Edwards SCU-350D Manuals

Manuals and User Guides for Edwards SCU-350D. We have 1 Edwards SCU-350D manual available for free PDF download: Instruction Manual

Edwards SCU-350D Instruction Manual

Edwards SCU-350D Instruction Manual (103 pages)

Brand: Edwards | Category: Control Unit | Size: 4 MB

Table of Contents

Table of Contents
5
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
13
- Warranty Period
  13
- Item Warranted
  13
- Disclaimer
  13
- Spare Parts
  14
High Voltage Device Caution Label
14
Safety Instruction Label
14
Caution Label
14
Labels
14
Connector Caution Label
15
Label Affixing Positions
16
Turbomolecular Pumps
17
- Cable Sets
  18
General Description
17
Control Unit
18
Technical Data
19
Control Unit Specifications
19
- Specifications
  20
Dimensions (MM)
20
External Appearance of SCU-350
22
Front Panel
23
Installation
23
Unpacking
23
Front Panel Functions
23
O TB1 Terminal Block
25
O TB2 Terminal Block
25
Rear Panel Function
25
- Rear Panel
  25
Top Panel
26
Top Panel Function
26
Left Side Panel
27
Precautions before Installation
28
- Operating Environment
  28
- Installation Area
  29
Example of Securing the SCU-350
30
Attaching the SCU-350 to a Rack
30
Cable Connection
31
- STP Connection Cable
  32
STP Pump Connection Cable
32
- Power Cable
  33
Power Cable (Without Plug)
33
Power Cable (with Plug)
34
How to Secure the Power Cable
36
Connecting to Semiconductor Equipment
37
- Connecting to Power
  37
- Emergency off Circuit (EMO Circuit)
  37
CON4 Connector
38
- 3.10.3 Serial Communication
  39
Remote Communication
38
- 3.10.1 Parallel Communication
  38
Tuning
40
- 3.11.2 Tuning Method
  40
LCD Display State
42
Confirmation Mode
42
- 3.12.1 Display Items
  42
- Confirmation Method
  42
Setting the Rated Speed
43
- 3.13.1 When Setting DSW-B No. 1 to on under Power-On State
  43
- 3.13.2 When Setting DSW-B No. 1 to on before Powering on
  44
LCD Message in Rated Speed Setting Mode
45
Operation
47
Before Starting the STP Pump
47
- Confirmation before Starting
  47
- Confirmation of Vacuum System
  47
Powering on
48
- Self Test
  48
How to Start/Stop the STP Pump
48
Manual Start/Stop the STP Pump
48
Remote Operation
51
- I/O TB2 Terminal Block
  51
- I/O TB1 Terminal Block
  54
Rated Contacts for Relays CR1
58
Rated Contacts for Relays CR4
58
- CON4 Connector (for SCU-350H/350HA Only)
  59
- 4.5.3.1 Remote Input Signals
  59
CON4 Connector (Remote Input Signal)
60
- 4.5.3.2 Remote Output Signals
  62
CON 4 Connector (Remote Output Signal)
63
- Remote Cables for CON4 (for SCU-350H/350HA Only)
  65
Rated Contacts for Relays CR4, 5, 6, 7, 8, 9 and
65
- Remote Setting
  66
- Starting/Stopping the STP Pump (I/O TB2)
  66
Starting/Stopping the STP Pump During Remote Operation (I/O TB2)
66
Reset Operation During Remote Operation (I/O TB2)
67
Starting/Stopping the STP Pump During Remote Operation (CON4)
67
- Starting the STP Pump after a Safety Function Operates (CON4)
  68
Reset Operation During Remote Operation (CON4)
68
Powering off
68
RS232 Port (CON3)
69
Serial Communication Protocol
69
Introduction
69
Setting up
69
- Hardware Connections
  69
O TB2 Terminal Block
70
O TB1 Terminal Block
70
- Pin Assignments
  71
- Serial Settings
  71
STP Control Unit Rear Panel
70
Pin Assignments of Serial Interface Cable (25Pin-25Pin)
71
Pin Assignments of Serial Interface Cable (25Pin-9Pin)
71
Serial Parameter
71
- Communication Mode
  72
Setting of DSW-B
72
- Recommended Items about Communication Cable Installation
  73
Grounding Example (both Ends Grounding)
73
Grounding Example (Single Point Grounding)
73
Serial Protocol on the STP
75
- SIM Replies to Queries or Commands
  76
Serial Protocol
75
- Overview
  75
- Sending a Command or Query to the SIM
  75
Command Syntax
76
- Queries
  77
- List of Queries
  77
- Description of Individual Queries
  77
Commands
79
- List of Commands
  79
- Description of Individual Commands
  79
- Error Message
  80
Data Formats
81
- Pump State
  81
- Alarm State
  81
- Alarm Type
  82
- SIM Control State
  83
- Parameters
  83
Maintenance
85
Safety Functions
85
- Power Failure
  85
- Operation after a Power Recovery
  86
States of LCD, Leds and REMOTE Output Signals
86
Troubleshooting When Powering on
94
Troubleshooting When Performing the STP Pump Start Operation
94
When Error Message Is Not Displayed on LCD
94
- Abnormalities When Powering on
  94
- Abnormalities When Performing Rotational Operation
  94
Displaying Past Abnormalities/Errors and Accumulated Running-Time
95
- Display Method
  95
Error Records
95
Maintenance and Inspection
96
- Cleaning
  96
- Maintenance
  97
Storage, Transportation and Disposal
99
Storage of the SCU-350
99
Transporting for Repair or Overhaul
99
Disposal
100
Service, Spares and Accessories
101
Introduction
101
Service
101
Spares
101
Power Cable
102
Accessories
102

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