Edwards EXC120 Instruction Manual
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Edwards EXC120 Instruction Manual

Edwards EXC120 Instruction Manual

Turbomolecular pump controllers
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Description
EXC120 Controller
EXC120E Controller
EXC300 Controller
EXC300M Controller
Instruction Manual
EXC Turbomolecular Pump Controllers
D396-14-880
Issue J Original
Item Number
D396-16-000
D396-17-000
D396-14-000
D396-15-000

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Summary of Contents for Edwards EXC120

  • Page 1 D396-14-880 Issue J Original Instruction Manual EXC Turbomolecular Pump Controllers Description Item Number EXC120 Controller D396-16-000 EXC120E Controller D396-17-000 EXC300 Controller D396-14-000 EXC300M Controller D396-15-000...
  • Page 2 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Turbomolecular Pump Controllers...
  • Page 3 P200-10-033 Issue A Material Declaration In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as ‘China RoHS2’) and SJ/T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical Products: Product Product Label...
  • Page 4 This page intentionally blank.

  • Page 5: Table Of Contents

    Enable/disable the Internal Timer to monitor low pump speed ..........31 3.13.3 Vent options ......................32 Operation ..................33 Start-up ........................33 Standby ........................33 Bakeout band control (EXC120/300/300M only) ..............34 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 BX bakeout band (EXC120/300/300M only) .................42 7.3.3 TAV vent-valve ......................42 7.3.4 ACX air-cooler ......................42 7.3.5 Active vacuum gauges ....................43 Engineering diagrams ................45 Page ii © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 7 EXC120, EXC300 and EXC300M Controller dimensions (mm) .............20 EXC120E Controller dimensions (mm) ................21 Schematic diagram of EXC120 & EXC120E Controller electrical connections .........25 Schematic diagram of EXC300 & EXC300M Controller electrical connections .........26 Direct operation of the backing pump ................29 Operation of the backing pump through a contactor .............29...
  • Page 8 D396-14-880 Issue J This page has been intentionally left blank. Page iv © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 9: Introduction

    Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards EXC120, EXC120E, EXC300 and EXC300M Turbomolecular Pump Controllers (abbreviated to Controller in the remainder of this manual). You must use the Controller as specified in this manual.

  • Page 10: Description

    Controller (see Section 1.9.2). You can use the EXC120, EXC300 and EXC300M Controllers as stand-alone controllers. Alternatively, you can connect the Controller to your own equipment; you can then use either the Controller or your own equipment to control the system.

  • Page 11: Controls And Indicators (Exc120/300/300M Only)

    In addition to the controls and indicators on the front panel, the EXC120, EXC300 and EXC300M Controllers have an electrical supply isolator on the rear panel (see Figures to 5). The controls and indicators on the front panel of the EXC120, EXC300 and EXC300M Controllers are shown in Figures and are described below. Start/Stop Use this latching button to alternately Start or Stop the EXT pump.

  • Page 12: Exc120 Controller Front Panel

    4. Start/Stop button 10. Pump speed >50% LED (green) 5. Electrical supply LED 11. Pump speed >75% LED (green) 6. Fail LED Page 4 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 13: Exc300/300M Controller Front Panel

    10. Pump speed >50% LED (green) 5. Electrical supply LED 11. Pump speed >75% LED (green) 6. Fail LED 12. Hours counter (EXC300 only) © Edwards Limited 2008. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 14: Bakeout Band Control (Exc120/300/300M Only)

    Bakeout band control (EXC120/300/300M only) The EXC120, 300 and 300M Controllers can be used to operate a bakeout band. The Controller will switch on the electrical supply to the bakeout band when the Heater switch on the front panel is switched on and the EXT pump is at Normal speed (refer to Sections and 1.7.4).

  • Page 15: Connection Of An Active Gauge

    Backing pump control (EXC120/300/300M only) The EXC120, EXC300 and EXC300M Controllers can be used to control the operation of a backing pump through a backing pump relay. The operation of this relay depends on how you have configured the Controller to operate the vent-valve: refer to Sections and 3.13.

  • Page 16: Electrical Supplies

    Start/Stop Use the Start/Stop input to Start and Stop the EXT pump. Note that on the EXC120, EXC300 and EXC300M Controllers, the signal is wired in series with the Start/Stop button on the front panel, so you must close the Start/Stop input and press the Start/Stop button on the front panel to Start the pump.

  • Page 17: Status Outputs

    (for example, to operate other components in the pumping system at preset EXT pump speeds). © Edwards Limited 2008. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 18: Vent-Valve Control

    If the Controller is configured to Vent on Fail or Vent on Axial Emergency, the Controller will switch off the vent- valve electrical supply as soon as Fail condition or Axial Emergency condition is detected. Page 10 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 19: Controller Fail Conditions

    When the Controller trips into Fail condition: the electrical supply to the EXT pump-motor is switched off the TMP Fail status output signal on the logic interface opens and (on the EXC120, EXC300 and EXC300M Controllers) the Fail LED on the front panel goes on.

  • Page 20: Axial Emergency (Exc300M Only)

    1.10 Electrical connections All electrical connections to the Controller are on the rear panel: see Figures to 5. Page 12 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 21: Rear Panel Of The Exc120 Controller

    D396-14-880 Issue J Figure 3 - Rear panel of the EXC120 Controller 1. Electrical supply isolator 6. Active gauge connector 2. Earth (ground) stud 7. Backing pump connector 3. Bakeout band connector 8. Bakeout band fuse 4. EXT pump connector 9.

  • Page 22: Rear Panel Of The Exc120E Controller

    1. Electrical supply connector 2. EXT pump connector 3. Logic interface connector 4. Active gauge connector 5. Earth (ground) stud 6. Electrical supply fuse Page 14 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 23: Rear Panel Of The Exc300/300M Controller

    9. Backing pump connector 4. EXT pump connector 10. Electrical supply connector 5. Active gauge connector 11. Electrical supply fuse 6. Logic interface connector © Edwards Limited 2008. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 24 D396-14-880 Issue J This page has been intentionally left blank. Page 16 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 25: Technical Data

    1 A, type F 20 mm 180 to 264 V a.c. electrical supply 0.5 A, type F 20 mm Not applicable to the EXC120E Controller. © Edwards Limited 2008. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 26 180 to 264 V a.c 180 to 264 V a.c 180 to 264 V a.c Maximum power 150 W 150 W 150 W Page 18 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 27: Electrical Connectors

    Pins 8 & 9, pins 12 & 13, pins 14 & 15 EXC300/M Pins 9 & 10, pins 13 & 14, pins 15 & 16 © Edwards Limited 2008. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 28: Exc120, Exc300 And Exc300M Controller Dimensions (Mm)

    D396-14-880 Issue J Figure 6 - EXC120, EXC300 and EXC300M Controller dimensions (mm) A. EXC120 1. Front panel B. EXC300/EXC300M 2. View from top 3. Clearance for cables 4. Clearance for ventilation 5. Panel cut-out Page 20 © Edwards Limited 2008. All rights reserved.

  • Page 29: Exc120E Controller Dimensions (Mm)

    Figure 7 - EXC120E Controller dimensions (mm) 1. Front panel 2. Clearance for ventilation 3. View from top 4. Clearance for cables 5. Panel cut-out © Edwards Limited 2008. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 30 D396-14-880 Issue J This page has been intentionally left blank. Page 22 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 31: Installation

    The Controller can be used on a bench-top or can be fitted in a rack or cabinet. You can operate the EXC120, EXC300 and EXC300M Controllers in a horizontal position or in a vertical position with the front panel at the top. You can operate the EXC120E Controller in a horizontal position or in a vertical position with the side vents at the top.

  • Page 32: Introduction To Controller Electrical Connections

    15 and 16 linked together on the mating connector. †† The EXC120/E Controller is supplied with pins 8 and 9 linked together, pins 12 and 13 linked together and pins 14 and 15 linked together on the mating connector.

  • Page 33: Schematic Diagram Of Exc120 & Exc120E Controller Electrical Connections

    D396-14-880 Issue J Figure 8 - Schematic diagram of EXC120 & EXC120E Controller electrical connections A. Vacuum and control system L. Live electrical supply B. EXC Controller N. Neutral electrical supply E. Earth (ground) electrical supply 1. External electrical supply 14.

  • Page 34: Schematic Diagram Of Exc300 & Exc300M Controller Electrical Connections

    11. Rear panel backing pump relay connector 24. Air-cooler 12. Rear panel Active gauge connector 25. Remote indicator equipment 13. Active gauge EXC300M Controller only. Page 26 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 35: Connect The Electrical Supply

    Connect the brown wire to the live electrical supply. Connect the blue wire to the neutral electrical supply. 2. On EXC120, EXC300 and EXC300M Controllers, ensure the electrical supply isolator on the rear panel is in the off position. 3. Fit the connector on the other end of the electrical supply cable to the electrical supply connector on the rear of the Controller (see Figures to 5).

  • Page 36: Connect The Backing Pump (Exc120/300/300M Only)

    Interlock, you must remove the link fitted to the TMP Interlock control input on the logic interface; that is: On EXC120 and EXC120E Controllers, remove the link between pins 12 and 13. On EXC300 and EXC300M Controllers, remove the link between pins 13 and 14.

  • Page 37: Direct Operation Of The Backing Pump

    Figure 11 - Operation of the backing pump through a contactor 1. EXC backing pump relay 2. Backing pump motor 3. EXC Controller © Edwards Limited 2008. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 38: Connect The Logic Interface To Your Equipment

    2. Turn the potentiometer clockwise to set the required time; one full turn adds approximately two minutes to the set time. For example, seven full turns give a set delay time of approximately 15 minutes. Page 30 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 39: Configure The Controller

    50% of full rotational speed. If the pump speed remains below 50% of full rotational speed after the preset time, the Controller will trip into Fail condition. © Edwards Limited 2008. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 40: Vent Options

    Vent on Axial Emergency and Vent on Fail and Vent on Stop. Factory setting. † Only available on the EXC300M Controller. Page 32 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 41: Operation

    Figures and 9). On the EXC120, EXC300 and EXC300M Controllers, the LED on the Standby button will go on when the Standby mode is selected (either by the button or the logic interface). If you select Standby when the pump is operating, the speed of the pump will be reduced to the Standby speed. If you select Standby before you switch the pump on, the pump will run up to Standby speed, not up to full speed.

  • Page 42: Bakeout Band Control (Exc120/300/300M Only)

    Controller (see Sections 1.8, and 3.13). Refer to the EXT pump instruction manual for the pump operating temperature ranges. Page 34 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 43: The Hours Counter (Exc300 Only)

    Use the following procedure to shut down your system. This procedure assumes that you will manually operate the vent-valve and the backing pump, however you can configure all EXC Controllers to automatically operate the vent- valve and you can configure the EXC120, EXC300 and EXC300M Controllers to automatically operate the backing pump (refer to Section 3.13).

  • Page 44: Automatic Shutdown After Fail Condition

    Ensure that people cannot be injured by the rotating rotor blades of the EXT pump. The EXC120, EXC120E and EXC300 Controllers will automatically switch off the electrical supply to the EXT pump if the Controller trips into Fail condition (see Section 1.9), though the EXC300M Controller will continue to provide an...

  • Page 45: Maintenance

    2. Remove and discard the failed fuse and replace with a new fuse of the correct rating (refer to Table 3. Refit the fuse holder. © Edwards Limited 2008. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 46: Fault Finding

    If you need to clean the interior of the Controller, we recommend that you return the Controller to your supplier or your nearest Edwards Service Centre. Page 38 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 47: Storage And Disposal

    Do not incinerate the Controller. If the Controller is heated to very high temperatures, dangerous gases may be emitted and internal components may explode. © Edwards Limited 2008. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 48 D396-14-880 Issue J This page has been intentionally left blank. Page 40 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 49: Spares And Accessories

    The bakeout bands are available in 110-120 V or 220-240 V versions and may be powered from a connector on the rear panel on the EXC120, EXC300 and EXC300M Controllers. © Edwards Limited 2008. All rights reserved.

  • Page 50: Tav Vent-Valve

    ACX air-cooler An ACX air-cooler can be fitted to the EXT pump and can be operated automatically from the EXC120, EXC300 and EXC300M Controllers. However, please refer to Section 3 of the instruction manual for the EXT pump to check the suitability of air cooling in a particular application.

  • Page 51: Active Vacuum Gauges

    Active Gauge Cable, 0.5 m long D400-01-005 Active Gauge Cable, 1 m long D400-01-010 Active Gauge Cable, 3 m long D400-01-030 © Edwards Limited 2008. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 52 D396-14-880 Issue J This page has been intentionally left blank. Page 44 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 53: Engineering Diagrams

    Figures and 15. The Active Gauge connector (which is specific to the EXC Controller) is shown in Figure Figure 14 - EXC120/120E/300 Controller to EXT pump connections A. EXT pump 1. DC motor B. EXT connector on cable 2. Speed set resistor C.

  • Page 54: Exc300M Controller To Ext Pump Connections

    Not used Gauge identification signal Not used Controller enable (equivalent to TMP Interlock) Gauge enable (equivalent to TMP Normal) Not used Page 46 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

This manual is also suitable for:

Exc300Exc120eExc300m

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