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Agilent Technologies Navigator TV 551 SEM User Manual

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User Manual
87-900-958-01(G)
04/2011
TV 551/701 SEM
Navigator
Pump models
969-8935, 969-8936, 969-8937, 969-8938
Controller models
969-8976, 969-8977
Manual de Instrucciones

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Summary of Contents for Agilent Technologies Navigator TV 551 SEM

  • Page 1 TV 551/701 SEM Navigator Pump models 969-8935, 969-8936, 969-8937, 969-8938 Controller models 969-8976, 969-8977 User Manual Manual de Instrucciones 87-900-958-01(G) 04/2011...
  • Page 2 Use, duplication or disclosure of Software is subject to The material contained in this Agilent Technologies’ standard © Agilent Technologies, Inc. 2011 document is provided “as is,” and is commercial license terms, and non- subject to being changed, without...
  • Page 3 TV 551/701 SEM Navigator TV 551/701 SEM Navigator TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 3/276...
  • Page 4 TV 551/701 SEM Navigator 4/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
  • Page 5 Contents Contents Istruzioni per l’uso 15  Indicazioni di Sicurezza per Pompe Turbomolecolari 16  Informazioni generali 17  Immagazzinamento 18  Preparazione per l'installazione 19  Installazione 20  Fissaggio della pompa 21  Uso 22  Manutenzione 25  Smaltimento 26  Gebrauchsanleitung 27  Sicherheitshinweise für Turbomolekularpumpen 28  Allgemeine Informationen 29 ...

  • Page 6: Table Of Contents

    Contents Entsorgung 38  Mode d’emploi 39  Normes de sécurité pour Pompe Turbomoléculaires 40  Indications Generales 41  Stockage 42  Preparation pour l'installation 43  Installation 44  Fixation de la pompe 45  Utilisation 46  Entretien 49  Mise au rebut 50  Manual de istrucciones 51 ...
  • Page 7 Contents 16 Instructions for Use 195  Safety Guideline for Turbomolecular Pumps 196  General Information 197  Storage 198  Preparation for Installation 199  Installation 200  Pump Fixing 201  Use 202  Maintenance 205  Disposal 206  17 Technical Information 207  Description of the TV 551/701 Navigator 209  Pump Description 210 ...
  • Page 8 Contents Inlet Screen Installation 243  Air Cooling Kit Installation 246  Water Cooling Kit Installation 250  Vent Accessories 252  Vibration Isolators 256  Purge Valve Installation 257  Serial Cable Installation 258  TV 551/701 SEM Controller Installation 259  Pump Used with Corrosive Gases 265  Pump Used in Presence of Magnetic Fields 268 ...
  • Page 9 Contents 14/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
  • Page 10 TV 551/701 SEM Navigator User Manual Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Información general Almacenamiento 54 Preparación para la instalación 55 Instalación Fijación de la bomba 57 Encendido y Uso del TV 551/701 SEM Navigator Parada del TV 551/701 SEM Navigator Parada de Emergencia 61 Mantenimiento Eliminación...

  • Page 11: Manual De Istrucciones Indicaciones De Seguridad Para Bombas Turbomoleculares

    Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energía cinética debido a la alta velocidad de rotación en combinación a la masa específica de sus rotores.

  • Page 12: Información General

    Manual de istrucciones Información general Información general Este equipo es para uso profesional. El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra información suplementaria facilitada por Agilent antes de usar el aparato. Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones, al uso impropio por parte de personal no preparado, a operaciones no autorizadas o a un uso contrario a las normas nacionales específicas.

  • Page 13: Almacenamiento

    Manual de istrucciones Almacenamiento Este manual utiliza los siguientes símbolos convencionales: ¡ADVERTENCIA! Los mensajes de advertencia atraen la atención del operador sobre un procedimiento o una operación específica que, al no realizarse correctamente, podría provocar graves lesiones personales. Los mensajes de atención se visualizan antes de los procedimientos que, de no ¡ATENCIÓN! cumplirse, podrían provocar daños al aparato.

  • Page 14: Preparación Para La Instalación

    Manual de istrucciones Preparación para la instalación En caso de superarse por cualquier motivo el período máximo permitido de ¡ATENCIÓN! almacenamiento, será necesario devolver la bomba al fabricante. Para mayores informaciones al respecto, se ruega contactar con el representante local de Agilent.

  • Page 15: Instalación

    Manual de istrucciones Instalación Figura 1 Instalación Despegar el adhesivo y quitar el tapón de protección sólo al conectar la bomba ¡ATENCIÓN! al sistema. Figura 2 56/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)

  • Page 16: Fijación De La Bomba

    Manual de istrucciones Fijación de la bomba No instalar ni/o utilizar la bomba en lugares expuestos a agentes atmosféricos (lluvia, hielo y nieve), polvo y gases agresivos, en lugares explosivos o con alto riesgo de incendio. Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes: presión máxima: 2 bares por encima de la presión atmosférica temperatura: de +5 °C a +35 °C (véase gráfico en el anexo...

  • Page 17: Uso

    Manual de istrucciones Tab. 1 BRIDA PAR DE APRIETE ISO 160 K 35 Nm ISO 200 K 35 Nm Para más detalles véase el anexo “Technical Information”. El TV 551/701 SEM Navigator puede instalarse en cualquier posición. El TV 551/701 SEM Navigator no puede fijarse utilizando su base. NOTA El TV 551/701 SEM Navigator pertenece a la segunda categoría de ATTENTION!

  • Page 18: Encendido Y Uso Del Tv 551/701 Sem Navigator

    Manual de istrucciones ¡ADVERTENCIA! No hacer funcionar nunca la bomba si la brida de entrada no está conectada al sistema o no está cerrada con la brida de cierre. No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento.

  • Page 19: Parada Del Tv 551/701 Sem Navigator

    Manual de istrucciones La primera salida de la bomba se realiza en el modo “Soft Start” que, al final del ciclo de puesta en marcha, se deshabilita automáticamente, por lo tanto cuando la bomba se ponga en marcha posteriormente se hará sin “Soft Start”. Para volver a utilizar una puesta en marcha “Soft Start”...

  • Page 20: Mantenimiento

    Manual de istrucciones Mantenimiento Parada de Emergencia Para detener en condiciones de emergencia el TV 551/701 SEM Navigator es necesario desconectar del controlador el cable de alimentación. Mantenimiento El TV 551/701 SEM Navigator no necesita ningún mantenimiento. Cualquier operación deberá ser realizada por personal autorizado. ¡ADVERTENCIA! Antes de realizar cualquier operación en el sistema desconectarlo de la corriente, enviar aire de la bomba abriendo la válvula oportuna, esperar...

  • Page 21: Eliminación

    Manual de istrucciones Eliminación Eliminación Significado del logotipo "WEEE" presente en las etiquetas. El símbolo que se indica a continuación, es aplicado en observancia de la directiva CE denominada "WEEE". Este símbolo (válido sólo para los países miembros de la Comunidad Europea) indica que el producto sobre el cual ha sido aplicado, NO debe ser eliminado junto con los residuos comunes sean éstos domésticos o industriales, y que, por el contrario, deberá...

  • Page 22: Instructions For Use

    TV 551/701 SEM Navigator User Manual Instructions for Use Safety Guideline for Turbomolecular Pumps 196 General Information Storage Preparation for Installation 199 Installation Pump Fixing Switching on and Use of TV 551/701 SEM Navigator TV 551/701 SEM Navigator Switching off 204 Emergency Stop Maintenance Disposal...

  • Page 23: Safety Guideline For Turbomolecular Pumps

    Instructions for Use Safety Guideline for Turbomolecular Pumps Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors.

  • Page 24: General Information

    Instructions for Use General Information General Information This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment. Agilent will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards.

  • Page 25: Storage

    Instructions for Use Storage This manual uses the following conventions WARNING! Warning messages are for attracting the attention of the operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury. The caution messages are displayed before procedures which, if not followed, CAUTION! could cause damage to the equipment Notes contain important information taken from the text.

  • Page 26: Preparation For Installation

    Instructions for Use Preparation for Installation If for any reason the shelf life time is exceeded, the pump has to be returned to CAUTION! the factory. Please contact the local Agilent Vacuum Sales and Service representative for informations. Preparation for Installation The TV 551/701 SEM Navigator is supplied in a special protective packing.

  • Page 27: Installation

    Instructions for Use Installation Figure 1 Installation Do not remove the adhesive and protective cap before connecting the CAUTION! turbopump to the system. Figure 2 200/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)

  • Page 28: Pump Fixing

    Instructions for Use Pump Fixing Do not install or use the pump in an environment exposed to atmospheric agents (rain, snow, ice), dust, aggressive gases, or in explosive environments or those with a high fire risk. During operation, the following environmental conditions must be respected: maximum pressure: 2 bar above atmospheric pressure temperature: from +5 °C to +35 °C (see the diagram pressure- temperature in the appendix “Technical Information”)

  • Page 29: Use

    Instructions for Use Tab. 1 FLANGE FIXING TORQUE ISO 160 K 35 Nm ISO 200 K 35 Nm See the appendix "Technical Information" for a detailed description. The TV 551/701 SEM Navigator can be installed in any position. The TV 551/701 SEM Navigator cannot be fixed by means of its base. NOTE The TV 551/701 SEM Navigator belongs to the second installation (or CAUTION!
  • Page 30 Instructions for Use WARNING! Never use the turbopump when the inlet flange is not connected to the vacuum chamber. Do not touch the turbopump or any of its accessories during the heating process. The high temperatures may cause burns. Avoid impacts, oscillations or harsh movements of the pump when in operation. CAUTION! The bearings may become damaged.

  • Page 31: Switching On And Use Of Tv 551/701 Sem Navigator

    Instructions for Use Switching on and Use of TV 551/701 SEM Navigator To switch on the TV 551/701 SEM Navigator it is necessary to supply the mains. The integrated controller automatically recognizes the interlock and start signals presence and start up the pump. The first pump start up is in “Soft Start”...

  • Page 32: Maintenance

    Instructions for Use Maintenance Emergency Stop To immediately stop the TV 551/701 SEM Navigator in an emergency condition it is necessary to remove the supply cable from the mains plug. Maintenance The TV 551/701 SEM Navigator does not require any maintenance. Any work performed on the system must be carried out by authorized personnel.

  • Page 33: Disposal

    Instructions for Use Disposal Disposal Meaning of the "WEEE" logo found in labels. The following symbol is applied in accordance with the EC WEEE (Waste Electrical and Electronic Equipment) Directive. This symbol (valid only in countries of the European Community) indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system.

  • Page 34: Technical Information

    TV 551/701 SEM Navigator User Manual Technical Information Description of the TV 551/701 Navigator 209 Pump Description 210 Controller Description 212 Technical Specification 213 TV 551/701 SEM Navigator Outline 216 Interconnections 221 P3 – Vent P4 – External Fan 222 J1 - In-Out Signal Description 224 How to Connect the Output Open Collector of the...
  • Page 35 Technical Information Air Cooling Kit Installation 246 TV 551/701 SEM with Navigator Controller TV 551/701 SEM Pump with Standard Rack Controller Water Cooling Kit Installation Vent Accessories 252 TV 551/701 SEM Navigator Controller Compatible 252 Vent Valve mod. 969-9834 Standard Rack Controller Compatible 254 Vent Valve mod.

  • Page 36: Description Of The Tv 551/701 Navigator

    Technical Information Description of the TV 551/701 Navigator Description of the TV 551/701 Navigator The TV 551/701 SEM Navigator pumping system consists of a pump with a dedicated controller fixed to it. The system is available in two models for TV 551 and two models for TV 701. The models of each group differ in the high vacuum flange.

  • Page 37: Pump Description

    Technical Information Pump Description Figure 3 Model 969-8935, Model 969-8936, Model 969-8937, Model 969-8938 Pump Description The pump consists of a high frequency motor driving a turbine fitted with 8 bladed stages and 4 Macrotorr stages. The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end.
  • Page 38 Technical Information Pump Description The Macrotorr stages are in the form of four discs. The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump. The static blades of the stator are made of stainless steel. These are supported and accurately positioned by spacer rings.

  • Page 39: Controller Description

    Technical Information Controller Description Controller Description The dedicated controller is a solid-state frequency converter which is driven by a single chip microcomputer and is composed of two PCBs which include power supply and 3-phase output, analog and input/output section, microprocessor and digital section. The power supply, together with the 3-phase output, converts the single phase AC mains supply into a 3-phase, low voltage, medium frequency output which is required to power the pump.

  • Page 40: Technical Specification

    Technical Information Technical Specification Technical Specification Tab. 2 CHARACTERISTIC TV 551 SEM TV 701 SEM Pumping speed (with inlet screen) ISO160: ISO200: 550 l/s 690 l/s 600 l/s 620 l/s 510 l/s 510 l/s Compression ratio 1 x 10 1 x 10 1 x 10 1 x 10 1 x 10...
  • Page 41 Technical Information Technical Specification CHARACTERISTIC TV 551 SEM TV 701 SEM Cooling water flow: 200 l/h (0.89 GPM) temperature: + 10 ° C to + 30 °C pressure: 3 to 5 bar (45 to 75 Psi) Bakeout temperature 120 °C at inlet flange max. (CF flange) 80 °C at inlet flange max.
  • Page 42 Technical Information Technical Specification CHARACTERISTIC TV 551 SEM TV 701 SEM Serial communication (Navigator RS232 cable with a 9-pin D type male kit) connector and a 9-pin D type female connector, and Navigator software (optional) Storage temperature -20 °C to +70 °C Weight kg (lbs): pump 19.4 (43)

  • Page 43: Tv 551/701 Sem Navigator Outline

    Technical Information TV 551/701 SEM Navigator Outline TV 551/701 SEM Navigator Outline The following figures show the TV 551/701 SEM Navigator outlines (dimensions are in inches [mm]). Figure 6 TV 551 SEM Navigator outline 216/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
  • Page 44 Technical Information TV 551/701 SEM Navigator Outline Figure 7 TV 701 SEM Navigator outline TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 217/276...
  • Page 45 Technical Information TV 551/701 SEM Navigator Outline TV 551 SEM TV 701 SEM Figure 8 Graph of nitrogen pumping speed vs inlet pressure (with inlet screen) 218/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
  • Page 46 Technical Information TV 551/701 SEM Navigator Outline Figure 9 Graph of compression ratio vs foreline pressure TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 219/276...
  • Page 47 Technical Information TV 551/701 SEM Navigator Outline TV 551 SEM TV 701 SEM Figure 10 Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 220/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)

  • Page 48: Interconnections

    Technical Information Interconnections Interconnections The following figure shows the TV 551/701 SEM interconnections. Figure 11 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 221/276...

  • Page 49: P3 - Vent

    Technical Information P3 – Vent P3 – Vent Figure 12 This is a dedicated 24 Vdc connector to control the optional vent valve. P4 – External Fan Figure 13 This is a dedicated 24 Vdc connector to supply the optional external fan.

  • Page 50: J1 - In-Out

    Technical Information J1 - In-Out J1 - In-Out Figure 14 This connector carries all the input and output signals to remote control the TV 551/701 SEM Navigator. It is a 15-pins D type connector; the available signals are detailed in the table, the following paragraphs describe the signal characteristics and use.

  • Page 51: Signal Description

    Technical Information J1 - In-Out PIN N. SIGNAL NAME INPUT/OUTPUT SPARE FAULT OUTPUT PROGRAMMABLE ANALOG SIGNAL (+) GROUND PROGRAMMABLE ANALOG SIGNAL (-) Signal Description START/STOP: input signal to start or stop the pump. With the supplied cover connector the START/STOP (+) signal is connected to the +24 Vdc pin and the START/STOP (-) signal to the GROUND pin: in this condition the pump automatically starts as soon as the controller recognises the input supply ("Plug &...
  • Page 52 Technical Information J1 - In-Out Figure 15 If any signal isn't applied (no connection) the pump speed is set to "High Speed" (714 Hz max and settable by window "121"). If a continuous signal is applied (pin 5 fixed at +24 V and pin 6 fixed to ground) the pump speed is set to "Low Speed".
  • Page 53 Technical Information J1 - In-Out Figure 16 The screen can be mounted on each pump model. Figure 17 FAULT: this open collector output signal is ON when a system fault condition is detected. 226/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
  • Page 54 Technical Information J1 - In-Out PROGRAMMABLE SET POINT: this open collector output signal is enabled when the reference quantity chosen (frequency, current or time) is higher than the set threshold. The signal can be "high level active" (that is the output is normally at 0 Vdc and becomes 24 Vdc when activated), or "low level active"...
  • Page 55 Technical Information J1 - In-Out It is possible to delay the set point checking for a programmable delay time. The PROGRAMMABLE SET POINT signal has the following default settings: reference quantity: frequency thereshold: 643 Hz hysteresis: 2 % activation type: high level delay time: 0 second The Navigator Software (optional) allows the operator to set all the NOTE...

  • Page 56: How To Connect The Output Open Collector Of The Controller

    Technical Information J1 - In-Out How to Connect the Output Open Collector of the Controller Here below there are the typical connections of the output open collector of TV551/701 SEM Navigator to an external system. Two cases are considered: the customer supplies the 24 Vdc the customer does not supply the 24 Vdc.
  • Page 57 Technical Information J1 - In-Out Figure 21 Case 2 with relay utilization 230/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
  • Page 58 Technical Information J1 - In-Out Figure 22 Case 2 with transistor utilization TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 231/276...

  • Page 59: J2 - Serial

    Technical Information J2 – Serial J2 – Serial Figure 23 This is a 9 pin D-type serial input/output connector to control via an RS 232 or RS 485 connection the TV 551/701 SEM. Tab. 4 PIN N. SIGNAL NAME SPARE TX (RS232) RX (RS232) SPARE...

  • Page 60: Rs 232/Rs 485 Communication Description

    Technical Information RS 232/RS 485 Communication Description RS 232/RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector J2. The communication protocol is the same (see the structure below), but only the RS 485 manages the address field. Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software.
  • Page 61 Technical Information RS 232/RS 485 Communication Description When a data is indicated between two quotes (‘...’) it means that the indicated NOTE data is the corresponding ASCII character. <STX> (Start of transmission) = 0x02 <ADDR> (Unit address) = 0x80 (for RS 232) <ADDR>...
  • Page 62 Technical Information RS 232/RS 485 Communication Description When the MESSAGE is a reading command, the SLAVE will respond transmitting a string with the same structure of the MESSAGE. Using the RS 485 interface, the message structure remains identical to the one NOTE used for the RS 232 interface, the only difference being that the value assigned to the ADDRESS <ADDR>...

  • Page 63: Examples

    Technical Information RS 232/RS 485 Communication Description Examples Command: START Source: PC Destination: Controller ADDR WINDOW Source: Controller Destination: PC ADDR Command: STOP Source: PC Destination: Controller ADDR WINDOW Source: Controller Destination: PC ADDR 236/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
  • Page 64 Technical Information RS 232/RS 485 Communication Description Command: SOFT-START (ON) Source: PC Destination: Controller ADDR WINDOW Source: Controller Destination: PC ADDR Command: SOFT-START (OFF) Source: PC Destination: Controller ADDR WINDOW Source: Controller Destination: PC ADDR TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 237/276...
  • Page 65 Technical Information RS 232/RS 485 Communication Description Command: READ PUMP STATUS Source: PC Destination: Controller (with address = 3) ADDR WINDOW Source: Controller (with address = 3 in stop status) Destination: PC ADDR WINDOW DATA (STATUS) Command: READ SERIAL TYPE Source: PC Destination: Controller (with address = 3 in 485 mode) ADDR...

  • Page 66: Window-Meanings

    Technical Information RS 232/RS 485 Communication Description Window-Meanings Tab. 7 Read/ Data Description Admitted Values Write Type Start/Stop (in remote Start = 1 mode the window is a Stop = 0 read only) Low Speed activation NO = 0 YES = 1 (default = 0) Remote (default) or Remote = 1...
  • Page 67 Technical Information RS 232/RS 485 Communication Description Read/ Data Description Admitted Values Write Type (write only in stop) 1 = YES Baud rate 600 = 0 1200 = 1 2400 = 2 4800 = 3 9600 = 4 (default = 4) Pump life/ cycle time/ To reset write ‘1’...
  • Page 68 Technical Information RS 232/RS 485 Communication Description Read/ Data Description Admitted Values Write Type Reserved to Agilent service Pump current in mA dc Pump voltage in Vdc Pump power in W (pump current x pump voltage duty cycle) Driving frequency in Hz Pump temperature in °C 0 to 70 Pump status...
  • Page 69 Technical Information RS 232/RS 485 Communication Description Read/ Data Description Admitted Values Write Type Reserved to Agilent service RS 485 address 0 to 31 (default = 0) 1. Automatic means that when the controller stops, the vent valve is opened NOTE with a delay defined by window n.

  • Page 70: Inlet Screen Installation

    Technical Information Inlet Screen Installation Inlet Screen Installation Figure 25 Figure 26 The inlet screens mod. 969-9304 and 969-9316 prevents the blades of the pump from being damaged by debris greater than 0.7 mm diameter. The inlet screen, however, does reduce the pumping speed by about 10 %.
  • Page 71 Technical Information Inlet Screen Installation Figure 27 The screen can be mounted on each pump. The screen can be removed as shown in the following figure. Figure 28 The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange and pump with CFF flange.
  • Page 72 Technical Information Inlet Screen Installation Figure 29 Figure 30 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 245/276...

  • Page 73: Air Cooling Kit Installation

    Technical Information Air Cooling Kit Installation Air Cooling Kit Installation TV 551/701 SEM with Navigator Controller An air cooling kit (mod. 969-9339) is available to improve the TV 551/701 SEM cooling during heavy operational conditions (optional). Figure 31 Fan specifications: air flow: 200 m input voltage: 24 Vdc dimensions: 127 x 127 x 38 mm (5 x 5 x 1.5 in.)
  • Page 74 Technical Information Air Cooling Kit Installation To fix the fan to the TV 551/701 SEM case execute the following procedure (see the following figure): Fix the fan to the suitable bracket by means of the furnished screws; Fix the bracket to the pump body between the pump and the controller;...

  • Page 75: Tv 551/701 Sem Pump With Standard Rack Controller

    Technical Information Air Cooling Kit Installation TV 551/701 SEM Pump with Standard Rack Controller When the TV 551/701 SEM pumps are used with the standard rack controller, it is necessary to utilize the air cooling kit model 969-9314. Figure 33 Fan specification: air flow: 25 l/s (51 CFM) input voltage: 120 Vac 50-60 Hz...
  • Page 76 Technical Information Air Cooling Kit Installation To fix the fan to the pump, position it ensuring that the holes in the plate line up with those in the pump base. Insert the respective washers and screws and tighten with a screwdriver. Connect the fan to the controller.

  • Page 77: Water Cooling Kit Installation

    Technical Information Water Cooling Kit Installation Water Cooling Kit Installation The water cooling kit mod. 969-9347 or 969-9337 must be installed when the pump is used under heavy load conditions or when air cooling is insufficient. Figure 35 Model 969-9337 Figure 36 Model 969-9347 250/276...
  • Page 78 Technical Information Water Cooling Kit Installation The kit is assembled as shown in the figure. Figure 37 Model 969-9347 Two rubber or plastic hoses from the water supply must be fitted to the two water cooling banjos. Cooling may be carried out either through an open circuit with eventual discharge of the water, or using a closed circuit cooling system.

  • Page 79: Vent Accessories

    Technical Information Vent Accessories Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation. TV 551/701 SEM Navigator Controller Compatible Vent Valve mod. 969-9834 Figure 38 This vent valve waits before opening a minimum time of about 5 sec.
  • Page 80 Technical Information Vent Accessories Figure 39 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2.5 Nm. Figure 40 Do not overtighten the valve as this may damage the thread on the pump. CAUTION! Then connect the cable from the valve to the suitable connector on the controller (see the preceding paragraph “INTERCONNECTIONS”).

  • Page 81: Standard Rack Controller Compatible

    Technical Information Vent Accessories Standard Rack Controller Compatible Vent Valve mod. 969-9843 Figure 41 This vent valve has a fixed delay time of about 5 sec. This value can be used only with rack controller. To install the vent valve execute the same steps as the vent valve model 969-9834 (see the above paragraph).
  • Page 82 Technical Information Vent Accessories The vent device has adjustable delay time (up to 36 min.). This value can be used only with rack controller. To install the vent device unscrew and remove the threaded plug (see the following figure). Figure 43 Screw the flange mod.

  • Page 83: Vibration Isolators

    Technical Information Vibration Isolators Vibration Isolators Single Damper Two vibration isolators are available as accessories. The four models part number are the following: model 969-9345 for ISO 160 K flange; model 969-9346 for ISO 200 K flange; model 969-9373 for ISO 160 F flange; model 969-9374 for ISO 200 F flange.

  • Page 84: Purge Valve Installation

    Technical Information Purge Valve Installation For more information, please refer to the relevant instruction manual. Figure 45 Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump. To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure, Figure 46...

  • Page 85: Serial Cable Installation

    Technical Information Serial Cable Installation and then screw the gas purge valve (with a torque of 2.5 Nm) as shown in the following figure. Figure 47 Figure 48 Serial Cable Installation The supplied serial cable must be installed when the TV 551/701 SEM Navigator or the optional vent valve have to be controlled by means of a remote computer.

  • Page 86: Tv 551/701 Sem Controller Installation

    Technical Information TV 551/701 SEM Controller Installation TV 551/701 SEM Controller Installation The controller can be mounted in two position: bottom mounting (as per the complete system) side mounting. To install the controller execute the following procedures. Bottom Mounting See the following figure. Turn the pump upside-down;...
  • Page 87 Technical Information TV 551/701 SEM Controller Installation Figure 50 260/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)

  • Page 88: Side Mounting

    Technical Information TV 551/701 SEM Controller Installation Side Mounting The L-shaped bracket (P/N 969-9349) is available as an option. NOTE See the following figure. Place the L-shaped bracket on the controller, with the pump cable toward the bracket, and fix it by means of the three socket head screws M5, the washers and the nuts.

  • Page 89: Connection A - High Vacuum Flange

    Technical Information TV 551/701 SEM Controller Installation Figure 51 Connection A - HIGH VACUUM FLANGE For ISO-K flange connections, fix the two flanges with the clamps as shown in the figure. Figure 52 262/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)

  • Page 90: Connection Configurations

    Technical Information TV 551/701 SEM Controller Installation WARNING! It is mandatory to connect the pump in such a way to withstand the torque specified in the "INSTRUCTION FOR USE" section. Specifically pay attention to clamp design, material of clamps and bolts and bolt fixing torque. To facilitate assembly and dismantling, apply Fel-pro C-100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange.

  • Page 91: Connection B - Fore-Vacuum Pump

    Technical Information TV 551/701 SEM Controller Installation Connection B - FORE-VACUUM PUMP A flange KF 25 NW is available to connect the Turbo-V551/701 SEM pump to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the mechanical pump must be eliminated through the use of bellows.

  • Page 92: Pump Used With Corrosive Gases

    Technical Information Pump Used with Corrosive Gases Connection C – ELECTRICAL Figure 54 The turbopump is connected to the controller through an 8-pin connector. Pins B, C and D are the 3-phase supply to the motor, pins A and F are connected to the temperature sensor (NTC type, 30 KΩ resistance at 25 °C) and pin E is connected to the pump ground;...
  • Page 93 Technical Information Pump Used with Corrosive Gases Adjust the pressure regulator in order to read a gas flow rate of 0.1 to 0.8 mbar l/s. To prevent bearing damage, Agilent suggests a minimum purge gas flow rate of CAUTION! 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements.
  • Page 94 Technical Information Pump Used with Corrosive Gases Figure 55 Purge layout Tab. 8 Purge gas line Pressure regulator Gas purge valve Gas purge port Forevacuum pump Turbopump Vent valve TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 267/276...

  • Page 95: Pump Used In Presence Of Magnetic Fields

    Technical Information Pump Used in Presence of Magnetic Fields Pump Used in Presence of Magnetic Fields Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation. The result is increased electrical power consumption by the motor, most of which is dissipated in the rotor.
  • Page 96 Technical Information Accessories and Spare Parts Description Part number Bracket for Navigator Controller side mounting 969-9349 Single vibration isolator ISO 160 K 969-9345 Single vibration isolator ISO 200 K 969-9346 Single vibration isolator ISO 160 F 969-9373 Single vibration isolator ISO 200 F 969-9374 Double vibration isolator ISO 160 F 969-9377...
  • Page 97 Technical Information Accessories and Spare Parts 270/276 TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
  • Page 103 Request for Return Form Sales and Service Offices United States India Southeast Asia Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies Sales Sdn Bhd Vacuum Products Division Vacuum Product Division Vacuum Products Division 121 Hartwell Avenue G01. Prime corporate Park,...

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