Technical Specification - Agilent Technologies TV 551 Navigator User Manual

17 Technical Information

Technical Specification

Technical Specification

Tab. 3 Technical Specification
CHARACTERISTIC
Pumping speed (with inlet screen)
N :
2
He:
H
2:
Compression ratio
N :
2
He:
H :
2
Base pressure
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test
dome bake-out, with a Turbopump fitted
with a ConFlat flange and using the
recommended pre-vacuum pump)
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Mechanical
Dry
Operating position
Operating ambient temperature
Cooling requirements
Cooling water
268/328
TV 551
CFF 6": CFF 8"/ISO160:
350 l/s 550 l/s
450 l/s 600 l/s
450 l/s 510 l/s
1 x 10
9
1 x 10
7
1 x 10
6
with minimum recommended mechanical pump:
< 1 x 10
-10
(< 1 x 10
-10
with minimum recommended diaphragm pump:
2 x 10 mbar
-9
(1.5 x 10
-9
ISO 160, CF 6", CF 8", ISO 160F
KF 25 NW
42000 rpm
< 5 minutes
Agilent DS 302
Agilent Triscroll PTS 300 / IDP-15
Any
+5 °C to +35 °C
Natural air convection
Water optional (use water with electrical conductivity
≤ 500 µS/cm)
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
TV 551/701 Navigator User Manual / 87-900-934-01 (P)
TV 701
CFF 10"/ ISO200:
690 l/s
620 l/s
510 l/s
1 x 10
1 x 10
1 x 10
mbar
Torr)
torr)
ISO 200, CF 10",
ISO 200F
9
7
6