Micronix PPS-20 Series Reference Manual
Piezo motor precision positioner stage
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Summary of Contents for Micronix PPS-20 Series
- Page 1 PPS-20 S e r i e s Precision Piezo Stage Reference Manual (Open and Closed Loop Versions)
- Page 2 PPS-20 Piezo Motor Precision Positioner Stage Reference Manual Rev 3.4 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...
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Page 3: Table Of Contents
Using a Digital Encoder ..........................21 A.4.1 Encoder Overview ..........................21 A.4.2 Operating and Electrical Specifications ..................... 21 A.4.3 Output Signals & Signal Termination for A quad B, Index and limits ..........21 A.4.4 Resolution ..............................21 MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... - Page 4 Legacy PPS-20PM with UHV MII 6000V Digital Encoder Dimensions ..........29 A.6.5 Legacy Digital MII6000V Encoder, Ultra High Vacuum Wiring Diagram ......... 30 A.6.6 Legacy UHV Digital Encoder Module ....................31 A.6.7 Resolution ..............................32 MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com...
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Page 5: Introduction
Vacuum, cryogenic, and non-magnetic versions available Carriage Base Encoder Figure 1-A. PPS-20PM, Piezo Motor, Open Loop Version (left), Closed Loop Version (right) Recommended Controllers The following controllers are available from MICRONIX USA: • MMC-100 • MMC-110 • NanoDrive Technical Data and Ordering Information See Datasheet on website. -
Page 6: Preparing To Install The Pps-20Pm Stage
Relative humidity between 20-80%. • Locate away from water, heat, and electrical noise. Package Contents If the product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: •... -
Page 7: Installing The Pps-20Pm Stage
Please note, it is possible to move the carriage of the piezo motor configurations manually without damaging the stage. 2x M2 Socket Head Cap Screws 2x M1.5 Dowel Pins Customer Supplied Direction Base Plate or of Travel Mounting Surface Figure 3-A. PPS-20PM Installation MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 8: X-Y Mounting
X-Y Mounting It is possible to mount the 20 mm length base versions directly onto any length bottom axis carriage without the use of an adapter bracket. Contact MICRONIX USA for additional or custom adapter plate information. 1. Install the bottom stage to the mounting surface as shown in Section 3.1.1. -
Page 9: Dimensions
PPS-20PM Precision Positioner Stage Reference Manual 4. Dimensions PPS-20PM Standard Dimensions Recommended General Mounting Pattern It is recommended to use a pin-slot hole pattern for dowel pin alignment. MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 10: Stacking Configurations
• Positioning according to: No Adapters XY 12mm x 12mm XY 12mm x 12mm Back-to-Back XY 12mm x 18mm Using Z Bracket PN: 430509 430509 430509 XYZ 12mm x 12mm x 12mm XYZ 51mm x 12mm x 26mm MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... - Page 11 Using Z Bracket PN: 430507 and XY Bracket PN: 431331 430507 430507 431331 431331 XYZ 26mm x 26mm x 26mm XYZ 26mm x 26mm x 12mm Full travel is achieved by 12mm stage. Limited travel for 18mm, 26mm, 51mm travel stages in this orientation. MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com...
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Page 12: Accessories
Precision Positioner Stage Reference Manual Accessories 430507 430508 Z-Bracket Adapter Z-Bracket Adapter Used to adapt the PPS-20 series to a Used to adapt the PPS-20 series to a perpendicular assembly for XZ perpendicular assembly for XZ mounting configurations. mounting configurations. 430509... -
Page 13: Connecting The Pps-20Pm Stage
Piezo Motor Atmospheric Open Loop Pinout Cable A Pinout for PPS-20-1X000 Dsub9M Description Color Phase 1 Phase 2 White (Green TP) Ground Black/Green Shield Casing Limit Switch - White (Violet TP) Limit Switch + Violet White (Grey) Grey MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 14: Closed Loop (Encoder), Atmospheric Wiring Diagram
Phase 1 Cos+ Blue Phase 2 White (Green TP) Sin+ Brown Ground Black/Green Index+ Violet Shield Casing Grey White (Grey TP) Cos- White (Blue TP) Sin- White (Brown TP) Index- White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... - Page 15 Description Color Description Color Phase 1 Blue Phase 2 White (Green TP) Brown Ground Black/Green Index+ Violet Shield Casing Grey White (Grey TP) White (Blue TP) White (Brown TP) Index- White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com...
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Page 16: Vacuum Environments
The vacuum compatible PPS-20PM will be supplied with wiring for a straight through feed-through, not a cross over gender changer. MICRONIX USA supplies test connectors that simulate the vacuum feed-through to allow for functionality testing prior to installation in a vacuum chamber, see Appendix A.2 for feedthrough pins. -
Page 17: Open Loop, Vacuum Wiring Diagram
Color Color Phase 1 Phase 2 White (Green TP) White (Green TP) Ground Black/Green Black/Green Limit Switch - White (Violet TP) White (Violet TP) Limit Switch + Violet Violet White (Grey) White (Grey) Grey Grey MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 18: Closed Loop (Encoder), Vacuum Wiring Diagram
Brown Index+ Violet Violet Grey Grey White (Grey TP) White (Grey TP) Cos- White (Blue TP) White (Blue TP) Sin- White (Brown TP) White (Brown TP) Index- White (Violet TP) White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... - Page 19 Blue Brown Brown Index+ Violet Violet Grey Grey White (Grey TP) White (Grey TP) White (Blue TP) White (Blue TP) White (Brown TP) White (Brown TP) Index- White (Violet TP) White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com...
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Page 20: Supplementary Information
USA personnel. If the stage is not performing up to the original specifications, please contact MICRONIX USA. • The PPS-20 series of linear stages are precision mechanical devices and should be handled with care. Do not drop or mishandle the stage. •... -
Page 21: Appendix
PPS-20PM Precision Positioner Stage Reference Manual A. Appendix A.1 2 Phase Piezo Motor Wiring Diagram A.1.1 Piezo Operating and Electrical Specifications Voltage 60V maximum Capacitance 150nf ±15% A.2 Feedthroughs MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 22: Using An Analog Encoder
All closed loop stages are supplied with 20µm scales. The interpolation is done in the MMC-100 to a higher resolution as specified in the order. With an analog encoder the MMC-100 has an achievable resolution of 10nm. MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 23: Using A Digital Encoder
All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder an MMC controller has an achievable resolution of 2nm. MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 24: Using An Absolute Encoder
Reference Manual A.5 Using an Absolute Encoder The Micronix absolute encoder operates using standard BiSS C-mode (continuous) interface, transmitting 32-bits of position data on each request. The controller will clock position acquisitions via the MA signal. The SLO signal will transmit position data from the encoder. -
Page 25: Absolute Encoder Setup
Absolute Encoder BiSS-C Absolute Resolution 32 Bits Encoder BiSS Frequency 5 MHz Encoder BiSS CRC Polynomial Position Integer Type Unsigned Number of Status Bits Error Bits Mask CRC Error Suppression None Data Alignment Left Justified MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 26: Legacy
Description Color Brown Phase 1 Blue Phase 2 White (Green TP) Index+ Violet Ground Black/Green Grey Shield Casing White (Grey TP) White (Brown TP) White (Blue TP) Index- White (Violet TP) Shield Casing Casing Casing MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 27: Legacy Digital Encoder With Dsub15 Interpolator Module, Vacuum
Violet Shield Interpolator Cable E Pinout for PPS-20-1X306 Dsub15M Dsub15F Dsub9F Description Color Brown Blue Index+ Violet Grey White (Grey TP) White (Brown TP) White (Blue TP) Index- White (Violet TP) Shield Casing Casing Casing MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 28: Legacy Cabling (8 Conductor Wiring)
Blue A- / COS- Orange White (Blue TP) B+ / SIN+ Yellow Brown B- / SIN- Green White (Brown TP) Index + Violet Violet Index - Blue White (Violet TP) White (Grey TP) Black Grey MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 29: Legacy Pps-20Pm With Uhv M1000V Analog Encoder Dimensions
PPS-20PM Precision Positioner Stage Reference Manual A.6.2 Legacy PPS-20PM with UHV M1000V Analog Encoder Dimensions MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 30: Legacy Analog M1000V Encoder, Ultra High Vacuum Wiring Diagram
Black/Green Black/Green Shield Casing Black Grey Cos+ Brown Brown White (Grey TP) Cos- Orange White (Brown TP) Sin+ Yellow Blue Sin- Green White (Blue TP) Index- Blue White (Violet TP) Index+ Violet Violet Shield Casing MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 31: Legacy Pps-20Pm With Uhv Mii 6000V Digital Encoder Dimensions
PPS-20PM Precision Positioner Stage Reference Manual A.6.4 Legacy PPS-20PM with UHV MII 6000V Digital Encoder Dimensions MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 32: Legacy Digital Mii6000V Encoder, Ultra High Vacuum Wiring Diagram
White (Brown TP) Shield Interpolator Cable E Pinout for PPS-20-1X309 Dsub15M Dsub15F Dsub9F Description: Color Brown Blue Index+ Violet Grey White (Grey TP) White (Brown TP) White (Blue TP) Index- White (Violet TP) Shield Casing Casing Casing MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com... -
Page 33: Legacy Uhv Digital Encoder Module
A Red or Yellow Signal Level LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders. -
Page 34: Resolution
All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder an MMC controller has an achievable resolution of 2nm. MICRONIX USA,LLC Rev: 3.4 www.micronixusa.com...
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