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Related Manuals for Newport GTS30V
Summary of Contents for Newport GTS30V
- Page 1 GTS30V High Precision Vertical Linear Stage ’ ANUAL...
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Page 2: Warranty
High Precision Vertical Linear Stage Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. -
Page 3: Table Of Contents
.................5 4.1 DC-Servo Drive Version ................5 4.2 Sensor Position..................6 4.3 Feedback Signal Position .................6 4.4 Pinouts......................7 4.5 MCAB-3 Cable ....................7 — Connection to Newport Controllers ........8 5.1 Warnings on Controllers ................8 5.2 Connection....................9 5.3 Cables ......................9 5.4 MCAB-3 Cable ....................9 —... - Page 4 GTS30V High Precision Vertical Linear Stage — Maintenance ................12 8.1 Maintenance ....................12 8.2 Repair .......................12 8.3 Calibration ....................12 Service Form ......................13 EDH0222En1041 — 12/18...
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Page 5: Ec Declaration Of Conformity
MICRO-CONTROLE Spectra-Physics, 9, rue du bois sauvage F-91055 Evry FRANCE Hereby declares that the machinery: Description: " GTS30V" Function: High Precision Vertical Linear Stage Models: GTS30V – the technical file of which was compiled by: Mr Hervé LE COINTE , Quality Director, MICRO-CONTROLE Spectra-Physics, Zone Industrielle - B.P.29... -
Page 6: Definitions And Symbols
Note indicates additional information that must be considered by the user or operator. European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations. -
Page 7: Warnings
Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous. WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage. -
Page 8: Caution
When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism. CAUTION Contact your Newport service facility to request cleaning and specification control every year. viii... -
Page 9: Introduction
GTS30V High Precision Vertical Linear Stage High Precision Vertical Linear Stage GTS30V —Introduction This manual provides operating instructions for the GTS30V precision vertical linear stage. GTS30V stage. RECOMMENDATION We recommend you read carefully the chapter “Connection to electronics” before using the GTS30V stage. -
Page 10: Description
GTS30V High Precision Vertical Linear Stage —Description The GTS30V is the ideal foundation for applications that require long travel vertical motion of horizontally oriented samples. Its low profile and high-precision motion capabilities make this stage an excellent choice for applications such as semiconductor wafer inspection, nanotechnology, automated device alignment, metrology, and quality control processes. -
Page 11: Characteristics
168 points. Guaranteed and Typical Specifications Guaranteed maximum performance values are verified per Newport's A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com EDH0222En1041 — 12/18... -
Page 12: Mechanical Specifications
20,000 hours at 25% load and with a 30% duty cycle Shown are peak to peak, guaranteed specifications or ±half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit www.newport.com for the Motion Control Metrology Primer. -
Page 13: Stage Weights
Weight [lb (kg)] GTS30V 7.3 (3.3) 3-meter MCAB-3 Cable 1.32 (0.6) —Drive and Motor DC-Servo Drive Version The GTS30V stage is equipped with a DC-motor and a metal optical scale. DC-Motor Performance Specifications and Characteristics Resolution Speed Nominal Max RMS Max. Peak... -
Page 14: Sensor Position
GTS30V High Precision Vertical Linear Stage Sensor Position Home Position (Origin) at 5 mm from the bottom end of travel – EOR Limit + EOR Limit Mechanical Zero Index Pulse Index Pulse Stage Travel Range Motion Direction + End-of-Run and Mechanical Zero are 5 V open collector type. -
Page 15: Pinouts
Encoder Phase A Encoder Phase B +5 V Encoder Phase /A Encoder Phase /B Index Pulse /I MCAB-3 Cable A 3-meter MCAB-3 cable is supplied with each GTS30V stage (see section 5.5: ”Cables”). SUB-D25M SUB-D25F CONNECTOR CONNECTOR (0.6 MM ) WHITE 1 (AWG20) WHITE 1 (0.6 MM... -
Page 16: Connection To Newport Controllers
GTS30V High Precision Vertical Linear Stage —Connection to Newport Controllers Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions. -
Page 17: Connection
This ensures that the user can operate the motion system quickly and safely. Cables The GTS30V stage is delivered with a MCAB-3 3-meter cable with a SUB-D25M connector for direct connection to Newport Controllers. MCAB-3 Cable 2.28 (58) -
Page 18: Connection To Non-Newport Electronics
GTS30V High Precision Vertical Linear Stage —Connection to Non-Newport Electronics Connections WARNING Newport is not responsible for malfunction or damage of GTS30V stages when used with non-Newport controllers. WARNING “ ” Newport guarantees compliance of GTS30V stages only if used with Newport cables and controllers. -
Page 19: Dimensions
-.20 (130 4 HOLES ø.31 (Ø 7.8) (10) SQR 3.97 MANUAL KNOB (100.8) SQR 4.53 4.63 (115) (117.5) A compact XYZ assembly consisting of a GTS150 linear stage, a GTS70 linear stage and a GTS30V vertical stage. EDH0222En1041 — 12/18... - Page 20 RECOMMENDATION It is recommended to return the stage to Newport for re-lubrication after 2000 hours of use. If the GTS30V stage is mounted on a workstation and cannot be easily removed, please contact Newport's After Sales Service for further instructions.
- Page 21 Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): EDH0222En1041 —...
- Page 22 Visit Newport Online at: www.newport.com North America & Asia Europe Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 9, rue du Bois Sauvage Irvine, CA 92606, USA 91055 Évry CEDEX France Sales Sales & Technical Support Tel.: (800) 222-6440 Tel.: +33 (0)1.60.91.68.68 e-mail: sales@newport.com...
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