Micronix PR-32 Series Reference Manual

Piezo rotation stage

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PR-32
S e r i e s
Piezo Rotation Stage
Reference Manual
(Open and Closed Loop Versions)

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Summary of Contents for Micronix PR-32 Series

  • Page 1 PR-32 S e r i e s Piezo Rotation Stage Reference Manual (Open and Closed Loop Versions)
  • Page 2 PR-32 Piezo Rotation Stage Reference Manual Rev 3.06 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...
  • Page 3: Table Of Contents

    Electrical Connections ......................... 12 A.1.1 DB-9 Male Motor Connector ....................... 12 A.1.2 Encoder Pinout ..........................12 Phase Piezo Motor Wiring Diagram ....................12 Open Loop Vacuum Wiring Diagram ....................13 A.3.1 Straight Through 9-Pin Feed Through ..................13 MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 4 A.4.3 Analog Output (Pins 1,2,6, and 7) ....................14 A.4.4 Index Window (Pins 3) ........................14 A.4.5 Resolution ............................15 A.4.6 Analog Encoder Wiring Diagram ....................15 A.4.7 Straight Through 15-Pin Feed Through ..................15 MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 5: Introduction

    PPS-series stages. Vacuum and Ultra High Vacuum (10 mbar) compatible versions are available. Features: 360° continuous ▪ Load capacity up to 1kg ▪ 10 µ°encoder resolution ▪ .5” Clear aperture (open loop) ▪ Carriage .5” Aperture MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 6: Recommended Controllers

    PR-32 Piezo Rotation Stage Reference Manual Recommended Controllers The following controllers are available from MICRONIX USA: MMC-100 ▪ MMC-110 ▪ Technical Data Motor PM-002R Speed Max. (°/sec) 6 (MMC-100), 30 (MMC-110) Resolution Typical (µ°) 3.6 (open loop), 50 (Analog Encoder), 10...
  • Page 7: Model Configurations

    PR-32 Order Numbers PR-32- Order No. Piezo Motor, PM-002R 360° Continuous None Analog (1Vpp) Digital (RS-422) None Magnetic Atmospheric High Vacuum, 10 mbar Ultra-High Vacuum, 10 mbar Contact MICRONIX USA for custom versions and stacking configurations. MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 8: Preparing To Install The Pr-32

    Locate away from water, heat, and electrical noise ▪ Package Contents If the product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: PR-32 Rotary Stage ▪...
  • Page 9: Installation

    Socket Head Cap Screws Open Loop System Requires: 2x M1.5 x 5mm Dowel Pins 4x M2 x 12mm Cheese Head Cap Screws Tighten 4x Mounting Screws Install Dowel Pins and M2 Socket Head Cap Screw MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 10: Connecting The Pr-32

    5.1.2 Closed Loop/Encoder Installation & Wiring Diagram Using the PR-32 stage with an encoder requires a closed loop compatible controller that recognizes encoder feedback. 5.1.3 Wiring Diagram for Atmospheric System with Analog Encoder MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 11: Vacuum Environments

    The vacuum compatible PR-32 will be supplied with wiring for a straight through feed through not a cross over gender changer. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow functionality test prior to installation in a vacuum chamber.
  • Page 12: Technical Specifications

    PR-32 Piezo Rotation Stage Reference Manual 5.2.3.1 Wiring Diagram for System with Analog Encoder 6. Technical Specifications Dimensions MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 13: Stacking Configurations

    ▪ modify the stage or perform any maintenance unless specifically instructed to do so by MICRONIX USA personal. If the stage is not performing up to the original specifications, please contact MICRONIX USA. The PR-32 rotary stage is a precision mechanical device and ▪...
  • Page 14: Appendix

    Not in Use Not in Use A.1.2 Encoder Pinout Function Analog A+/Cos+ Brown B+/Sin+ Yellow Index+ Violet Black & Inside shield A-/Cos- Orange B-/Sin- Green Index- Blue Shield Outside Shield Phase Piezo Motor Wiring Diagram MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 15: Open Loop Vacuum Wiring Diagram

    PR-32 Piezo Rotation Stage Reference Manual Open Loop Vacuum Wiring Diagram A.3.1 Straight Through 9-Pin Feed Through MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 16 Operating and Electrical Specifications Power Supply 5VDC ±5% @ 330mA (60mA for sensor) Operating Temperature 0 to 70°C Humidity 10 - 90% RH non-condensing A.4.3 Analog Output (Pins 1,2,6, and 7) A.4.4 Index Window (Pins 3) MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...
  • Page 17 11 (White - Violet TP) Index+ Violet 10 (Violet) Shield 9 (Shield) Casing Female Dsub9 Connector - Rear View Female PEEK Dsub15 Connector - Rear View Male Dsub9 Connector - Rear View A.4.7 Straight Through 15-Pin Feed Through MICRONIX USA,LLC Rev: 3.06 www.micronixusa.com...

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