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Summary of Contents for Newport FMS Series
- Page 1 FMS Series Linear Metrology Stages ’ ANUAL...
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Page 2: Warranty
Linear Metrology Stages Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. -
Page 3: Table Of Contents
4.3 Sensor Position..................7 4.4 Feedback Signal Position .................7 4.5 Pinouts......................8 4.6 MCAB-3 Cable ....................9 4.7 MSCABLE-3 Cable..................9 4.8 MSCABLE-10 Cable..................9 — Connection to Newport Controllers ......10 5.1 Warnings on Controllers ................10 5.2 Connection....................11 5.3 Cables .......................11 5.4 MSCABLE-3 Cable..................12 5.5 MCAB-3 Cable ..................12 —... - Page 4 FMS Series Linear Metrology Stages — Maintenance ................15 8.1 Maintenance ....................15 8.2 Repair .......................15 8.3 Calibration ....................15 Service Form ......................17 EDH0267En1041 — 12/18...
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Page 5: Ec Declaration Of Conformity
FMS Series Linear Metrology Stages EC Declaration of Conformity FMS Series EU Declaration of Conformity following Annex II-1A of Directive 2006/42/EC on machinery The manufacturer: MICRO-CONTROLE Spectra-Physics, 9, rue du Bois Sauvage 91055 Évry CEDEX, FRANCE Hereby declares that the machinery: Description: "... -
Page 6: Definitions And Symbols
Note indicates additional information that must be considered by the user or operator. European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations. -
Page 7: Warnings
Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous. WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage. -
Page 8: Caution
When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism. CAUTION Contact your Newport service facility to request cleaning and specification control every year. viii... -
Page 9: Introduction
FMS Series Linear Metrology Stages Linear Metrology Stages FMS Series —Introduction This manual provides operating instructions for the stage that you have purchased in the FMS Series: • FMS-PP • FMS-CC • FMS-PPHA 3 travel ranges of FMS stages. RECOMMENDATION We recommend you read carefully the chapter “Connection to... -
Page 10: Description
FMS Series Linear Metrology Stages —Description The FMS series of precision linear stages is Newport’s latest innovation in high precision motion control technology. It addresses the unique needs of surface metrology applications for smooth motion, low noise, high straightness and flatness. The FMS linear stages run highly flat and straight and combined with steel construction, enable higher accuracy performance. -
Page 11: Characteristics
168 points. Guaranteed and Typical Specifications Guaranteed maximum performance values are verified per Newport's A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com EDH0267En1041 — 12/18... -
Page 12: Mechanical Specifications
FMS Series Linear Metrology Stages Mechanical Specifications FMC-CC FMC-PP FMC-PPHA Travel Range (mm) 100; 200; 300 Minimum Incremental Motion (µm) Uni-directional Repeatability, ±0.40 (±0.75) ±0.35 (±0.75) ±0.06 (±0.10) Typical (Guaranteed) (µm) Bi-directional Repeatability ±0.8 (±1.5) ±1.3 (±2.25) ±0.15 (±0.25) Typical (Guaranteed) (µm) -
Page 13: Load Characteristics And Stiffness
FMS Series Linear Metrology Stages Load Characteristics and Stiffness Cz, Normal center load capacity on bearings 150 N ±Cx, Axial load capacity <30 N kax, Compliance in roll 3 µrad/Nm k α k α z kay, Compliance in pitch 2 µrad/Nm –... -
Page 14: Drives And Motors
FMS Series Linear Metrology Stages —Drives and Motors Stepper Drive Versions FMS-PP: This version is not equipped with an encoder. The micro-step is equivalent to 1/100 of the full-step. FMS-PPHA: This version is equipped with a steel scale encoder. For these stages, the micro-step is equivalent to 1/200 of the full-step. -
Page 15: Sensor Position
FMS Series Linear Metrology Stages Sensor Position 0.5 mm 0.5 mm Home Position (Origin) near the – end-of-run – EOR Limit FMSCC: 2 mm 1 mm FMSPPHA: 25 mm + EOR Limit Mechanical Zero Index Pulse Index Pulse Negative Software Limit... -
Page 16: Pinouts
“Encoder” and “Index Pulse” are “differential pair” (type RS-422) type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486. Pinouts The pinout diagrams for the FMS stages SUB-D connector are shown below. -
Page 17: Mcab-3 Cable
FMS Series Linear Metrology Stages MCAB-3 Cable This cable is supplied with each FMS-PPHA stages. SUB-D25M SUB-D25F CONNECTOR CONNECTOR (0.6 MM ) WHITE 1 (AWG20) WHITE 1 (0.6 MM ) WHITE 2 (AWG20) WHITE 2 (0.6 MM ) WHITE 3 (AWG20) WHITE 3 (0.6 MM... -
Page 18: Connection To Newport Controllers
FMS Series Linear Metrology Stages —Connection to Newport Controllers NOTE Visit www.newport.com for compatible Newport controllers. Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. -
Page 19: Connection
These stages are ESP compatible. Enhanced System Performance is Newport's exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters. This ensures that the user can operate the motion system quickly and safely. -
Page 20: Mscable-3 Cable
(ground continuity provided by the cable). For applications where the standard 3-meter cable (MSCABLE-3) included with your stage is not adequate, Newport offers a 10-m longer length cable (MSCABLE-10) designed to ensure the integrity of your positioning application. -
Page 21: Connection To Non-Newport Electronics
Linear Metrology Stages For applications where the standard 3-meter cable (MCAB-3) included with your stage is not adequate, Newport offers longer length cables designed to ensure the integrity of your positioning application. These cables are specially shielded and terminated with Newport’s standard SUB-D25 connectors. -
Page 22: Dimensions
FMS Series Linear Metrology Stages —Dimensions EDH0267En1041 — 12/18... -
Page 23: Maintenance
CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty. Calibration CAUTION It is recommended to return your FMS stage to Newport once a year for recalibration to its original specifications. EDH0267En1041 — 12/18... - Page 24 FMS Series Linear Metrology Stages EDH0267En1041 — 12/18...
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Page 25: Service Form
Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): EDH0267En1041 —... - Page 26 Visit Newport Online at: www.newport.com North America & Asia Europe Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 9, rue du Bois Sauvage Irvine, CA 92606, USA 91055 Évry CEDEX France Sales Sales & Technical Support Tel.: (800) 222-6440 Tel.: +33 (0)1.60.91.68.68 e-mail: sales@newport.com...
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