Related Manuals for Micronix PPS-28 Series
Summary of Contents for Micronix PPS-28 Series
- Page 1 PPS-28 S e r i e s Precision Piezo Stage Reference Manual (Open and Closed Loop Versions)
- Page 2 PPS-28 Piezo Positioner Stage Reference Manual Rev 3.04 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...
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Page 3: Table Of Contents
Configuration Examples (Additional configurations available upon request)............14 Supplementary Information Maintenance ................................15 Units and Conventions ............................15 Appendix Electrical Connection ............................. 16 9.1.1 DB-9 Male Motor Connector ......................... 16 9.1.2 Encoder Pinout .............................. 16 MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... - Page 4 Operating and Electrical Specifications ......................21 9.5.4 Analog Output (Pins 1,2,6, and 7)........................21 9.5.5 Index Window (Pins 3) ........................... 21 9.5.6 Resolution ..............................22 9.5.7 Analog Encoder Wiring Diagram ........................22 9.5.8 Straight Through 15-Pin Feed Through ......................23 MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com...
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Page 5: Introduction
Encoder Head Encoder Bracket PPS-28 20mm Open Loop PPS-28 20mm with external 2nm encoder Or Internal 10nm Encoder (Shown in center position) (Shown in center position) PPS-28 20mm with external Analog encoder (Shown in center position) MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 6: Recommended Controllers
PPS-28 Piezo Positioner Stage Reference Manual Recommended Controllers The following controllers are available from MICRONIX USA: MMC-100 ▪ MMC-110 ▪ Technical Data Motor PM-002 Speed Max. (mm/sec) 2 (MMC-100), 10 (MMC-110) Resolution Typical (nm) <1 (open loop), 2 (digital encoder),... -
Page 7: Model Configurations
51mm Travel 76mm Travel 102mm Travel Open Loop Analog (1Vpp), 10nm Digital (RS-422), 1nm No Limit Switch Magnetic Non-vacuum Vacuum prepared, 10 mbar Vacuum prepared, 10 mbar Contact MICRONIX USA for custom applications and stacking configurations. MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 8: Preparing To Install The Pps-28
Locate away from water, heat, and electrical noise ▪ Package Contents If product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: PPS-28 Linear Stage ▪... -
Page 9: Installing The Pps-28
1. Align Carriage with Clearance 2. Align carriage with Hole. Install Dowel Pins and M2 remaining clearance hole Socket Head Cap Screw and install second M2 Socket Head Cap Screw Travel 26mm 51mm 76mm 120 80 102mm 150 80 MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 10: X-Y Mounting
Holes. Install Dowel Pins holes and install and M2 Socket Head Cap second M2 Socket Screw Head Cap Screw Note: For stages assembled in an XY configuration in factory do not require disassembly for base mounting MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 11: Connecting The Pps-28
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram Using the PPS-28 stage with an encoder requires a closed loop compatible controller (MMC-100 or MMC-110) that recognizes encoder feedback. Connect the stage as shown below. MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... - Page 12 For a PPS-28 with a digital encoder, connect the stage as shown below using the supplied 15 to 9 pin cable to connect the Encoder Module to the Controller. PPS-28 Shown with 2nm External Encoder MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com...
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Page 13: Vacuum Environments
The vacuum compatible PPS-28 will be supplied with wiring for a straight through feed through not a cross over gender bender. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow functionality test prior MICRONIX USA,LLC Rev: 3.04... - Page 14 PPS-28 Piezo Positioner Stage Reference Manual to installation in a vacuum chamber. For details regarding the pin-out and feed through specifications see the Appendix A.4.5, A.5.5. 5.2.3.1 Analog Encoder Wiring Diagram MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com...
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Page 15: Dimensions
Digital Encoder Wiring Diagram 6. Dimensions PPS-28 20mm with Digital Encoder. * Grey parts for external closed loop only Travel 1 40 26mm 5 50 51mm 112 7 80 76mm 150 102mm 142 9 80 MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 16: Pps-28 20Mm With Analog Encoder
1 40 26mm 5 50 51mm 112 7 80 76mm 150 102mm 142 9 80 7. Stacking Configurations Configuration Examples (Additional configurations available upon request) PPS-28, PPS-20 Using Adapter Plate (P/N: 430517) PPS-28 & PR-32 MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 17: Maintenance
Reference Manual 8. Supplementary Information Maintenance The PPS-28 series of Linear Piezo stages utilizes a maintenance free design. Do not ▪ modify the stage or perform any maintenance unless specifically instructed to do so by MICRONIX USA personal. If the stage is not performing up to the original specifications, please contact MICRONIX USA. -
Page 18: Appendix
Brown B+/Sin+ Grey Yellow Index+ Violet Violet Black & Inside shield Black & Inside shield A-/Cos- Orange Orange B-/Sin- White Green Index- Blue Blue Shield Outside Shield Outside Shield 2 Phase Piezo Motor Wiring Diagram MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 19: Open Loop Vacuum Wiring Diagram
PPS-28 Piezo Positioner Stage Reference Manual Open Loop Vacuum Wiring Diagram 9.3.1 Straight Through 9-Pin Feed Through MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 20: 26Busing The Digital Encoder Module
A Red or Yellow Signal Level LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders. -
Page 21: Operating And Electrical Specifications
All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder the MMC-100 has an achievable resolution of 2nm. MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 22: Digital Encoder Wiring Diagram
Index - White (Purple TP) 4 White (Yellow TP) 5 White (Brown TP) 6 +5VDC Ground Black Index + Purple Yellow Female PEEK Dsub25 Connector - Rear View Brown 9.4.6 Straight Through 25-Pin Feed Through MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 23: Using An Analog Encoder
Operating and Electrical Specifications Power Supply 5VDC ±5% @ 330mA (60mA for sensor) Operating Temperature 0 to 70°C Humidity 10 - 90% RH non-condensing 9.5.4 Analog Output (Pins 1,2,6, and 7) 9.5.5 Index Window (Pins 3) MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 24: Resolution
3 (Red) Cos- Orange 4 (White - Brown TP) Sin+ Yellow 5 (Yellow) Sin- Green 12 (White - Yellow TP) Index- Blue 11 (Violet - White T P) Index+ Violet 10 (Violet) Shield 9 (Shield) Casing MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com... -
Page 25: Straight Through 15-Pin Feed Through
PPS-28 Piezo Positioner Stage Reference Manual 9.5.8 Straight Through 15-Pin Feed Through MICRONIX USA,LLC Rev: 3.04 www.micronixusa.com...
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