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Micronix PR-20 Series Reference Manual

Piezo rotation stage
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PR-20
S e r i e s
Piezo Rotation Stage
Reference Manual
(Open and Closed Loop Versions)

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Summary of Contents for Micronix PR-20 Series

  • Page 1 PR-20 S e r i e s Piezo Rotation Stage Reference Manual (Open and Closed Loop Versions)
  • Page 2 PR-20 Piezo Rotation Stage Reference Manual Rev 1.0 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...

  • Page 3: Table Of Contents

    A.2.3 Piezo Motor Vacuum Open Loop Pinout .................... 13 A.2.4 Piezo Motor Vacuum Closed Loop Absolute Pinout ................13 A.2.5 Feedthroughs ............................14 Using an Absolute Encoder ........................... 15 A.3.1 Absolute Encoder Pinout ........................15 Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 4: Introduction

    Piezo Motor – (PM-002) Carriage Base Figure 1-A. PR-20, Open Loop & Closed Loop Version Recommended Controllers The following controllers are recommended: MMC-100 (open loop only) • • MMC-110 (open loop or absolute encoder) Technical Data See Datasheet. Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 5: Model Configurations

    Relative humidity between 20 - 80%. • Locate away from water, heat, and electrical noise. Package Contents If the product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: •...

  • Page 6: Installing The Pr-20 Stage

    0.16 Nm recommended torque. The minimum screw length required for mounting is 14 mm. 4x M1.6 Socket Head Cap Screws Direction of Travel Customer Supplied Base Plate or Mounting Surface Figure 4-A. PR-20 Installation Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 7: Dimensions

    PR-20 Piezo Rotation Stage Reference Manual 5. Dimensions PR-20 Open Loop and Absolute Configuration Dimensions Recommended General Mounting Pattern Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 8: Connecting The Pr-20 Stage

    Connect the stage as shown below. For details regarding the pinout see Appendix A.2.1. Cable Descriptions: Motor Cable (Male Dsub9 Pin, 1.5m PVC Black Cable) Figure 6-A. PR-20, Open Loop, Atmospheric Wiring Diagram Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 9: Closed Loop (Encoder), Atmospheric Wiring Diagram

    Absolute Encoder, Atmospheric Wiring Diagram Cable Descriptions: A. Motor Cable (Male Dsub9 Pin to Male Dsub9 Pin, 1.5m PVC Black Cable) Encoder Cable (Female Dsub9 Pin Module, 1.5m PVC Black Cable) Figure 6-B. PR-20, Absolute Encoder, Atmospheric Wiring Diagram Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 10: Vacuum Environments

    The vacuum compatible PR-20 will be supplied with wiring for a straight through feed- through not a cross over gender changer. MICRONIX USA supplies test connectors that simulate the vacuum feed-through to allow functionality testing prior to installation in a vacuum chamber, see Appendix A.2.5 for feedthrough pins.

  • Page 11: Closed Loop (Encoder), Vacuum Wiring Diagram

    D. Encoder Breakout Cable (Female Dsub 9 Pin to Female Dsub 9 Pin, 1.5m PVC Black Cable) Temporary vacuum test connectors are standard. Requires customer supplied feedthrough connector. Figure 6-D. PR-20, Absolute Encoder, Vacuum Wiring Diagram Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 12: Supplementary Information

    Reference Manual 7. Supplementary Information Maintenance The PR-20 series of rotary stages utilizes a maintenance free design. Do not modify the • stage or perform any maintenance unless specifically instructed to do so by MICRONIX USA. If the stage is not performing up to the original specifications, please contact MICRONIX USA.

  • Page 13: Appendix

    Piezo Rotation Stage Reference Manual A. Appendix A.1 2-Phase Piezo Motor Wiring Diagram A.1.1 Piezo Operating and Electrical Specifications Voltage 60V maximum Capacitance 150nf ±15% Operating Temperature 50°C maximum A.2 D-subminiature Connector Nomenclature & Pinouts Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 14: Piezo Motor Atmospheric Open Loop Pinout

    PR-20 Piezo Rotation Stage Reference Manual A.2.1 Piezo Motor Atmospheric Open Loop Pinout See Figure 6-A. A.2.2 Piezo Motor Atmospheric Closed Loop Absolute Pinout See Figure 6-B. Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 15: Piezo Motor Vacuum Open Loop Pinout

    PR-20 Piezo Rotation Stage Reference Manual A.2.3 Piezo Motor Vacuum Open Loop Pinout See Figure 6-C. A.2.4 Piezo Motor Vacuum Closed Loop Absolute Pinout See Figure 6-D. Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 16: Feedthroughs

    PR-20 Piezo Rotation Stage Reference Manual A.2.5 Feedthroughs Rev: 1.0 MICRONIX USA,LLC www.micronixusa.co...

  • Page 17: Using An Absolute Encoder

    Reference Manual A.3 Using an Absolute Encoder The MICRONIX USA absolute encoder operates using standard BiSS C-mode (continuous) interface, transmitting 32-bits of position data on each request. The controller will clock position acquisitions via the MA signal. The SLO signal will transmit position data from the encoder.

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