MKS PR 4000 F Instruction Manual
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MKS PR 4000 F Instruction Manual

MKS PR 4000 F Instruction Manual

2 channel power supply and readout for flow and pressure
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PR 4000 F
2 Channel Power Supply and
Readout for Flow and Pressure
Instruction Manual
MKS Instruments
Release 05/2000
Deutschland GmbH

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  • Page 1 PR 4000 F 2 Channel Power Supply and Readout for Flow and Pressure Instruction Manual MKS Instruments Release 05/2000 Deutschland GmbH...
  • Page 2 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments. Printed in the Federal Republic of Germany...

  • Page 3: Table Of Contents

    How This Manual Is Organized..................6 Customer Support ....................... 6 Chapter 2: Installation........................7 Unpacking........................7 Unpacking Checklist....................7 Cables ........................8 Interconnection Cabels from MKS..................8 Generic Shielded Cable Description ..................9 Installation, Mounting....................10 Dimensions ........................11 Line Power and Fuses.......................12 Switching on the unit....................12 Chapter 3: Overview........................
  • Page 4 Table of Contents PR4000F Chapter 4: Operation....................... 19 Structure of the Menu....................19 Editor ........................20 Switching on Edit mode..................... 20 Switching off Edit mode..................... 20 Decimal point ........................20 Setup ........................21 Entering Setup ......................... 21 Trip Limits........................29 Interface RS485 .......................
  • Page 5 PR4000F Table of Contents Chapter 5: Interface......................... 43 5.1 General..........................43 5.2 Command syntax......................43 5.3 Reply syntax ........................44 5.4 Error reply syntax ......................44 5.5 Commands........................45 Sample Command ......................45 Display Text (DT)......................45 Request Key (KY)......................45 Dialog (DG) ........................45 ID String (ID) ........................46 Remote Mode (RT) ......................46 Access Channel (AC)......................46 Actual Value (AV)......................46...
  • Page 6 Address (AD) ........................53 Interface Mode (IM) ......................53 Resolution (RS)........................ 54 Reset Status (RE)......................54 Default (DF)........................54 Appendix A: Specifications...................... 55 Appendix B: Error Messages....................57 Appendix C: Default - Configuration..................59 MKS Worldwide Calibration & Service Centers................61...
  • Page 7 PR4000F List of Figures and Tables List of Figures and Tables Figures Figure 1: Dimensions ......................11 Figure 2: Front Panel ......................13 Figure 3: Rear Panel of the PR4000F..................14 Figure 4: Structure of the menu....................19 Tables Table 1: Definition of Symbols Found on the Unit............... 2 Table 2: Standard Interconnecting Cables .................
  • Page 8 List of Figures and Tables PR4000F This page left blank viii...

  • Page 9: Safety Information

    PR4000F Safety Information Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 10: Symbols Found On The Unit

    Safety information PR4000F Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5017 IEC 417, No.5019 IEC 417, No.5008 IEC 417, No.5007 Frame or chassis...

  • Page 11: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 12 Safety information PR4000F This page left blank...

  • Page 13: Chapter 1: General Information

    The control unit PR4000F is designed for the use with mass flow controllers (MFC), mass flow meters (MFM), pressure transducers and in-line-pressure controllers, e.g. type 640 from MKS Instruments. Compatibility is just restricted in case of disagreement of electrical specifications.

  • Page 14: How This Manual Is Organized

    Authorization Number) or a form for declaration of decontamination or other regulations before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the last page of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.

  • Page 15: Chapter 2: Installation

    Do not discard any packing materials until you have completed your Note inspection and are sure the unit arrived safely. If you find any damage, notify your carrier and MKS immediately. Please refer to the last page of this manual for a list of MKS calibration and service centers. Caution Only qualified individuals should perform the installation and any user adjustments.

  • Page 16: Cables

    „E“ or „S“ (example: CB259E-... or CB259S-...). Interconnection Cables from MKS The following table lists the standard cables provided by MKS Instruments. They are all in compliance with the CE guidelines. If the cable needed for your particular instruments is not listed there then please contact your MKS center.

  • Page 17: Generic Shielded Cable Description

    (remotely closing of the control valve). Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have a braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 18: Installation, Mounting

    Chapter 2: Installation PR4000F 4. For shielded cables with flying leads at one end; it is important at such end, to ground the shield before the wires exit. Make this ground with absolute minimum length. After picking up the braid’s ground, keep wires and braid flat against the case. With very few exceptions, grounded metal covers are not required over terminal strips.

  • Page 19: Dimensions

    PR4000F Chapter 2: Installation Dimensions Figure 1: Dimensions (above: Front and Rear Panel; below: Side View)

  • Page 20: Line Power And Fuses

    Chapter 2: Installation PR4000F Line Power and Fuses The two wire line power connection is protected by two fuses. Before connecting the unit to the AC power source you must check that the voltage selector switch is set to the correct mains voltage. Refer to the following table in case that the line fuses must be changed or replaced respectively.

  • Page 21: Chapter 3: Overview

    PR4000F Chapter 3: Overview Chapter 3: Overview Front Panel LED for set-point LED for remote operation Display PR 4000 SETPOINT REMOTE CONTRAST POWER Screw for contrast ENTER adjustment Reset switch Power switch Enter key On/off switch Escape key for set-point Arrow keys for dialog selection Figure 2: Front Panel...

  • Page 22: Rear Panel

    Chapter 3: Overview PR4000F Rear Panel The rear panel provides all connectors, the fuse holder and the line voltage selector switch. Voltage RS232 selector and fuse compartment Channel 2 RS485 Power Channel 1 RS485 EXT. supply Relay Figure 3: Rear Panel of the PR4000F Connections Connector ACCESS.

  • Page 23: Connectors

    PR4000F Chapter 3: Overview Connectors Channel 1/Channel 2 This connector serves to connect the flow or pressure controller or meter device to the unit. There are 2 connectors, one for each channel. 15pin., Sub-D, Socket Function Function reserved reserved Signal input reserved Flow controllers: Valve Close * Signal ground ***...
  • Page 24 Chapter 3: Overview PR4000F EXTERN This connector is preferable used to monitor the flow or pressure signal of the device connected to the respective channel and / or to feed an external setpoint voltage into the instrument. 9-pin., Sub-D, Socket Function Function External input (typ.
  • Page 25 PR4000F Chapter 3: Overview RELAY 15-pin:; Sub-D, Socket Function Function Relay 1, Normally closed Relay 1, Common Relay 1, Normally open Relay 2, Normally closed Relay 2, Common Relay 2, Normally open reserved reserved reserved + 5 V reserved + 15 V reserved +15 V and 5 V Ground +15 V and 5 V Ground...
  • Page 26 Chapter 3: Overview PR4000F RS232 9-pin., Sub-D, Pin Function Function No connection No connection No connection No connection No connection No connection RS485 15-pin., Sub-D Function Function Shield Send Data T (B) Send Data T (A) No connection No connection Reveive Data R (B) Reveive Data R (A) No connection...

  • Page 27: Chapter 4: Operation

    PR4000F Chapter 4: Operation Chapter 4: Operation After switching on the power the following information is displayed for 2-3 seconds: PR4000 2CHANNELS V 01.29 19991011 (here: Version 01.29 ; Oct. 11, 1999) Then the unit switches automatically to display 1, which may be used for routine operation. This section describes how to configurate the different displays and how to set the parameters for operation and control.

  • Page 28: Editor

    Chapter 4: Operation PR4000F It is recommended to deactivate the entry into the setup (see figure 4) after all parameters have been edited. This allows quick switching through the 1 to 4 operational displays in a circular mode without stepping through all setup dialogs. By pressing the escape key (ESC) one time it is easily possible to switch the unit back to the display #1 from any position in any level.

  • Page 29: Setup

    PR4000F Chapter 4: Operation Setup It is recommended to check all parameters for correct settings before starting operation. Detailed information for operation of the different kind of transducers, controllers etc. are given later in this chapter. For understanding these instructions it is necessary to have studied the setup informations before.
  • Page 30 Chapter 4: Operation PR4000F Configuration of display 1 and display 2 DISPLAY1 DISPLAY2 In this first window of the setup submenu display #1 and display #2 of the operational level are being configurated. Use the arrow keys to select and set the settings: CH1,2 select one or both channel(s) to be displayed VA1,2...
  • Page 31 20.000 SCCM Here you can enter the setpoint for massflowcontrollers (MFC) as well as for in-line pressure controllers, e.g. MKS type 640. The example shows an MFC on channel 2 and a pressure controller being operated by channel 1. The PR4000F takes automatically into account any corrections which may be necessary because of zero offset compensation.
  • Page 32 Chapter 4: Operation PR4000F Gain and Offset (extra windows for channel 1 and channel 2) GAIN1 01.0000 OFFS1 - 00043 mV GAIN is a factor which adapts the range and the measurement signal for correct readout. A typical application is to use the gain factor as the gas correction factor with thermal mass flow meters or mass flow controllers.
  • Page 33 PR4000F Chapter 4: Operation Input Signal Range and Output Signal Range (extra windows for channel 1 and channel 2) OUT1 Each signal input and output can be set for a range between 1 V and 10 V in steps of 1 V. This allows the use of MFC’s with 10 V full scale flow and/or 10 V setpoint signal or pressure transducers with for example 5 Volt full scale.
  • Page 34 Chapter 4: Operation PR4000F Signalmode (extra window for channel 1 and channel 2) SIGMODE1 INDEP SCL1 10.000 mbar SIGMODE: For controllers the parameter SIGMODE determines the source of the setpoint which shall be applied the the respective channel. For meters this parameter determines to which value the setpoint output is set.
  • Page 35 PR4000F Chapter 4: Operation (only SLAVE or EXTRN ) The value of (Scaler) determines the ratio of the setpoint which will be applied to the slave. Example for two mass flow controllers: Channel 1: MFC 500 sccm full scale, Mode Independent. This is the master channel! Channel 2: MFC 200 sccm full scale, Mode Slave.
  • Page 36 Chapter 4: Operation PR4000F Linearization (extra window for channel 1 and channel 2) LIN1 mbar 00.000 <> 00.000 The PR4000F offers the possibility to correct known the non-linearity of each transducer connected to the instrument. This menu provides 11 correction points P0 – P10 for each channel. With the values S0 –...

  • Page 37: Trip Limits

    PR4000F Chapter 4: Operation Trip Limits The PR4000F provides three trip limit modes: LIMIT, BAND and SLEEP. The supervision modes LIMIT and BAND further provide a memory mode by selecting MLIMIT and MBAND respectively. Limit-Mode: (extra window for channel 1 and channel 2) MODE1 LIMIT DEAD BAND1...
  • Page 38 Chapter 4: Operation PR4000F The switching mode of the relay RLY1 and RLY2 is configured in this menu: RLY1 = L1 v U1 RLY2 = In the example shown relay RLY1 is activated (and simultaneously shown is it‘s status) when the lower limit 1 (here 15,00 mbar) was passed or (indicated by the logic symbol V) the upper limit U1 (here 30,00 mbar) was passed.

  • Page 39: Interface Rs485

    PR4000F Chapter 4: Operation Interface RS232 Selectable baud rates: 110 – 1200 – 2400 – 4800 – 9600 – 19200 – 38400 –57600 – 76800 – 115000 Baud BAUDRATE 9600 Bd PARITY Parities: Odd – Even – None For more instructions refer to chapter 5 INTERFACE. Interface RS485 ADRESS IFACEMODE...

  • Page 40: Exit Setup

    Chapter 4: Operation PR4000F Exit Setup RESET DEFAULT F ♦ RESOL16 EXIT RESET All error messages will be reset. DEFAULT F Setup menu will completely set to standard settings for MFC’s and MFM DEFAULT P Setup menu will completely set to standard settings for Baratron pressure transducers.

  • Page 41: Control

    PR4000F Chapter 4: Operation Control For routine operation, e.g. flow readout and setpoint settings, after the setup has been finished there will be 1 to three windows, depending on the configuration choosen, plus two displays for control parameters and status information. Display for measurement values and setpoints Example for setting of display 1: 05.160 mbar...

  • Page 42: Status Displays

    Chapter 4: Operation PR4000F Status Displays RLY1 RTD1 RLY2 RTD2 RLY1, RLY2 A diamond sign indicates if the respective relay is activated. RTD1, RTD2 A diamond sign indicates if the range turndown function is activated. OK, EXXX Error message appears here. Refer to appendix B for a list of error codes and their interpretation.

  • Page 43: Operation With Pressure Transducers

    PR4000F Chapter 4: Operation During the autozero cycle the display shows ACTIVE followed by a short report DONE if the procedure was completed successfully. If the zero offset signal of the meter exceeds ±250 mV the PR4000F will not perform the autozero process and display FAIL. If this is the case you should carefully check if all requirements for a correct zeroing are fullfilled and, if necessary, do a coarse zero adjustment at the meter or transducer.

  • Page 44: Operation With Baratron Type 120

    Chapter 4: Operation PR4000F Operation with Baratron Type 120 Range Turndown This type pressure transducer has a recommended measurement range of five decades, that means the lowest pressure displayed should be 1E-5 of full scale. The readout of the PR4000F however will dispIay only four decades thus the lowest pressure displayed would be 1E-4 of full scale.

  • Page 45: Operation With Mass Flow Controllers (Mfc)

    The setpoint voltage will be applied only to channels which have been Note pre-selected with the valve switch VLV1 or VLV2. Beside the thermal mass flow controllers also pressure based MFC’s by MKS Instruments type 1150, 1151 and 1152 can be combined to the PR4000F. Control Modes with Mass Flow Controllers: a.

  • Page 46: Operation With Flow Meters

    FL1 and FL2. Operation with pressure controllers This operation mode mainly affects in line pressure controllers from von MKS Instruments, e.g. the types 640, 641 or 649. In general the above given instructions for mass flow controllers apply also here.

  • Page 47: Limit Switches And Relays

    PR4000F Chapter 4: Operation Limit switches and relays The two relays on the hardware may be assigned flexible to the channels and different signal sources. The logic of the limit switches is configurable and also is the hysterisis (i.e. dead band). A switch delay is not available.

  • Page 48: 4.10 Relay Settings

    Chapter 4: Operation PR4000F 4.10 Relay Settings Configuration of relay control is done in the aforementioned menu Limit-Mode in the setup section. By the use of logical formulas almost each combination of different criteria for activating (or de- activating) the relays can be realized. This allows flexible adoption of both relays to many demands.
  • Page 49 PR4000F Chapter 4: Operation The PR4000F applies these formulas to the relays RLY1 and RLY2. Use the cursor which allows the following settings dependent from his position (RLY = R1): Position under " = " -> Selection of numbers of criteria Position before or after criteria ->...
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  • Page 51: Chapter 5: Interface

    PR4000F Chapter 5: Interface Chapter 5: Interface 5.1 General The PR4000F offers two serial interfaces, a RS232 and a RS485. The RS232 is a connection between two devices (Host and PR4000). The RS485 connects the host to up to 30 PR4000, what makes an address code for each command necessary.

  • Page 52: 5.3 Reply Syntax

    Chapter 5: Interface PR4000F 5.3 Reply syntax The reply syntax is defined as follows, were token in brackets are optional. There are no blanks between command elements needed. Yellow characters are constant, gray characters represent placeholders for command values. [r1[,r2[,r3]]]<CR> r1 r2 r3 reply values of command.

  • Page 53: Commands

    PR4000F Chapter 5: Interface 5.5 Commands Sample Command command description reply sample 1 reply 1 sample description 1 sample 2 reply 2 sample description 2 Display Text (DT) DT[,text] displays text in the display 4 text: 32 byte string, which will be written to display 4. [text] DT,HELLO display text "HELLO"...

  • Page 54: Id String (Id)

    Chapter 5: Interface PR4000F ID String (ID) retrieve ID string format: = version PR42vvrrsssss ....................................PR42012900000 returns ID string PR42012900000 returns ID string Remote Mode (RT) RT[,enable] set to remote operation [enable] enable: OFF, ON RT,ON switch PR4000 to remote mode ask for remote mode RT,OFF switch PR4000 to local mode...

  • Page 55: Setpoint (Sp)

    PR4000F Chapter 5: Interface Setpoint (SP) SPc[,setpoint] set setpoint setpoint: -5% .. 110% of FS [setpoint] SP1,50.0 set setpoint ?SP1 050.00 retrieve setpoint External Input (EX) access of EXTERN channels extinput extinput: -5% .. 110% of FS 000.00 retrieve external input Status (ST) request of hex status word hexsts bits:...

  • Page 56: Relays (Rl)

    Chapter 5: Interface PR4000F Relays (RL) RLc[,enable] set manual setting of relay enable: OFF, ON [enable] RL1,ON set relay 1 ?RL1 retrieve relay 1 status Displays (DP) DPd,(line,tag,chn|enable) setup configurable displays (tag,chn)| OFF line: 1, 2 tag: 0=SP, 1=VA, 2=CH, 3=FL, 4=PR, 5=EX chn = 1, 2 enable: OFF, ON DP1,1,3,1...

  • Page 57: Gain (Gn)

    PR4000F Chapter 5: Interface Gain (GN) GNc[,gain] setup gain gain: 0,001 .. 2.000 [gain] GN1,1.3 set gain of channel 1 ?GN1 01.300 retrieve gain Offset (OF) OFc[,offset] setup offset [offset] offset: -250 .. +250 OF1,30 set offset of channel 1 ?OF1 00030 retrieve offset...

  • Page 58: Output Range (Ot)

    Chapter 5: Interface PR4000F Output Range (OT) OTc[,phyrange] setup of physical output range phyrange: 1 .. 10 [phyrange] OT1,10 set output range of channel 1 to 10V ?OT1 00010 retrieve output range External Input Range (EI) EIc[,phyrange] setup of physical input range [phyrange] phyrange: 1 ..

  • Page 59: Scale (Sc)

    PR4000F Chapter 5: Interface Scale (SC) SCc[,scale] setup of scale scale: -5% .. 110% of FS [scale] SC1,30.0 set scale ?SC1 30.000 retrieve scale Linearization (LN, LS) LNc[,point,x,y] setup of linearization table [x,y] point: 0 .. 10 x, y: -5% .. 100% of FS LN1,2,2.1,2.2 set point of lin.

  • Page 60: Upper Limit (Ul)

    Chapter 5: Interface PR4000F Upper Limit (UL) ULc[,upperlimit] setup of upper limit upper limit: -5% .. 110% of FS [upperlimit] UL1,80.0 set upper limit ?UL1 80.000 retrieve upper limit Lower Limit (LL) LLc[,lowerlimit] setup of lower limit [lowerlimit] lower limit: -5% .. 110% of FS LL1,20.0 set lower limit ?LL1...

  • Page 61: Parity (Py)

    PR4000F Chapter 5: Interface Parity (PY) PY[,parity] setup of parity parity: 0=NONE, 1=EVEN, 2=ODD [parity] PY,2 set parity 00002 retrieve parity Baudrate (BD) BD[,baudrate] setup of baudrate [baudrate] baudrate: 0=110, 1=1200, 2=2400, 3=4800, 4=9600, 5=19k2, 6=38k4, 7=57k6, 8=76k8, 9=110k BD,4 set baudrate 00004 retrieve baudrate...

  • Page 62: Resolution (Rs)

    Chapter 5: Interface PR4000F Resolution (RS) RS[,enable] setup of 16 bit resolution enable: OFF, ON [enable] RS,ON set resolution to 16 bit retrieve resolution Reset Status (RE) reset status reset status Default (DF) DF,dmode reset to default values (Pres|Flow) dmode: P=pressure, F=flow DF,P set pressure default...

  • Page 63: Appendix A: Specifications

    PR4000F Appendix A: Specifications Appendix A: Specifications Number of channels 2 inputs for flow or pressure signals 2 inputs for external setpoints 2 outputs for setpoints 2 outputs for signal monitoring Accuracy 0,01% ± 1 Digit Temperature coefficient 0,1 mV / K Display format and resolution Two line LCD, 16 places per line , configurable: 4-digits: 0000 –...
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  • Page 65: Appendix B: Error Messages

    PR4000F Appendix B: Error Messages Appendix B: Error Messages Code Problem E 001 Communication Error E 002 ADC Overflow or Underflow E 003 Range Error, Setpoint < 0 or out of Range W 001 Offset > 250 mV...
  • Page 66 Appendix B: Error Messages PR4000F This page left blank...

  • Page 67: Appendix C: Default - Configuration

    PR4000F Appendix C: Default - Configuration Appendix C: Default - Configuration Parameter Default Flow Default Pressure DISPLAY1, 2 FL1, SP1; FL2, SP2 PR1, PR2; off DISPLAY3, 4 off, off off, off SP1, SP2 100%, 100% 0%, 0% RNG1, RNG2 100SCCM, 100SCCM 10mbar, 10mbar GAIN1, OFFS1 1.0, 0mV...
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  • Page 69: Mks Worldwide Calibration & Service Centers

    PR4000F MKS Worldwide Calibration & Service Centers MKS Worldwide Calibration & Service Centers UNITED STATES GERMANY/BENELUX MKS Instruments, Inc. MKS Instruments, Corporate Service Center Deutschland GmbH 651 Lowell Street Schatzbogen 43 Methuen, MA 01844 D-81829 München & & (978) 682-4567...

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