MKS 247D Manuals

MKS 247D Manuals

Manuals and User Guides for MKS 247D. We have 1 MKS 247D manual available for free PDF download: Instruction Manual

MKS 247D Instruction Manual

MKS 247D Instruction Manual (100 pages)

Four-Channel Mass Flow Controller Power Supply/Readout

Brand: MKS | Category: Power Supply | Size: 0 MB

Table of Contents

Table of Contents
5
Safety Information
13
Sicherheitshinweise
17
Informations Relatives À la Sécurité
21
Información sobre Seguridad
25
Chapter One: General Information
29
- Introduction
  29
- How this Manual Is Organized
  30
- Customer Support
  30
Chapter Two: Installation
31
- How to Unpack the Type 247 Unit
  31
  - Unpacking Checklist
    31
- Interface Cables
  32
- Product Location and Requirements
  35
  - Operating Environmental Requirements
    35
  - Safety Conditions
    35
- Setup
  36
  - Dimensions
    36
  - Figure 1: Front Panel Dimensions
    36
  - Figure 2: Top View Dimensions
    37
  - Power Requirements
    38
  - Mounting Instructions
    38
  - System Configurations
    39
  - Figure 3: Manual Flow Control
    39
  - Figure 4: Pressure Control with an External Controller
    40
- Electrical Information
  42
  - Fuses
    42
  - Grounding
    42
  - Table 6: Fuse Information
    42
  - How to Set the Line Voltage
    43
- Connectors and Cables
  44
Chapter Three: Overview
47
- General Information
  47
- Flow Signal Path
  47
- Set Point Signal
  48
- Front Panel Controls
  52
  - Power ON/OFF Switch
    52
  - Flow Indicator LED
    52
  - Figure 5: Front Panel Controls
    52
  - Flow Control Switch
    53
  - Digital Panel Meter
    53
  - Channel Selector
    53
  - Set Point Source Switch
    53
  - Set Point Control
    54
  - Read / Set Point Switch
    54
  - Zero Control
    54
- Rear Panel Controls
  55
  - Scaling Control Potentiometers
    55
  - Figure 6: Rear Panel Controls
    55
  - Decimal Point Selector Switches
    56
  - Line Voltage Selector
    56
  - Fuse
    56
  - AC Line Cord
    56
  - Interface Connector J6 - Channels 1 to 4
    56
  - Interface Connector J5 - Channel 1
    57
  - MFC Connectors
    57
- Scaling Controls
  58
- Gas Correction Factor (GCF)
  61
  - How to Calculate the GCF for Pure Gases
    62
  - How to Calculate the GCF for Gas Mixtures
    63
- Labels
  65
  - Serial Number Label
    65
  - Figure 8: Serial Number Label
    65
Chapter Four: Operation
67
Chapter Five: Maintenance and Troubleshooting
83
- General Information
  83
- Maintenance
  83
  - How to Clean the Unit
    83
  - How to Replace the Fuses
    83
- Troubleshooting
  85
  - Power Supply
    85
  - Channel Amplifiers
    86
  - Internal +5 V Voltage Reference
    87
  - External Ratio Amplifier
    87
  - Digital Panel Meter
    88
  - Set Point Buffer and Flow Switching Circuit
    89
Appendix A: Product Specifications
91
Appendix B: Model Code Explanation
93
- Model Code
  93
Appendix C: Gas Correction Factors for Commonly Used Pure Gases
95
Table 17: Gas Correction Factors for Pure Gases
95
Index
99

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