LEYBOLD MAG.DRIVE 2000 Manuals

Manuals and User Guides for LEYBOLD MAG.DRIVE 2000. We have 2 LEYBOLD MAG.DRIVE 2000 manuals available for free PDF download: Operating Instructions Manual

LEYBOLD MAG.DRIVE 2000 Operating Instructions Manual (66 pages)

Turbomolecular Pump with Magnetic Bearing, Electronic Frequency Converter

Brand: LEYBOLD | Category: Water Pump | Size: 1 MB

Table of Contents
2
1 Description

3
2 Installation

13
- General Safety Information
  13
- Unpacking - Storing - Transportation
  13
- Operating Environment
  14
- Connecting the MAG to the Vacuum Chamber
  14
- Connecting the Backing Pump
  19
- Connecting the Cooling Water
  20
- Connecting the Purge Gas
  22
- Installing the MAG.DRIVE
  24
- Power Supply Connection X10
  25
- Pump Connection
  26
- Control Plug X14
  27
- Interface Connector
  31
3 Operation

32
4 Plug-In Control

36
- Operation with Plug-In Control
  36
- Operating Statuses
  38
- Operating Menu
  40
- Basic Menu
  40
- Settings Converter
  41
- Settings Pump
  42
- Settings Temperature Management System
  42
- Total View of the Menu
  43
- Temperature Management System
  44
5 Maintenance

46
- Removing the Pump from the System
  46
- Service at Leybold's
  48
6 Troubleshooting

50
- Warning Messages
  50
- Failure Messages
  52
- Malfunctions
  57
  - Certifications
    58
  - Forms
    64

LEYBOLD MAG.DRIVE 2000 Operating Instructions Manual (50 pages)

Turbomolecular pumps with Magnetic Bearing & Electronic Frequency converter

Brand: LEYBOLD | Category: Water Pump | Size: 0 MB

Table of Contents
2
1 Description

3
2 Installation

11
- General Safety Information
  11
- Unpacking - Storing - Transportation
  11
- Operating Environment
  12
- Connecting the MAG to the Vacuum Chamber
  12
- Connecting the Backing Pump
  16
- Connecting the Cooling Water
  18
- Connecting the Purge Gas
  19
- Installing the MAG.DRIVE
  20
- Power Supply Connection X10
  20
- Pump Connection
  21
- Control Plug X14
  21
- Interface Connector
  24
3 Operation

25
4 Plug-In Control

28
- Operation with Plug-In Control
  28
- Operating Statuses
  30
- Operating Menu
  32
- Basic Menu
  32
- Settings Converter
  33
- Settings Pump
  34
- Total View of the Menu
  35
5 Maintenance

36
- Removing the Pump from the System
  36
- Service at Leybold's
  37
6 Troubleshooting

38
- Failure Messages
  40
- Malfunctions
  43
  - Certifications
    44
  - Forms
    48

LEYBOLD Categories

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More LEYBOLD Manuals

LEYBOLD MAG.DRIVE 2000 Manuals

LEYBOLD MAG.DRIVE 2000 Operating Instructions Manual (66 pages)

Table of Contents

1 Description

2 Installation

3 Operation

4 Plug-In Control

5 Maintenance

6 Troubleshooting