SMC Networks PFM3 Series Operation Manual page 24

Flow specification when [ Ft] is selected by unit selection function
Model
Rated flow range
Setting/Display
flow range
Min. setting/display unit
Setting/Display flow range
Min. setting/display unit
Conversion of accumulated pulse
: Flow rate in the specification is the value at standard condition.
If the display unit standard is changed from standard to normal, use the conversion formula.
Flow rate at standard condition x 0.927 = Flow rate at normal condition
PFM710
Dry air, 0.8 to 35.3
-2
N Ar CFM x 10
2,
0.8 to 17.6
CO
2
-2
CFM x 10
Dry air, 0.8 to 37.1
、Ar
-2
N
CFM x 10
2
0.8 to 18.5
CO
2
-2
CFM x 10
0.1 CFM x 10
0.0 to 99999.0
3 -1
ft x 10
3
0.1 ft x 10
0.1
3 -1
ft x 10 /pulse
-23-
PFM725
1.8 to 88.3
-2
CFM x 10
1.8 to 44.1
-2
CFM x 10
1.8 to 92.7
-2
CFM x 10
1.8 to 46.3
-2
CFM x 10
-2 -2
0.1 CFM x 10
0.0 to 99999.9
3 -1
ft x 10
-1 3 -1
0.1 ft x 10
1
3 -1
ft x 10 /pulse ft
PFM750 PFM711
4 to 177 8 to 353
-2
CFM x 10 CFM x 10
4 to 88 8 to 176
-2
CFM x 10 CFM x 10
4 to 186 8 to 371
-2
CFM x 10 CFM x 10
4 to 93 8 to 185
-2
CFM x 10 CFM x 10
-2
1 CFM x 10 1 CFM x 10
0 to 999999 0 to 999999
3 -1 3
ft x 10 ft x 10
3 -1 3
1 ft x 10 1 ft x 10
1 1
3 -1 3 -1
x 10 /pulse ft x 10 /pulse
No.PF※※-OMJ0018-F
-2
-2
-2
-2
-2
-1
-1