SMU Filter
V/I DAC
Time
The filter is mounted on each SMU. It assures clean source output with no spikes or overshooting.
However, using a filter may increase the SMU settling time. If measurement speed is top priority, set
the SMU Filter OFF.
Filter OFF
Filter ON
SMU
(V or I mode)
Filter setting
7-34
Force
Series Resistor
Sense
(1 M ohm)
Module 7
Measurement Functions