Table Of Contents - Hamamatsu Photonics EX-mini L12530 User Manual

Compact excimer lamp light source

Table of Contents

1. Safety precautions ................................................................................................ 3

1-1 Warning symbols and signal words ...................................................................... 3

1-2 Precautions .......................................................................................................... 4

1-3 Warning label position .......................................................................................... 7

2. Product overview .................................................................................................. 8

3. Package contents ................................................................................................. 8

4. Product specifications ........................................................................................... 8

4-1 General ratings .................................................................................................... 8

4-2 Optical characteristics .......................................................................................... 8

5. Part names and functions ..................................................................................... 9

5-1 Front panel ........................................................................................................... 9

5-2 Rear panel ......................................................................................................... 10

5-3 Side panels ......................................................................................................... 11

5-4 Sample chamber ................................................................................................ 12

6. Making the connections ...................................................................................... 13

6-1 Connecting an exhaust duct .............................................................................. 13

6-2 Connecting the power cable .............................................................................. 13

6-3 Connecting an air tube to the gas inlet port ....................................................... 13

7. How to use .......................................................................................................... 14

7-1 Pre-operation check ........................................................................................... 14

7-2 Operation ........................................................................................................... 14

7-3 Turning off the unit ............................................................................................. 15

7-4 Replacing the lamp ............................................................................................ 15

7-5 External control .................................................................................................. 16

7-6 Alarms and errors .............................................................................................. 18

7-7 Precautions during use ...................................................................................... 18

8. Maintenance and inspection ............................................................................... 19

9. Troubleshooting .................................................................................................. 19

10. Warranty and after-sales service ...................................................................... 200

10-2 After-sales service ........................................................................................... 200

11. Dimensional outlines ......................................................................................... 211

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Table of Contents

Table of contents