Pfeiffer Vacuum EVR 116 Operating Instructions

A P A S S I O N
F O R P E R F E C T I O N
EVR 116
Control Valve
Operating Instructions

Product Identification

In all communications with Pfeiffer Vacuum, please specify
the information on the product nameplate. For convenient
reference copy that information into the nameplate replica
below.
Pfeiffer Vacuum, D-35614 Asslar
Type:
No:
F-No:
V W

Validity

This document applies to products with the part number
PF I39 931.
The part number (No) can be taken from the product
nameplate.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.

Intended Use

The EVR 116 Control Valve is used together with a control
unit (e.g. Pfeiffer Vacuum RVC 300 control unit) for con-
trolling the pressure in a vacuum system, either with a
variable gas flow (up-stream contol) or with a variable con-
ductance (down-stream control).
It must not be used with liquid gases.

Functional Principle

The Control Valve with integrated motor drive electronics,
which transforms the control signal into a defined valve
position, can be controlled
• with analog voltage,
• via integrated interface or
• via optional RS232 interface.

Safety

Symbols Used

DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and en-
vironmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.

Personnel Qualifications

Skilled personnel
All work described in this document may only be carried
out by persons who have suitable technical training and
the necessary experience or who have been instructed by
the end-user of the product.

General Safety Instructions

• Adhere to the applicable regulations and take the neces-
sary precautions for the process media used.
Consider possible reactions between the materials and
the process media.
• Adhere to the applicable regulations and take the neces-
sary precautions for all work you are going to do and con-
sider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.

Liability and Warranty

Pfeiffer Vacuum assumes no liability and the warranty be-
comes null and void if end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations
etc.) on the product
• use the product with accessories and options not listed in
the corresponding product documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Failures due to contamination or wear and tear, as well as
expendable parts (seals), are not covered by the warranty.

Technical Data

Connection flange DN 16 ISO-KF
Mounting orientation
1) → "Dimensions"
Gas Flow direction
-9
Tightness 1x10 mbar l/s
-8
Pressure range 1x10 mbar ... 2.5 bar (absolute)
2)
Flow rate
-6
With filter on inlet side 5x10 ... 1250 mbar l/s
With filter on inlet and
-6
Vacuum side 5x10 ... 1000 mbar l/s
3
Dead volume 0.03 cm
Supply
Operating voltage
24 VDC (±10%)
Power consumption
12 VA
Current consump-
3)
tion
500 mA, 20 ... 30 mA rest current
Control
→ separate document
RVC 300
Control voltage
0 ... +10 VDC
(→ "Electrical Connection")
Degree of protection IP 40
Stroke (needle) 11.5 mm
Closing / opening time 3 / 4 s
Integrated sensors valve open
valve closed
valve needle in movement
Ambient temperature 5 ... 40 °C
Materials
Valve housing stainless steel 1.4435
Valve needle stainless steel 1.4301
Filter stainless steel 1.4404
Seals FPM
Dosing sleeve fluorplastomer
Weight 0.75 kg
1)
The recommended mounting orientation is with the valve seat
in direction to the vacuum chamber
2) For air with Δp = 1 bar
3)
Pre-fusing 630 mAT recommended
Dimensions [mm]
DN 16 ISO-KF
Electrical Connection
Protective lid e
Gas flow diagram
The gas flow curve corresponds to a mean value for air with
a pressure difference of 1 bar.
Gas flow [mbar l/s]
1000
100
10
1
1E-1
1E-2
1E-3
1E-4
1E-5
1E-6
0 1 2 3 4 5 6
any
Gas flow direction
Valve seat site
7 8 9 10
U [V]
CONTROL