Agilent Technologies Turbo-V 1K-G Series User Manual page 296

17 Technical Information
Pump Used With Corrosive Gases
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When the Turbo-V pump and the backing pump are stopped and
the system is at atmospheric pressure, for a better bearing
protection it is advisable to leave the purge gas flowing into the
Turbo-V pump, with the chamber or the Turbo-V vent valve
opened, to avoid system overpressures. If the vent valve can't be
kept opened, the backing pump should be left operating.
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2
3
1 Purge gas line
2 Pressure regulator
3 Gas purge valve
4 Gas purge port
5 Forevacuum pump
6 Turbopump
7 Vent valve
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Turbo-V 1K-G User Manual / 87-901-025-01 (A)
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