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5-4 Sample chamber
①Excimer lamp
②Ozone outlet
③Ozone outlet cover
④Vent cover
⑤Gas inlet port
⑥Air vents
NOTE: When introducing external gas into the sample chamber, close the ozone outlet and air
vents with the covers. Even in that case, always connect a local exhaust ventilation system or an
ozone decomposition unit E12685 (sold separately) to the duct connection port of this unit.
Excimer lamp main body. The lamp is still very hot shortly after
operation. Before beginning work and touching the lamp, always
wear gloves and make sure the lamp has been cooled down.
Vent for exhausting ozone generated in the sample chamber. Do
not block this ozone outlet when used in an atmosphere where
(Note)
ozone is generated.
When introducing external gas into the sample chamber, use this
cover to close the ozone outlet.
When introducing external gas into the sample chamber, use this
cover to close the air vents.
This port is for introducing external gas into the sample chamber.
Do not block these air vents when used in an atmosphere where
(Note)
ozone is generated.
12
①
②
③
④
⑤
⑥
When introducing gas into
the sample chamber, use
these covers to close the
ozone outlet and air vents.
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