Edwards EXC120E Turbomolecular Pump Manuals

Manuals and User Guides for Edwards EXC120E Turbomolecular Pump. We have 1 Edwards EXC120E Turbomolecular Pump manual available for free PDF download: Instruction Manual

Edwards EXC120E Instruction Manual

Edwards EXC120E Instruction Manual (54 pages)

Turbomolecular pump controllers

Brand: Edwards | Category: Controller | Size: 1 MB

Table of Contents

Table of Contents
5
Introduction

9
- Scope and Definitions
  9
- Description
  10
- Controls and Indicators (EXC120/300/300M Only)
  11
- EXC120 Controller Front Panel
  12
- EXC300/300M Controller Front Panel
  13
- Bakeout Band Control (EXC120/300/300M Only)
  14
- Connection of an Active Gauge
  15
- Backing Pump Control (EXC120/300/300M Only)
  15
- Logic Interface
  15
- Introduction
  15
- Electrical Supplies
  16
- Control Inputs
  16
- Status Outputs
  17
- Analogue Outputs
  17
- Vent-Valve Control
  18
- Vent on Stop
  18
- Vent on Fail and Vent on Axial Emergency
  18
- Controller Fail Conditions
  19
- General
  19
- Internal Timer
  19
- Axial Emergency (EXC300M Only)
  20
- Electrical Connections
  20
- Rear Panel of the EXC120 Controller
  21
- Rear Panel of the EXC120E Controller
  22
- Rear Panel of the EXC300/300M Controller
  23
Technical Data

25
- Operating and Storage Conditions
  25
- Mechanical Data
  25
- Electrical Data
  25
- Electrical Connectors
  27
- Factory Settings
  27
- EXC120, EXC300 and EXC300M Controller Dimensions (MM)
  28
- EXC120E Controller Dimensions (MM)
  29
Installation

31
Operation

41
Maintenance

45
- Safety
  45
- Replace a Fuse
  45
- Introduction
  45
- Replace the Electrical Supply Fuse
  45
- Replace the Bakeout Band Fuse (EXC120/300/300M Only)
  45
- Fault Finding
  46
- Clean the Controller
  46
Storage and Disposal

47
- Storage
  47
- Disposal
  47
Spares and Accessories

49
- Introduction
  49
- Spares
  49
- Accessories
  49
- Pump-To-Controller Cable
  49
- BX Bakeout Band (EXC120/300/300M Only)
  49
- TAV Vent-Valve
  50
- ACX Air-Cooler
  50
- Active Vacuum Gauges
  51
Engineering Diagrams

53

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