HP 5973 MSD Hardware Manual page 63

Typical pressure readings
Use the HP 59823B high-vacuum gauge controller. Note that the mass flow
controller is calibrated for methane, and the high vacuum gauge controller is
calibrated for helium, so these measurements are not accurate, but are intended as
a guide to typical observed readings. They were taken with the following set of
conditions. Note that these are typical PCI temperatures:
Source temperature
Quad temperature
Interface temperature
Helium carrier gas flow
MFC (%) Pressure (Torr)
Methane
5.6 × 10
10
7.7 × 10
15
9.8 × 10
20
1.2 × 10
25
1.4 × 10
30
1.6 × 10
35
1.8 × 10
40
2.0 × 10
45
2.2 × 10
50
2.7 × 10
60
Familiarize yourself with the measurements on your system under operating
conditions, and watch for changes that may indicate a vacuum or gas flow problem.
250°C
106°C
320°C
1ml/min
Isobutane
6.5 × 10
-5 -5
9.2 × 10
-5 -5
1.2 × 10
-5 -4
1.4 × 10
-4 -4
1.8 × 10
-4 -4
2.0 × 10
-4 -4
2.3 × 10
-4 -4
2.6 × 10
-4 -4
3.0 × 10
-4 -4
3.5 × 10
-4 -4
 CI operation
7R PRQLWRU KLJK YDFXXP SUHVVXUH
Ammonia
4.7 × 10
-5
6.7 × 10
-5
8.5 × 10
-5
1.0 × 10
-4
1.2 × 10
-4
1.4 × 10
-4
1.6 × 10
-4
1.9 × 10
-4
2.1 × 10
-4
2.5 × 10
-4
63