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Summary of Contents for Newport RV
- Page 1 (217) 352-9330 | Click HERE Find the Newport RV120PP at our website:...
- Page 2 High-Performance Precision Rotation Stages ’ ANUAL www.newport.com Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 3: Warranty
This warranty is in lieu of all other warranties, expressed or implied, including any implied warranty of merchantability or fitness for a particular use. Newport Corporation shall not be liable for any indirect, special, or consequential damages. No part of this manual may be reproduced or copied without the prior writ- ten approval of Newport Corporation. -
Page 4: Table Of Contents
— Characteristics ................3 3.1 Definitions ....................4 3.2 Mechanical Specifications................5 3.3 Load Specifications Definitions ...............6 3.4 Specifications for RV Rotation Stages with Vacuum Preparation..7 3.5 Load Specifications ...................8 3.6 Maximum Inertia Tables................9 3.7 Torque (Mz)/Speed .................10 3.8 Working Reliability and Safety...............14 3.9 Rotation Stage Weights ................14... - Page 5 Safety: EIC 1010-1, safety standards for measurement, lab and control equipment. Newport Corporation shall not be liable for damages when using the product: • Modification of the product. • Using modified connector, or modified or not supplied cables. • Connecting this product to non-CE equipment.
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Page 6: Warnings
Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous. WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage. -
Page 7: Cautions
To reach the specifications stated for RC, rotation stages must be fixed on a plane surface with a flatness <5 µm. CAUTION Contact your Newport service facility to request cleaning and specification control every year. EDH0168En1030 – 02/03 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 8: Introduction
RV Series rotation stages. RECOMMENDATION We recommend you read carefully the chapter “Connection to electronics” before using the RV rotation stage. EDH0168En1030 – 02/03 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 9: Description
Hexagon socket for manual movement of the mobile core At the end of the drive screw in RV stages (side opposite motor), a hexagon socket is given for manual movement of the mobile core, using an “Allen” wrench. EDH0168En1030 – 02/03... -
Page 10: Design Details
Do not attempt to move the mobile core manually with the rotation stage switched on. For optimal performance, we recommend the use of our ESP or MM series motion controllers. The RV Series rotation stages are supplied with a 3-meter cable for connection to our motion controllers. Design Details Base Material... -
Page 11: Characteristics
Linear errors include: cosine errors, inaccuracy of screw or linear scale pitch, angular deviation at the measuring point (Abbe error) and thermal expansion effect. All Newport motion electronics can compensate for linear accuracy errors by step encoder correction. The relation between absolute accuracy and on-axis accuracy is as follow:... -
Page 12: Mechanical Specifications
High-Performance Precision Rotation Stages The testing of on-axis accuracy, repeatability, and reversal error are made systematically with our test equipment in an air-conditioned room (20 °C ±1 °C Each rotation stage is tested with a precision optical encoder. A linear cycle with 21 measures on the travel and 4 cycles in each direction gives a total of 164 points. -
Page 13: Load Specifications Definitions
In order to be compliant with the specifications stated for RV stages, the load-bearing surface must have a plane value of less than 5 µm. -
Page 14: Specifications For Rv Rotation Stages With Vacuum Preparation
• Kinematic chain. • Motor. • Use of the stage (speed). In order to obtain the best performance from your RV rotation stage, see the stage use diagrams given below, for each version (see Chapter 3.7). Torque Torque/Speed Curve of RV Series Stages (N.m) -
Page 15: Load Specifications
High-Performance Precision Rotation Stages Load Specifications RV80 RV120 RV160 RV240 RV350 1800 2700 4000 6500 (mm) (mm) HAT & HAHLT Versions. – 3-point @ 120° mounting 0.25 kα (µrad/N.m) 5-point mounting on a flatness plane <5 µm Horizontal Load Characteristics where: : Off-center load, <... -
Page 16: Maximum Inertia Tables
1 kg placed at a distance of 1 m from the rotation axis). Example of Inertia Value A load of 20 kg must be placed at 240 mm from the rotation axis of the RV rotation stage. The corresponding inertia is: 0.24 0.24 = 1.152 kg.m... -
Page 17: Torque (Mz)/Speed
High-Performance Precision Rotation Stages Torque (Mz)/Speed RV80 Rotation Stages Torque (N.m) RV80PE RV80CCHL RV80PP RV80CC Speed (°/sec) Torque/Speed curve of RV80. max. max. (N.m) (°/sec) (N.m) (°/sec) RV80PP RV80PE RV80CC RV80CCHL with: : Maximum torque at maximum allowed speed. : Maximum torque. max. - Page 18 High-Performance Precision Rotation Stages max. max. (N.m) (°/sec) (N.m) (°/sec) RV120PP RV120PE RV120CC RV120CCHL and RV120HAT — and RV120HAHLT with: : Maximum torque at maximum allowed speed. : Maximum torque. max. : Maximum speed at maximum torque. : Maximum allowed speed. max.
- Page 19 High-Performance Precision Rotation Stages RV240 Rotation Stages Torque (N.m) RV240PE RV240CCHL RV240HAHLT RV240PP RV240CC RV240HAT Speed (°/sec) Torque/Speed curve of RV240. max. max. (N.m) (°/sec) (N.m) (°/sec) RV240PP RV240PE RV240CC RV240CCHL and RV240HAT — and RV240HAHLT with: : Maximum torque at maximum allowed speed. : Maximum torque.
- Page 20 High-Performance Precision Rotation Stages RV350 Rotation Stages Torque (N.m) RV350PE RV350CCHL RV350HAHLT RV350PP RV350CC RV350HAT Speed (°/sec) Torque/Speed curve of RV350. max. max. (N.m) (°/sec) (N.m) (°/sec) RV350PP RV350PE RV350CC RV350CCHL and RV350HAT — and RV350HAHLT with: : Maximum torque at maximum allowed speed. : Maximum torque.
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Page 21: Working Reliability And Safety
Working Reliability and Safety The optimum reliability of the components of the stage was ensured right from the initial design phases of the RV rotation stages. CETIM participated in this study and ensured the conformity of the approach used. Several tests were conducted in order to guarantee the safety of working with a minimum level of maintenance. - Page 22 High-Performance Precision Rotation Stages NOTE RV80PEHL and RVPPHL rotation stage are primarily designed for appli- cations requiring the direct positioning accuracy to be maintained to within the stage’s mechanical resolution when power is switched off, such as operation in vacuum (10 -6 Torr vacuum preparation on request). In this case, specifications for speed (°/sec), load capacity (Cz) and torque (Mz) have to be divided by two.
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Page 23: Dc-Servo Drive Versions
High-Performance Precision Rotation Stages DC-Servo Drive Versions DC-motor-driven stages are offered in four variations: • Two high-speed DC-servo versions (CC and HAT) enabling speeds up to 80 °/sec. The CCHAT features a high-resolution direct reading encoder and tachometer for superior repeatability, position stability and speed regulation. -
Page 24: Manual Drive
High-Performance Precision Rotation Stages Manual Drive The RV Series rotation stages are also available with manual drive (MS) and rotary encoder providing 0.001° resolution. The manual knob permits a rotation of 2 °/rev. (RV80MS) or 4 °/rev. (RV120MS to RV350MS). -
Page 25: Motor
High-Performance Precision Rotation Stages Motor Stepper Motor Characteristics Angle by Step Current Resistance Inductance Newport Motor (°) (Ω) (mH) Utilization UE31PP 0.56 Full-Step UE41PP Full-Step or Mini-Step UE63PP 1.16 Mini-step Command Signals for Stepper Motors Command Signals Command Signals UE31PP... -
Page 26: Dc-Motor Characteristics
High-Performance Precision Rotation Stages DC-Motor Characteristics Mechanical Power Nominal Voltage Armature Resistance Tachometer Motor (Ω) (V/Krpm) UE31CC – UE404S – UE404S-T 18.6 3 (±10%) UE511S – UE511S-T 7 (±10%) Command Signals for DC-Motors + Motor + Motor + Tachometer + Tachometer –... -
Page 27: Sensor Position
Use appropriate TTL type receivers. Inhibition of Limit Switches In standard, except for HAT & HAHLT versions, RV rotation stages are equipped with limit switches (limited to ±170°) for protecting the equipment. A switch enables inhibiting the limit switches in order to use the rotation stage over 360°... -
Page 28: Feedback Signal Position
The incremental sensor operates following the photoelectric measurement principle, with a disk including slides. When the sensor shaft turns, the sensor generates square signals in quadrature, sent to pins #19, #20, #23 and #24 of the 25-pin Sub-D connector. Newport User Stage Encoder Phase A... -
Page 29: Pinouts
High-Performance Precision Rotation Stages Pinouts The 25-pin Sub-D connection for the RV rotation stages is given in the following table: UE31PP UE31CC UE404S-T Manual UE41PP UE404S UE511S-T Versions UE63PP UE511S Phase 1 N.C. + Tachometer N.C. Phase 1 N.C. + Tachometer N.C. -
Page 30: Connection To Newport Controllers
High-Performance Precision Rotation Stages Connection to Newport Controllers Warnings on controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions. -
Page 31: Connection
Vacuum compatible rotation stages have to be configured if running with an ESP series controller. Cables All our RV rotation stages are delivered equipped with a 3-meter cable with 25-pin Sub-D connectors so they can be directly connected to our controllers/drivers of MM or ESP series. - Page 32 High-Performance Precision Rotation Stages For applications where the standard 3-meter cable (MMCABLE-3) included with your rotation stage is not adequate, Newport offers longer length cables designed to ensure the integrity of your positioning application. These cables are specially shielded and terminated with Newport’s standard 25-pin sub-D connectors.
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Page 33: Connection To Non-Newport Controllers
“Encoder” and “Index Pulse” are “differential pair” type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486. EDH0168En1030 – 02/03... -
Page 34: Mounting
High-Performance Precision Rotation Stages Mounting WARNING Before operating the RV rotation stage, you must fix it in one of the following ways: • Directly on the rectified working surface. • To another stage, directly or indirectly using an assembly interface. -
Page 35: Vertical Rotation Stages
Vertical Rotation Stages (Horizontal Rotation Axis) The RV rotation stage is fixed on a vertical surface. The external flange has various holes provided for fastening. This type of stage is fixed using the same fastening methods as for the horizontal rotation stage (3 or 5 fastening points). -
Page 36: Dimensions
High-Performance Precision Rotation Stages Dimensions RV80 Rotations Stages EDH0168En1030 – 02/03 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 37: Rv120 To Rv350 Rotations Stages
High-Performance Precision Rotation Stages RV120 to RV350 Rotations Stages Rotation Stages, Direct Motor Model Dimension (mm) Model CC CCHL RV120 RV120 251.5 251.5 251.5 301.5 45.5 115.5 33.5 RV160 RV160 264 81.5 18.5 14.5 RV240 RV240 289 119.5 20.3 16.6 73.5 RV350 RV350 315... -
Page 38: Rvhat & Rvhahlt Versions
High-Performance Precision Rotation Stages RVHA & RVHAT Versions Rotation Stages, Direct Motor Model Dimension (mm) HAHLT Model RV160 301.5 301.5 45.5 33.5 RV120 115.5 RV160 RV160 81.5 18.5 14.5 RV240 73.5 RV240 132.5 119.5 20.3 16.6 RV350 RV350 331.5 17.5 21.3 17.3 Rotation Stages, Folded Motor... -
Page 39: Rvms Versions
33.5 10.0 Accessories: EQ120 & EQ180 Brackets Newport's EQ120 and EQ180 brackets (to order separately) are ideal for mounting our ILS or IMS Series of linear stages and RV80 to RV160 rotation stages for stable and stiff muti-axis positioning systems. - Page 40 High-Performance Precision Rotation Stages EQ120 Bracket EQ180 Bracket INTERFACE PLATE 17.5° 42.5° 4 HOLES ø 6.6 ON SQUARE 5.91 (150) 9 HOLES M5 THD, DEPTH: .47 (12) ø 6.85 (174) 7.48 6.69 (190) (170) ø 2.36 INTERFACE PLATE (60) 4 HOLES ø .28 (7) 25°...
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Page 41: Maintenance
It is recommended to return your rotation stage to our After Sales Service after every 2000 hours of use for lubrication. If your RV rotation stage is mounted on a workstation and cannot be easily dismantled, please contact our After Sales Service for further instructions. -
Page 42: Service Form
Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): EDH0168En1030 –... - Page 43 High-Performance Precision Rotation Stages CE Declaration of Conformity We declare that the accompanying product, identified with the “ ” mark, meets all relevant requirements of Directive: • 73/23/CEE, for Low Voltage Compatibility. • 89/336/EEC for Electromagnetic Compatibility. Compliance was demonstrated to the following specifications: EMISSION: Radiated and Conducted Emission in accordance with relative prescription to the EMC, NF EN61326-1: Standards...
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