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Micronix PPS-20 Series Reference Manual

Precision linear / stepper motor stage (open and closed loop versions)
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PPS-20
S e r i e s
Precision Linear Motor / Stepper Motor Stage
Reference Manual
(Open and Closed Loop Versions)

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  • Page 1 PPS-20 S e r i e s Precision Linear Motor / Stepper Motor Stage Reference Manual (Open and Closed Loop Versions)
  • Page 1 PPS-20 S e r i e s Precision Linear / Stepper Motor Stage Reference Manual (Open and Closed Loop Versions)
  • Page 2 PPS-20 Linear/Stepper Motor Positioner Stage Reference Manual Rev 3.08 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...
  • Page 2 PPS-20 Linear/Stepper Motor Positioner Stage Reference Manual Rev 3.03 MICRONIX USA, LLC 15375 Barranca Parkway, E-106 Irvine, CA 92618 Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...

  • Page 3: Table Of Contents

    Open loop Installation & Wiring Diagram 5.2.3 Closed Loop/Encoder Installation & Wiring Diagram Technical Specifications Dimensions 6.1.1 PPS-20 Stepper Motor Analog Encoder 6.1.2 PPS-20 Stepper Motor MII 6000 Digital Encoder 6.1.3 PPS-20 Linear Motor Analog Encoder MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 3: Table Of Contents

    PPS-20 Stepper Motor Analog Encoder 6.1.2 PPS-20 Stepper Motor MII 6000 Digital Encoder 6.1.3 PPS-20 Linear Motor Analog Encoder 6.1.4 PPS-20 Linear Motor MII 6000 Digital Encoder Stacking Configurations Configuration Examples Supplementary Information Maintenance MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...
  • Page 4 Encoder Module Pin-out A.6.2 Operating and Electrical Specifications A.6.3 Output Signals & Signal Termination for A quad B, Index and limits A.6.4 Resolution A.6.5 MII 6000 Digital Encoder Wiring Diagram A.6.6 Straight Through 25-Pin Feed Through MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...
  • Page 4 A.6.2 Operating and Electrical Specifications A.6.3 Output Signals & Signal Termination for A quad B, Index and limits A.6.4 Resolution A.6.5 MII 6000 Digital Encoder Wiring Diagram A.6.6 Straight Through 25-Pin Feed Through MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 5: Introduction

    (Shown in center position) Linear Motor – (LM-003) PPS-20 20 mm Closed Loop with 10 nm analog encoder PPS-20 20 mm Closed Loop (Shown in center position) with 2 nm digital encoder (Shown in center position) MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 5: Introduction

    (Shown in center position) (Shown in center position) Linear Motor – (LM-003) PPS-20 20mm Closed Loop with 10nm analog encoder PPS-20 20mm Closed Loop (Shown in center position) with 2nm digital encoder (Shown in center position) MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 6: Recommended Controllers

    PPS-20 LMSM Precision Stepper Stage Reference Manual Recommended Controllers The following controllers are available from MICRONIX USA: MMC-200 [Stepper Motor Versions] ▪ MMC-300 [Linear Motor Versions] ▪ Technical Data Motor option SM-007 LM-003 Speed, max. [mm/sec] Digital Digital Open Analog...

  • Page 6: Recommended Controllers

    PPS-20 LMSM Precision Stepper Stage Reference Manual Recommended Controllers The following controllers are available from MICRONIX USA: MMC-200 [Stepper Motor Versions] ƒ ƒ MMC-300 [Linear Motor Versions] Technical Data Motor option SM-002 LM-003 Speed, max. [mm/sec] Analog Digital Analog Digital...

  • Page 7: Model Configurations

    Order No. Stepper Motor SM-007 10mm Travel 18mm Travel 26mm Travel 51mm Travel None Analog (1V Digital (RS-422) Digital Low Cost Magnetic Atmospheric High Vacuum, 10 mbar Contact MICRONIX USA for custom applications and stacking configurations. MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 7: Model Configurations

    Open Loop Analog (1V Digital (RS-422) No Limit Switch Magnetic Optical* Non-vacuum Vacuum prepared, 10 mbar ¿ Only available with option 3 digital encoder selection. Contact MICRONIX USA for custom applications and stacking configurations. MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 8: Pps-20 Lm Order Numbers

    PPS-20 LM Order Numbers PPS-20 Order No. Linear Motor LM-003 11mm Travel 18mm Travel 25mm Travel Analog (1V Digital (RS-422) Digital Low Cost None Magnetic Atmospheric Contact MICRONIX USA for custom applications and stacking configurations. MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 8: Pps-20 Lm Order Numbers

    25mm Travel Analog (1V ), 10nm Digital (RS-422), 2nm No Limit Switch Magnetic Optical* Non-vacuum ¿ Only available with option 3 digital encoder selection. Contact MICRONIX USA for custom applications and stacking configurations. MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 9: Preparing To Install The Pps-20 Lmsm Stage

    Locate away from water, heat, and electrical noise ▪ Package Contents If product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: PPS-20 Linear Stage ▪...

  • Page 9: Preparing To Install The Pps-20 Lmsm Stage

    ƒ ƒ Locate away from water, heat, and electrical noise Package Contents If product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: ƒ PPS-20 Linear Stage ƒ...

  • Page 10: Installing The Pps-20 Lmsm Stage

    2. Move carriage via controller*, if 1. Move carriage via controller*, if necessary, to access remaining necessary, to access mounting mounting hole. Install M2 SHCS as hole. Insert Pins and M2 SHCS as shown. shown. MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 10: Installing The Pps-20 Lmsm Stage

    Install M2 SHCS as hole. Insert Pins and M2 SHCS as shown. shown. Stepper Motor Linear Motor Travel Travel 12mm 11mm 18mm 18mm 26mm 25mm 51mm MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 11: X-Y Mounting

    1. Move Y-Axis Stage carriage via 10mm 11mm controller*, if necessary, to access necessary, to access remaining 18mm 18mm mounting hole. Install M2 SHCS as mounting hole. Install M2 SHCS as 26mm 25mm shown. shown. 51mm MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 11: X-Y Mounting

    2. Move carriage via controller*, if 1. Move Y-Axis Stage carriage via necessary, to access remaining controller*, if necessary, to access mounting hole. Install M2 SHCS as mounting hole. Install M2 SHCS as shown. shown. MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 12: Connecting The Pps-20 Lmsm Stage

    D-sub 9 Pin male Motor Cable be connected to a compatible controller. No other cables or components are required. Note: Open loop configurations are not available for linear motor versions. Stepper Motor Version MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 12: Connecting The Pps-20 Lmsm Stage

    D-sub 9 Pin male Motor Cable be connected to a compatible controller. No other cables or components are required. Note: Open loop configurations are not available for linear motor versions. Stepper Motor Version MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 13: Closed Loop/Encoder Installation & Wiring Diagram

    Using the PPS-20 LMSM stage with an encoder requires a closed loop compatible controller that recognizes encoder feedback. Connect the stage as shown below. 5.1.2.1 Analog Encoder Wiring Diagram Stepper Motor Version Linear Motor Version MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 13: Closed Loop/Encoder Installation & Wiring Diagram

    Using the PPS-20 LMSM stage with an encoder requires a closed loop compatible controller that recognizes encoder feedback. Connect the stage as shown below. 5.1.2.1 Analog Encoder Wiring Diagram Stepper Motor Version Linear Motor Version MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...
  • Page 14 PPS-20 LMSM Precision Stepper Stage Reference Manual 5.1.2.2 MII 6000 Digital Encoder Wiring Diagram Stepper Motor Version Linear Motor Version MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...
  • Page 14 PPS-20 LMSM Precision Stepper Stage Reference Manual 5.1.2.2 MII 6000 Digital Encoder Wiring Diagram Stepper Motor Version Linear Motor Version MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 15: Vacuum Environments

    The vacuum compatible PPS-20 LMSM will be supplied with wiring for a straight through feed through, not a cross over gender changer. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow for functionality testing prior to installation in a vacuum chamber.

  • Page 15: Vacuum Environments

    The vacuum compatible PPS-20 LMSM will be supplied with wiring for a straight through feed through, not a cross over gender changer. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow for functionality testing prior to installation in a vacuum chamber.

  • Page 16: Closed Loop/Encoder Installation & Wiring Diagram

    The vacuum compatible PPS-20 LMSM stage will be supplied with wiring for a straight through feed through, not a cross over gender bender. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow for functionality testing prior to installation in a vacuum chamber.

  • Page 16: Closed Loop/Encoder Installation & Wiring Diagram

    The vacuum compatible PPS-20 LMSM stage will be supplied with wiring for a straight through feed through, not a cross over gender bender. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow for functionality testing prior to installation in a vacuum chamber.

  • Page 17: Technical Specifications

    6. Technical Specifications Dimensions 6.1.1 PPS-20 Stepper Motor Analog Encoder TRAVEL 20 16 41.3 61.3 30 16 41.3 72.1 40 36 35.7 75.8 80 50 32.1 110.7 * Grey parts for external closed loop only MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 17: Technical Specifications

    Dimensions 6.1.1 PPS-20 Stepper Motor Analog Encoder TRAVEL 15 16 47.7 25 16 57.7 10 3 35 36 57.7 18 7 14 75 50 87.7 * Grey parts for external closed loop only MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 18: Pps-20 Stepper Motor Mii 6000 Digital Encoder

    Reference Manual 6.1.2 PPS-20 Stepper Motor MII 6000 Digital Encoder TRAVEL 20 16 41.3 61.3 30 16 41.3 72.1 40 36 35.7 75.8 80 50 32.1 110.7 * Grey parts for external closed loop only MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 18: Pps-20 Stepper Motor Mii 6000 Digital Encoder

    PPS-20 Stepper Motor MII 6000 Digital Encoder TRAVEL 15 16 47.7 25 16 57.7 10 3 35 36 57.7 18 7 14 75 50 87.7 * Grey parts for external closed loop only MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 19: Pps-20 Linear Motor Analog Encoder

    Precision Stepper Stage Reference Manual 6.1.3 PPS-20 Linear Motor Analog Encoder TRAVEL 1 2 15 16 1 2 25 16 54.5 10 3 6 35 36 66.8 * Grey parts for external closed loop only MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 19: Pps-20 Linear Motor Analog Encoder

    Precision Stepper Stage Reference Manual 6.1.3 PPS-20 Linear Motor Analog Encoder TRAVEL 1 2 15 16 1 2 25 16 54.5 10 3 6 35 36 66.8 * Grey parts for external closed loop only MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 20: Pps-20 Linear Motor Mii 6000 Digital Encoder

    Precision Stepper Stage Reference Manual 6.1.4 PPS-20 Linear Motor MII 6000 Digital Encoder TRAVEL 1 2 15 16 1 2 25 16 54.5 10 3 6 35 36 66.8 * Grey parts for external closed loop only MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 20: Pps-20 Linear Motor Mii 6000 Digital Encoder

    Reference Manual 6.1.4 PPS-20 Linear Motor MII 6000 Digital Encoder TRAVEL 1 2 15 16 1 2 25 16 54.5 10 3 6 35 36 66.8 * Grey parts for external closed loop only MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 21: Stacking Configurations

    ➢ Note: Stacking compatibility for all motor configurations. ➢ Positioning according to: No Adapters X-Y 11x11mm X-Y 11x25mm X-Y 18x18mm X-Y 26x11mm X-Y 51x18mm [with PPS-28 Linear Stage] Using Adapter Plate (P/N: 430509) X-Y-Z 12x12x12mm [3 PPS-20 SM Stages] MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 21: Stacking Configurations

    No Adapters X-Y 11x11mm X-Y 11x25mm X-Y 18x18mm X-Y 26x11mm X-Y 51x18mm [with PPS-28 Linear Stage] Using Adapter Plate (P/N: 430509) X-Y-Z 51x18x12mm X-Y-Z 12x12x12mm [3 PPS-20 SM Stages] [3 PPS-20 SM Stages] MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 22: Supplementary Information

    1 millimeter 0.0394 inches 1 micron 0.0000394 inches 1 Newton 0.2248 lbs 1 Newton-meter 8.85 in-lbs Accessories 430509 Z-Bracket Adapter Plate Used to adapt the PPS-20 series to a perpendicular assembly for XZ mounting configurations. MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 22: Supplementary Information

    0.0394 inches 1 micron 0.0000394 inches 1 Newton 0.2248 lbs 1 Newton-meter 8.85 in-lbs Accessories 430509 Z-Bracket Adapter Plate Used to adapt the PPS-20 series to a perpendicular assembly for XZ mounting configurations. MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 23: Appendix

    Stepper Motor Motor Type 2 Phase Bipolar Phase Current 0.3 A Max Step Angle 1.8° Full steps per Rev Coil-Resistance 21 Ohms Coil-Inductance 4.2 mH Holding Torque 6.5 mHm Pitch 0.5 mm/rev Resolution/Full step 2.5 μm MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 23: Appendix

    Stepper Motor Motor Type 2 Phase Bipolar Phase Current 0.2 A Step Angle 18° Fullsteps per Rev Coil-Resistance 13 Ohms Coil-Inductance 3.5 mH Holding Torque 2.4 mHm Pitch 0.5 mm/rev Resolution/Fullstep 2.5 m MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 24: Linear Voice-Coil Motor

    Coil Clearance Per Side 0.33 mm 0.013 in Coil Assy Mass 9.0 gr 0.32 oz Body Mass 13.8 gr 0.49 oz Coil Resistance 4.6 Ohms Coil Inductance @120 Hz 0.7 mH Max Continuous Power 4.5 W MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 24: Linear Voice-Coil Motor

    Coil Clearance Per Side 0.33 mm 0.013 in Coil Assy Mass 9.0 gr 0.32 oz Body Mass 13.8 gr 0.49 oz Coil Resistance 4.6 Ohms Coil Inductance @120 Hz 0.7 mH Max Continuous Power 4.5 W MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...
  • Page 25 Coil Clearance Per Side 0.33 mm 0.013 in Coil Assy Mass 10.8 gr 0.38 oz Body Mass 17 gr 0.60 oz Coil Resistance 5.9 Ohms Coil Inductance @120 Hz 1.0 mH Max Continuous Power 5.0 W MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...
  • Page 25 Coil Clearance Per Side 0.33 mm 0.013 in Coil Assy Mass 10.8 gr 0.38 oz Body Mass 17 gr 0.60 oz Coil Resistance 5.9 Ohms Coil Inductance @120 Hz 1.0 mH Max Continuous Power 5.0 W MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 26: Magnetic (Hall Effect) Limit Switches

    Open Collector (NPN) Contact Type Normally Closed Operating Temperature -40 to +150 °C A.3.2 Limit Switch Schematic Limit Switch Common (Pin 9) - Limit Switch (Pin 7) + Limit Switch (Pin 6) Power Pin 8 MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 26: Magnetic (Hall Effect) Limit Switches

    Open Collector (NPN) Contact Type Normally Closed Operating Temperature -40 to +150 °C A.3.2 Limit Switch Schematic Limit Switch Common (Pin 9) - Limit Switch (Pin 7) + Limit Switch (Pin 6) Power Pin 8 MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 27: Open Loop Vacuum Wiring Diagram

    -Motor Motor Phase A+ Yellow Motor Phase A- Motor Phase B+ Blue Motor Phase B- Orange Shield Limit Switch + Violet Limit Switch - Blue Orange Limit Ground Brown A.4.1 Straight Through 9-Pin Feed Through MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 27: Open Loop Vacuum Wiring Diagram

    Limit Switch - Violet 6 (Violet) Limit Switch + Blue 7 (White - Violet TP) Orange 8 (Red) Limit Ground Brown 9 (Black) Shield 5 (Shield) Casing A.4.1 Straight Through 9-Pin Feed Through MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 28: Using An Analog Encoder

    Not in Use A.5.3 Operating and Electrical Specifications Power Supply 5VDC ±5% @ 330mA (60mA for sensor) Operating Temperature 0 to 70°C Humidity 10 - 90% RH non-condensing A.5.4 Analog Output (Pins 1,2,6 and 7) MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 28: Using An Analog Encoder

    Operating and Electrical Specifications Power Supply 5VDC ±5% @ 330mA (60mA for sensor) Operating Temperature 0 to 70°C Humidity 10 - 90% RH non-condensing A.5.4 Analog Output (Pins 1,2,6 and 7) A.5.5 Index Window (Pins 3) MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 29: Resolution

    6 (Shield) Casing 4 (Red) Ground Black 17 (Black) Cos+ Brown 3 (Brown) Cos- Orange 16 (White - Brown TP) Sin+ Yellow 2 (Yellow) Sin- Green 15 (White - Yellow TP) Index+ Violet 1 (Violet) MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 29: Resolution

    Cos+ Brown 3 (Brown) Cos- Orange 16 (White - Brown TP) Sin+ Yellow 2 (Yellow) Sin- Green 15 (White - Yellow TP) Index+ Violet 1 (Violet) Index- Blue 14 (White - Violet TP) MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

  • Page 30: Using The Digital Encoder Module

    A Red or Yellow Signal Level LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders.

  • Page 30: Using The Digital Encoder Module

    A Red or Yellow Signal Level LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders.

  • Page 31: Operating And Electrical Specifications

    All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder an MMC controller has an achievable resolution of 2nm. MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 31: Operating And Electrical Specifications

    All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder an MMC controller has an achievable resolution of 2nm. MICRONIX USA,LLC Irvine, California Rev: 3.03...

  • Page 32: Mii 6000 Digital Encoder Wiring Diagram

    PPS-20 LMSM Precision Stepper Stage Reference Manual MICRONIX USA,LLC Rev: 3.07 www.micronixusa.com...

  • Page 32: Mii 6000 Digital Encoder Wiring Diagram

    CLK+ White - Brown TP 14 (White - Brown TP) Shield 7 (Shield) Š Note: For the pinout of cable E, refer to the appropriate MMC manual. A.6.6 Straight Through 25-Pin Feed Through MICRONIX USA,LLC Irvine, California Rev: 3.03 www.micronixsusa.com...

This manual is also suitable for:

Sm-002Lm-003Pps-20smPps-20lm

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