Vacuum System Components - Agilent Technologies 5977B series Troubleshooting And Maintenance Manual

Vacuum System Components

The parts of the vacuum system are identified in
• Foreline (rough) pump
• High vacuum pump (diffusion or turbo pump)
• Analyzer chamber
• Side plate (analyzer door), and front and rear end plates
• Vacuum seals
• Calibration valve(s) and vent valve
• Vacuum control electronics
• Vacuum gauges and gauge control electronics
Each of these is discussed in more detail in this chapter.
Ion vacuum gauge (if present)
CI flow control
Vent valve
(not shown)
Analyzer
chamber
GC/MSD
interface
High vacuum
pump
High vacuum
pump
cooling fan
Figure 25 Example vacuum system components (MSD with turbo pump shown)
5977B Series MSD Troubleshooting and Maintenance Manual
Vacuum System
Figure 25.
6
155