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Summary of Contents for Agilent Technologies VacIon Plus 150
- Page 1 VacIon Plus 150 pumps Models 919-1510/1520/1540 919-1511/1521/1541 919-1512/1522/1542 919-1550/1560/1580 919-1551/1561/1581 919-1552/1562/1582 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D’Emploi Instruction Manual 87-900-102-01 (E) 05/2011...
- Page 2 Do not “Restricted computer software” as proceed beyond a WARNING notice defined in FAR 52.227-19 (June 1987) until the indicated conditions are or any equivalent agency regulation or fully understood and met. VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
- Page 3 VacIon Plus 150 VacIon Plus 150 VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 3/88...
- Page 4 VacIon Plus 150 4/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 5: Table Of Contents
Anleitung zur Installation 19 Allgemeine Hinweise 20 Vor der Installation 21 Installation 22 Gebrauch 24 Bedienungsschritte 25 Wartung 27 Entsorgung 27 Procédure pour l’installation 29 Indications Generales 30 Préparation de l'installation 31 VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 5/88... - Page 6 Description of the VacIon Pump 51 Technical Specification 53 Vaclon Plus 150 Starcell 55 Vaclon Plus 150 Diode 56 Vaclon Plus 150 Noble Diode 57 Outline Drawing 58 Stray Magnetic Field 59 6/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
- Page 7 Safety Interlock 70 Heater Installation 70 Heater Replacement 72 Bakeout Operation 72 Operating Procedure 74 Maintenance 75 Pump Troubleshooting 79 VacIon Plus Pump Replacement Parts and Accessories 80 VacIon Plus Pump Controllers 81 VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 7/88...
- Page 8 Contents 8/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 9: Procedura Per L'installazione
VacIon Plus 150 pumps Instruction Manual Procedura per l’installazione Informazioni Generali 10 Preparazione per l’installazione 11 Installazione Procedure di uso 15 Manutenzione Smaltimento Traduzione delle istruzioni originali 9/88... -
Page 10: Informazioni Generali
I messaggi di attenzione sono visualizzati prima di procedure che, se non ATTENZIONE! osservate, potrebbero causare danni all'apparecchiatura. Le note contengono informazioni importanti estrapolate dal testo. NOTA 10/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 11: Preparazione Per L'installazione
La pompa non può essere danneggiata rimanendo semplicemente esposta NOTA all'atmosfera. Si consiglia comunque di mantenerla chiusa fino al momento dell'installazione sul sistema onde evitare eventuale inquinamento da polvere. Figura 1 VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 11/88... -
Page 12: Installazione
AVVERTENZA! Per evitare lesioni alla persona, non collegare l’alta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse. 12/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) - Page 13 Per installazioni con posizione diversa dalla verticale, la pompa deve essere sostenuta tramite i piedini di montaggio posti sul suo fondo. Per informazioni dettagliate sull’installazione della pompa, vedere l’appendice "Technical Information". VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 13/88...
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Page 14: Uso
14/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 15: Procedure Di Uso
La pressione nella pompa può anche essere calcolata leggendo la corrente e convertendo la lettura in pressione tramite l’apposito diagramma pressione-corrente illustrato nell’appendice “Technical Information” di questo manuale. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 15/88... - Page 16 L'elevata temperatura può causare lesioni alle persone. Non avvicinare dispositivi elettronici alla pompa. Il campo magnetico attorno ad ATTENZIONE! essa può provocare dei malfunzionamenti dei dispositivi stessi. 16/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 17: Manutenzione
Si invita pertanto l'utente finale a contattare il fornitore del dispositivo, sia esso la casa madre o un rivenditore, per avviare il processo di raccolta e smaltimento, dopo opportuna verifica dei termini e condizioni contrattuali di vendita. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 17/88... - Page 18 Procedura per l’installazione Smaltimento 18/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 19: Anleitung Zur Installation
VacIon Plus 150 pumps Instruction Manual Anleitung zur Installation Allgemeine Hinweise 20 Vor der Installation Installation Gebrauch Bedienungsschritte Wartung Entsorgung Übersetzung der Originalanleitungen 19/88... -
Page 20: Allgemeine Hinweise
Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf VORSICHT! aufmerksam, daß bei Nichteinhaltung Schäden am Gerät entstehen können. Die Hinweise enthalten wichtige Informationen, die aus dem Text hervorgehoben HINWEIS werden. 20/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 21: Vor Der Installation
Die Pumpe kann, wenn sie einfach der Atmosphäre ausgesetzt ist, nicht HINWEIS beschädigt werden. Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben, um Verunreinigungen durch Staub zu vermeiden. Abbildung 1 VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 21/88... -
Page 22: Installation
Anschluß an das System bereit ist. FALSCH! WARNUNG! Um Personenschäden zu vermeiden, darf die Hochspannungsleitung der Pumpe erst angeschlossen werden, wenn die Pumpe im System installiert ist und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind. 22/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) - Page 23 Eintrittsflansch montiert. Bei nicht senkrechten Einbaulagen soll die Pumpe auf Montagefüßen aufliegen, die an ihrer Unterseite angebracht werden. Detaillierte Informationen zur Installation der Pumpe sind dem Anhang “Technical Information” zu entnehmen. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 23/88...
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Page 24: Gebrauch
Titanverbindungen absorbieren Wasserdampf, wenn sie der Luft ausgesetzt werden. Dadurch bewirkt beim anschließenden Anlaufvorgang die Aufheizung der Pumpe die Abgabe des Dampfes und eines Teils des zuvor gepumpten Wasserstoffs, so daß sich die Anlaufzeit verlängert. 24/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 25: Bedienungsschritte
Status PROTECT zu schalten. Das System verfügt auf diese Weise über einen Selbstschutz vor einem Druckanstieg über 1x10 Torr (mbar), wenn die Pumpe nicht kontrolliert ist. Falls ein solcher Anstieg stattfindet, wird die Steuereinheit automatisch ausgeschaltet. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 25/88... - Page 26 Abkühlung nicht berührt werden. Die hohe Temperatur kann zu Personenschäden führen. Keine elektronischen Geräte in die Nähe der Pumpe bringen. Das darum VORSICHT! befindliche Magnetfeld kann zu Funktionsstörungen der Geräte führen. 26/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 27: Wartung
Sammelsystem zugeführt werden muss. Der Endabnehmer sollte daher den Lieferanten des Geräts - d.h. die Muttergesellschaft oder den Wiederverkäufer - kontaktieren, um den Entsorgungsprozess zu starten, nachdem er die Verkaufsbedingungen geprüft hat. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 27/88... - Page 28 Anleitung zur Installation Entsorgung 28/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 29: Procédure Pour L'installation
VacIon Plus 150 pumps Instruction Manual Procédure pour l’installation Indications Generales 30 Préparation de l'installation 31 Installation Utilisation Procédure d’utilisation 35 Maintenance Mise au rebut Traduction de la mode d’emploi originale 29/88... -
Page 30: Indications Generales
Les messages d'attention apparaissent avant certaines procédures dont le non- ATTENTION! respect peut endommager sérieusement l'appareillage. Les notes contiennent des renseignements importants, extrapolés du texte. NOTE 30/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 31: Préparation De L'installation
Il est quoi qu’il en soit conseillé de ne pas la retirer de son emballage avant le moment de l'installation, afin d'éviter toute pollution due à la poussière. Figure 1 VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 31/88... -
Page 32: Installation
Le fonctionnement de la pompe n'est optimisé que si celle-ci est utilisée avec l'une des unités de contrôle Agilent spécifiques (Dual, MidiVac ou MiniVac). 32/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) - Page 33 Pour toute installation différente de la position verticale, la pompe doit reposer sur ses pieds de montage placé sur le fond. Pour plus de détails sur l’installation de la pompe, consulter l’appendice “Technical Information”. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 33/88...
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Page 34: Utilisation
34/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 35: Procédure D'utilisation
La pression de la pompe peut également être calculée en relevant le courant et en convertissant la lecture en pression à l’aide du diagramme pression-courant illustré dans l’appendice “Technical Information” de ce manuel. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 35/88... - Page 36 La température élevée peut provoquer des brûlures. Ne pas approcher de dispositifs électroniques de la pompe. Le champ ATTENTION! magnétique environnant cette dernière peut entraîner des dysfonctionnements desdits dispositifs. 36/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 37: Maintenance
Après avoir vérifié les termes et conditions du contrat de vente, l’utilisateur final est donc prié de contacter le fournisseur du dispositif, maison mère ou revendeur, pour mettre en œuvre le processus de collecte et mise au rebut. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 37/88... - Page 38 Procédure pour l’installation Mise au rebut 38/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 39: Installation Procedure
VacIon Plus 150 pumps Instruction Manual Installation Procedure General Information Preparation for Installation 41 Installation Operating Procedure 45 Maintenance Disposal Original Instructions 39/88... -
Page 40: General Information
The caution messages are displayed before procedures which, if not followed, CAUTION! could cause damage to the equipment. The notes contain important information taken from the text. NOTE 40/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 41: Preparation For Installation
Normal exposure to the environment cannot damage the pump. Nevertheless, it NOTE is advisable to keep it closed until it is installed in the system, thus preventing any form of pollution by dust. Figure 1 VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 41/88... -
Page 42: Installation
The pump operation is optimized using one of the special Agilent controllers (Dual, MidiVac or MiniVac) only. 42/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) - Page 43 For mounting other than vertical, the pump should be supported using the mounting feet at the bottom of the pump. For detailed information about the pump installation, see the appendix “Technical Information”. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 43/88...
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Page 44: Use
During exposure to air, the deposits of titanium compound absorb water vapor. In subsequent start ups, pump heating causes release of the water vapor and some previously pumped hydrogen; thus, the starting time may be lengthened. 44/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 45: Operating Procedure
The pressure in the pump can also be determined by reading the current and converting this reading to pressure with the appropriate pressure versus current graph shown in the appendix “Technical Information” of this manual. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 45/88... - Page 46 The high temperature may cause a serious damage. Do not put any electronic device near the pump since the magnetic field may CAUTION! cause a device malfunction. 46/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 47: Maintenance
The end user is therefore invited to contact the supplier of the device, whether the Parent Company or a retailer, to initiate the collection and disposal process after checking the contractual terms and conditions of sale. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 47/88... - Page 48 Installation Procedure Disposal 48/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 49: Technical Information
VacIon Plus 150 pumps Instruction Manual Technical Information Description of the VacIon Pump Technical Specification Vaclon Plus 150 Starcell 55 Vaclon Plus 150 Diode Vaclon Plus 150 Noble Diode57 Outline Drawing Stray Magnetic Field VacIon Plus Pump Installation 62 Inspection Procedure... -
Page 50: Vacion Plus Pump Controllers
Exchange of Pumping Element 75 Exchange of the High Voltage Feedthrough 76 Leakage Current Check High-potting Pump Troubleshooting VacIon Plus Pump Replacement Parts and Accessories 80 VacIon Plus Pump Controllers 50/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 51: Description Of The Vacion Pump
StarCell pumps since the anode is grounded and the cathode is held at negative potential. The inlet ConFlat flange is a 6” (NW 100). Fig. 3 shows the VacIon Plus 150 pump, Fig. 4 shows the main assemblies of the pump. VacIon Plus 150 pumps Instruction Manual... - Page 52 Technical Information Description of the VacIon Pump Figure 2 VacIon Plus 150 pump Element Magnet Inlet flange High voltage Cover connector Figure 3 Pump main assemblies 52/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 53: Technical Specification
Temperature limits (°C): Pump Magnet Flange Material: Body AISI 304 SST Cathode Titanium Titanium/ Titanium Tantalum Anode AISI 304 SST Magnet Ferrite Weight, lbs (kg) 94 (43) (*) Tested according to ISO/DIS 3556-1-1992 VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 53/88... - Page 54 "saturation" (nominal pumping speed). To saturate the VacIon Plus 150 pumps, it normally requires an amount of gas equal to 5 mbar-liters. Consequently, pumps can operate for extended periods of time at low pressures in the non-saturated state, if they are properly conditioned.
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Page 55: Vaclon Plus 150 Starcell
Technical Information Vaclon Plus 150 Starcell Vaclon Plus 150 Starcell Figure 4 Pumping speed vs pressure for Nitrogen Figure 5 Pumping speed vs pressure for Argon Figure 6 Pressure vs current diagram VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 55/88... -
Page 56: Vaclon Plus 150 Diode
Technical Information Vaclon Plus 150 Diode Vaclon Plus 150 Diode Figure 7 Pumping speed vs pressure for Nitrogen Figure 8 Pressure vs current diagram 56/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 57: Vaclon Plus 150 Noble Diode57
Vaclon Plus 150 Noble Diode Vaclon Plus 150 Noble Diode Figure 9 Pumping speed vs pressure for Nitrogen Figure 10 Pumping speed vs pressure for Argon Figure 11 Pressure vs current diagram VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 57/88... -
Page 58: Outline Drawing
Technical Information Outline Drawing Outline Drawing The following figure shows the outline drawing for the VacIon Plus pump. Figure 12 VacIon Plus pump outline drawing 58/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 59: Stray Magnetic Field
X axis, By is along Y axis and Bz is along Z axis. Figure 13 VacIon Plus pump axis identification Figure 14 Stray magnetic field from flange along X axis (z = 0 mm) VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 59/88... - Page 60 Stray Magnetic Field Figure 15 Stray magnetic field from flange along Y axis (z = 0 mm) Figure 16 Stray magnetic field from flange along X axis (z = 100 mm) 60/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
- Page 61 Technical Information Stray Magnetic Field Figure 17 Stray magnetic field from flange along Y axis (z = 100 mm) Figure 18 Stray magnetic field from flange along Z axis VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 61/88...
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Page 62: Vacion Plus Pump Installation
The pump is not harmed by such exposure, although it is good practice to keep it under vacuum when not in use to exclude dust and the accumulation of water vapor from the environment. 62/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 63: Vacuum Evaluation
If this occurs, turn the power OFF immediately. If the vacuum integrity has been lost, the pump should be leak- checked with a mass spectrometer leak detector before installation on the system. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 63/88... -
Page 64: Short Circuits
An ohm meter reading on the pump feedthrough may not be effective in finding a short. Short circuits may be caused by mechanical shock to the pump. If the pump is shorted, contact Agilent. 64/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 65: Typical Installation
6. A valve to seal off the roughing pump from the vacuum chamber. Roughing lines are usually made of stainless steel or copper tubing, or other low vapor pressure material. 7. High voltage cable. 8. Backing pump. Figure 19 Typical installation VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 65/88... -
Page 66: Inlet Flange Connection
ConFlat flange and the copper gasket plate. Some particles of copper oxide may adhere to the outer edge of the flange gasket. Be careful not to allow them or any other foreign materials to fall into the pump. 66/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) - Page 67 To allow complete flexibility in the installation, a stud mounting kit is available (see Fig. 22). For ordering information refer to the “VacIon Plus pump replacement parts and accessories” paragraph. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 67/88...
- Page 68 Technical Information Inlet Flange Connection Figure 20 Stud mounting kit 68/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
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Page 69: Control Unit Connection
(very little sleeve travel is required) from the control unit and at the same time pull on the male end of the cable connector to remove it from the socket on the control unit. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 69/88... -
Page 70: Safety Interlock
Position the connection box (3) on the upper side of the pump in an oppose position of the HV feedthrough with respect to the flange, and fix it to the pump case. 70/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) - Page 71 Technical Information Heater Installation Figure 21 Heating element Figure 22 Heating element installation VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 71/88...
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Page 72: Heater Replacement
To control the heaters and to monitor the high pressure limit during bakeout in automatic mode, an automatically controlled relay may be used. 72/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 73: Bakeout Of Vacion Pump With The Integral Heaters
Wait until the pump cools down to room temperature and recovers its base pressure before using it in the application. WARNING! Do not touch the pump during the heating and cooling phases. The high temperature may cause serious damage. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 73/88... -
Page 74: Operating Procedure
11 When venting the pump use clean, dry nitrogen. This will avoid water absorption on the pump surfaces and make subsequent pump downs easier. 74/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 75: Maintenance
VacIon Plus pumps are maintenance free. In case of life time expiry or premature failure of the pump, please contact your nearest Agilent sales/service office for repair. The VacIon Plus 150 pumps are designed with ex-changeable high- voltage feedthrough and pump elements. Exchange of Pumping Element... -
Page 76: Exchange Of The High Voltage Feedthrough
Bake out the pump while it is operating, and leave it to cool down; then verify that the base pressure is below 10 mbar. Figure 23 High voltage feedthrough connection 76/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 77: Leakage Current Check
If it is not possible to "high-pot" the pump, the pressure reading is biased by the leakage current value. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 77/88... -
Page 78: High-Potting
15 seconds. This should effectively remove any "whiskers" or sharp edges on the pump cathode. Voltages developed in the High Potter power sup-ply are potentially lethal. WARNING! Use caution during operation and ensure correct grounding connection. 78/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 79: Pump Troubleshooting
8) – System fails to System not appropriately cleaned for UHV. Clean all components for UHV achieve desired UHV Excessive outgassing from walls limits base and bake the system again. vacuum pressure. pressure. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 79/88... -
Page 80: Vacion Plus Pump Replacement Parts And Accessories
Nut and bolt set for 1 1/3" CF FB-0133-C feedthrough flange, 8-32 x 3/4 (25-pack) For a complete overview of Agilent's extensive vacuum product line, please refer to the Agilent Vacuum Catalogue. 80/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E) -
Page 81: Vacion Plus Pump Controllers
VacIon Plus Pump Controllers The following controller series are available to supply the VacIon Plus pumps: MiniVac Dual 4UHV Please refer to the Agilent Vacuum Catalogue to choose the correct controller for each pump. VacIon Plus 150 pumps Instruction Manual 87-900-102-01 (E) 81/88... - Page 82 Technical Information VacIon Plus Pump Controllers 82/88 VacIon Plus 150 pumps Instruction Manual / 87-900-102-01 (E)
- Page 88 Request for Return Form Sales and Service Offices United States India Southeast Asia Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies Sales Sdn Bhd Vacuum Products Division Vacuum Product Division Vacuum Products Division 121 Hartwell Avenue G01. Prime corporate Park,...