Edwards EXC 100E Instruction Manual

Turbo pump controller

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Description

EXC100E Turbomolecular Pump Controller

EXC100L Turbomolecular Pump Controller

Instruction Manual

EXC100E and EXC100L Turbomolecular

Pump Controllers

Original Instructions

D396-20-880

Issue H

Item Number

D396-20-000

D396-22-000

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Page 1 D396-20-880 Issue H Instruction Manual EXC100E and EXC100L Turbomolecular Pump Controllers Description Item Number EXC100E Turbomolecular Pump Controller D396-20-000 EXC100L Turbomolecular Pump Controller D396-22-000 Original Instructions...
Page 2 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Turbomolecular Pump Controllers...
Page 3: Table Of Contents
Operation ..................23 Start-up ........................23 Standby ........................23 Operation with high inlet pressure ................... 23 Operation with high pump temperature ................23 © Edwards Limited 2015. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 4 Reconfigure the Controller (EXC100L shown) ..............21 EXC Controller to EXT pump connections ................34 Active gauge connector pins ..................35 Page ii © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 5 Associated publications Publication title Publication number EXT Pump Accessories B580-66-880 EXT70 and EXT250 Turbomolecular Pumps B722-01-880 EXT351 and EXT501 Turbomolecular Pumps B727-20-880 © Edwards Limited 2015. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 7: Introduction
The following warning symbols appear on the Controller: Warning - refer to accompanying documentation. Warning - risk of electric shock. Protective conductor terminal. Direct current only. © Edwards Limited 2015. All rights reserved. Page 1 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 8: Description
1.2). You can connect an Edwards AIM Active Inverted Magnetron Gauge directly to the active gauge connector on the Controller and use the Controller TMP Normal signal to switch the gauge on. This allows you to control the AIM Gauge without the need to use an additional high pressure gauge (and its associated control equipment) to interlock the operation of the AIM Gauge to system pressure.
Page 9: Logic Interface
Start/Stop input. To Stop the pump, you must open the input (refer to Sections and 4.5). Standby Close the Standby input to select pump Standby (refer to Section 4.2). © Edwards Limited 2015. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 10: Status Outputs
(if fitted) to close,  then switches off the electrical supply to the vent-valve.  Page 4 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 11: Vent On Stop
Controller (refer to Sections and 3.2). To reset the Controller after a Fail condition has occurred, refer to Section 4.7. © Edwards Limited 2015. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 12: Internal Timer
The Controller is supplied with the Internal Timer enabled and adjusted for a preset time of eight minutes. You can adjust the timer for your application: refer to Section 3.11. Page 6 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 13: Rear Panel Of The Controller (Exc100E Shown)
2. Earth (ground) stud 5. Active gauge connector 6. Normal LED 3. EXT pump connector EXC100E only; the EXC100L has an integral pump-to-controller cable © Edwards Limited 2015. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 15: Technical Data
11 A at 110 V a.c. 40 A at 240 V a.c. Fuse rating 2 A, type T 20 mm Over-voltage transients EN61010, category 2 © Edwards Limited 2015. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 16: Ext Pump Electrical Output Data
TMP On status output Logic high output voltage at 8 A 4.12 V Logic low output voltage at 42 A 0.77 V Page 10 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 17: Factory Settings
Figure 6 Table 11 Socket type FCC68, 8-way Manufacturer Western Electric Maximum power Logic interface connector 15-way sub-miniature ‘D’ type socket © Edwards Limited 2015. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 18: Dimensions (Mm): Exc100E Shown
A. Rear view 1. Clearance for ventilation B. Top view 2. Clearance for cables C. Side view 3. Optional mounting plate Page 12 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 19: Installation
(5). To select the pump power analogue output signal on the logic interface, insert link LK1 in the lower position (6). © Edwards Limited 2015. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 20: Enable/Disable The Internal Timer To Monitor Low Pump Speed
50% of full speed after Stop is selected. active active Vent on Fail and vent on Stop. Link positions as supplied. Page 14 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 21: Reconfigure The Controller (Exc100L Shown)
5. Link LK1 in speed configuration 11. Link LK4 not active: Timer disabled 6. Link LK1 in power configuration 12. Link LK4 active: Timer enabled © Edwards Limited 2015. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 22: Fit The Controller
‡ This supply line is raised to +24 V to de-energise the valve coil and vent the system. Page 16 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 23: Schematic Diagram Of Controller Electrical Connections
E Earth (ground) electrical supply 12. Vent-valve 13. External Standby switch 14. External Start/Stop switch 15. Speed/power indicator These are solid-state switches in the Controller © Edwards Limited 2015. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 24: Connect The Electrical Supply
EXT pump. Fit the connectors on the ends of the cable to the appropriate mating-halves on the rear of the Controller and on the EXT pump. Page 18 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 25: Connect An Aim Active Inverted Magnetron Gauge (Optional)
Connect a vacuum gauge to the logic interface You can connect an Edwards APG Active Pirani Gauge to the Controller so that the setpoint output of the gauge sets the Start/Stop input on the logic interface, to switch on the EXT pump. We recommend that you use the following procedure: 1.
Page 27: Reconfigure The Controller (Exc100L Shown)
D396-20-880 Issue H Figure 5 - Reconfigure the Controller (EXC100L shown) A. Normal speed potentiometer B. Timer potentiometer © Edwards Limited 2015. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 29: Operation
Fail condition after a set time; this depends on how you have configured the Controller (see Sections and 3.2). Refer to the EXT pump instruction manual for the pump operating temperature ranges. © Edwards Limited 2015. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 30: Normal Shutdown
AIM gauge (if connected) and the associated control logic are maintained until the pump speed falls to 50% of full rotational speed, then the electrical supplies are switched off. The Controller will then shut down.  Page 24 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 31: Maintenance
Fail condition. If necessary, refer to the appropriate fault finding section of the instruction manual supplied with the EXT pump. © Edwards Limited 2015. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 33: Storage And Disposal
Do not incinerate the Controller. If the Controller is heated to very high temperatures, dangerous gases may be emitted and internal components may explode. © Edwards Limited 2015. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 35: Service And Accessories
The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required: Model and Item Number of your equipment ...
Page 36: Pump-To-Controller Cable
(supplied with the valve) and used with any suitable NW10 flanged port on your vacuum system. Vent-valve Item Number TAV vent-valve B580-66-010 Page 30 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 37: Acx Air-Cooler
Active Gauge Cable, 0.5 m long D400-01-005 Active Gauge Cable, 1 m long D400-01-010 Active Gauge Cable, 3 m long D400-01-030 © Edwards Limited 2015. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 39: Engineering Diagrams
5.4), the connections between the Controller and the EXT pump are shown Figure The Active Gauge connector (which is specific to the EXC Controller) is shown in Figure © Edwards Limited 2015. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 40: Exc Controller To Ext Pump Connections
D. EXC Controller 5. Hall effect device 3 6. Pump temperature sensor EXC100E controller only; the EXC100L has an integral cable Page 34 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 41: Active Gauge Connector Pins
Power supply +24 V d.c. Power supply 0 V d.c. Not used Gauge identification signal Not used Not used TMP Normal status output Not used © Edwards Limited 2015. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited.

This manual is also suitable for:

Exc 100l

Edwards EXC 100E Instruction Manual

Introduction

Technical Data

Installation

Operation

Maintenance

Storage and Disposal

Service and Accessories

Engineering Diagrams

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