Micronix PPS-20 Series Reference Manual
Precision piezo stage
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Summary of Contents for Micronix PPS-20 Series
- Page 1 PPS-20 S e r i e s Precision Piezo Stage Reference Manual (Open and Closed Loop Versions)
- Page 2 PPS-20 Piezo Positioner Stage Reference Manual Rev 3.12 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...
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Page 3: Table Of Contents
A.5.3 Analog Output (Pins 1,2,6, and 7) ..............................23 A.5.4 Index Window (Pins 3) ..................................23 A.5.5 Resolution ......................................24 A.5.6 Analog Encoder Wiring Diagram ................................ 24 A.5.7 Straight Through 15-Pin Feed Through .............................. 25 MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 4: Introduction
PPS-20 20mm Closed Loop with 10nm Analog encoder PPS-20 20mm Open Loop Scale Bracket (Shown in center position) (Shown in center position) PPS-20 20mm Closed Loop with 2nm digital encoder (Shown in center position) Encoder Bracket Encoder Head MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 5: Recommended Controllers
PPS-20 Piezo Positioner Stage Reference Manual Recommended Controllers The following controllers are available from MICRONIX USA for piezo stages: MMC-100 ▪ MMC-110 ▪ Technical Data Motor PM-002 Speed Max. (mm/sec) 2 (MMC-100), 10(MMC-110) Resolution Typical (nm) <1 (open loop), 2 (digital encoder),... -
Page 6: Pps-20 Order Numbers
18mm Travel 26mm Travel 51mm Travel Open Loop Analog (1Vpp), 10nm Digital Encoder, 2nm No Limit Switch Magnetic Non-vacuum Vacuum prepared, 10 mbar Vacuum prepared, 10 mbar Contact MICRONIX USA for custom applications and stacking configurations. MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 7: Preparing To Install The Pps-20
Locate away from water, heat, and electrical noise ▪ Package Contents If product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: PPS-20 Linear Stage ▪... -
Page 8: Installing The Pps-20
Customer Supplied Base Plate or Mounting Surface Align carriage with remaining Align carriage with a clearance hole and install clearance hole and install an second M2 Socket Head Cap M2 Socket Head Cap Screw Screw MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 9: X-Y Mounting
Open Loop Installation & Wiring Diagram Connecting the PPS-20 in an open loop configuration only requires that the D-sub 9 Pin male Motor Cable be connected to a compatible controller. No other cables or components are needed. MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... - Page 10 PPS-20 Piezo Positioner Stage Reference Manual MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com...
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Page 11: Closed Loop/Encoder Installation & Wiring Diagram
Using the PPS-20 stage with an encoder requires a closed loop compatible controller (MMC-100 or MMC-110) that recognizes encoder feedback. Connect the stage as shown below. 5.1.2.1 Analog Encoder Wiring Diagram 5.1.2.2 Digital Encoder Wiring Diagram MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 12: Vacuum Environments
(such as wearing gloves, clean room clothing, etc.) when handling the stage as to avoid any contaminants. Maximum Bake-out temperature is 100°C. MICRONIX USA supplies the stage with vacuum compatible connectors: 9-pin female PEEK connectors for open loop, 15-Pin female PEEK connector for closed loop with analog encoder, 25-pin female PEEK connector for closed loop with digital encoder. -
Page 13: Closed Loop/Encoder Installation & Wiring Diagram
The vacuum compatible PPS-20 will be supplied with wiring for a straight through feed through not a cross over gender bender. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow functionality test prior to installation in a vacuum chamber. - Page 14 PPS-20 Piezo Positioner Stage Reference Manual 5.2.3.1 Analog Encoder Wiring Diagram 5.2.3.2 Digital Encoder Wiring Diagram MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com...
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Page 15: Dimensions
PPS-20 with Digital Encoder A B C Travel 20 12mm 15 16 30 18mm 25 16 40 26mm 10 3 35 36 80 51mm 18 7 14 75 36 * Grey parts for external closed loop only MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... - Page 16 PPS-20 with Analog Encoder Travel A B C 20 12mm 15 16 30 18mm 25 16 40 26mm 10 3 35 36 80 51mm 18 7 14 75 36 * Grey parts for external closed loop only MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com...
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Page 17: Stacking Configurations Configurations Examples
(Additional Configurations available upon request) 18mm (no carriage) -12mm No carriage 18mm-12mm Back to back PPS-28 X-Y (back to back) 38mm (X-Axis) – 26mm (Y-Axis) Using Z-Adapter (P/N: 430509) X-Y-Z X-Y-Z PPS-20 XYZ X-38mm, Y-18mm, Z-26mm MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 18: Maintenance
Reference Manual Supplementary Information Maintenance The PPS-20 series of linear piezo stages utilizes a maintenance free design. Do not • modify the stage or perform any maintenance unless specifically instructed to do so by MICRONIX USA personal. If the stage is not performing up to the original specifications, please contact MICRONIX USA. -
Page 19: Appendix
Brown B+/Sin+ Grey Yellow Index+ Violet Violet Black & Inside shield Black & Inside shield A-/Cos- Orange Orange B-/Sin- White Green Index- Blue Blue Shield Outside Shield Outside Shield 2 Phase Piezo Motor Wiring Diagram MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 20: Open Loop Vacuum Wiring Diagram
PPS-20 Piezo Positioner Stage Reference Manual Open Loop Vacuum Wiring Diagram A.3.1 Straight Through 9-Pin Feed Through MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 21: Using The Digital Encoder Module
A Red or Yellow Signal Level LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders. -
Page 22: Operating And Electrical Specifications
All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder the MMC-100 has an achievable resolution of 2nm. MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 23: A.4.5 Digital Encoder Wiring Diagram
Color Index - White (Purple TP) 4 Female Dsub9 Connector - Rear View White (Yellow TP) 5 White (Brown TP) 6 +5VDC Ground Black Index + Purple Yellow Brown Male Dsub9 Connector - Rear View MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 24: Straight Through 25-Pin Feed Through
PPS-20 Piezo Positioner Stage Reference Manual A.4.6 Straight Through 25-Pin Feed Through MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 25: Using An Analog Encoder
Operating and Electrical Specifications Power Supply 5VDC ±5% @ 330mA (60mA for sensor) Operating Temperature 0 to 70°C Humidity 10 - 90% RH non-condensing A.5.3 Analog Output (Pins 1,2,6, and 7) A.5.4 Index Window (Pins 3) MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 26: Resolution
Cos+ Brown Brown Cos- Orange White (Brown TP) 4 Sin+ Yellow Yellow Sin- Green White (Yellow TP) 12 Index- Blue Violet (White TP) Index+ Violet Violet Shield Casing Female PEEK Dsub15 Connector - Rear View MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com... -
Page 27: Straight Through 15-Pin Feed Through
PPS-20 Piezo Positioner Stage Reference Manual A.5.7 Straight Through 15-Pin Feed Through MICRONIX USA,LLC Rev: 3.12 www.micronixusa.com...
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