Cmu Calibration - Agilent Technologies B1500A Training Manual

Semiconductor device analyzer self-paced training manual, 4
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CMU Calibration

Type
Phase
Compensation
Perform before
measurement
Open Correction
Perform before
measurement
Short Correction
Recommended
Load Correction
Recommended
CMU is equipped with the error correction function used to realize accurate impedance
measurements. The correction function minimizes the effects of the error elements in the extension
cables and the DUT interface such as manipulator and probe card.
At least perform the phase compensation and the open correction. They only need to open the
measurement terminals.
Performing the short correction and the load correction is recommended.
If it is easy to make the short condition in your test environment, perform the short correction.
If you have the load standard, perform the load correction.
The standard must have the reference value. And the reference value must be defined in the
Advanced Options for CMU Calibration window. This window is opened by clicking the Advanced
Options... button. See the next page.
Effectiveness
Corrects phase error caused
by extending measurement
cables.
Corrects for stray admittance.
Effective for high impedance
measurement.
Corrects for residual
impedance. Effective for low
impedance measurement.
Corrects any error by using
the working standard.
8-11
Capacitance Measurement
Measurement
terminals
Open terminals
Open terminals
Connect terminals
together
Connect standard
Module 8

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