Newport GTS-V Series User Manual

Newport GTS-V Series User Manual

High precision vertical linear stage

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GTS-V
High Precision
Vertical Linear Stages
U
'
M
SER
S
ANUAL

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Summary of Contents for Newport GTS-V Series

  • Page 1 GTS-V High Precision Vertical Linear Stages ’ ANUAL...
  • Page 2: Warranty

    High Precision Vertical Linear Stages Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion.
  • Page 3: Table Of Contents

    .................5 4.1 DC-Servo Drive Version ................5 4.2 Sensor Position..................6 4.3 Feedback Signal Position .................6 4.4 Pinouts......................7 4.5 MCAB-3 Cable ....................7 — Connection to Newport Controllers ........8 5.1 Warnings on Controllers ................8 5.2 Connection....................9 5.3 Cables ......................9 5.4 MCAB-3 Cable ....................9 —...
  • Page 4 GTS-V High Precision Vertical Linear Stages — Stage Installation ..............13 8.1 Unpacking ....................13 8.2 Mounting Patterns ..................13 — Maintenance ................14 9.1 Maintenance ....................14 9.2 Repair .......................14 9.3 Calibration ....................14 Service Form ......................15 EDH0222En2010 — 10/19...
  • Page 5: Ec Declaration Of Conformity

    Manufacturers Name: MICRO-CONTROLE Spectra-Physics S.A.S Importer's Name & Location: / Equipment Type/Description: GTS-V Series - High Precision Vertical Linear Stage Model Number(s) : GTS30-V; GTS70-V & GTS70-VCC MKS confirms that, with respect to the products listed above, it believes it is in conformity with the selected European Union harmonization legislation.
  • Page 6: Definitions And Symbols

    GTS-V High Precision Vertical Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur. General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document.
  • Page 7: Warnings

    Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous. WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage.
  • Page 8: Caution

    When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism. CAUTION Contact your Newport service facility to request cleaning and specification control every year. viii...
  • Page 9: Introduction

    GTS-V High Precision Vertical Linear Stages High Precision Vertical Linear Stages GTS-V —Introduction This manual provides operating instructions for the GTS-V precision vertical linear stage. GTS70V & GTS30V stages. RECOMMENDATION We recommend you read carefully the chapter “Connection to electronics” before using a GTS-V stage. ILS250, GTS30V and URS100 stages in XZθz configuration.
  • Page 10: Description

    100 nm minimum incremental motion with all Newport motion controllers and drivers. Precision position feedback is provided by an optical scale with 50 nm resolution for GTS30V and GTS70V.
  • Page 11: Characteristics

    168 points. Guaranteed and Typical Specifications Guaranteed maximum performance values are verified per Newport's A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com EDH0222En2010 — 10/19...
  • Page 12: Mechanical Specifications

    GTS-V High Precision Vertical Linear Stages Mechanical Specifications GTS30V GTS70VCC GTS70V Rotary Encoder Linear Encoder Travel Range (mm) Minimum Incremental Motion (µm) 0.25 Bi-directional Repeatability (µm) ±0.1 ±0.5 ±0.2 Accuracy (µm) ±0.75 ±1.75 ±1 Maximum Speed (mm/s) Normal Load (N) 40/70 Straightness (µm) ±0.75...
  • Page 13: Stage Weights

    GTS-V High Precision Vertical Linear Stages Stage Weights The weights shown below do not include the weight of the cable. Weight [lb (kg)] GTS30V 7.3 (3.3) GTS70V & GTS70VCC 9.6 (4.35) 3-meter MCAB-3 Cable 1.32 (0.6) —Drive and Motor DC-Servo Drive Version The GTS30V and GTS70V stages are equipped with a DC-motor and a metal optical encoder.
  • Page 14: Sensor Position

    GTS30V/GTS70V and optical disk and encoder head for GTS70VCC. When the carriage moves, the encoder head generates square signals in quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25 connector. NEWPORT CONNECTOR PIN # STAGE SUD-D25 OR SUB-D15...
  • Page 15: Pinouts

    GTS-V High Precision Vertical Linear Stages Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486. Pinouts The pinout diagram for the GTSV stage SUB-D25M connector is shown below. IMS-V N.C. N.C.
  • Page 16: Connection To Newport Controllers

    GTS-V High Precision Vertical Linear Stages —Connection to Newport Controllers Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions.
  • Page 17: Connection

    (ground continuity provided by the cable). For applications where the standard 3-meter cable (MCAB-3) included with your stage is not adequate, Newport offers longer length cables designed to nsure the integrity of your positioning application. Please contact Newport if longer cables are required for your application.
  • Page 18: Connection To Non-Newport Electronics

    GTS-V High Precision Vertical Linear Stages —Connection to Non-Newport Electronics Connections WARNING Newport is not responsible for malfunction or damage of GTS-V stages when used with non-Newport controllers. WARNING “ ” Newport guarantees compliance of GTS-V stages only if used with Newport cables and controllers.
  • Page 19: Dimensions

    GTS-V High Precision Vertical Linear Stages —Dimensions GTS30V Stage 4 HOLES M6 THD 4 HOLES M4 THD SUB-D25M ON SQR 3.97 (100.8) ON 2.95 3.94 (75 100) DEPTH: .39 (10) CONNECTOR DEPTH: .31 (8) 120° 4 HOLES M4 THD ON 3.94 2.95 (100 DEPTH: .31 (8) 5 HOLES M4 THD...
  • Page 20: Gts70V Stages

    GTS-V High Precision Vertical Linear Stages GTS70V/GTS70VCC Stages 3.94 (100) 8 HOLES M6 THD 2.95 8 HOLES M4 THD DEPTH: .31 (8) (75) DEPTH: .31 (8) SQR 3.97 2.95 3.94 (100.8) 2.95 (75) (100) (75) 5° 6 HOLES M4 THD 1 HOLE ø.24 (6) ON ø3.62 (92) DEPTH: .24 (6)
  • Page 21: Stage Installation

    GTS-V High Precision Vertical Linear Stages —Stage Installation Unpacking GTS-V stages are delivered in packaging that is designed for safe transport. It is recommended to carefully lift and remove the stage from packaging. Packaging can be kept and used for possible maintenance return. Mounting Patterns GTSV stages use M6 and M4 patterns for mounting.
  • Page 22: Maintenance

    CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty. Calibration CAUTION It is recommended to return your GTS-V stage to Newport once a year for recalibration to its original specifications. EDH0222En2010 — 10/19...
  • Page 23: Service Form

    Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): EDH0222En2010 —...
  • Page 24 Visit Newport Online at: www.newport.com North America & Asia Europe Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 9, rue du Bois Sauvage Irvine, CA 92606, USA 91055 Évry CEDEX France Sales Sales & Technical Support Tel.: (800) 222-6440 Tel.: +33 (0)1.60.91.68.68 e-mail: sales@newport.com...

This manual is also suitable for:

Gts30-vGts70-vGts70-vcc

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