SMC Networks PF2M7 Series Manual page 6

Flow Switch Flow Rate Variations
Applicable
Series
PFMV
Series
Applicable
Compatibility with the
PFG300 digital flow monitor
PF2M7(-L)
Dry air
—
CO
PFMB
Dry air
PFG300
PFMC
Dry air
PFG300
PF2A
—
PF3A7 H
PFG300
5
Detection
fluid method
−3
Thermal
Dry air
type
N
2
(MEMS)
−3
Smallest
Detection
settable
fluid
method 0.02 0.1 0.3 0.5
increment
0.01 0.05
0.001
0.01
L/min
0.02
0.01
0.05
L/min
Thermal
N
2
type
0.1
Ar
(MEMS)
2
0.1
L/min
Thermal
type
1
(MEMS)
L/min
N
2
Bypass
flow type
Thermal
type
(MEMS) 1
N L/min
2
Bypass
flow type
0.1
L/min
0.5
L/min
Thermal
Air 1
type
L/min
N
2
(Thermistor)
2
L/min
5
L/min
2
Thermal
L/min
type
(Platinum
Air 5
sensor)
L/min
N
2
Bypass
10
flow type
L/min
Rated flow range [L/min]
−2 −1 −0.5
−0.5
−1
Rated flow range [L/min]
1 2 5 10 20 25 50 100 150 200 300
1
2
5
10
25
0.3
50
0.5
1 100
200
2
5
10
20
5
10
20
1 10
5 50
10 100
20 200
50
30
60
120
0 0.5 1 2
0 0.5
0 1
0
0.5
1
500 600 1000 2000 3000 6000 12000
500
1000
2000
500
1000
2000
500
3000
6000
3
3
3
12000