MKS 247D Instruction Manual
  1. Manuals
  2. Brands
  3. MKS Manuals
  4. Power Supply
  5. 247D
  6. Instruction manual

MKS 247D Instruction Manual

Four-channel mass flow controller power supply/readout
Hide thumbs
Table of Contents

Advertisement

Quick Links

120714-P1
Rev A, 7/97
Instruction Manual
MKS Type 247D
Four-Channel Readout
Six Shattuck Road
Fax: (978) 975-0093
Andover, MA 01810-2449
E-mail: mks@mksinst.com
(800) 227-8766 or (978) 975-2350
Web site: http://www.mksinst.com

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 247D and is the answer not in the manual?

Questions and answers

Related Manuals for MKS 247D

Summary of Contents for MKS 247D

  • Page 1 120714-P1 Rev A, 7/97 Instruction Manual MKS Type 247D Four-Channel Readout Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
  • Page 2 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
  • Page 3 120714-P1 Rev A, 7/97 MKS Type 247D Four-Channel Readout...
  • Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 5: Table Of Contents

    Table of Contents Table of Contents Safety Information........................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Sicherheitshinweise........................ 5 In dieser Betriebsanleitung vorkommende Symbole ........... 5 Am Gerät angebrachte Symbole................. 6 Sicherheitsvorschriften und Vorsichtsmaßnahmen............
  • Page 6 Table of Contents Safety Conditions ..................23 Setup..........................24 Dimensions....................24 Power Requirements ..................26 Mounting Instructions..................26 System Configurations...................27 Electrical Information....................30 Fuses ......................30 Grounding .....................30 How To Set the Line Voltage.................31 Connectors and Cables ....................32 Interface Connector P6 (Channels 1 to 4) ............32 Interface Connector P5 (Channel 1) ...............33 MFC Connectors (J1 - J4)................34 Chapter Three: Overview .......................35 General Information ....................35...
  • Page 7 Table of Contents Scaling Control Potentiometers ..............43 Decimal Point Selector Switches ..............44 Line Voltage Selector ..................44 Fuse ......................44 AC Line Cord....................44 Interface Connector J6 - Channels 1 to 4 ............44 Interface Connector J5 - Channel 1..............45 MFC Connectors ...................
  • Page 8 Table of Contents Troubleshooting ......................73 Power Supply ....................73 Channel Amplifiers..................74 Internal +5 V Voltage Reference ..............75 External Ratio Amplifier................75 Digital Panel Meter..................76 Set Point Buffer and Flow Switching Circuit ..........77 Appendix A: Product Specifications..................79 Appendix B: Model Code Explanation...................81 Model Code .......................81 Appendix C: Gas Correction Factors for Commonly Used Pure Gases ........83 Index ............................87...
  • Page 9 List of Figures List of Figures Figure 1: Front Panel Dimensions ..................24 Figure 2: Top View Dimensions.................... 25 Figure 3: Manual Flow Control ..................... 27 Figure 4: Pressure Control with an External Controller............28 Figure 5: Front Panel Controls ....................40 Figure 6: Rear Panel Controls....................
  • Page 10 List of Figures viii...
  • Page 11 List of Tables List of Tables Table 1: Definition of Symbols Found on the Unit ..............2 Tabelle 2: Definitionen der am Gerät angebrachten Symbole ............6 Tableau 3 : Définition des symboles apparaissant sur l'appareil ..........10 Tabla 4 : Definición de los símbolos que aparecen en la unidad..........14 Table 5: System Interface Cables....................20 Table 6: Fuse Information ......................30 Table 7: Interface Connector P6 (Channels 1 to 4) Pinout............32...
  • Page 12 List of Tables...

  • Page 13: Safety Information

    Safety Information Symbols Used in This Instruction Manual Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 14: Symbols Found On The Unit

    Symbols Found on the Unit Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5008 IEC 417, No.5017...

  • Page 15: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 16 Safety Procedures and Precautions Safety Information USE THE PROPER POWER SOURCE This product is intended to operate from a power source that does not apply more voltage between the supply conductors, or between either of the supply conductors and ground, than that specified in the manual.

  • Page 17: Sicherheitshinweise

    Sicherheitshinweise In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise In dieser Betriebsanleitung vorkommende Symbole Definition der mit WARNUNG!, VORSICHT! und HINWEIS überschriebenen Abschnitte in dieser Betriebsanleitung. Warnung! &CU 5[ODQN 9#4070) YGKUV CWH GKPG )GHCJTGPSWGNNG JKP 'U OCEJV CWH GKPGP #TDGKVUCDNCWH GKPG #TDGKVUYGKUG GKPGP <WUVCPF QFGT GKPG UQPUVKIG )GIGDGPJGKV CWHOGTMUCO FGTGP WPUCEJIGO·­G #WUHÒJTWPI D\Y WPIGPÒIGPFG $GTÒEMUKEJVKIWPI \W -ÌTRGTXGTNGV\WPI HÒJTGP MCPP...

  • Page 18: Am Gerät Angebrachte Symbole

    Am Gerät angebrachte Symbole Sicherheitshinweise Am Gerät angebrachte Symbole Der untenstehenden Tabelle sind die Bedeutungen der Symbole zu entnehmen, die an dem Gerät angebracht sind. Definitionen der am Gerät angebrachten Symbole Ein (Netz) Aus (Netz) Erde Schutzleiter IEC 417, Nr. 5007 IEC 417, Nr.

  • Page 19: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Bauen Sie in das Instrument keine Ersatzteile ein, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor! Schicken Sie das Instrument zu Wartungs- und Reparatur-zwecken an einen MKS-Kalibrierungs- und -Kundendienst ein! Dadurch wird sicher-gestellt, daß alle Sicherheitseinrichtungen voll funktionsfähig bleiben.
  • Page 20 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise Erdung und Verwendung geeigneter elektrischer Armaturen! In diesem Instrument liegen gefährliche Spannungen an. Alle verwendeten elektrischen Armaturen und Kabel müssen dem angegebenen Typ entsprechen und sich in einwand-freiem Zustand befinden. Alle elektrischen Armaturen sind vorschriftsmäßig anzubringen und zu erden. Richtiges Netzkabel verwenden! Das verwendete Netzkabel muß...

  • Page 21: Informations Relatives À La Sécurité

    Informations relatives à la sécurité Symboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité Symboles utilisés dans ce manuel d'utilisation Définition des indications AVERTISSEMENT, ATTENTION et REMARQUE utilisées dans ce manuel. #XGTVKUUGOGPV . KPFKECVKQP #8'46+55'/'06 UKIPCNG WP FCPIGT RQVGPVKGN 'NNG GUV FGUVKP¾G ¯...

  • Page 22: Symboles Apparaissant Sur L'appareil

    Symboles apparaissant sur l'appareil Informations relatives à la sécurité Symboles apparaissant sur l'appareil Le tableau suivant décrit les symboles apparaissant sur l'appareil. Définition des symboles apparaissant sur l'appareil Terre de protection Marche (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.

  • Page 23: Mesures De Sécurité Et Mises En Garde

    NE PAS SUBSTITUER DES PIÈCES OU MODIFIER L'APPAREIL Ne pas utiliser de pièces détachées autres que celles vendues par MKS Instruments, Inc. ou modifier l'appareil sans l'autorisation préalable de MKS Instruments, Inc. Renvoyer l'appareil à...
  • Page 24 Mesures de sécurité et mises en garde Informations relatives à la sécurité Utiliser uniquement un cordon d'alimentation amovible avec des conducteurs dont la section est égale ou supérieure à 0,75 mm . Le cordon d'alimentation doit être approuvé par un organisme compétent tel que VDE, Semko ou SEV.

  • Page 25: Información Sobre Seguridad

    Información sobre seguridad Símbolos usados en el manual de instrucciones Información sobre seguridad Símbolos usados en el manual de instrucciones Definiciones de los mensajes de ADVERTENCIA, PRECAUCIÓN Y OBSERVACIÓN usados en el manual. #FXGTVGPEKC 'N UÃODQNQ FG #&8'46'0%+# KPFKEC WP TKGUIQ 2QPG FG TGNKGXG WP RTQEGFKOKGPVQ RT±EVKEC EQPFKEKÉP GVE SWG FG PQ TGCNK\CTUG W QDUGTXCTUG EQTTGEVCOGPVG RQFTÃC ECWUCT NGUKQPGU C NQU GORNGCFQU...

  • Page 26: Símbolos Que Aparecen En La Unidad

    Símbolos que aparecen en la unidad Información sobre seguridad Símbolos que aparecen en la unidad En la tabla que figura a continuación se indican los símbolos que aparecen en la unidad. Definición de los símbolos que aparecen en la unidad Encendido Apagado (alimentación eléctrica)

  • Page 27: Procedimientos Y Precauciones De Seguridad

    No se debe instalar piezas que no sean originales ni modificar el instrumento sin autorización. Para garantizar que las prestaciones de seguridad se observen en todo momento, enviar el instrumento al Centro de servicio y calibración de MKS cuando sea necesaria su reparación y servicio de mantenimiento.
  • Page 28 Procedimientos y precauciones de seguridad Información sobre seguridad USAR EL CABLE ELÉCTRICO ADECUADO Usar únicamente un cable eléctrico que se encuentre en buenas condiciones y que cumpla los requisitos de alimentación de entrada indicados en el manual. Usar únicamente un cable desmontable instalado con conductores que tengan un área de sección transversal equivalente o superior a 0,75mm².

  • Page 29: Chapter One: General Information

    Chapter One: General Information Introduction The MKS Type 247D Four-Channel Mass Flow Controller Power Supply/Readout is designed as power supply/readout and set point source for four analog mass flow controllers (MFCs). The unit can also power and monitor the flow rate through analog mass flow meters (MFMs).

  • Page 30: How This Manual Is Organized

    Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.

  • Page 31: Chapter Two: Installation

    Chapter Two: Installation How To Unpack the Type 247 Unit MKS has carefully packed the Type 247 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.

  • Page 32: Interface Cables

    January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low-Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. MKS products that meet these requirements are identified by application of the CE mark.
  • Page 33 Chapter Two: Installation Interface Cables System Interface Cables (Continued) To Connect the 247 Unit To... Use the MKS Cable... Standard Shielded 250 Controller (PCS) CB247-2-3 CB247S-2-3 1250 Controller (PCS) CB247-9-3 CB247S-9-3 247 Readout CB247-4-x*** CB247S-4-x*** To connect the 1150, 1151, or 1152 unit to a 260 PS-1, you must also use cable CB260(S)-3-10.

  • Page 34: Generic Shielded Cables

    Chapter Two: Installation Generic Shielded Cables MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 35: Product Location And Requirements

    Chapter Two: Installation Product Location and Requirements Product Location and Requirements The Type 247 unit meets the following criteria: • POLLUTION DEGREE 2 in accordance with IEC 664 • Transient overvoltages according to INSTALLATION CATEGORY II Operating Environmental Requirements • Ambient Operating Temperature: 15°...

  • Page 36: Setup

    Setup Chapter Two: Installation Setup Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. 9.469 (240.5) 8.86 (225.0) 3.469 (88.1) 3.00 (76.2) 0.234 (5.94) 0.50 (12.7) Figure 1: Front Panel Dimensions...

  • Page 37: Figure 2: Top View Dimensions

    Chapter Two: Installation Setup Power ON/OFF Switch 8.00 (203.2) Scaling Controls Channel Selector 10.01 (254.3) 10.80 (274.3) Figure 2: Top View Dimensions...

  • Page 38: Power Requirements

    Setup Chapter Two: Installation Power Requirements The power requirements for the 247 unit are: • 115 VAC Setting 100 to 120 VAC nominal, 50/60 Hz • 230 VAC Setting 200 to 240 VAC nominal, 50/60 Hz The power consumption for the 247 unit is: •...

  • Page 39: System Configurations

    Chapter Two: Installation Setup System Configurations The 247 unit can be configured for manual, external set point, or remote operation. The various system configurations and the required cabling are shown in Figure 3, page 27, and Figure 4, page 28. The system interface cables are listed in Table 5, page 20. Refer to Chapter Four: Operation, page 55, for information on the setup and operation of these systems.

  • Page 40: Figure 4: Pressure Control With An External Controller

    Note Any controller and pressure transducer may be used provided the signal that enters the 247 unit goes positive with increasing flow (correct polarity). Throughout this manual, the MKS Type 250 Pressure/Flow ® Controller and Type 127/227 Baratron Pressure Transducers are used for example only.
  • Page 41 Chapter Two: Installation Setup Remote Flow Control Remote flow control can be accomplished using TTL logic control. Interface connector P6 provides the means to remotely turn the flow on/off and to adjust and monitor the flow rate in any channel using a set point signal from a voltage applied to P6. Refer to Table 7, page 32, for the pinout for Interface connector P6.

  • Page 42: Electrical Information

    The line fuses protect the internal circuitry; both sides of the line are fused. The fuse values are listed in Table 6. Fuse Information Voltage Setting Fuse Type MKS Part Number 115 VAC 0.8 A (T) / 250 V 024-5693 230 VAC 0.4 A (T) / 250 V...

  • Page 43: How To Set The Line Voltage

    Chapter Two: Installation Electrical Information How To Set the Line Voltage The Line Voltage Selector configures the 247 unit to accept either 115 or 230 VAC input voltage. The value of the selected line voltage is visible through the window in the cover when it is closed.

  • Page 44: Connectors And Cables

    Connectors and Cables Chapter Two: Installation Connectors and Cables The 247 unit’s two Interface connectors and four MFC connectors are located on the rear panel of the unit (refer to Figure 6, page 43). When the 247 is purchased as part of a complete system including MFCs, all of the required interface cables are supplied.

  • Page 45: Interface Connector P5 (Channel 1)

    Chapter Two: Installation Connectors and Cables Interface Connector P5 (Channel 1) The 9-pin Type “D” connector, located on the rear panel (refer to Figure 6, page 43), is used to join two 247 units, or to connect a 247 unit to an external controller which provides the external ratio signal interface.

  • Page 46: Mfc Connectors (J1 - J4)

    Connectors and Cables Chapter Two: Installation MFC Connectors (J1 - J4) The four 15-pin Type “D” connectors (J1 through J4), located on the rear panel (refer to Figure 6, page 43), provide the connection for the mass flow controllers. Each connector provides the necessary power and set point voltages, and receives the flow output signal.

  • Page 47: Chapter Three: Overview

    Chapter Three: Overview General Information Chapter Three: Overview General Information The 247 power supply/readout can be connected to as many as four MFCs through connectors J1 to J4 on the rear panel (refer to Figure 6, page 43). Communication to and from the unit occurs through connector P6.

  • Page 48: Set Point Signal

    Set Point Signal Chapter Three: Overview Set Point Signal The set point signal that is sent to each MFC through connectors J1 to J4 may be generated in a variety of ways: • Manually using independent gas flows or by ratioing the gas flows for one to three channels to the flow in Channel 1 •...

  • Page 49: Set Point Function With Manual Flow Control

    Chapter Three: Overview Set Point Signal Set Point Function with Manual Flow Control Individual Gas Flows The SET POINT SOURCE SWITCH must be set to the FLOW position, when manually controlling individual gas flows. In this mode of operation, a precise 5.000 VDC signal is generated from the power supply, and flows through the SET POINT SOURCE SWITCH to the SET POINT CONTROL attenuator.

  • Page 50: Set Point Function With External Flow Control

    Any controller and pressure transducer may be used provided the signal that enters the 247 unit goes positive with increasing flow (correct polarity). Throughout this manual, the MKS Type 250 Pressure/Flow Controller and Type 127/227 Baratron Pressure Transducers are used for example only.

  • Page 51: Set Point Function With Remote Flow Control

    Chapter Three: Overview Set Point Signal Set Point Function with Remote Flow Control The SET POINT SOURCE SWITCH must be set to the EXT position, when using remote flow control. Interface connector P6 provides the means to remotely turn the flow on/off and to adjust and monitor the flow rate in any channel using a set point signal from a voltage applied to P6.

  • Page 52: Front Panel Controls

    Front Panel Controls Chapter Three: Overview Front Panel Controls Figure 5 shows the location of the controls on the front panel of the 247 controller. Digital Panel Meter Power ON/OFF Switch Flow Indicator Flow Control Switch Zero Control Set Point Source Switch Channel Selector Set Point Control Read/Set Point Switch...

  • Page 53: Flow Control Switch

    Chapter Three: Overview Front Panel Controls Flow Control Switch This switch controls the circuit which applies the set point signal to the MFC as follows: The switch activates the output switch which allows the set point signal to flow through it, through the unity gain buffer amplifier, and on to the MFC. OFF: The switch places a small negative voltage on the set output line so that the control valve will be closed positively.

  • Page 54: Set Point Control

    Front Panel Controls Chapter Three: Overview Set Point Control This 20-turn potentiometer sets the set point level when the Set Point Source Switch is in the FLOW or RATIO position. The ranges are: FLOW Position: ± 0.1 to 100% of Full Rated Flow RATIO Position: ±...

  • Page 55: Rear Panel Controls

    Chapter Three: Overview Rear Panel Controls Rear Panel Controls Figure 6 shows the location of the controls on the rear panel of the 247 controller. Decimal Point Scaling Controls Selector Switches Line Voltage Selector Fuse Interface Connector J5 AC Line Cord MFC Connectors Channel 1 Interface Connector J6...

  • Page 56: Decimal Point Selector Switches

    Rear Panel Controls Chapter Three: Overview Decimal Point Selector Switches These switches, one for each channel, set the decimal point for the Digital Panel Meter on the front panel. The position of the decimal point is determined by the full scale range of the MFC in use. A 100 sccm mass flow controller requires the decimal point to be positioned as “100.0”...

  • Page 57: Interface Connector J5 - Channel 1

    Chapter Three: Overview Rear Panel Controls Interface Connector J5 - Channel 1 This 9-pin Type “D” connector is used to connect two 247 units or to connect a 247 unit to an external pressure controller. Individual flow rates are set, using the front panel Set Point Controls, as a fraction of Channel 1 of the first 247 unit;...

  • Page 58: Scaling Controls

    Scaling Controls Chapter Three: Overview Scaling Controls There are four Scaling Control Potentiometers on the rear panel of the 247 unit; one for each channel (refer to Figure 6, page 43). These 10-turn potentiometers are used to adjust the full scale voltage signals from the MFCs, which correspond to the flow rate, to a level that enables the digital panel meter (DPM) to display the flow rate and set point directly, in sccm or slm.

  • Page 59: Scaling Control Factor

    Chapter Three: Overview Scaling Controls Scaling Control Factor The Scaling Control Factor is the product of the Gauge Factor for the MFC in use and the Gas Correction Factor for the gas in use: CALING ONTROL ACTOR AUGE ACTOR ORRECTION ACTOR Gauge Factor The Gauge Factor is a factory set value which scales the +5 VDC output signal to the appropriate...

  • Page 60: Scaling Control Potentiometer

    Scaling Controls Chapter Three: Overview Scaling Control Potentiometer The Scaling Control (refer to Figure 7) is a 10-turn potentiometer that serves as a voltage divider for the +5 VDC output signals from the MFCs; the control has a full scale setting of 1000. Window Outer Control (Sets factors of 100)

  • Page 61: Gas Correction Factor (Gcf)

    T s = 273.15° K (~ equal to 0° C) Note 1. When using the GCF, the accuracy of the flow reading may vary by ±5%, however, the repeatability will remain ±0.2% of FS. 2. All MKS readouts have Gas Correction Adjustment controls to provide direct readout.

  • Page 62: How To Calculate The Gcf For Pure Gases

    Gas Correction Factor (GCF) Chapter Three: Overview How To Calculate the GCF for Pure Gases To calculate the Gas Correction Factor for pure gases, use the following equation: (0.3106) (s) (d ) (cp ) where: GCF x = Gas Correction Factor for gas X 0.3106 = (Standard Density of nitrogen) (Specific Heat of nitrogen) s = Molecular Structure correction factor where S equals: 1.030 for Monatomic gases...

  • Page 63: How To Calculate The Gcf For Gas Mixtures

    Chapter Three: Overview Gas Correction Factor (GCF) How To Calculate the GCF for Gas Mixtures For gas mixtures, the calculated Gas Correction Factor is not simply the weighted average of each component’s GCF. Instead, the GCF (relative to nitrogen) is calculated by the following equation: (0.3106) (a s + a s + ...a s ) (a d cp + a d cp + ...a d cp )
  • Page 64 Gas Correction Factor (GCF) Chapter Three: Overview Example: Calculate the GCF for a gas mixture of argon (gas 1) flowing at 150 sccm and nitrogen (gas 2) flowing at 50 sccm, where: 150 = 0.75 0.25 1.030 1.000 1.782 g/l 1.250 g/l 0.1244 cal/g °...

  • Page 65: Labels

    CE mark signifying compliance with the European CE regulations. Serial #: 123456789 Model #: 247D MKS Instruments, Inc. Made in the USA Figure 8: Serial Number Label The instrument model code is identified as “247D.” Refer to Appendix B: Model Code Explanation, page 81, for more information.
  • Page 66 Labels Chapter Three: Overview This page intentionally left blank.

  • Page 67: Chapter Four: Operation

    Chapter Four: Operation How To Setup the System Chapter Four: Operation How To Setup the System 1. Ensure that the MFCs and the 247 unit are properly installed. Refer to Mounting Instructions, page 26. 2. Set the FRONT PANEL CONTROLS (refer to Figure 5, page 40) as listed in Table 11. Manual Flow Control - 247 Unit Front Panel Controls Control Switch Position...
  • Page 68 How To Setup the System Chapter Four: Operation 6. Calculate the SCALING CONTROL FACTOR for each MFC in use. The Scaling Control Factor specifies how much the +5 VDC output signal from the MFC will be scaled down so that the flow rate can be read directly from the Digital Panel Meter, which reads 1 VDC as 1000 counts full scale.

  • Page 69: Figure 9: Scaling Control Potentiometer - Example Setting

    Chapter Four: Operation How To Setup the System 7. Adjust the SCALING CONTROL POTENTIOMETER for each MFC in use. The Scaling Control Potentiometers set the values of the Scaling Control Factors. Note It is critical for proper system operation that the Scaling Control Potentiometers are set correctly.
  • Page 70 How To Setup the System Chapter Four: Operation 8. Turn the POWER SWITCH ON to apply power to the 247 unit and the attached MFCs. Note Allow the MFCs to warm up for a period of 1 hour prior to any zero adjustments.

  • Page 71: Manual Flow Control

    Chapter Four: Operation Manual Flow Control Manual Flow Control Manual control of the flow rate through MFCs in an individual or ratioed mode is accomplished using the system configuration shown in Figure 3, page 27. Note Ensure the MFCs and the 247 unit are properly configured as described in How To Setup the System, page 55.
  • Page 72 Manual Flow Control Chapter Four: Operation 6. Turn the flow ON by placing the FLOW CONTROL SWITCH to the ON position. The set point signal is applied to the MFC, the Flow Indicator LED illuminates, and flow begins after a slight delay. The correct flow is realized within approximately 1.5 seconds, depending on the type of MFC being used.

  • Page 73: How To Manually Control Ratioed Gas Flows

    Chapter Four: Operation Manual Flow Control How To Manually Control Ratioed Gas Flows This mode of operation enables you to control the individual flow rates of Channels 2 to 4 as a fraction of the flow of Channel 1, using an internal set point signal. The set point signal is controlled by the Transducer Output of Channel 1.
  • Page 74 Manual Flow Control Chapter Four: Operation 3. Leave the SET POINT SOURCE SWITCH for Channel 1 in the FLOW position and move the switches for Channels 2 to 4 to the RATIO position. The 247 unit is now adjusted to control the MFCs connected to Channels 2 through 4 to 75, 50, and 25% of the flow rate through Channel 1.

  • Page 75: External Flow Control

    Any controller and pressure transducer may be used provided the signal that enters the 247 unit goes positive with increasing flow (correct polarity). Throughout this manual, the MKS Type 250 Pressure/Flow Controller and Type 127/227 Baratron Pressure Transducers are used for...

  • Page 76: How To Change The Dipswitch Settings

    External Flow Control Chapter Four: Operation How To Change the Dipswitch Settings The External Ratio Amplifier will accept signals corresponding to a full scale voltage of +5 V or +1 V. Configuring dipswitch S15 to the settings listed in Table 14, page 64, or Table 15, page 65, configures the RATIO position on all of the SET POINT SOURCE SWITCHES to be driven by the output of the External Ratio Amplifier, rather than the +5 V internal reference.

  • Page 77: Table 15: Dipswitch S15 Settings For +1 V Full Scale Input

    Chapter Four: Operation External Flow Control 5. To configure the 247 unit to accept +1 V full scale input, set dipswitch S15 to the settings listed in Table 15. Dipswitch S15 Settings for +1 V Full Scale Input Dipswitch Position Open (Off) Closed (On) Open (Off)

  • Page 78: How To Control Individual Gas Flows With An External Controller

    External Flow Control Chapter Four: Operation How To Control Individual Gas Flows with an External Controller This mode of operation enables you to control individual gas flows using a set point signal from an external controller. The 0 to 5 VDC set point signal is received at Interface Connector P6, and is routed by the SET POINT SOURCE SWITCH to each MFC.

  • Page 79: Table 16: External Controller - Front Panel Controls

    Any controller that provides a positive signal with increasing flow (correct polarity) may be used; the MKS Type 250 Pressure/Flow Controller is used for example only. 1. Verify that the LINE VOLTAGE SELECTOR SWITCH on the 250 controller is set to the proper voltage.
  • Page 80 External Flow Control Chapter Four: Operation How To Setup the 247 Unit for Pressure Control 1. Place the SET POINT SOURCE SWITCHES on all channels of the 247 unit with an MFC attached to the RATIO position. 2. Place the FLOW CONTROL SWITCHES on all channels with an MFC attached to the ON position.

  • Page 81: Remote Flow Control

    Chapter Four: Operation Remote Flow Control Remote Flow Control Note Ensure the MFCs and the 247 unit are properly configured as described in How To Setup the System, page 55. Interface connector P6 provides the means to remotely turn the flow on/off and to adjust and monitor the flow rate in any channel using a set point signal from a voltage applied to P6.
  • Page 82 Remote Flow Control Chapter Four: Operation This page intentionally left blank.

  • Page 83: Chapter Five: Maintenance And Troubleshooting

    Instruments immediately. If it is necessary to return the unit to MKS, obtain an ERA number (Equipment Return Authorization Number) from a MKS Service Center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers. Maintenance Periodically check for wear on the cables and inspect the enclosure for visible signs of damage.
  • Page 84 Maintenance Chapter Five: Maintenance and Troubleshooting 4. Insert a small, flat head screw driver under the top side of the black plastic cover and firmly pull towards you to unsnap the cover. The cover is attached firmly, so it requires a strong force on the screw driver to loosen it. The cover will flip open to expose the line voltage selector drum and the two fuse carriers.

  • Page 85: Troubleshooting

    Chapter Five: Maintenance and Troubleshooting Troubleshooting Troubleshooting The first approach when dealing with a problem with the 247 unit is to isolate the section of the instrument where the fault lies. The 247 readout can be separated into the following sections: •...

  • Page 86: Channel Amplifiers

    Troubleshooting Chapter Five: Maintenance and Troubleshooting Channel Amplifiers To test a channel: 1. Plug an external connector with a jumper wire connected between pins 2 and 8, into the appropriate Channel Input Connector. This connects the output of the set point buffer to the input of the channel. 2.

  • Page 87: Internal +5 V Voltage Reference

    An incorrect input voltage may be caused by a defective reference VR1. An incorrect output may be caused by a defective amplifier U9A, also located on the rear of the Main PC board. Contact MKS Instruments for assistance. External Ratio Amplifier Failure of the 247 unit to work properly with an external voltage being used as a ratio signal may be caused by a defective amplifier or by an incorrect setting on dipswitch S15.

  • Page 88: Digital Panel Meter

    Troubleshooting Chapter Five: Maintenance and Troubleshooting Digital Panel Meter The Digital Panel Meter (DPM) is a 3½ digit, 2 V full scale device. The meter is powered by a +5 V supply located on the Main PC board. To measure the supply voltage to the meter: 1.

  • Page 89: Set Point Buffer And Flow Switching Circuit

    Chapter Five: Maintenance and Troubleshooting Troubleshooting Set Point Buffer and Flow Switching Circuit The buffer amplifier prevents the Flow Controller from loading the set point signal. The voltage at the output of the second set point buffer should track the voltage on the arm of the Set Point Control by ±2 mV when the flow is on.
  • Page 90 Troubleshooting Chapter Five: Maintenance and Troubleshooting This page intentionally left blank.

  • Page 91: Appendix A: Product Specifications

    Appendix A: Product Specifications Appendix A: Product Specifications CE Compliance EMC Directive 89/336/EEC Electromagnetic Compatibility Low-Voltage Directive 73/23/EEC Low-Voltage Requirements II, according to EN 61010-1 Installation Category 2, according to IEC 664 Pollution Degree Product Safety Directive 92/59/EEC Product Safety and Liability Display Accuracy ±0.1% ±...
  • Page 92 Appendix A: Product Specifications Signal Inputs (each channel) 0 to +5 VDC (5.5 V maximum) Scaling (GCF) 0.1 to 4.0 External Set Point 0 to 5 VDC (bypasses on-board set point controls) External ON/OFF TTL Compatible Signal Outputs (each channel) MFC Output(s) Minimum load impedance;...

  • Page 93: Appendix B: Model Code Explanation

    Appendix B: Model Code Explanation Model Code Appendix B: Model Code Explanation Model Code The model code is identified as follows: 247D Type Number (247D) The type number 247D designates the model number of the instrument.
  • Page 94 Model Code Appendix B: Model Code Explanation This page intentionally left blank.

  • Page 95: Appendix C: Gas Correction Factors For Commonly Used Pure Gases

    Appendix C: Gas Correction Factors for Commonly Used Pure Gases Appendix C: Gas Correction Factors for Commonly Used Pure Gases Table 17 lists the gas correction factors for some commonly used pure gases. If the GCF for your gas is not listed, or you are using a gas mixture, you must calculate the GCF. Refer to Gas Correction Factor (GCF), page 49, for more information.
  • Page 96 Appendix C: Gas Correction Factors for Commonly Used Pure Gases Gas Correction Factors for Pure Gases (Continued) SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Dichlorofluoromethane CHCl 0.140 4.592 0.42 (Freon - 21) Dichloromethysilane SiCl 0.1882...
  • Page 97 Appendix C: Gas Correction Factors for Commonly Used Pure Gases Gas Correction Factors for Pure Gases (Continued) SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Hydrogen 3.419 0.0899 .- - -2 Hydrogen Bromide 0.0861 3.610 1.00...
  • Page 98 1.32 Empirically defined. Consult MKS Instruments, Inc. for special applications. The GCF for Oxygen is 0.993 when using thermal MFCs such as the Type 1179, 1479, 1679, 1159, and 1259 units, and related products. The GCF for Oxygen is 1.000, as listed in the table, for pressure based MFCs such as the Type 1640, 1150, 1151, 1152, and 1153 units.

  • Page 99: Index

    Index Index individual gas flows, 28, 38, 66 ratioed gas flows, 28, 66–68, 38, 66–68 AC line cord, 44 system setup, 68 Cables Front panel controls, 40–42 CE requirements, 20, 22 Fuses, 30, 71 ordering, 32 part numbers, 20 CE mark Gas correction factors cables, 20, 22 description of, 47, 49...
  • Page 100 Index Specifications, 79–80 Symbols, definitions of Operation english, 2 flow signal path, 35 french, 10 functional description, 35 german, 6 spanish, 14 PCS, 67 System setup, 55–58 Pollution Degree, 23 Power requirements, 26, 44, 79 Temperature, operating, 23 Troubleshooting, 73–77 Ratio, gas, 66 TTL logic control, 69 Rear panel controls, 43–45...

Table of Contents

Save PDF