Side Panels - Hamamatsu Photonics EX-mini L12530 User Manual

Compact excimer lamp light source
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5-3 Side panels

①Cooling fan air intake vents
②Air exhaust vents
③Gas inlet port
Air intake vents for cooling the internal power supply. When
installing this unit, provide a space of at least 10 cm from these
vents to a wall or other objects.
Air exhaust vents for cooling the internal power supply. When
installing this unit, provide a space of at least 10 cm from these
vents to a wall or other objects.
Gas can be introduced into the sample chamber by inserting an
air tube (outer diameter: 6 mm) into this port. To introduce gas
into the sample chamber, close the ozone outlet and air vents in
the sample chamber.
Even in that case, always connect a local exhaust ventilation
system or an ozone decomposition unit E12685 (sold
separately) to the duct connection port of this unit.
Never use flammable gases.
NOTE: See section 5-4 "Sample chamber" for details.
(NOTE)
11

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