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Related Manuals for Zeiss 348247-9013-000
Summary of Contents for Zeiss 348247-9013-000
- Page 1 Carl Zeiss Microscopy - Electron and Ion Beam Microscopy 105-mm DC stage 105-mm DC stage Optional Stage for Field Emission Optional stage for Field Emission Scanning Electron Microscopes Scanning Electron Microscopes Enabling the Nano-Age World ®...
- Page 2 Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back- up copy for safety purposes.
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Page 3: Table Of Contents
`çåíÉåíë Table of Contents 1. About this manual ..................3 1.1. Definition of terms ................... 4 2. Safety summary ................... 5 2.1. Intended use ..................... 5 2.2. Prevention of accidents and improper use ........... 5 2.3. Safety devices ....................7 2.3.1. - Page 4 `çåíÉåíë fåëíêìÅíáçå=j~åì~ä=NMRJãã=a`=ëí~ÖÉ=ÉåMO...
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Page 5: About This Manual
Read the instructions carefully. Keep the instruction manual nearby the 105-mm DC stage and hand it over to future owners of the instrument. This instruction manual is designed for users who have been trained by an authorized Carl Zeiss expert to operate the FESEM, the 105-mm DC stage is built in. -
Page 6: Definition Of Terms
Operating software for Carl Zeiss field emission scanning electron SmartSEM software microscopes Carl Zeiss service engineer, Specially trained service expert, either Carl Zeiss staff or authorised Carl Zeiss service staff service partner of Carl Zeiss. Operator Basic operator: Person who has been trained to perform fundamental operation... -
Page 7: Safety Summary
OK=p~ÑÉíó=ëìãã~êó 2. Safety summary 2.1. Intended use The 105-mm DC (Direct Current) stage is an option for the following Carl Zeiss field emission scanning electron microscopes: Option Part no. Compatible Carl Zeiss FESEM 105-mm DC stage 348247-9013-000 ® SUPRA 40/40VP ®... - Page 8 OK=p~ÑÉíó=ëìãã~êó CAUTION There are moving parts at the specimen stage. Fingers could be trapped. Do not touch the specimen stage when the specimen chamber is open. CAUTION The specimen might have a weight of 500g. Risk of injury when specimen falls down. Wear personal protective equipment, i.e.
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Page 9: Safety Devices
OK=p~ÑÉíó=ëìãã~êó IMPORTANT All pursuing tasks of maintenance, service, and repair not described in this instruction manual have to be performed by authorised Carl Zeiss service staff only. IMPORTANT Fingerprints can cause virtual vacuum leaks. Always wear lint-free gloves when touching the specimen or inner parts of the chamber. -
Page 10: Safety Labels
OK=p~ÑÉíó=ëìãã~êó 2.4. Safety labels Appropriate safety labels on the 105-mm DC stage warn users of possible hazards. Each safety label is affixed to the point where a particular hazard exists. Fig. 1.1: Safety labels at the chamber door Position Subject Label Safety information Safety information... - Page 11 OK=p~ÑÉíó=ëìãã~êó Position Subject Label Type plate for Cross- ® Beam series fåëíêìÅíáçå=j~åì~ä=NMRJãã=a`=ëí~ÖÉ=ÉåMOKÑã =V=çÑ=PM...
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Page 12: Description
PK=aÉëÅêáéíáçå 3. Description 3.1. The 105-mm DC stage The 105-mm DC stage is a 6-axes, super eucentric stage. It is used for precise positioning of samples up to 500 g in the electron microscope. The following overview shows the arrangement of the six axes. Fig. -
Page 13: Principle Of Operation
PK=aÉëÅêáéíáçå 3.2. Principle of operation To position the specimens in the electron microscope, the six axes of the 105-mm DC stage can Axis movements be tilted, rotated and moved in linear direction. The following overview shows the movement of the X-, Y-, and R-axis. Movement Axis Initial position of axis... - Page 14 PK=aÉëÅêáéíáçå The following overview shows the movement of the Z-, T-, and M-axis. Axis movements Movement Axis Initial position of axis Axis travel direction Z-axis Up and down T-axis Tilts M-axis Up and down in tilted state Table 1.2: Front view on axis travel of Z-, T-, and M-axis The six axes of the 105-mm DC stage are stacked on each other in the following order: Z, T, M, Axis stacking X, Y, R.
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Page 15: Tool For Specimen Exchange
PK=aÉëÅêáéíáçå 3.3. Tool for specimen exchange The tool for specimen exchange is included in delivery. It must be used both, when you mount the specimen holder to the specimen stage and when you remove it. The use of the tool ensures that contamination is kept low during specimen exchange and that no dirt particles can fall on the glas scales. -
Page 16: Technical Data
PK=aÉëÅêáéíáçå 3.4. Technical data Environmental requirements Ambient Temperature approx. 21°C +/-4°C Stability 0.5°C/h Relative humidity Less than 65 % Altitude Maximum 2000 m above sea level. Floor vibrations Less than 0.2 mm/s² at > 10 Hz Less than 0.1 mm/s² at < 10 Hz Noise level Less than 40 dBA at <... - Page 17 PK=aÉëÅêáéíáçå Technical data of the stage board Nominal voltage ±21VDC / max 5A +5VDC / max 3.15A Cooling water max 3bar Dimensions ((LxBxH) 470 x 230 x 90mm Weight 2 kg Degree of protection IP20 Protection class fåëíêìÅíáçå=j~åì~ä=NMRJãã=a`=ëí~ÖÉ=ÉåMOKÑã =NR=çÑ=PM...
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Page 18: Customer Service
QK=fåëí~ää~íáçå 3.5. Customer service For customer service contact your local Carl Zeiss service engineer. A list of Carl Zeiss locations and authorised service partners can be found at: http://www.zeiss.com/microscopy 4. Installation The 105-mm DC stage is either factory-installed or retrofitted by authorised Carl Zeiss service staff. -
Page 19: Operation
RK=léÉê~íáçå 5. Operation The following section summarises basic sequences how to locate the specimen with the 105-mm DC stage. Prerequisite: ® • SmartSEM software has been started and is ready to control the FESEM. Parts required Allen wrench, 1.5 mm delivered with the FESEM Stub delivered with the FESEM... -
Page 20: Preparing The Specimen Holder
RK=léÉê~íáçå 5.1. Preparing the specimen holder IMPORTANT Fingerprints can lead to vacuum deterioration or prolonged pumping times. Further, the specimen might be contaminated. Always wear lint-free gloves when touching specimen, specimen holder or stage. Attach the specimen to the stub by using con- ductive carbon, adhesive metal or carbon tape etc. -
Page 21: Loading The Specimen Chamber Via An Airlock
RK=léÉê~íáçå 5.2. Loading the specimen chamber via airlock If you exchange the specimen via an airlock, refer to the manual of the airlock manufacturer. 5.3. Loading the specimen chamber via chamber door If you exchange the specimen via the specimen chamber, obey the following instructions. Use the tool for specimen exchange. - Page 22 RK=léÉê~íáçå A TV view inside the specimen chamber is shown. CAUTION Risk of damaging the objective lens and/or your specimen Ensure not to hit the objective lens while driving the stage. Change to TV mode to observe the moving stage. IMPORTANT ®...
- Page 23 RK=léÉê~íáçå Go to the Vacuum tab. Click on the Vent button to ventilate the specimen chamber. A message appears asking: ’Are you sure you want to vent?’. Confirm by clicking on Yes. The specimen chamber is filled with gaseous nitrogen. CAUTION Suffocation hazard due to lack of oxygen, since the specimen chamber is ventilated with nitrogen.
- Page 24 RK=léÉê~íáçå Fix the special tool at the specimen holder. Insert the pins into the holes of the speci- men holder. Turn the knob clockwise. All specimen holders are equipped with a dovetail so that the position of the specimen holder is exactly defined. Mount the specimen holder on the stage: Push the specimen holder to the mechan- ical stop.
- Page 25 RK=léÉê~íáçå 12 Carefully close the chamber door. 13 In the SEM Control panel click on the Pump button . The vacuum status messages show the current vacuum levels achieved. fåëíêìÅíáçå=j~åì~ä=NMRJãã=a`=ëí~ÖÉ=ÉåMOKÑã =OP=çÑ=PM...
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Page 26: Locating The Specimen
RK=léÉê~íáçå 5.4. Locating the specimen In TV mode (ChamberScope), look into the specimen chamber. CAUTION Risk of damaging the objective lens and/or your specimen. Ensure not to hit the objective lens while driving the stage. Change to TV mode to observe the moving stage. -
Page 27: Maintenance And Repair
SK=j~áåíÉå~åÅÉ=~åÇ=êÉé~áê 6. Maintenance and repair 6.1. Cleaning the chamber door Parts required Lint-free cloth CAUTION There are moving parts at the specimen stage. Fingers could be trapped. Only clean the chamber door not the stage. Clean the outside of the chamber door (1): Use a moistened, lint-free cloth. -
Page 28: Troubleshooting
6.2. Troubleshooting The following table gives some clues to solve problems. If you cannot solve the problem or if you are feeling unsure do not hesitate to get in contact with your local Carl Zeiss service engineer. Symptom Possible reason/s... -
Page 29: Deinstallation And Disposal
TK=aÉáåëí~ää~íáçå=~åÇ=Çáëéçë~ä 7. Deinstallation and disposal The 105-mm DC stage is de-installed and disposed of by authorised Carl Zeiss service staff only. fåëíêìÅíáçå=j~åì~ä=NMRJãã=a`=ëí~ÖÉ=ÉåMOKÑã =OT=çÑ=PM... - Page 30 TK=aÉáåëí~ää~íáçå=~åÇ=Çáëéçë~ä OU=çÑ=PM fåëíêìÅíáçå=j~åì~ä=NMRJãã=a`=ëí~ÖÉ=ÉåMOKÑã...
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Page 31: Index
UK=fåÇÉñ 8. Index Numerics 105-mm DC stage 10 Safety devices 7 Safety instructions 3 Safety labels 8 Ambient Temperature 14 Stage Points List panel 20 Axis arrangement 10 Axis movements 11 Axis stacking 12 Technical Data 14 Tool for specimen exchange 13 Touch alarm 7 Chamber door interlock 7 Travel 14... - Page 32 Carl Zeiss Microscopy, LLC One Zeiss Drive Thornwood, NY 10594 microscopy@zeiss.com Plus a worldwide network of distributors www.zeiss.com/microscopy Due to a policy of continuous development, we reserve the right to change specifications without notice. © Carl Zeiss Microscopy GmbH, Oberkochen...