 90kPa...

  • Page 29: Analog Set Point Signal Over Tool Signal (Db9) Port

    6015650 Rev 0 When the Flow Setpoint is less than 1% of Full Scale, the setpoint drops to 0. Parameter Stream Flow Button Chart Names Checkboxes Checkboxes Chart Data Length Figure 49: The Data window Once the flow rate has been set, clicking the Stream Flow button will command the 2950 LFC to send data to the Service Tool.

  • Page 30: Serial Communication Over Tool Signal (Db) Port

    6015650 Rev 0 To monitor the flow rate, read the signal (depending upon how it was configured) between pins 8 & 9 on the Tool Connector. Additional information on configuring the flow monitor signal see section 4.2.4 and the electrical pin out can be found in section 3.3.3. To monitor the piezo voltage, read the signal (depending upon how it was configured) between pins 4 &...

  • Page 31: Status Lights

    6015650 Rev 0 The EtherCAT ERR light has the following meanings: Light Meaning • No Error • No Sync Error Single Flash • Synchronization Error • Distributed Clock PLL Error • EtherCAT Stack Local Error • Sync Manager Watchdog Double Flash •...

  • Page 32: Configurations And Compatibility

    6015650 Rev 0 ONFIGURATIONS AND OMPATIBILITY The Liquid Flow Controller was specifically designed for use with the 28XX PE series of vaporizers and is available in two different configurations, each having a variety of models are available to work over a variety of flow ranges. The 2950 series uses the piezo valve on the PE Turbo Vaporizers while the 2950-V series LFCs have a piezo valve on the...

  • Page 33: Maintenance And Service

    6015650 Rev 0 2. Set a suitable push gas pressure for the liquid supply, ideally below 200kPa. Less pressure is often more suitable than over pressurizing the liquid supply. Verify that there is flow when input is set at full scale (5V) and the rate is higher or equal to the desired high flow limit.

  • Page 34: Zeroing The Unit

    6015650 Rev 0 6.2 Z EROING THE Pressure Regulator 2950 dP-LFC Push Coriolis Precursor Meter Tank Source Ampule Push Gas Precursor Zero Button Vacuum Vacuum exhaust Pump out of Status Light Ampule building Scale Ampule Dry Dillution Scale Gas (N ) as needed Figure 51: Location of Piezo Valve...

  • Page 35: Troubleshooting

    6015650 Rev 0 Blinking Red means that it can’t measure flow. Blinking yellow, that means one of the following warning conditions occurred: Overflow, Over Pressure, Under Pressure, Over Temperature, Under Temperature, Temperature Change, Clog, or Failure to Re-Zero. To clear the errors stored in the unit, hold down the zero button for five seconds. 6.4 T ROUBLESHOOTING If the unit isn’t functioning properly please check the troubleshooting table and if necessary...
  • Page 36 6015650 Rev 0 Symptom Possible Problem Possible Solution Mode 1 – Digitial Control Mode 2 – Piezo Override to Fixed Voltage Mode 3 – Piezo Overide Closed • EtherCAT communications • Disconnect the EtherCAT cable or set the active LFC to Pre-Operational mode. Then change the Mode or Flow Setpoint •...

  • Page 37: Service

    6015650 Rev 0 6.5 S ERVICE should consulted persistent operating difficulties arise. The controller contains voltages as high as 150Vdc. Disconnect all power going into unit, before opening enclosure. 6.5.1 R EPLACING There is a sintered wire mesh disk (part Liquid Inlet number: 6014773) and kalrez o-ring (part number 6012401) that could be...

  • Page 38: Serial Command Set

    6015650 Rev 0 ERIAL OMMAND Table 7-1 Specifications for the Model 2950 (subject to change without notification) Serial Command String Format >> XXX.XXXXX XXX.XXXXX XXX.XXXXX {cr} {lf} Command Sentinal : describes whether the data was sent to the controller or sent from the controller >...
  • Page 39 6015650 Rev 0 Type Command Description Average Temperature measurement Mass Flowrate RS/WS Setpoint of Mass Flow Rate Voltage to the Piezo Valve Error/Warning Flags RD/WD Error/Warning Mask Start the LED’s blinking Calibrate the Zero Flow (Zero Button Pressed) RS/WS PID Mode RS/WS Send PID values to the Recipe Table RS/WS...
  • Page 40 6015650 Rev 0 PRZ • (Press Zero Button) This command is the equivalent to pressing the zero button and is used to zero the flow sensor. Shut off valves should be closed upstream and or downstream of the 2950 flow controller to insure that there is no flow going through it when the command is set.
  • Page 41 6015650 Rev 0 Command Sent: >WSFSP{sp}XXX.XXXXX{cr}{lf} Expected Response: <WSFSP{sp}XXX.XXXXX{cr}{lf} where XXX.XXXXXX is the mass flow rate Setpoint in grams per minute Reading the Setpoint Command Sent: >RSFSP{cr}{lf} Expected Response: <RSFSP{sp}XXX.XXXXX{cr}{lf} where XXX.XXXXXX is the mass flow rate Setpoint in grams per minute VPZ •...
  • Page 42 6015650 Rev 0 ZBP • (Zero Button Pressed) This command is the equivalent to pressing the zero button and is used to zero the flow sensor. Shut off valves should be closed upstream and or downstream of the 2950 flow controller to insure that there is no flow going through it when the command is set.
  • Page 43 6015650 Rev 0 LNB • (Liquid Number) This command writes or reads the index number of the liquid that the flow controller is using to determine a flow rate from a pressure drop measurement. Example: Command Sent: >WSLNB{sp}XX{cr}{lf} Expected Response: <WSLNB{sp}XX{cr}{lf} where is a two digit number between 01 and 03, where 01 is TEOS and numbers 02 and 03 are user defined.

  • Page 44: Ethercat Command Set

    6015650 Rev 0 where YYYYY is the year that the unit was manufactured VER • (Firmware Version) This command reads the version of firmware that is installed on the 2950 Flow Controller Example: Command Sent: >RSVER{cr}{lf} Expected Response: <RSVER{sp}X.XX{cr}{lf} where X.XX is the version of firmware that is installed on the 2950 Flow Controller CAT C...
  • Page 45 6015650 Rev 0 Index SubInd Name Type Bits Default Access 0x08 Subindex 008 0x09 Subindex 009 0x0A Subindex 00A 0x0B Subindex 00B 0x0C Subindex 00C 0x0D Subindex 00D 0x0E Subindex 00E 0x0F Subindex 00F 0x10 Subindex 010 #x1C00 Sync Manager Type 0x01 Subindex 001 0x02...
  • Page 46 6015650 Rev 0 Index SubInd Name Type Bits Default Access 0x01 End Point Real 0x02 Proportional Gain Real 0x03 Integral Gain Real 0x04 Derivative Gain Real 0x05 Bias/Offset Time (ms) Real 0x06 Bias/Offset Voltage Real 0x07 Dynamic Bias/Offset Offset Real #x2002 Zone 2 Config 0x01...
  • Page 47 6015650 Rev 0 Index SubInd Name Type Bits Default Access 0x05 Bias/Offset Time Real 0x06 Bias/Offset Voltage Real 0x07 Dynamic Bias/Offset Offset Real #x2008 Liquid Config 0x01 Liquid Name String(20) 0x02 Viscosity Real 0x03 Density Real 0x04 Selected Liquid #x2009 Setpoints 0x01 Piezo Voltage Override Setpoint...
  • Page 48 6015650 Rev 0 Index SubInd Name Type Bits Default Access 0x05 Valve Control Mode (fully closed) BOOL RO P 0x06 Valve Control Mode (position control) BOOL RO P 0x0D New Message in Diagnosis History BOOL RO P 0x0E TxPdoState BOOL RO P 0x0F Input Cycle Counter...
  • Page 49 6015650 Rev 0 Index SubInd Name Type Bits Default Access Number 0x0C Revision of Supported Liquid Table 0x0D Date of Factory Calibration 0x0E Date of Last Calibration 0x0F Cardinal Points Array Size 0x10 Cardinal Points #x900B Liquid Parameter Instance 2 DT900B 3744 0x01...
  • Page 50 6015650 Rev 0 Index SubInd Name Type Bits Default Access Liquid Calibration File Revision 0x0B Number 0x0C Revision of Supported Liquid Table 0x0D Date of Factory Calibration 0x0E Date of Last Calibration 0x0F Cardinal Points Array Size 0x10 Cardinal Points #x900E Liquid Parameter Instance 5 DT900E...
  • Page 51 6015650 Rev 0 Index SubInd Name Type Bits Default Access #xF501 Device Information DTF501 0x01 Manufacturer 0x02 Model 0x03 Serial #xF6F0 Input Latch Local Timestamp DTF6F0 0x01 Input Latch Local Timestamp #xF6F2 Input Latch ESC Timestamp (64-bit) DTF6F2 0x01 SubIndex 001 RO P #xF9F0 Manufacturer Serial Number...
  • Page 52 6015650 Rev 0 Index SubInd Name Type Bits Default Access 0x02 Status 0x03 Response Model 2950 Liquid Flow Controller Page 52 of 55...

  • Page 53: Appendixa Mechanical Diagram

    6015650 Rev 0 PPENDIX ECHANICAL IAGRAM Model 2950 Liquid Flow Controller Page 53 of 55...

  • Page 54: Appendix B Installation, Handling And Warranty

    6015650 Rev 0 PPENDIX NSTALLATION ANDLING AND ARRANTY ’ ECEIVER ESPONSIBILITY  Check packaging integrity for dents or cuts in box, evidence of dropping such as crushed corners etc. Document any damage that may have occurred during shipping prior to opening the shipping carton.

  • Page 55: Appendixc Korean Emc Statement

    6015650 Rev 0 ARRANTY NFORMATION Warranty MSP products are warranted to be free from defect in material or workmanship for a period of 12 months following shipment. Products must be returned to factory for warranty repair. MSP will repair or replace the product at no cost to the customer. However, the customer will bear the shipping costs.

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